Ultra-pure water filter for semiconductor

Abstract

The utility model discloses a kind of ultra-pure water filters for semiconductor, including filter shell, the inside of the filter shell is provided with cleanable filter screen, the position of the filter shell and corresponding the filter screen is equipped with the cleaning assembly for the filter screen cleaning, the bottom of the filter shell and corresponding the position of the filter screen is provided with the fixed end cover for fixing the filter screen, the top of the filter shell is equipped with water inlet pipe, the bottom of the fixed end cover is provided with drain hole. The utility model can easily disassemble fixed end cover by loosening mounting bolt, greatly simplifies the disassembly, cleaning and replacement process of filter screen, reduces maintenance cost and time;Cleaning structure is matched with cleaning rod, and the online reciprocating cleaning of filter screen filtering surface can be realized, effectively prevent impurity accumulation, maintain efficient filtering performance;The connecting spring of cleaning brush side face ensures that it is closely attached to filter screen surface, and guarantees cleaning effect.

Description

Technical Field

[0001] This utility model relates to the field of filter technology, and in particular to an ultrapure water filter for semiconductors. Background Technology

[0002] In semiconductor manufacturing, ultrapure water is a critical raw material, and its purity and quality directly affect the performance and yield of semiconductor products. Therefore, ultrapure water filters for semiconductors play a vital role in semiconductor production lines. Existing technologies, such as the semiconductor ultrapure water filter disclosed in CN218435122U, while providing a basic filtration structure, have some inconveniences in practical use. Specifically, the process of disassembling, cleaning, or replacing the filter screen is cumbersome, requiring specialized tools and considerable time. This not only increases maintenance costs but may also affect the continuous operation of the production line. Furthermore, with prolonged filtration time, impurities and particulate matter easily accumulate on the filter screen surface, leading to a decrease in filtration efficiency. The lack of an effective online cleaning mechanism in existing technologies further exacerbates this problem. Utility Model Content

[0003] The purpose of this invention is to provide an ultrapure water filter for semiconductors. The fixed end cap can be easily removed by loosening the mounting bolts, which greatly simplifies the process of disassembling, cleaning, and replacing the filter screen, reducing maintenance costs and time. The cleaning structure, combined with the cleaning rod, enables online reciprocating cleaning of the filter screen surface, effectively preventing the accumulation of impurities and maintaining high-efficiency filtration performance. The connecting spring on the side of the cleaning brush ensures that it fits tightly against the filter screen surface, guaranteeing the cleaning effect.

[0004] To achieve the above objectives, the main technical solutions adopted by this utility model include:

[0005] An ultrapure water filter for semiconductor applications, comprising:

[0006] A filter housing, wherein a cleanable filter screen is provided inside the filter housing, a cleaning component for cleaning the filter screen is installed on the filter housing and corresponding to the position of the filter screen, and a fixing end cap for fixing the filter screen is provided at the bottom of the filter housing and corresponding to the position of the filter screen.

[0007] In the aforementioned ultrapure water filter for semiconductors, a water inlet pipe is installed on the top of the filter housing, and a drain hole is provided at the bottom of the fixed end cap.

[0008] In the aforementioned ultrapure water filter for semiconductors, positioning rings for positioning the filter screen are provided on both the inner wall of the filter housing and the fixed end cap.

[0009] In the aforementioned ultrapure water filter for semiconductors, the cleaning component includes a cleaning rod slidably disposed on the filter housing, and a cleaning structure for cleaning the filter screen is installed at the bottom of the cleaning rod.

[0010] The aforementioned ultrapure water filter for semiconductors includes a cleaning structure comprising an annular plate, the annular plate being fixedly connected to the bottom of the cleaning rod via a connecting rod, and a cleaning brush matching the filter screen being provided at the edge of the annular plate.

[0011] In the aforementioned ultrapure water filter for semiconductors, a connecting slider is fixedly connected to the side of the cleaning brush, and an mounting groove matching the connecting slider is opened on the side of the annular plate. A connecting spring is fixedly connected to the inner wall of the mounting groove, and the other end of the connecting spring is fixedly connected to the connecting slider.

[0012] In the aforementioned ultrapure water filter for semiconductors, positioning sliders are fixedly connected to both the top and bottom of the connecting slider, and positioning grooves matching the positioning sliders are provided on the inner wall of the mounting groove.

[0013] In the aforementioned ultrapure water filter for semiconductors, a sealing ring matching the cleaning rod is installed on the inner wall of the filter housing at a position corresponding to the cleaning rod.

[0014] The aforementioned ultrapure water filter for semiconductors includes a receiving groove on the filter housing corresponding to the cleaning rod.

[0015] In the aforementioned ultrapure water filter for semiconductors, the fixed end cap is fixedly connected to the bottom of the filter housing by mounting bolts, and a sealing ring matching the filter housing is fixedly connected to the top of the fixed end cap.

[0016] This utility model has at least the following beneficial effects:

[0017] 1. This utility model realizes an ultrapure water filter for semiconductors. The fixed end cap can be easily removed by loosening the mounting bolts, which greatly simplifies the process of disassembling, cleaning and replacing the filter screen, and reduces maintenance costs and time. The cleaning structure with the cleaning rod can realize online reciprocating cleaning of the filter screen surface, effectively preventing the accumulation of impurities and maintaining high-efficiency filtration performance. The connecting spring on the side of the cleaning brush ensures that it fits tightly with the surface of the filter screen, ensuring the cleaning effect.

[0018] 2. Convenient filter screen removal and maintenance: This utility model allows for easy removal of the fixed end cap by loosening the mounting bolts, facilitating the disassembly, thorough cleaning, or replacement of the filter screen. This design greatly simplifies the filter screen maintenance process, reduces maintenance costs and time, and improves the operating efficiency of the production line.

[0019] 3. Highly efficient online cleaning function: A cleaning structure is installed on the filter surface of the filter screen. By pulling the cleaning rod, the cleaning structure moves up and down back and forth, and the cleaning brush of the cleaning structure can clean the filter surface of the filter screen in real time. This online cleaning mechanism effectively prevents the accumulation of impurities and particulate matter on the filter screen surface, maintaining the filter screen's continuous and efficient filtration performance.

[0020] 4. Stable Cleaning Contact: The cleaning brush has a connecting spring on its side, which ensures that the cleaning brush maintains a tight contact with the filter surface of the filter screen at all times. Even if the filter screen surface is uneven or obstructed by impurities during the cleaning process, the connecting spring can provide sufficient elasticity to allow the cleaning brush to fit tightly against the filter screen surface, thereby improving the cleaning effect. Attached Figure Description

[0021] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0022] Figure 1 This is a schematic diagram of the structure of the ultrapure water filter for semiconductors according to this utility model;

[0023] Figure 2 This is a schematic diagram of the structure of the ultrapure water filter for semiconductors according to this utility model from another perspective.

[0024] Figure 3 This is a cross-sectional structural diagram of the ultrapure water filter for semiconductors according to this utility model;

[0025] Figure 4 This is a schematic diagram of the structure of the filter shell in the ultrapure water filter for semiconductors of this utility model;

[0026] Figure 5 This is a schematic diagram of the cleaning component in the ultrapure water filter for semiconductors of this utility model;

[0027] Figure 6 This is a schematic diagram of the cleaning structure in the ultrapure water filter for semiconductors of this utility model.

[0028] Figure 7 This is a schematic diagram of the fixed end cap structure in the ultrapure water filter for semiconductors of this utility model.

[0029] Explanation of icon numbers:

[0030] 1. Filter housing; 2. Filter screen; 3. Fixed end cap;

[0031] 101. Water inlet pipe; 1011. Drain hole;

[0032] 201. Positioning ring;

[0033] 202. Cleaning components; 203. Cleaning rod; 204. Cleaning structure;

[0034] 2031, sealing ring; 2032, receiving groove;

[0035] 2041, Annular plate; 2042, Connecting rod; 2043, Mounting groove; 2044, Connecting spring; 2045, Connecting slider; 2046, Cleaning brush; 2047, Positioning slider; 2048, Positioning groove;

[0036] 301. Mounting bolts; 302. Sealing ring. Detailed Implementation

[0037] The following will describe in detail the implementation of this application with reference to the accompanying drawings and embodiments, so that the implementation process of how this application uses technical means to solve technical problems and achieve technical effects can be fully understood and implemented accordingly.

[0038] Please refer to Figures 1 to 7 As shown, an embodiment of the present invention provides an ultrapure water filter for semiconductors, comprising: a filter housing 1, a cleanable filter screen 2 disposed inside the filter housing 1, a cleaning component 202 for cleaning the filter screen 2 installed on the filter housing 1 at a position corresponding to the filter screen 2, and a fixing end cap 3 for fixing the filter screen 2 disposed at the bottom of the filter housing 1 at a position corresponding to the filter screen 2.

[0039] By adopting the above technical solution, the fixed end cover 3 can be easily removed by loosening the mounting bolt 301, which greatly simplifies the disassembly, cleaning and replacement process of the filter screen 2, and reduces maintenance costs and time; the cleaning structure 204, together with the cleaning rod 203, can realize online reciprocating cleaning of the filter surface of the filter screen 2, effectively preventing the accumulation of impurities and maintaining high-efficiency filtration performance; the connecting spring 2044 on the side of the cleaning brush 2046 ensures that it fits tightly with the surface of the filter screen 2, ensuring the cleaning effect.

[0040] In order to achieve smooth introduction and discharge of ultrapure water, in this embodiment: a water inlet pipe 101 is installed on the top of the filter shell 1, and a drain hole 1011 is opened at the bottom of the fixed end cap 3. The water inlet pipe 101 ensures that ultrapure water can smoothly enter the filter shell 1 for filtration, while the drain hole 1011 is responsible for discharging the filtered ultrapure water, realizing continuous treatment and discharge of ultrapure water and improving treatment efficiency.

[0041] In order to achieve precise positioning and installation of the filter screen 2, in this embodiment, positioning rings 201 for positioning the filter screen 2 are provided on the inner wall of the filter shell 1 and the fixed end cap 3. The design of the positioning rings 201 enables the filter screen 2 to be precisely positioned during installation, ensuring the sealing and stability between it and the filter shell 1, and avoiding problems such as water leakage or reduced filtration effect caused by improper installation.

[0042] In order to achieve online cleaning of filter screen 2 and improve filtration efficiency, in this embodiment: the cleaning component 202 includes a cleaning rod 203 slidably disposed on filter shell 1, and a cleaning structure 204 for cleaning filter screen 2 is installed at the bottom of the cleaning rod 203. The cleaning structure 204 includes an annular plate 2041, which is fixedly connected to the bottom of the cleaning rod 203 through a connecting rod 2042. A cleaning brush 2046 matching the filter screen 2 is provided at the edge of the annular plate 2041, and a connecting slider 2045 is fixedly connected to the side of the cleaning brush 2046.

[0043] To ensure the stability and flexibility of the cleaning brush 2046 during the cleaning process, in this embodiment: the side of the annular plate 2041 is provided with a mounting groove 2043 that matches the connecting slider 2045. A connecting spring 2044 is fixedly connected to the inner wall of the mounting groove 2043, and the other end of the connecting spring 2044 is fixedly connected to the connecting slider 2045. By moving the cleaning rod 203 up and down, the cleaning structure 204 can drive the cleaning brush 2046 to clean the filter surface of the filter screen 2 online, effectively preventing the accumulation of impurities and particles on the filter screen surface, thereby improving the filtration efficiency and the quality of ultrapure water. The cooperation between the connecting slider 2045 and the mounting groove 2043 allows the cleaning brush 2046 to move flexibly on the annular plate 2041, while the connecting spring 2044 provides the necessary elastic support, ensuring that the cleaning brush 2046 can always maintain close contact with the filter surface of the filter screen 2 during the cleaning process, thus improving the cleaning effect.

[0044] To enhance the stability of the connecting slider 2045 and prevent it from shifting or falling off, in this embodiment: positioning sliders 2047 are fixedly connected to both the top and bottom of the connecting slider 2045, and positioning grooves 2048 matching the positioning sliders 2047 are provided on the inner wall of the mounting groove 2043. The cooperation between the positioning sliders 2047 and the positioning grooves 2048 makes the movement of the connecting slider 2045 in the mounting groove 2043 more stable and reliable, avoiding problems such as reduced cleaning effect or equipment damage caused by shifting or falling off.

[0045] To ensure the sealing of the cleaning rod 203 during the sliding process and prevent leakage of ultrapure water, in this embodiment, a sealing ring 2031 matching the cleaning rod 203 is installed on the inner wall of the filter shell 1 at the position corresponding to the cleaning rod 203. The setting of the sealing ring 2031 effectively prevents leakage of ultrapure water during the sliding process of the cleaning rod 203, ensuring the sealing of the filter shell 1 and the quality of ultrapure water.

[0046] In order to accommodate the cleaning rod 203 and reduce its occupation of external space, in this embodiment, a receiving groove 2032 is also provided on the filter shell 1 at the position corresponding to the cleaning rod 203. The receiving groove 2032 provides storage space for the cleaning rod 203, so that it can be properly stored when not in use, reducing the occupation of external space, and also facilitating the transportation and storage of the equipment.

[0047] In order to achieve the detachable connection of the fixed end cap 3 and facilitate the cleaning and replacement of the filter screen 2, in this embodiment: the fixed end cap 3 is fixedly connected to the bottom of the filter shell 1 by the mounting bolt 301. By loosening the mounting bolt 301, the user can easily remove the fixed end cap 3 from the filter shell 1, thereby facilitating the thorough cleaning or replacement of the filter screen 2 and reducing maintenance costs and time.

[0048] To enhance the sealing between the fixed end cap 3 and the filter shell 1 and prevent ultrapure water leakage, in this embodiment, a sealing ring 302 matching the filter shell 1 is fixedly connected to the top of the fixed end cap 3. The setting of the sealing ring 302 effectively enhances the sealing between the fixed end cap 3 and the filter shell 1, prevents ultrapure water leakage during the filtration process, and ensures the quality and processing efficiency of ultrapure water.

[0049] The working principle of this invention is as follows: During the ultrapure water filtration process, ultrapure water enters the filter housing 1 through the inlet pipe 101 and is filtered by the filter screen 2. Simultaneously, to maintain the filtration performance of the filter screen 2, the user can move the cleaning structure 204 back and forth by pulling the cleaning rod 203 up and down. During this movement, the cleaning brush 2046 maintains close contact with the filter surface of the filter screen 2 under the elastic force of the connecting spring 2044, effectively removing impurities and particles from the filter screen surface. Furthermore, when a thorough cleaning or replacement of the filter screen 2 is required, the user only needs to loosen the mounting bolt 301 to remove the fixed end cap 3, thus facilitating the operation of the filter screen 2. Throughout the process, the sealing ring 2031 and sealing ring 302 ensure the airtightness of the filter housing 1, preventing leakage of ultrapure water.

[0050] The foregoing description illustrates and describes several preferred embodiments of the present invention. However, as previously stated, it should be understood that the present invention is not limited to the forms disclosed herein and should not be construed as excluding other embodiments. It can be used in various other combinations, modifications, and environments, and can be altered within the scope of the present invention's conception through the foregoing teachings or related technical or knowledge. Any modifications and variations made by those skilled in the art that do not depart from the spirit and scope of the present invention should be within the protection scope of the appended claims.

Claims

1. An ultrapure water filter for semiconductors, comprising a filter housing (1), characterized in that, The filter housing (1) is provided with a cleanable filter screen (2) inside. A cleaning component (202) for cleaning the filter screen (2) is installed on the filter housing (1) at the position corresponding to the filter screen (2). A fixing end cap (3) for fixing the filter screen (2) is provided at the bottom of the filter housing (1) at the position corresponding to the filter screen (2).

2. The ultrapure water filter for semiconductors according to claim 1, characterized in that: The filter housing (1) is equipped with a water inlet pipe (101) on the top, and the fixed end cap (3) is provided with a drain hole (1011) at the bottom.

3. The ultrapure water filter for semiconductors according to claim 2, characterized in that: Positioning rings (201) for positioning the filter screen (2) are provided on the inner wall of the filter shell (1) and on the fixed end cap (3).

4. The ultrapure water filter for semiconductors according to claim 3, characterized in that: The cleaning assembly (202) includes a cleaning rod (203) slidably disposed on the filter housing (1), and a cleaning structure (204) for cleaning the filter screen (2) is installed at the bottom of the cleaning rod (203).

5. The ultrapure water filter for semiconductors according to claim 4, characterized in that: The cleaning structure (204) includes an annular plate (2041), which is fixedly connected to the bottom of the cleaning rod (203) via a connecting rod (2042). A cleaning brush (2046) matching the filter screen (2) is provided at the edge of the annular plate (2041).

6. The ultrapure water filter for semiconductors according to claim 5, characterized in that: The cleaning brush (2046) is fixedly connected to a connecting slider (2045) on its side. The annular plate (2041) has an installation groove (2043) on its side that matches the connecting slider (2045). A connecting spring (2044) is fixedly connected to the inner wall of the installation groove (2043), and the other end of the connecting spring (2044) is fixedly connected to the connecting slider (2045).

7. The ultrapure water filter for semiconductors according to claim 6, characterized in that: The top and bottom of the connecting slider (2045) are fixedly connected to positioning sliders (2047), and the inner wall of the mounting groove (2043) is provided with positioning grooves (2048) that match the positioning sliders (2047).

8. The ultrapure water filter for semiconductors according to claim 7, characterized in that: A sealing ring (2031) matching the cleaning rod (203) is installed on the inner wall of the filter housing (1) at the position corresponding to the cleaning rod (203).

9. An ultrapure water filter for semiconductors according to claim 8, characterized in that: A receiving groove (2032) is also provided on the filter shell (1) at the position corresponding to the cleaning rod (203).

10. An ultrapure water filter for semiconductors according to claim 9, characterized in that: The fixed end cap (3) is fixedly connected to the bottom of the filter shell (1) by mounting bolts (301), and a sealing ring (302) matching the filter shell (1) is fixedly connected to the top of the fixed end cap (3).

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