Vacuum pump seal structure

Abstract

The utility model belongs to vacuum pump sealing technical field especially is a kind of vacuum pump sealing structure, including shell, the front of shell is provided with controller, the inside of shell is provided with two groups of gas sensor, the inner wall of shell upper surface and bottom is all fixedly connected with connecting pipe, the end of two connecting pipes mutually close is all fixedly connected with bellow, the end of two bellows mutually close is all fixedly connected with fixed pipe, the outer surface of each fixed pipe is all fixedly connected with sealing ring, the side of two sealing rings mutually close is all fixedly connected with sealing washer, the outside of each fixed pipe is provided with two groups of electric push rod, by connecting pipe, the stable connection of the air inlet and outlet of vacuum pump and external equipment pipeline can be realized, sealing ring and sealing washer can be driven to move accurately by the telescopic function of electric push rod simultaneously, the sealing of connecting place can be effectively realized by the close extrusion of two, in the sealing process, bellow can flexibly extend, adapt component displacement.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum pump sealing technology, and specifically relates to a vacuum pump sealing structure. Background Technology

[0002] Molecular pumps, especially turbomolecular pumps, are commonly used vacuum pumping equipment. They use a high-speed rotating impeller to transfer momentum to gas molecules, causing the gas to flow in a specific direction. After compression, the gas is driven to the exhaust port and discharged, thereby obtaining a vacuum environment. Given the advantages of turbomolecular pumps, such as rapid start-up, low pollution, and the ability to achieve clean ultra-high vacuum, they have been widely used in the industrial field in recent years.

[0003] However, molecular pumps, especially turbomolecular pumps, require a vacuum environment inside the equipment, so their inlet and outlet parts need to be equipped with a good sealing structure. If the inlet and outlet are not sealed well, the outside atmosphere will rush in rapidly due to the pressure difference, causing the internal vacuum level to drop sharply and failing to meet the vacuum standard required by the process.

[0004] To address the aforementioned problems, this application proposes a vacuum pump sealing structure. Utility Model Content

[0005] To address the aforementioned problems in the existing technology, this utility model provides a vacuum pump sealing structure that can seal the inlet and outlet gas positions.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a vacuum pump sealing structure, including a housing, a controller disposed on the front of the housing, two sets of gas sensors disposed inside the housing, connecting pipes fixedly connected to the inner walls of the upper and lower surfaces of the housing, corrugated pipes fixedly connected to the ends of the two connecting pipes that are close to each other, fixed pipes fixedly connected to the ends of the two corrugated pipes that are close to each other, a sealing ring fixedly connected to the outer surface of each fixed pipe, a sealing gasket fixedly connected to the side of the two sealing rings that are close to each other, and two sets of electric push rods disposed on the outer side of each fixed pipe, the telescopic ends of the two sets of electric push rods being fixedly connected to the side of the two sealing rings that are far from each other.

[0007] As a preferred embodiment of this utility model, two connecting brackets are fixedly connected to the front and back of the housing, and a fixing pin is engaged inside each connecting bracket.

[0008] As a preferred embodiment of this utility model, a mounting plate is fixedly connected to the back of the controller, and the back of the mounting plate is fixedly connected to the front of the housing.

[0009] As a preferred embodiment of this utility model, a transparent plate is snapped onto the left side of the housing, a reinforcing frame is fixedly connected to the outer surface of the transparent plate, and the right side of the reinforcing frame is fixedly connected to the left side of the housing.

[0010] As a preferred embodiment of this utility model, each set of gas sensors has a connecting rod fixedly connected to its opposite ends, and the opposite ends of each set of connecting rods are fixedly connected to the inner wall of the housing.

[0011] As a preferred technical solution of this utility model, each of the two sets of electric push rods has a fixed frame fixedly connected to one end of each set that is far apart from the other, and the outer surface of each fixed frame is fixedly connected to the inner wall of the housing.

[0012] As a preferred technical solution of this utility model, a reinforcing ring is fixedly connected to the outer surface of the telescopic end of each electric push rod, and the side of the two sets of reinforcing rings that are close to each other is fixedly connected to the side of the two sealing rings that are far from each other.

[0013] As a preferred embodiment of this utility model, two sets of guide rods are fixedly connected to the upper surface of one of the sealing rings, and the outer surface of each guide rod is slidably connected to the inner wall of the other sealing ring.

[0014] Compared with the prior art, the beneficial effects of this utility model are as follows: the connecting pipe enables a stable connection between the vacuum pump inlet / outlet and the external equipment pipeline. Simultaneously, the telescopic function of the electric push rod precisely drives the movement of the sealing ring and sealing gasket. Through their tight compression, the connection is effectively sealed. During the sealing process, the bellows can flexibly extend and retract to adapt to component displacement, ensuring connection stability. Furthermore, the gas sensor, controller, and electric push rod work together. Once a gas leak is detected, the controller automatically controls the electric push rod to dynamically enhance the compression force between the sealing ring and sealing gasket, greatly improving sealing performance and thus significantly improving the sealing reliability of the vacuum pump inlet / outlet. Attached Figure Description

[0015] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This is a cross-sectional view of the shell structure in this utility model;

[0018] Figure 3 This is a schematic diagram of the corrugated pipe structure in this utility model;

[0019] Figure 4 This is a schematic diagram of the sealing ring structure in this utility model;

[0020] In the diagram: 1. Housing; 2. Reinforcing frame; 3. Transparent panel; 4. Connecting frame; 5. Mounting plate; 6. Controller; 7. Fixing pin; 8. Connecting pipe; 9. Gas sensor; 10. Connecting rod; 11. Fixing frame; 12. Bellows; 13. Sealing ring; 14. Guide rod; 15. Sealing gasket; 16. Electric push rod; 17. Fixing pipe; 18. Reinforcing ring. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model. Example

[0022] Please see Figure 1-4 The present invention provides the following technical solution: a vacuum pump sealing structure, including a housing 1, a controller 6 is provided on the front of the housing 1, two sets of gas sensors 9 are provided inside the housing 1, connecting pipes 8 are fixedly connected to the inner walls of the upper surface and the bottom surface of the housing 1, corrugated pipes 12 are fixedly connected to the ends of the two connecting pipes 8 that are close to each other, fixed pipes 17 are fixedly connected to the ends of the two corrugated pipes 12 that are close to each other, a sealing ring 13 is fixedly connected to the outer surface of each fixed pipe 17, a sealing gasket 15 is fixedly connected to the side of the two sealing rings 13 that are close to each other, and two sets of electric push rods 16 are provided on the outer side of each fixed pipe 17, the telescopic ends of the two sets of electric push rods 16 are fixedly connected to the side of the two sealing rings 13 that are far from each other;

[0023] In this embodiment, the sealing gasket 15 adopts a metal spiral wound gasket structure, with a metal steel strip as the skeleton and a flexible sealing material (such as graphite, polytetrafluoroethylene, etc.) wound on the outer layer, forming a composite structure of 'metal skeleton + flexible filler', which has both high strength and excellent sealing performance. Its metal matrix gives the structure strong compressive strength and can stably withstand the continuous extrusion of the electric push rod 16, ensuring uniform force on the sealing surface. The flexible filler layer can tightly fit the micro gaps on the surface of the sealing ring 13, significantly reducing the gas leakage rate. Even under harsh conditions such as high temperature, high pressure or high vacuum, it can still maintain a long-term seal, effectively improving the reliability and service life of the vacuum pump inlet and outlet.

[0024] Specifically, two connecting brackets 4 are fixedly connected to the front and back of the housing 1. Each connecting bracket 4 has a fixing pin 7 inside. In this embodiment, the connecting bracket 4 can be penetrated and fixed to a suitable device through the fixing pin 7, so that the housing 1 can be fixed to the target device.

[0025] Specifically, a mounting plate 5 is fixedly connected to the back of the controller 6. The back of the mounting plate 5 is fixedly connected to the front of the housing 1. In this embodiment, the controller 6 can be fixed by the mounting plate 5. The controller 6, or programmable logic controller 6 for short, is a digital computing electronic system designed for industrial automation control scenarios. Its core stores instructions through a programmable memory and performs functions such as logic operations, sequential control, timing, counting, and arithmetic operations. Through digital or analog input / output interfaces, it controls various industrial equipment or production processes to ensure the reliability and stability of the system's automated operation.

[0026] Specifically, a viewing plate 3 is snapped onto the left side of the housing 1, and a reinforcing frame 2 is fixedly connected to the outer surface of the viewing plate 3. The right side of the reinforcing frame 2 is fixedly connected to the left side of the housing 1. In this embodiment, the viewing plate 3 can be fixed to the housing 1 through the reinforcing frame 2, and the internal state of the housing 1 can be directly observed using the viewing plate 3.

[0027] Specifically, each gas sensor 9 is fixedly connected to a connecting rod 10 at one end that is far apart from each other, and the other end of each connecting rod 10 is fixedly connected to the inner wall of the housing 1. In this embodiment, the gas sensor 9 can be fixed by the connecting rod 10. At the same time, the gas sensor 9 is a functional device that converts the physicochemical properties of the target gas, such as its type, concentration, and partial pressure, into a measurable electrical signal. Furthermore, the gas sensor 9 can monitor parameters such as the gas concentration and composition inside the housing 1 in real time.

[0028] Specifically, each of the two sets of electric push rods 16 has a fixed bracket 11 fixedly connected to one end of each set of electric push rods 16 that is far apart from each other. The outer surface of each fixed bracket 11 is fixedly connected to the inner wall of the housing 1. In this embodiment, the electric push rod 16 can be connected to the housing 1 through the fixed bracket 11, so that the electric push rod 16 can extend and retract stably.

[0029] Specifically, a reinforcing ring 18 is fixedly connected to the outer surface of the telescopic end of each electric push rod 16. The side of the two sets of reinforcing rings 18 that are close to each other is fixedly connected to the side of the two sealing rings 13 that are far from each other. In this embodiment, the connection between the electric push rod 16 and the sealing ring 13 can be reinforced by the reinforcing rings 18, which can further improve the firmness of the equipment connection.

[0030] Specifically, two sets of guide rods 14 are fixedly connected to the upper surface of one of the sealing rings 13. The outer surface of each guide rod 14 is slidably connected to the inner wall of the other sealing ring 13. In this embodiment, the guide rods 14 provide guidance for the movement of the sealing ring 13, ensuring that the sealing surfaces on both sides are accurately aligned and avoiding sealing failure caused by eccentricity.

[0031] The working principle and usage process of this utility model are as follows: In use, the housing 1 is first fixed to the inlet and outlet of the vacuum pump by the connecting frame 4 and the fixed pin 7, so that the connecting pipe 8 is connected to the vacuum pump interface and the external pipeline. Then, the controller 6 is started, so that the electric push rod 16 pushes the sealing ring 13 through the reinforcing ring 18, causing the sealing gasket 15 to squeeze against each other. The metal frame provides pressure resistance and the flexible filling layer fills the gap. The bellows 12 elastically expands and contracts to compensate for displacement to form an initial seal. During operation, the gas sensor 9 monitors the gas concentration in the housing 1 in real time. When a leak is detected, the signal is transmitted to the controller 6, triggering the electric push rod 16 to increase the thrust and dynamically enhance the seal. If the leak still occurs when the maximum thrust is reached, an alarm is triggered and the valve is closed in conjunction with the alarm. At the same time, the operator can observe the internal situation through the transparent plate 3. If the sealing gasket 15 is found to be worn, the machine is stopped and replaced. The status of each component is checked regularly to ensure the stable operation of the system.

[0032] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A vacuum pump sealing structure, characterized in that: The device includes a housing (1), a controller (6) is provided on the front of the housing (1), two sets of gas sensors (9) are provided inside the housing (1), connecting pipes (8) are fixedly connected to the inner walls of the upper and lower surfaces of the housing (1), corrugated pipes (12) are fixedly connected to the ends of the two connecting pipes (8) that are close to each other, fixed pipes (17) are fixedly connected to the ends of the two corrugated pipes (12) that are close to each other, sealing rings (13) are fixedly connected to the outer surface of each fixed pipe (17), sealing gaskets (15) are fixedly connected to the sides of the two sealing rings (13) that are close to each other, and two sets of electric push rods (16) are provided on the outer side of each fixed pipe (17), with the telescopic ends of the two sets of electric push rods (16) fixedly connected to the sides of the two sealing rings (13) that are far from each other.

2. The vacuum pump sealing structure according to claim 1, characterized in that: The front and back of the housing (1) are fixedly connected to two connecting brackets (4), and each connecting bracket (4) has a fixing pin (7) inside.

3. The vacuum pump sealing structure according to claim 1, characterized in that: The back of the controller (6) is fixedly connected to the mounting plate (5), and the back of the mounting plate (5) is fixedly connected to the front of the housing (1).

4. The vacuum pump sealing structure according to claim 1, characterized in that: A viewing plate (3) is snapped onto the left side of the housing (1), and a reinforcing frame (2) is fixedly connected to the outer surface of the viewing plate (3). The right side of the reinforcing frame (2) is fixedly connected to the left side of the housing (1).

5. The vacuum pump sealing structure according to claim 1, characterized in that: Each gas sensor (9) is fixedly connected to a connecting rod (10) at one end that is far apart from each other, and the connecting rod (10) at one end that is far apart from each other is fixedly connected to the inner wall of the housing (1).

6. The vacuum pump sealing structure according to claim 1, characterized in that: Each of the two sets of electric push rods (16) has a fixed frame (11) fixedly connected to one end of each set of electric push rods (16) that is far apart from each other. The outer surface of each fixed frame (11) is fixedly connected to the inner wall of the housing (1).

7. The vacuum pump sealing structure according to claim 1, characterized in that: Each of the electric push rods (16) has a reinforcing ring (18) fixedly connected to the outer surface of its telescopic end. The two sets of reinforcing rings (18) are fixedly connected to the sides of the two sealing rings (13) that are far apart from each other.

8. The vacuum pump sealing structure according to claim 1, characterized in that: Two sets of guide rods (14) are fixedly connected to the upper surface of one of the sealing rings (13), and the outer surface of each guide rod (14) is slidably connected to the inner wall of the other sealing ring (13).

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