Integrated circuit glass via defect multi-angle optical detection device

Abstract

The utility model relates to integrated circuit defect detection technical field especially is a kind of integrated circuit glass via hole defect multi-angle optical detection device, it includes product stage, laser lamp body, driving part, work platform, lifting base and the laser lamp support of being movably arranged on work platform, work platform is installed on lifting base, driving part is installed on work platform, the output shaft of driving part is driven connection with product stage, driving part is used to drive product stage to rotate, laser lamp support is located in the side of product stage, laser lamp body is installed in the upper end of laser lamp support, the irradiation direction of laser lamp body is towards product stage, lifting base is used to drive work platform to move up and down, product positioning groove is provided on product stage.The utility model novel structure, clever design, not only can 360 ° rotation to sample, so as to can find the problem of integrated circuit glass via hole defect that is not easy to be found or observed in prior art.

Description

Technical Field

[0001] This utility model relates to the field of integrated circuit defect detection technology, and in particular to a multi-angle optical detection device for through-hole defects in integrated circuit glass. Background Technology

[0002] In integrated circuit manufacturing, glass vias serve as crucial structures for electrical connections and signal transmission, and their quality directly impacts the performance and reliability of integrated circuits. Common defects in integrated circuit glass vias include surface scratches, wall cracks, internal residues, irregular shapes, and misalignment. Accurate detection of these defects is essential for improving the yield rate and ensuring product quality. Optical microscopy is a relatively conventional method for detecting defects in integrated circuit glass vias. However, this method relies on a beam of light emitted perpendicular to the sample surface from the microscope objective, reflected back to the objective for imaging. The image is then transmitted to a computer via an eyepiece or camera for observation and inspection. Traditional optical microscopes emit light perpendicular to the sample, which can lead to situations where minute cracks in the glass via sample are not observed due to the angle of light reflection, or the defect observation is incomplete. Summary of the Invention

[0003] This invention addresses the problems of existing technologies by providing a multi-angle optical detection device for through-hole defects in integrated circuit glass. The device features a novel structure and ingenious design, enabling not only 360° rotation of the sample but also optical illumination of the sample via a laser lamp, thus facilitating the detection of through-hole defects in integrated circuit glass that are difficult to detect or observe in existing technologies.

[0004] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0005] This utility model provides a multi-angle optical inspection device for through-hole defects in integrated circuit glass, comprising a product stage, a laser lamp body, a driver, a working platform, a lifting base, and a laser lamp bracket movably mounted on the working platform. The working platform is mounted on the lifting base, the driver is mounted on the working platform, and the output shaft of the driver is drivenly connected to the product stage. The driver is used to drive the product stage to rotate. The laser lamp bracket is located on one side of the product stage, and the laser lamp body is mounted on the upper end of the laser lamp bracket. The irradiation direction of the laser lamp body is towards the product stage. The lifting base is used to drive the working platform to move up and down. A product positioning groove is provided on the product stage.

[0006] The driving component is a stepper motor.

[0007] The working platform is equipped with a fixed bracket, which is used to fix the driving component.

[0008] The fixed bracket includes four limiting uprights, and a fixed space is formed between the four limiting uprights. The driving component is installed in the fixed space.

[0009] The inner side of the limiting upright is provided with a rubber pad along its length.

[0010] The laser light bracket includes a first connecting rod, a second connecting rod, and a third connecting rod. The lower end of the first connecting rod is fixedly mounted on the working platform. The lower end of the second connecting rod is detachably connected to the upper end of the first connecting rod. The lower end of the third connecting rod is detachably connected to the upper end of the second connecting rod. A fixing ring is provided at the upper end of the third connecting rod for fixing the laser light body. The first connecting rod is vertically positioned, and the third connecting rod is inclined.

[0011] The upper end of the first connecting rod and the lower end of the second connecting rod are connected by a first locking assembly. The first locking assembly includes a first locking screw and a first locking nut. The first locking screw is horizontally inserted through the first connecting rod and the second connecting rod and then screwed into the first locking nut. The first locking nut is in close contact with the first connecting rod.

[0012] The upper end of the second connecting rod is connected to the lower end of the third connecting rod by a second locking assembly. The second locking assembly includes a second locking screw and a second locking nut. The second locking screw is horizontally inserted through the second connecting rod and the third connecting rod and then screwed into the second locking nut. The second locking nut is in close contact with the third connecting rod.

[0013] The beneficial effects of this utility model are:

[0014] When this invention is in operation, the external optical microscope is located directly above the product stage. The sample to be tested is placed in the product positioning slot. The angle of the laser lamp bracket is adjusted, thereby adjusting the illumination angle of the laser lamp body, so that the light illumination direction of the laser lamp body is aligned with the sample on the product positioning slot. The height of the entire working platform can be adjusted by lifting the base, making it easier for the external optical microscope to focus on the sample. The driving component drives the product stage to rotate, so as to perform multi-angle defect detection on the sample. This invention has a novel structure and ingenious design. It can not only rotate the sample 360°, but also provide optical illumination to the sample through the laser lamp body in the device, so as to discover problems such as through-hole defects in integrated circuit glass that are not easily detected or observed in the prior art. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of a multi-angle optical detection device for through-hole defects in integrated circuit glass according to the present invention.

[0016] exist Figure 1 The reference numerals in the figures include:

[0017] 1. Product platform; 2. Laser lamp body; 3. Drive unit; 4. Working platform; 5. Lifting base; 6. Product positioning slot; 7. Limiting upright; 8. First connecting rod; 9. Second connecting rod; 10. Third connecting rod; 11. Fixing ring; 12. First locking screw; 13. First locking nut; 14. Second locking screw; 15. Optical microscope; 16. Base plate; 17. Top plate; 18. Lifting support rod. Detailed Implementation

[0018] To facilitate understanding by those skilled in the art, the present invention will be further described below with reference to embodiments and accompanying drawings. The content mentioned in the embodiments is not intended to limit the present invention. The present invention will be described in detail below with reference to the accompanying drawings.

[0019] A multi-angle optical detection device for through-hole defects in integrated circuit glass, such as Figure 1 As shown, it includes a product platform 1, a laser lamp body 2, a drive unit 3, a working platform 4, a lifting base 5, and a laser lamp bracket movably mounted on the working platform 4. The working platform 4 is mounted on the lifting base 5, and the drive unit 3 is mounted on the working platform 4. The output shaft of the drive unit 3 is drivenly connected to the product platform 1. The drive unit 3 is used to drive the product platform 1 to rotate. The laser lamp bracket is located on one side of the product platform 1, and the laser lamp body 2 is mounted on the upper end of the laser lamp bracket. The irradiation direction of the laser lamp body 2 is towards the product platform 1. The lifting base 5 is used to drive the working platform 4 to move up and down. The product platform 1 is provided with a product positioning groove 6, and the drive unit 3 is a stepper motor. Specifically, when this utility model is in operation, the external optical microscope 15 is located directly above the product stage 1. The sample to be tested is placed in the product positioning slot 6. The angle of the laser lamp bracket is adjusted, thereby adjusting the irradiation angle of the laser lamp body 2, so that the light irradiation direction of the laser lamp body 2 is aligned with the sample on the product positioning slot 6. The height of the entire working platform 4 can be adjusted by the lifting base 5, so that the external optical microscope 15 can be easily focused on the sample. The driving component 3 drives the product stage 1 to rotate, so as to perform multi-angle defect detection on the sample. This utility model has a novel structure and ingenious design. It can not only rotate the sample 360°, but also provide optical illumination to the sample through the laser lamp body 2 in the device, so as to discover the problem of integrated circuit glass through-hole defects that are not easy to be discovered or observed in the prior art.

[0020] In this embodiment, a fixed bracket is provided on the working platform 4 to fix the driving component 3. The fixed bracket includes four limiting uprights 7, which form a fixed space, within which the driving component 3 is installed. Specifically, this configuration facilitates quick positioning and installation of the driving component 3, ensuring precise and reliable installation.

[0021] In this embodiment, a rubber pad is provided on the inner side of the limiting rod 7 along its length. Specifically, with the above arrangement, the rubber pad can buffer and dampen vibrations, reducing the vibration noise generated by the drive component 3 during operation.

[0022] In this embodiment, the laser light bracket includes a first connecting rod 8, a second connecting rod 9, and a third connecting rod 10. The lower end of the first connecting rod 8 is fixedly mounted on the working platform 4. The lower end of the second connecting rod 9 is detachably connected to the upper end of the first connecting rod 8. The lower end of the third connecting rod 10 is detachably connected to the upper end of the second connecting rod 9. A fixing ring 11 is provided at the upper end of the third connecting rod 10 for fixing the laser light body 2. The first connecting rod 8 is vertically positioned, and the third connecting rod 10 is inclined. The upper end of the first connecting rod 8 and the lower end of the second connecting rod 9 are connected by a first locking assembly. The first locking assembly includes a first locking screw 12 and a first locking nut 13. The first locking screw 12 is horizontally inserted through the first connecting rod 8 and the second connecting rod 9 and then screwed onto the first locking nut 13. The first locking nut 13 is in close contact with the first connecting rod 8. The upper end of the second connecting rod 9 and the lower end of the third connecting rod 10 are connected by a second locking assembly. The second locking assembly includes a second locking screw 14 and a second locking nut. The second locking screw 14 is horizontally inserted through the second connecting rod 9 and the third connecting rod 10 and then screwed onto the second locking nut. The second locking nut is in close contact with the third connecting rod 10.

[0023] Specifically, under the above configuration, loosening the first locking assembly causes the first locking screw 12 and the first locking nut 13 to loosen. At this time, the second connecting rod 9 can rotate relative to the first connecting rod 8, adjusting both the height and tilt of the laser lamp body 2. After adjustment, the first locking nut 13 and the first locking screw 12 are then engaged and locked to secure the first connecting rod 8 and the second connecting rod 9. Similarly, loosening the second locking assembly causes the second locking screw 14 and the second locking nut to loosen. At this time, the third connecting rod 10 can rotate relative to the second connecting rod 9, adjusting both the height and tilt of the laser lamp body 2. After adjustment, the second locking nut and the second locking screw 14 are then engaged and locked to secure the second connecting rod 9 and the third connecting rod 10.

[0024] In this embodiment, the lifting base 5 includes a base plate 16, a top plate 17, and a lifting assembly. The bottom of the lifting assembly is connected to the base plate 16, and the top of the lifting assembly is connected to the top plate 17. Two lifting assemblies are provided. The top two sides of the base plate 16 are respectively slidably connected to the bottom limits of the two lifting assemblies, and the bottom two sides of the top plate 17 are respectively slidably connected to the top limits of the two lifting assemblies. Specifically, the lifting assembly includes two lifting support rods 18, which are arranged crosswise. The middle of the two lifting support rods 18 in one lifting assembly is rotatably connected. The lifting base 5 also includes a lifting cylinder (not shown in the figure), which is mounted on the base plate 16. The output end of the lifting cylinder is connected to the lower end of the top plate 17 to drive the top plate 17 to move up and down. The structure of the lifting base 5 is prior art and will not be described in detail here.

[0025] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some changes or modifications to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes, and modifications made to the above embodiments based on the present utility model without departing from the scope of the present utility model shall fall within the scope of the present utility model.

Claims

1. A multi-angle optical inspection device for through-hole defects in integrated circuit glass, characterized in that: The device includes a product platform, a laser lamp body, a driver, a work platform, a lifting base, and a laser lamp bracket movably mounted on the work platform. The work platform is mounted on the lifting base, and the driver is mounted on the work platform. The output shaft of the driver is connected to the product platform, and the driver is used to drive the product platform to rotate. The laser lamp bracket is located on one side of the product platform, and the laser lamp body is mounted on the upper end of the laser lamp bracket. The irradiation direction of the laser lamp body is towards the product platform. The lifting base is used to drive the work platform to move up and down. The product platform is provided with a product positioning groove.

2. The multi-angle optical inspection device for through-hole defects in integrated circuit glass according to claim 1, characterized in that: The driving component is a stepper motor.

3. The multi-angle optical inspection device for through-hole defects in integrated circuit glass according to claim 1, characterized in that: The working platform is equipped with a fixed bracket, which is used to fix the driving component.

4. The multi-angle optical inspection device for through-hole defects in integrated circuit glass according to claim 3, characterized in that: The fixed bracket includes four limiting uprights, and a fixed space is formed between the four limiting uprights. The driving component is installed in the fixed space.

5. The multi-angle optical inspection device for through-hole defects in integrated circuit glass according to claim 4, characterized in that: A rubber pad is provided on the inner side of the limiting upright along its length.

6. The multi-angle optical inspection device for through-hole defects in integrated circuit glass according to claim 1, characterized in that: The laser light bracket includes a first connecting rod, a second connecting rod, and a third connecting rod. The lower end of the first connecting rod is fixedly mounted on the working platform. The lower end of the second connecting rod is detachably connected to the upper end of the first connecting rod. The lower end of the third connecting rod is detachably connected to the upper end of the second connecting rod. A fixing ring is provided at the upper end of the third connecting rod for fixing the laser light body. The first connecting rod is vertically mounted, and the third connecting rod is inclined.

7. The multi-angle optical inspection device for through-hole defects in integrated circuit glass according to claim 6, characterized in that: The upper end of the first connecting rod and the lower end of the second connecting rod are connected by a first locking assembly. The first locking assembly includes a first locking screw and a first locking nut. The first locking screw is horizontally inserted through the first connecting rod and the second connecting rod and then screwed into the first locking nut. The first locking nut is in close contact with the first connecting rod.

8. The multi-angle optical inspection device for through-hole defects in integrated circuit glass according to claim 6, characterized in that: The upper end of the second connecting rod is connected to the lower end of the third connecting rod by a second locking assembly. The second locking assembly includes a second locking screw and a second locking nut. The second locking screw is horizontally inserted through the second connecting rod and the third connecting rod and then screwed into the second locking nut. The second locking nut is in close contact with the third connecting rod.

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