Dual spring elastic conductive pin for protecting wafer

Abstract

The utility model discloses a kind of elastic conductive PIN needle of double-spring protection wafer, it is related to the technical field of conductive PIN needle, the utility model aims to solve the problem of poor contact or wafer is too heavy to hurt wafer, the utility model includes base, plug-in base and PIN needle, the plug-in base is installed on base by vacuum screw, the PIN needle is installed on plug-in base, further include the two-step shape central axis of lower half part is diametrically decreasing. By the protection mechanism of central axis spring, PIN needle can be moved downward to buffer when receiving excessive pressure, avoid PIN needle and wafer rigid contact leading to wafer damage, by increasing the protection mechanism of shade spring, increase the support wafer force, cooperate the protection mechanism of central axis spring, can play the effect of double protection wafer damage when wafer is too heavy.

Description

Technical Field

[0001] This utility model relates to the technical field of conductive PIN pins, specifically an elastic conductive PIN pin with dual springs to protect a wafer. Background Technology

[0002] In semiconductor manufacturing, wafer handling is a critical step. Traditional conductive pin devices often use a springless structure. This rigid contact can damage the wafer due to excessive pressure, resulting in a decrease in yield. Utility Model Content

[0003] To address the aforementioned problems, specifically those raised in the background section, this invention proposes a double-spring-protected wafer elastic conductive PIN pin, comprising a base, a connector base, and a PIN pin. The connector base is mounted on the base using vacuum screws, and the PIN pin is mounted on the connector base. The invention also includes a central shaft with a lower half exhibiting a two-stage stepped shape with decreasing diameter. The PIN pin is mounted on the top of the central shaft. A through hole is formed in the connector base, and a central shaft spring is disposed within the through hole. The bottom end of the central shaft passes through the central shaft spring and the through hole. The bottom end of the central shaft is mounted on the bottom end of the connector base using a vacuum nut. A central shaft guide seat is movably sleeved in the middle of the outer wall of the central shaft, and the central shaft guide seat is mounted on the connector base.

[0004] A further feature of this invention is that the bottom end of the through hole in the plug base is provided with a first-level step with decreasing inner diameter, and the inner diameter of the first-level step is smaller than the diameter of the second-level step on the central axis.

[0005] A further feature of this invention is that: a cover is movably sleeved on the top of the outer wall of the central shaft, the top of the cover has an opening that allows the PIN pin to pass through, a gap is left between the inner wall of the lower half of the cover and the outer wall of the central shaft, and a cover spring is provided in the gap, a gap is left between the bottom end of the cover and the central shaft guide seat, a cover guide seat is movably sleeved on the outer wall of the cover, and the bottom end of the cover guide seat is mounted on the central shaft guide seat.

[0006] A further feature of this invention is that the central spring is made of bronze, and the pin is made of pure titanium or oxygen-free copper.

[0007] The beneficial technical effects of this utility model are as follows: the protection mechanism of the central axis spring can cause the PIN pin to move downward to buffer when it receives excessive pressure, thus avoiding hard contact between the PIN pin and the wafer and causing wafer damage. By adding the shielding spring protection mechanism, the supporting force on the wafer is increased. Combined with the protection mechanism of the central axis spring, it can play a double protection against wafer damage when the wafer is too heavy. Attached Figure Description

[0008] Figure 1A schematic diagram of the overall structure of this solution is shown.

[0009] Figure 2 A schematic diagram of the internal structure of the base of this solution is shown.

[0010] The attached diagram shows the following components: 1. Base; 2. Cable insertion base; 3. Central shaft; 4. Shield guide seat; 5. Pin; 6. Shield; 7. Shield spring; 8. Central shaft guide seat; 9. Central shaft spring; 10. Vacuum nut; 11. Vacuum screw. Detailed Implementation

[0011] Preferred embodiments of the present invention will now be described with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of the present invention and are not intended to limit the scope of protection of the present invention.

[0012] This invention proposes a double-spring protective elastic conductive PIN pin for wafers. This solution is applied to measurement equipment and is used to release and adsorb wafer charges. Existing technology has a springless structure, which may lead to poor contact or wafer damage due to excessive weight. The central axis spring 9 is made of high-conductivity bronze, and the PIN pin 5 is made of high-conductivity and high-strength pure titanium or oxygen-free copper to conduct adsorbed charges. The shield 6 and the central axis guide seat 8 are both made of PEEK (polyether ether ketone).

[0013] In use, when the worktable lowers the wafer, it contacts the PIN pin, causing the wafer to release its charge by contacting the PIN pin 5. As the worktable continues to lower, it triggers the protection mechanism of the central shaft spring 9, causing the PIN pin 5 to push the central shaft 3 to move straight down along the interior of the central shaft guide seat 8, compressing the central shaft spring 9.

[0014] The lower half of the central shaft 3 is set as a two-stage step. The upper first stage is used to lock the top of the central shaft spring 9. The bottom of the central shaft spring contacts the bottom of the through hole. The lower second stage cooperates with the first stage of the through hole to limit the downward stroke of the central shaft 3, so that the bottom part of the central shaft 3 can extend out of the through hole and avoid excessive downward stroke that could damage the spring. The vacuum nut 10 is installed at the bottom of the central shaft 3 to limit the upward stroke of the central shaft 3 pushed by the central shaft spring 9.

[0015] A shield 6 is installed above the outer wall of the central axis 3. A shield spring 7 is installed below the shield 6. When the worktable descends, the shield 6 is squeezed and moves a certain distance downward along the shield guide seat 4 to compress the shield spring 7, which plays a supporting role and reduces the downward pressure on the wafer. At the same time, the PIN pins are exposed so that the wafer can contact the PIN pins to release the charge. When the worktable continues to descend, the central axis spring 9 is triggered to start the second protection mechanism. Through the double spring protection mechanism, the wafer is prevented from being punctured by excessive weight.

[0016] Although the present invention has been described with reference to preferred embodiments, various modifications can be made to it and components can be replaced with equivalents without departing from the scope of the present invention. In particular, the technical features mentioned in the various embodiments can be combined in any manner as long as there is no structural conflict. The present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

[0017] In the description of this utility model, terms such as "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," which indicate direction or positional relationships, are based on the direction or positional relationships shown in the accompanying drawings. These are used merely for ease of description and do not indicate or imply that the device or element must have a specific orientation, or be constructed and operated in a specific orientation; therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0018] Furthermore, it should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0019] The term "comprising" or any other similar term is intended to cover non-exclusive inclusion, such that a process, article, or apparatus / device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to those processes, articles, or apparatus / devices.

[0020] The technical solution of this utility model has been described in conjunction with the preferred embodiments shown in the accompanying drawings. However, it will be readily understood by those skilled in the art that the protection scope of this utility model is obviously not limited to these specific embodiments. Without departing from the principle of this utility model, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will all fall within the protection scope of this utility model.

Claims

1. A double-spring protective wafer elastic conductive PIN pin, comprising a base (1), a connector base (2), and a PIN pin (5), wherein the connector base (2) is mounted on the base (1) by a vacuum screw (11), and the PIN pin (5) is mounted on the connector base (2), characterized in that: It also includes a central shaft (3) with a two-stage stepped shape in the lower half with decreasing diameter. The PIN pin (5) is installed on the top of the central shaft (3). A through hole is opened in the plug base (2). A central shaft spring (9) is installed in the through hole. The bottom end of the central shaft (3) passes through the central shaft spring (9) and the through hole. The bottom end of the central shaft (3) is installed on the bottom end of the plug base (2) by a vacuum nut (10). A central shaft guide seat (8) is movably sleeved in the middle of the outer wall of the central shaft (3). The central shaft guide seat (8) is installed on the plug base (2).

2. The elastic conductive PIN pin for protecting a wafer with dual springs according to claim 1, characterized in that: The bottom of the through hole in the plug base (2) is provided with a first-level step with decreasing inner diameter, and the inner diameter of the first-level step is smaller than the diameter of the second-level step of the central axis (3).

3. The elastic conductive PIN pin for protecting a wafer with dual springs according to claim 1 or 2, characterized in that: A cover (6) is movably sleeved on the top of the outer wall of the central shaft (3). The top of the cover (6) has an opening that allows the PIN pin (5) to pass through. There is a gap between the inner wall of the lower half of the cover (6) and the outer wall of the central shaft (3), and a cover spring (7) is provided in the gap. There is a gap between the bottom end of the cover (6) and the central shaft guide seat (8). A cover guide seat (4) is movably sleeved on the outer wall of the cover (6), and the bottom end of the cover guide seat (4) is installed on the central shaft guide seat (8).

4. The elastic conductive PIN pin for protecting a wafer with dual springs according to claim 1, characterized in that: The central spring (9) is made of bronze, and the pin (5) is made of pure titanium or oxygen-free copper.

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