A sealed structure of a magnetic control sputtering on-line adjusting magnetic bar

Abstract

The application discloses a sealing structure of an on-line magnetic rod adjusting device for magnetron sputtering, which is used for sealing between an output end of an adjusting assembly and a channel of an outer shell; a second sealing is arranged between the output end of the adjusting assembly and the channel; the second sealing comprises a flexible sealing sleeve, an inner side edge of the sealing sleeve is connected with the output end of the adjusting assembly, and an outer side edge is connected with an outer edge of the channel, so that the output end of the adjusting assembly and the channel are sealed; the inner side of the sealing sleeve and the output end of the adjusting assembly are connected, and the outer side edge and the outer edge of the channel are connected through the sealing sleeve of the second sealing, so that the sealing between the output end of the adjusting assembly and the channel is realized without affecting the movement of the output end of the adjusting assembly.

Description

Technical Field

[0001] This utility model belongs to the field of magnetron sputtering technology, specifically relating to a sealing structure for an online adjustable magnetic rod used in magnetron sputtering. Background Technology

[0002] Physical vapor deposition (PVD) using sputtering has become a standard technique for customizing the properties of materials such as glass plates or other rigid or flexible materials. "Sputtering" refers to the projectile ejection of positively charged ions (typically argon ions) from a sputtering target. These positively charged ions are accelerated by an electric field directed at a negatively charged sputtering target. The positive ions are formed through impact ionization in a low-pressure gas phase. The ejected atoms collide with the substrate to be coated, forming a dense, well-adhered film. A drawback is the need to turn on the magnetron, requiring the vacuum to be removed for adjustment and then reapplied afterward. This is very time-consuming. One of the process challenges is the inclusion of a magnetic field generator within the sputtering target. Oriented towards the substrate, the magnetic field generator is typically kept stationary while the columnar sputtering target rotates in front of it. High-performance permanent magnets based on Fe-Nd-B or Co-Sm alloys are used to generate the magnetic field. Because the magnetic field component parallel to the sputtering target surface determines the range of electrons in the plasma, it is important to control this component along the length of the tube. Unfortunately, the magnetic flux density (in Tesla) of this component typically decreases at least with the square of the distance to the magnetic field generator, and is therefore very sensitive to the position of the magnetic field generator relative to the sputtering target surface. The distance between the sputtering target surface and the magnetic field generator must therefore be well controlled; otherwise, the plasma will exhibit localized intensity variations, which can correspondingly lead to non-uniform coating profiles on the substrate.

[0003] In the magnetron sputtering industry, cylindrical targets with an inner diameter of 25mm are the most widely used to achieve optimal uniformity in magnetron sputtering products. Especially in the Low E market, in-line adjustable magnetic rods have become an indispensable choice for producing high-end Low E products.

[0004] To address this issue, our company has developed a device that allows for online adjustment of the magnetic rod during magnetron sputtering. This device includes an adjustment component located within the housing. The housing separates the cooling water used in the magnetron sputtering process from the adjustment component. However, since the output end of the adjustment component needs to extend outside the housing to connect with the magnetic yoke component, it is necessary to seal the channel between the output end of the adjustment component and the housing to prevent cooling water from entering the housing and causing water damage to the internal equipment. Utility Model Content

[0005] The purpose of this invention is to provide a sealing structure for an online adjustable magnetic rod used in magnetron sputtering, which aims to solve the following problems.

[0006] To solve the above-mentioned technical problems, the purpose of this utility model is achieved as follows:

[0007] A sealing structure for an online adjustable magnetic rod for magnetron sputtering is provided for sealing the channel between the output end of the adjusting component and the housing; a second seal is provided between the output end of the adjusting component and the channel; the second seal includes a flexible sealing sleeve, the inner edge of the sealing sleeve is connected to the output end of the adjusting component, and the outer edge is connected to the outer edge of the channel, thereby sealing the output end of the adjusting component with the channel.

[0008] Based on the above scheme and as a preferred embodiment of the above scheme: the cross-section of the sealing sleeve is skirt-shaped or sheet-shaped; part or all of the cross-section of the side wall of the sealing sleeve is corrugated.

[0009] Based on the above scheme and as a preferred embodiment of the above scheme: a first support ring is fixedly provided on the inner edge of the sealing sleeve, and a second support ring is fixedly provided on the outer edge. The first support ring is detachably fixed and sealed to the output end of the adjustment component, and the second support ring is detachably fixed and sealed to the outer edge of the channel.

[0010] Based on the above scheme and as a preferred embodiment of the above scheme: the adjustment component further includes a mounting base, the adjustment component is mounted on the mounting base, and its output end extends downward through the mounting base, passes through the channel and extends to the outside of the channel; the mounting base closes the channel, and a first seal is provided between the output end of the adjustment component and the mounting base.

[0011] Based on the above scheme and as a preferred embodiment of the above scheme: the adjustment component includes a servo motor, a transmission component, a nut, and a lead screw; the axis of the servo motor is perpendicular to the axis of the lead screw, and the lead screw passes through the mounting base and the channel and is hinged to the magnetic yoke component; the servo motor drives the lead screw to reciprocate linearly along its axial direction through the transmission component and the nut; the threaded hole on the nut that connects to the threaded section of the lead screw is a blind hole.

[0012] The significant and beneficial technical advantages of this invention compared to existing technologies are as follows: By using a second sealing sleeve, the inner side of the sleeve is connected to the output end of the regulating component, and the outer edge is connected to the outer edge of the channel. This achieves a seal between the output end of the regulating component and the channel without affecting the movement of the output end. Furthermore, a first seal is provided between the mounting base and the output end of the regulating component, sealing the mounting base and the channel. This first seal further seals the output end of the regulating component against the mounting base, significantly improving the reliability and durability of the seal between the output end of the regulating component and the channel. Attached Figure Description

[0013] Figure 1 This is the main structural diagram of this utility model;

[0014] Figure 2 This is a disassembled schematic diagram of the overall structure of the online adjustment magnetic rod device;

[0015] Figure 3 This is a schematic diagram of the internal component installation structure of the outer shell assembly;

[0016] Figure 4 This is a schematic diagram of the adjustment component structure;

[0017] Figure 5 This is a partial sectional view of the overall structure of this utility model;

[0018] Figure 6 yes Figure 5 Enlarged view of section III in the middle;

[0019] Figure 7 This is a schematic diagram of the magnetic yoke assembly structure;

[0020] Figure 8 yes Figure 7 Enlarged view of a section at point V;

[0021] Figure 9 This is a partial sectional view of the overall structure of Embodiment 2;

[0022] Figure 10 yes Figure 9 Enlarged view of section VI in the middle. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions in the embodiments will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the given embodiments, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0024] In the description of this application, it should be understood that the terms "upper" and "lower" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0025] In the description of this application, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Example

[0026] Combination Figure 1-8As shown, this utility model discloses an online oscillating adjustable magnetic rod for magnetron sputtering, comprising a shell assembly 10, a yoke assembly 20, a first terminal assembly 30, a second terminal assembly 40, an adjustment assembly 50, a main control assembly 60, an energy storage assembly 70, an oscillation assembly 80, and a drive assembly 90; wherein, the shell assembly 10 includes a shell body 11 and an upper cover plate assembly 12, the shell body 11 is hollow to form an accommodating chamber 111, and has an opening at its upper end, the opening communicating with the outside; the upper cover plate assembly 12 includes multiple upper cover plates, and after the adjustment assembly 50 and other components are installed in the accommodating chamber, the upper cover plates are fixedly installed at the opening of the shell body 11 to close the accommodating chamber 111, and the opening is closed by the upper cover plate assembly. The upper opening facilitates the installation of the regulating component, energy storage component, and oscillating component within the housing chamber. The opening is sealed by the upper cover plate assembly to isolate the equipment from the outside during magnetron sputtering, preventing water or other media from entering the housing chamber and causing damage. The magnetic yoke assembly 20 is located below the outer casing assembly 10; it includes a support plate 21 and a magnetic rod body 22, with the magnetic rod body 22 fixedly mounted on the support plate 21. Alternatively, a magnet housing cavity can be provided on the support plate 21, with several magnets arranged according to the required magnetic field within the magnet housing cavity, and then the magnet housing cavity is sealed, thus forming the magnetic yoke assembly. Multiple adjustment components 50, each independently controlled, are arranged along the length of the yoke assembly 20 and housed within the receiving chamber 111. The output end of each adjustment component 50 reciprocates linearly perpendicular to the yoke assembly 20, and extends from the side wall of the receiving chamber 111 toward the side containing the yoke assembly 20, hinged to it. The output end of the adjustment component 50 partially pushes or pulls the yoke assembly outward or inward, thus allowing the yoke assembly 20 to elastically deform within its elastic deformation range or within the limits of its strength and shape. Since the magnetic field component parallel to the sputtering target surface determines the range of electrons in the plasma, it is important to control this component along the length of the tube. The magnetic induction intensity of this component (in Tesla) typically decreases at least with the square of the distance to the magnetic field generator, and is therefore very sensitive to the position of the magnetic field generator relative to the sputtering target surface. In actual testing, a deformation of less than 4 mm is sufficient to meet practical requirements, thereby causing the yoke assembly 20 to partially or completely change its distance from the sputtering target surface. By setting multiple adjustment components, each with multiple connection points to the magnetic yoke component, the output of the adjustment component actuates, causing the corresponding magnetic yoke component to locally change its distance from the sputtering target surface, moving closer or further away. This adjusts the local magnetic field strength, enabling real-time online control of the coating thickness on the sputtering target surface. This results in a more uniform coating thickness on the coated products, improving product quality without requiring vacuum removal, thus significantly increasing production efficiency. Specifically, in this embodiment... Figure 6As shown, the adjustment assembly 50 includes a servo motor 51, a first bevel gear 53, a second bevel gear 54, a nut 52, and a lead screw 55. The first bevel gear 53 is fixedly mounted on the spindle of the servo motor 51, the second bevel gear 54 is fixedly connected to the nut 52, and the nut 52 is threaded onto the lead screw 55. The first bevel gear 53 and the second bevel gear 54 mesh to make the axis of the servo motor 51 perpendicular to the axis of the lead screw 55. The mounting base 56 facilitates the installation of the adjustment assembly and also helps to seal the channel. It allows the output end of the adjustment assembly to move flexibly while maintaining a seal between the two components. Furthermore, it facilitates easier disassembly and replacement when the seal ages or leaks. The perpendicular alignment of the servo motor and the lead screw axis significantly shortens the overall size of the adjustment assembly, making it easier to fit into a confined housing. Furthermore, in this preferred embodiment, the adjusting component 50 also includes a mounting base 56. A channel 112 is correspondingly provided on the side of the outer casing 11 facing the magnetic yoke component 20. A nut 53 is movably mounted on the mounting base 56, and its lead screw 55 extends downwards from the center of the mounting base 56, passes through the channel 112, and connects to the magnetic yoke component 20. The mounting base 56 contacts the bottom surface of the accommodating chamber at the edge of the channel 112, and a sealing element is provided between the contact surfaces of the mounting base 56 and the edge of the channel 112, thereby achieving a seal between the mounting base 56 and the channel 112. A nut 52 is installed in the mounting hole in the center of the mounting base 56, and a sealing element, such as a skeleton oil seal, is provided between the mounting hole and the outer peripheral surface of the nut 52, forming a seal between the nut 52 and the mounting base 56. Of course, it should be noted that the threaded hole 521 on the nut 52 that connects to the threaded section 552 of the lead screw 55 is a blind hole. This design only needs to ensure a reliable seal between the outer circumferential surface of the nut 52 and the mounting base 56, without causing leakage between the lead screw 55 and the threaded hole. Furthermore, considering that the nut 52 can rotate flexibly and withstand a certain axial force, this embodiment preferably provides a combination of thrust bearing and angular contact bearing between the upper end face of the nut 52 and the mounting base 56 and / or the mounting hole; it also includes necessary axial limiting components to limit any possible axial movement of the nut 52, such as... Figure 8 The limiting plate 57 shown is connected to the mounting base 56 and limits the axial movement of the nut 52. The magnetic yoke assembly 20 in this embodiment includes a connector 23, which is fixedly mounted on the end face of the support plate 21 facing the outer casing, and the connector 23 is detachably connected to the lower end of the lead screw 55. Specifically, as shown... Figure 8 and Figure 10As shown, the connector 23 has a mounting hole 231. The lead screw 55 is inserted into the mounting hole 231. A pin 553 passes through the connector 23 and the lead screw 55 from the side, and the pin 553 is axially limited by an elastic lock 554. The pin connection structure is simple and reliable, and disassembly and assembly are very convenient.

[0027] Implementation of Column 2

[0028] like Figure 9-10 As shown, the difference between this embodiment and Embodiment 1 is that the adjustment component 50 further includes a mounting base 56, and the outer shell 11 has a channel 112 corresponding to the side where the magnetic yoke component 20 is located. The adjustment component 50 is mounted on the mounting base 56, and its output end extends downward through the mounting base 56, passes through the channel 112, and connects with the magnetic yoke component 20. The mounting base 56 closes the channel 112, and a second seal 120 is provided between the output end of the adjustment component 50 and the channel 112.

[0029] Specifically, in this embodiment, the second seal 120 includes a flexible sealing sleeve 121, which seals the output end of the adjusting component 50 to the channel 112. For example... Figure 10As shown, a first support ring 122 is fixedly provided on the inner edge 1211 of the sealing sleeve 121, and a second support ring 123 is fixedly provided on the outer edge 1212. The first support ring 122 is detachably and securely connected to the output end of the adjusting assembly 50, and the second support ring 123 is detachably and securely connected to the outer edge of the channel 112. The first support ring 122 is sleeved on the threaded section 552 of the lead screw 55, and a pressure ring 124 is detachably connected to the threaded section 552. For example, the pressure ring 124 is threadedly connected to the threaded section 552, limiting the first support ring 122 to the threaded section 552. To avoid leakage between the first support ring 122 and the threaded section 552, it is preferable that the diameter of the connection end 555 of the lead screw 55 and the connector 23 is larger than that of the threaded section 552. An annular groove is formed on the connection side of the connection end 555 and the threaded section 552, and a first sealing ring 127 is embedded in the annular groove. 2. The pressure ring 124 is pressed onto the first sealing ring 127 to achieve a seal between the first support ring 122 and the threaded section 552. An annular groove is provided on the mating surface of the first support ring 123 and the outer shell, and the second sealing ring 126 is embedded in the annular groove. The second support ring 123 is pressed onto the outer shell by the screw 125, thereby achieving a seal between the second support ring 123 and the outer shell. This achieves the connection between the inner edge of the sealing sleeve 121 and the output end of the adjusting component 50, and the outer edge and the outer edge of the channel 112, thereby sealing the channel 112. Since the lower end of the lead screw 55 is connected to the connector 23, and in this embodiment, the second seal 120 is located near the connection end of the two, in order to avoid interference between the connector 23 and the sealing sleeve 121 during the movement of the lead screw 55, which could lead to potential damage to the sealing sleeve 121, it is preferable that the cross-section of the sealing sleeve 121 is skirt-shaped or plate-shaped, and it is fastened above the connector 23, thereby avoiding interference and impact on the sealing sleeve 121 and preventing damage to the sealing sleeve 121. In addition, during the adjustment of the magnetic rod, the sealing sleeve 121 will be pulled to undergo elastic deformation. Considering the need to improve the stretching flexibility and range of motion of the sealing sleeve 121 and to avoid excessive stretching of the sealing sleeve 121 during large strokes, which could lead to damage, in this embodiment, the side wall portion or all of the sealing sleeve 121 is preferably corrugated. The corrugated side wall structure greatly improves the stretching range of the sealing sleeve 121.

[0030] The above embodiments are merely preferred embodiments of the present utility model and are not intended to limit the scope of protection of the present utility model. Therefore, all equivalent changes made to the structure, shape, and principle of the present utility model should be covered within the scope of protection of the present utility model.

Claims

1. A sealing structure for an online adjustable magnetic rod for magnetron sputtering, used to seal the connection between the output end of the adjusting assembly (50) and the channel (112) of the housing (11); characterized in that: A second seal (120) is provided between the output end of the adjustment component (50) and the channel (112); the second seal (120) includes a flexible sealing sleeve (121), the inner edge of the sealing sleeve (121) is connected to the output end of the adjustment component (50), and the outer edge is connected to the outer edge of the channel (112), thereby sealing the output end of the adjustment component (50) and the channel (112).

2. The sealing structure of an online adjustable magnetic rod for magnetron sputtering according to claim 1, characterized in that: The sealing sleeve (121) has a skirt-shaped or sheet-shaped cross section; the side wall portion or all of the sealing sleeve (121) has a corrugated cross section.

3. The sealing structure of an online adjustable magnetic rod for magnetron sputtering according to claim 2, characterized in that: The inner edge of the sealing sleeve (121) is fixed with a first support ring (122), and the outer edge is fixed with a second support ring (123). The first support ring (122) is detachably fixed and sealed to the output end of the adjustment component (50), and the second support ring (123) is detachably fixed and sealed to the outer edge of the channel (112).

4. The sealing structure of an online adjustable magnetic rod for magnetron sputtering according to claim 1, characterized in that: The adjustment component (50) further includes a mounting base (56), the adjustment component (50) is mounted on the mounting base (56), and its output end extends downward through the mounting base (56), passes through the channel (112) and extends to the outside of the channel (112); the mounting base (56) closes the channel (112), and a first seal is provided between the output end of the adjustment component (50) and the mounting base (56).

5. The sealing structure of an online adjustable magnetic rod for magnetron sputtering according to claim 4, characterized in that: The adjustment assembly (50) includes a servo motor (51), a transmission assembly, a nut (52), and a lead screw (55); the axis of the servo motor (51) is perpendicular to the axis of the lead screw (55), and the lead screw (55) passes through the mounting base (56) and the channel (112) and is hinged to the magnetic yoke assembly (20); the servo motor (51) drives the lead screw (55) to reciprocate linearly along its axis through the transmission assembly and the nut (52); The threaded hole (521) on the nut (52) that connects to the threaded section (552) of the lead screw (55) is a blind hole.

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