Film roll pretreatment apparatus and magnetron sputtering machine

Abstract

The application provides a film roll pretreatment device and a magnetron sputtering machine. The film roll pretreatment device comprises a cavity, a bearing mechanism, a heating mechanism, a rotating mechanism and a gas extraction mechanism. The bearing mechanism is arranged in the cavity and used for bearing the film roll. The heating mechanism is connected with the cavity and used for heating the cavity. The rotating mechanism is connected with the cavity and at least partially located in the cavity and used for driving the film roll to rotate. The gas extraction mechanism is connected with the cavity and used for extracting the gas in the cavity. The film roll pretreatment device provided by the application can release the water vapor in the film roll quickly by arranging the heating mechanism and the rotating mechanism, can remove the water vapor in the film roll quickly and efficiently, and improves the production efficiency. In addition, the film roll pretreatment device provided by the application can remove the air in the film roll, and improves the stability in the subsequent film coating in the magnetron sputtering device. Meanwhile, the water vapor removal process does not need to be wound and unwound, avoiding the influence of the uneven winding on the film running of the magnetron sputtering machine.

Description

Technical Field

[0001] This application relates to the field of vacuum coating technology, and in particular to a film roll pretreatment device and a magnetron sputtering machine. Background Technology

[0002] Vacuum coating technology is a very environmentally friendly film formation technique. Films formed through vacuum coating possess advantages such as high hardness, high wear resistance, good chemical stability, strong adhesion to the substrate, and a bright metallic appearance. Therefore, vacuum coating is increasingly widely used in the decorative treatment of metal substrates such as copper, aluminum, silver, gold, and stainless steel.

[0003] In vacuum coating technology, the base film provides a foundation surface for the coating material to adhere, enabling the coating to form a uniform and continuous thin film, ensuring the smooth progress and integrity of the coating process. However, the moisture content of the base film can be affected by packaging, transportation, weather, and other factors. Furthermore, some air may be trapped within the film roll produced from the base film. During sputtering coating, the moisture in the base film can affect the quality of the coated product, and the air trapped within the base film can also affect the efficiency of vacuum extraction during the sputtering coating process.

[0004] Therefore, a membrane roll pretreatment device is needed to remove moisture from the membrane roll. Utility Model Content

[0005] In view of this, the purpose of this application is to provide a membrane roll pretreatment device that can quickly and efficiently remove water vapor and air from the membrane roll.

[0006] To achieve the above objectives, this application provides a membrane roll pretreatment device, the membrane roll pretreatment device comprising:

[0007] cavity;

[0008] A support mechanism, disposed within the cavity, is used to support the membrane roll;

[0009] A heating mechanism, connected to the cavity, is used to heat the cavity;

[0010] A rotating mechanism connected to the cavity, the rotating mechanism being at least partially located within the cavity for driving the membrane roll to rotate;

[0011] An air extraction mechanism is connected to the cavity and is used to extract gas from the cavity.

[0012] In a preferred embodiment, the film roll pretreatment equipment further includes:

[0013] A transfer vehicle, wherein a first track is provided on the transfer vehicle, and the carrying mechanism can be connected to the first track and move along the extension direction of the first track;

[0014] The second track is disposed within the cavity, and the supporting mechanism can be connected to the second track and move along the extension direction of the second track; the second track can dock with the first track to transfer the supporting mechanism from the first track to the second track; or, transfer the supporting mechanism from the second track to the first track.

[0015] In a preferred embodiment, the film roll pretreatment equipment further includes limiting rails disposed on both sides of the transfer vehicle, the limiting rails restricting the movement direction of the transfer vehicle;

[0016] The limiting track is provided with a limiting part at one end near the cavity. When the transfer vehicle comes into contact with the limiting part, the second track connects with the first track.

[0017] In a preferred embodiment, the film roll pretreatment equipment further includes a first positioning beam, a second positioning beam, and a first positioning element. The first positioning beam is connected to the first track, and the second positioning beam is connected to the second track. The first positioning element is used to position the carrying mechanism to the first track; or, to position the carrying mechanism to the second track.

[0018] In a preferred embodiment, the carrying mechanism includes a support base, a chuck, and a support shaft. The support shaft is used to carry the film roll. Both ends of the support shaft are rotatably connected to the support base via the chuck. The rotating mechanism is connected to the support shaft and drives the support shaft to rotate.

[0019] In a preferred embodiment, the supporting mechanism further includes a baffle sleeved on the support shaft, the baffle limiting the range of motion of the film roll along the axial direction of the support shaft.

[0020] In a preferred embodiment, the rotating mechanism includes a rotary motor, a coupling, and a magnetorheological fluid, wherein the rotary motor and the magnetorheological fluid are connected via the coupling, and the magnetorheological fluid is connected to the support shaft.

[0021] In a preferred embodiment, the evacuation mechanism includes a vacuum pipe and a vacuum pump, the vacuum pump being connected to the cavity via the vacuum pipe.

[0022] In a preferred embodiment, the heating mechanism includes an electric heat tracing tube that is wound around the outer wall of the cavity.

[0023] In a preferred embodiment, the rotating mechanism is disposed at one end of the cavity, and a cavity door is disposed at the other end of the cavity, the cavity door being connected to the cavity via a rotating arm;

[0024] In a preferred embodiment, the cavity is provided with a viewing mirror for observing the interior of the cavity.

[0025] Based on the same inventive concept, this application also provides a magnetron sputtering machine, which includes the film roll pretreatment equipment described in any one of the above.

[0026] As can be seen from the above, the membrane roll pretreatment equipment provided in this application, by setting a heating mechanism and a rotating mechanism, can realize the rotational heating of the membrane roll, which makes the heating more uniform and allows the water vapor in the membrane roll to be released quickly. The released water vapor is then promptly removed by the air extraction mechanism, so that the water vapor in the membrane roll can be released more quickly and efficiently, thereby improving production efficiency.

[0027] Secondly, the film roll pretreatment equipment provided in this application can remove the air inside the film roll, thereby improving the stability during subsequent coating in the magnetron sputtering equipment.

[0028] Meanwhile, the process of removing moisture does not require unwinding or rewinding, thus avoiding uneven winding that could affect the film feeding of the magnetron sputtering machine. Attached Figure Description

[0029] To more clearly illustrate the technical solutions in this application or related technologies, the drawings used in the description of the embodiments or related technologies will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0030] Figure 1 This is an overall schematic diagram of the film roll pretreatment equipment in one embodiment of this application;

[0031] Figure 2 This is a schematic diagram of a partial structure of a film roll pretreatment device in one embodiment of this application. Figure 1 ;

[0032] Figure 3 This is a schematic diagram of a partial structure of a film roll pretreatment device in one embodiment of this application. Figure 2 ;

[0033] Figure 4 This is a schematic diagram of the rotating mechanism in one embodiment of this application.

[0034] Figure Labels

[0035] 100. Film roll pretreatment equipment;

[0036] 1. Cavity; 11. Second track; 12. Cavity opening; 13. Rotary arm; 14. Sight mirror;

[0037] 2. Bearing mechanism; 21. Support base; 22. Chuck; 23. Support shaft; 231. Snap-fit ​​structure; 24. Baffle;

[0038] 3. Heating mechanism; 31. Electric heat tracing pipe;

[0039] 4. Rotating mechanism; 41. Rotary electric motor; 42. Coupling; 43. Magnetofluid;

[0040] 5. Vacuum extraction mechanism; 51. Vacuum piping; 52. Vacuum pump;

[0041] 6. Transfer vehicle; 61. First track;

[0042] 7. Limiting rail; 71. Limiting part;

[0043] 81. First positioning beam; 82. Second positioning beam; 83. First positioning component. Detailed Implementation

[0044] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with specific embodiments and the accompanying drawings.

[0045] It should be noted that, unless otherwise defined, the technical or scientific terms used in the embodiments of this application should have the ordinary meaning understood by one of ordinary skill in the art to which this application pertains. The terms "first," "second," and similar terms used in the embodiments of this application do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are only used to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0046] The inventors discovered that most current equipment used to remove moisture from film rolls suffers from low moisture removal efficiency. Furthermore, some equipment requires moisture removal during the unwinding and winding process, which heavily relies on the neatness of the winding; uneven winding can affect the film feeding of the magnetron sputtering machine.

[0047] Therefore, the purpose of this application is to provide a membrane roll pretreatment solution to solve the above problems.

[0048] Reference Figures 1-4 As shown, one embodiment of this application discloses a membrane roll pretreatment device 100. The membrane roll pretreatment device 100 includes a cavity 1, a carrying mechanism 2, a heating mechanism 3, a rotating mechanism 4, and a vacuuming mechanism 5. The carrying mechanism 2 is disposed in the cavity 1 and is used to carry the membrane roll. The heating mechanism 3 is connected to the cavity 1 and is used to heat the cavity 1. The rotating mechanism 4 is connected to the cavity 1 and is at least partially located in the cavity 1 to drive the membrane roll to rotate. The vacuuming mechanism 5 is connected to the cavity 1 and is used to remove the gas in the cavity 1.

[0049] The membrane roll pretreatment equipment 100 provided in this embodiment can achieve rotational heating of the membrane roll by setting a heating mechanism 3 and a rotating mechanism 4, which makes the heating more uniform and allows the water vapor in the membrane roll to be released quickly. The released water vapor is then promptly removed by the air extraction mechanism 5, so that the water vapor in the membrane roll can be released more quickly and efficiently, thereby improving production efficiency.

[0050] Secondly, the film roll pretreatment equipment 100 provided in this embodiment can remove the air inside the film roll, thereby improving the stability during subsequent coating in the magnetron sputtering equipment.

[0051] Meanwhile, the process of removing moisture does not require unwinding or rewinding, thus avoiding uneven winding that could affect the film feeding of the magnetron sputtering machine.

[0052] The membrane roll is formed by winding the base membrane, and the base membrane is supplied and stored in the form of membrane rolls.

[0053] During operation, the membrane roll is first placed on the support mechanism 2, then the heating mechanism 3 is turned on to heat the cavity 1, the rotating mechanism 4 is turned on to drive the membrane roll to rotate, and the air extraction mechanism 5 is turned on to extract the water vapor and air rolled in the membrane roll from the cavity 1.

[0054] In one embodiment, the vacuum pumping mechanism 5 includes a vacuum pipe 51 and a vacuum pump 52, with the vacuum pump 52 connected to the cavity 1 via the vacuum pipe 51. When the vacuum pump 52 is turned on, the water vapor in the cavity 1 and the air rolled in the membrane roll are drawn out of the cavity 1 through the vacuum pipe 51, which can promptly remove the water vapor in the cavity 1 and prevent water vapor condensation.

[0055] In one embodiment, the heating mechanism 3 includes an electric heat tracing pipe 31, which is wound around the outer wall of the cavity 1 to ensure uniform heating of the cavity 1, thereby ensuring the temperature uniformity of different areas within the cavity 1 and facilitating the rapid release of water vapor and air trapped within the membrane roll. Optionally, the electric heat tracing pipe 31 can be a coil wound around the outer wall of the cavity 1, or it can form multiple independent annular pipes. In another embodiment, the heating mechanism 3 can be steam heating or the like, and the specific method is not limited.

[0056] In one embodiment, a rotating mechanism 4 is disposed at one end of the cavity 1, and a cavity door 12 is disposed at the other end of the cavity 1. The cavity door 12 is connected to the cavity 1 via a rotating arm 13. Since the membrane roll is usually quite heavy, the cavity door 12 is also usually quite heavy. Connecting the cavity door 12 to the cavity 1 via the rotating arm 13 makes it easy to open or close the cavity door 12 to place the membrane roll into the cavity 1 or to remove the membrane roll from the cavity 1.

[0057] Optionally, the cavity 1 is a cylindrical structure, the rotating mechanism 4 is located at one end of the cylindrical structure, and the cavity door 12 is located at the other end of the cylindrical structure.

[0058] In one embodiment, a sight glass 14 is provided on the cavity 1 for observing the interior of the cavity 1, through which the removal of water vapor inside the cavity 1 can be observed. Optionally, multiple sight glasses 14 are provided on the cavity 1, and the multiple sight glasses 14 are spaced apart to observe different areas inside the cavity 1. Further, the multiple sight glasses 14 are distributed at intervals along the axial direction of the cylindrical structure, and also at intervals along the circumferential direction of the cylindrical structure.

[0059] Please continue to refer to Figure 1-3 As shown, in one embodiment, the film roll pretreatment equipment 100 further includes a transfer vehicle 6 and a second track 11. The transfer vehicle 6 is provided with a first track 61, and the carrying mechanism 2 can be connected to the first track 61 and move along the extension direction of the first track 61. The second track 11 is provided in the cavity 1, and the carrying mechanism 2 can be connected to the second track 11 and move along the extension direction of the second track 11. The second track 11 can dock with the first track 61 to transfer the carrying mechanism 2 from the first track 61 to the second track 11; or, to transfer the carrying mechanism 2 from the second track 11 to the first track 61.

[0060] Since the membrane rolls are usually quite heavy, they can be transferred more easily using a transfer vehicle with rails.

[0061] During operation, the carrier mechanism 2 is placed on the first track 61 on the transfer vehicle 6, and the membrane roll to be processed is placed on the carrier mechanism 2; then, the transfer vehicle 6 moves to dock with the first track 61; then, the carrier mechanism 2 and the membrane roll to be processed are transferred from the first track 61 to the second track 11 inside the cavity 1, then the heating mechanism 3 is turned on to heat the cavity 1, the rotating mechanism 4 is turned on to drive the membrane roll to rotate, and the air extraction mechanism 5 is turned on to extract the water vapor inside the cavity 1.

[0062] The bearing mechanism 2 can be slidably or rollingly connected to the first track 61, and the bearing mechanism 2 can be slidably or rollingly connected to the second track 11.

[0063] Optionally, the bottom of the transfer vehicle 6 is equipped with wheels to facilitate rolling on the ground.

[0064] Please continue to refer to Figure 1 and 3 As shown, in one embodiment, the film roll pretreatment equipment 100 further includes a limiting track 7, which is disposed on both sides of the transfer vehicle 6. The limiting track 7 restricts the movement direction of the transfer vehicle 6. A limiting part 71 is provided at one end of the limiting track 7 near the cavity 1. When the transfer vehicle 6 abuts against the limiting part 71, the second track 11 connects with the first track 61, which can ensure that the second track 11 and the first track 61 can quickly connect, thereby improving production efficiency.

[0065] Optionally, the limiting part 71 includes a baffle. When the baffle comes into contact with the transfer vehicle 6, the transfer vehicle 6 can no longer move forward, and at this time the second track 11 and the first track 61 are perfectly aligned. In another embodiment, the limiting part 71 is a block or similar structure, and the specific design is not limited.

[0066] Optionally, the limiting rail 7 is installed on the ground, specifically by means of bolts or welding.

[0067] Please continue to refer to Figure 2 and 3 As shown, in one embodiment, the film roll pretreatment equipment 100 further includes a first positioning beam 81, a second positioning beam 82, and a first positioning member 83. The first positioning beam 81 is connected to the first track 61, and the second positioning beam 82 is connected to the second track 11. The first positioning member 83 is used to position the carrying mechanism 2 to the first track 61; or to position the carrying mechanism 2 to the second track 11, thereby ensuring the stability of the connection between the carrying mechanism 2 and the first track 61, or between the carrying mechanism 2 and the second track 11, and preventing the carrying mechanism 2 from moving along the extension direction of the first track 61 or the second track 11.

[0068] Specifically, when it is necessary to transfer the bearing mechanism 2 from the first track 61 to the second track 11, the first positioning element 83 is disconnected from the first positioning beam 81. Simultaneously, when it is necessary to transfer the bearing mechanism 2 from the second track 11 to the first track 61, the first positioning element 83 is disconnected from the second positioning beam 82. Optionally, the first positioning element 83 is a positioning pin or bolt, etc., and the first and second positioning beams 81 and 82 are also provided with positioning holes for connecting to the first positioning element 83.

[0069] The first track 61 includes two spaced-apart first slide rails connected by a first positioning beam 81 to ensure the stability of the first track 61. Similarly, the second positioning beam 82 includes two spaced-apart second slide rails connected by a second positioning beam 82 to ensure the stability of the second track 11.

[0070] Please continue to refer to Figure 2As shown, in one embodiment, the carrying mechanism 2 includes a support base 21, a chuck 22 and a support shaft 23. The support shaft 23 is used to carry the film roll. The two ends of the support shaft 23 are rotatably connected to the support base 21 through the chuck 22. The rotating mechanism 4 is connected to the support shaft 23 and drives the support shaft 23 to rotate.

[0071] The two ends of the support shaft 23 are rotatably connected to the support base 21 via the chuck 22. The rotating mechanism 4 is connected to the support shaft 23 and drives the support shaft 23 to rotate. The support shaft 23 drives the film roll to rotate synchronously, while the support base 21 does not need to rotate, thus ensuring the stability of the film roll during rotation.

[0072] Optionally, the support shaft 23 is an expansion shaft. After being inflated under high pressure, the surface of the expansion shaft can protrude. After deflating, the surface part quickly retracts, which can ensure close contact with the membrane roll and drive the membrane roll to rotate.

[0073] Optionally, the bottom of the support base 21 is provided with rollers, which are tactilely connected to the first track 61 or to the second track 11.

[0074] Please continue to refer to Figure 2 As shown, in one embodiment, the supporting mechanism 2 further includes a baffle 24, which is sleeved on the support shaft 23. The baffle 24 restricts the range of motion of the film roll along the axial direction of the support shaft 23, so as to prevent the film roll from moving circumferentially during the rotation of the support shaft 23, thereby affecting the neatness of the film roll, and preventing the side of the film roll from shifting during the rotation.

[0075] Please continue to refer to Figure 4 As shown, in one embodiment, the rotating mechanism 4 includes a rotating motor 41, a coupling 42, and a magnetic fluid 43. The rotating motor 41 and the magnetic fluid 43 are connected by the coupling 42, and the magnetic fluid 43 is connected to the support shaft 23. The magnetic fluid 43 can withstand the high temperature inside the cavity 1 well and avoid failure.

[0076] Optionally, the magnetorheological fluid 43 is provided with a snap-fit ​​groove, and one end of the support shaft 23 connected to the magnetorheological fluid 43 is provided with a snap-fit ​​structure 231 that matches the shape of the snap-fit ​​groove. After the snap-fit ​​structure 231 snaps into the snap-fit ​​groove, the support shaft 23 can rotate with the rotary motor 41. In other embodiments, the snap-fit ​​groove can be provided at one end of the support shaft 23, and the snap-fit ​​structure can be provided on the magnetorheological fluid 43. Optionally, the cross-section of the snap-fit ​​groove in the axial direction perpendicular to the motor shaft is rectangular, trapezoidal, or parallelogram, etc.

[0077] Based on the same inventive concept, another embodiment of this application discloses a magnetron sputtering machine, which includes the film roll pretreatment equipment 100 in any of the above embodiments, and uses the film roll pretreatment equipment 100 in any of the above embodiments to pretreat the film roll before vacuum coating.

[0078] The magnetron sputtering machine provided in this embodiment features a film roll pretreatment device 100. By incorporating a heating mechanism 3 and a rotating mechanism 4, it achieves rotational heating of the film roll, resulting in more uniform heating and rapid release of moisture from the roll. The released moisture is then promptly removed by an air extraction mechanism 5, further accelerating the removal of moisture from the film roll and improving production efficiency. Secondly, the magnetron sputtering machine in this embodiment can remove air trapped within the film roll, improving the stability of the magnetron sputtering process. Furthermore, the removal of moisture eliminates the need for unwinding and rewinding, preventing uneven rewinding from affecting the film feeding process of the magnetron sputtering machine.

[0079] It should be noted that some embodiments of this application have been described above. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps described in the claims can be performed in a different order than that shown in the above embodiments and still achieve the desired result. In addition, the processes depicted in the drawings do not necessarily require the specific order or sequential order shown to achieve the desired result.

[0080] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of this application (including the claims) is limited to these examples; within the framework of this application, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of different aspects of the above embodiments of this application, which are not provided in detail for the sake of brevity.

[0081] The embodiments of this application are intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the embodiments of this application should be included within the protection scope of this application.

Claims

1. A film roll pretreatment device, characterized in that, include: cavity; A support mechanism, disposed within the cavity, is used to support the membrane roll; A heating mechanism, connected to the cavity, is used to heat the cavity; A rotating mechanism connected to the cavity, the rotating mechanism being at least partially located within the cavity for driving the membrane roll to rotate; An air extraction mechanism is connected to the cavity and is used to extract gas from the cavity.

2. The membrane roll pretreatment equipment according to claim 1, characterized in that, The film roll pretreatment equipment also includes: A transfer vehicle, wherein a first track is provided on the transfer vehicle, and the carrying mechanism can be connected to the first track and move along the extension direction of the first track; The second track is disposed within the cavity, and the supporting mechanism can be connected to the second track and move along the extension direction of the second track; the second track can dock with the first track to transfer the supporting mechanism from the first track to the second track; or, transfer the supporting mechanism from the second track to the first track.

3. The membrane roll pretreatment equipment according to claim 2, characterized in that, The film roll pretreatment equipment also includes limiting rails, which are arranged on both sides of the transfer vehicle and restrict the movement direction of the transfer vehicle. The limiting track is provided with a limiting part at one end near the cavity. When the transfer vehicle comes into contact with the limiting part, the second track connects with the first track.

4. The film roll pretreatment equipment according to claim 3, characterized in that, The film roll pretreatment equipment further includes a first positioning beam, a second positioning beam, and a first positioning component. The first positioning beam is connected to the first track, and the second positioning beam is connected to the second track. The first positioning component is used to position the carrying mechanism to the first track; or, to position the carrying mechanism to the second track.

5. The film roll pretreatment equipment according to claim 1, characterized in that, The supporting mechanism includes a support base, a chuck, and a support shaft. The support shaft is used to support the film roll. Both ends of the support shaft are rotatably connected to the support base through the chuck. The rotating mechanism is connected to the support shaft and drives the support shaft to rotate.

6. The membrane roll pretreatment equipment according to claim 5, characterized in that, The supporting mechanism further includes a baffle, which is sleeved on the support shaft and restricts the range of motion of the film roll along the axial direction of the support shaft.

7. The film roll pretreatment equipment according to claim 5, characterized in that, The rotating mechanism includes a rotary motor, a coupling, and a magnetorheological fluid. The rotary motor and the magnetorheological fluid are connected through the coupling, and the magnetorheological fluid is connected to the support shaft.

8. The membrane roll pretreatment equipment according to claim 1, characterized in that, The air extraction mechanism includes a vacuum pipe and a vacuum pump, and the vacuum pump is connected to the cavity through the vacuum pipe; And / or, the heating mechanism includes an electric heat tracing tube, which is wound around the outer wall of the cavity.

9. The membrane roll pretreatment equipment according to claim 1, characterized in that, The rotating mechanism is located at one end of the cavity, and a cavity door is located at the other end of the cavity. The cavity door is connected to the cavity via a rotating arm. And / or, the cavity is provided with a viewing mirror for observing the interior of the cavity.

10. A magnetron sputtering machine, characterized in that, Includes the film roll pretreatment equipment as described in any one of claims 1-9.

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