A molecular pump bearing fixing structure

Abstract

This utility model belongs to the field of molecular pump bearing fixing technology, and in particular to a molecular pump bearing fixing structure, including a bearing frame. Disc springs are provided above and below the bearing frame. A rotating bearing is fixedly connected to the inner wall of the bearing frame. A controller and two sets of sliding groove columns are respectively provided inside the bearing frame. An electric push rod is provided inside each sliding groove column, and a sliding column is slidably connected inside each sliding groove column. The ends of each set of sliding columns that are close to each other are fixedly connected to the telescopic end of the electric push rod. The ends of the two sets of sliding columns that are far apart from each other are fixedly connected to the sides of two disc springs that are close to each other. Through the linkage structure of the disc springs and electric push rods set above and below the bearing frame, the electric push rod can drive the sliding column to compress the disc springs to generate dynamic preload, thereby absorbing the vibration energy of the molecular pump during high-speed rotation in real time and precisely controlling the axial displacement of the rotating bearing.

Description

Technical Field

[0001] This utility model belongs to the field of molecular pump bearing fixing technology, specifically relating to a molecular pump bearing fixing structure. Background Technology

[0002] Molecular pump bearings are specially designed bearings installed between the rotor shaft and the pump body of a molecular pump. By bearing the radial and axial loads when the rotor rotates at high speed, they ensure that the rotor rotates in a precise axial position, while preventing external gas from entering the vacuum chamber. They are a key basic component for achieving high vacuum pumping performance in molecular pumps.

[0003] However, the structure of a molecular pump includes high-speed rotating blades or a spiral tube, which achieve the pumping function by impacting gas molecules. Bearings need to be installed at the joint between the high-speed rotating blades and the shaft. However, when the molecular pump is in high-speed rotation, if the bearing is not installed tightly enough, it will be subjected to large vibrations. Continuous vibrations will cause the bearing to have axial displacement, which will not only shorten the service life of the bearing itself, but also have an adverse effect on the service life of the entire molecular pump.

[0004] To address the aforementioned problems, this application proposes a molecular pump bearing fixing structure. Utility Model Content

[0005] To address the aforementioned problems in the existing technology, this utility model provides a molecular pump bearing fixing structure, which has the characteristic of improving the service life of the entire molecular pump device.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a molecular pump bearing fixing structure, including a bearing frame, with butterfly springs provided above and below the bearing frame, a rotating bearing fixedly connected to the inner wall of the bearing frame, a controller and two sets of sliding groove columns respectively provided inside the bearing frame, an electric push rod provided inside each of the sliding groove columns, and a sliding column slidably connected inside each of the sliding groove columns, with the ends of each set of sliding columns close to each other fixedly connected to the telescopic end of the electric push rod, and the ends of the two sets of sliding columns far from each other fixedly connected to the sides of two butterfly springs close to each other.

[0007] As a preferred embodiment of this utility model, each of the two butterfly springs is fixedly connected to a connecting ring on the side away from each other, and each connecting ring is made of nickel-based alloy.

[0008] As a preferred embodiment of this utility model, a wiring conduit is fixedly connected to the inner wall of the bearing bracket, and a protective cap is snapped onto the top of the wiring conduit.

[0009] As a preferred embodiment of this utility model, a fixing plate is fixedly connected to the back of the controller, and the back of the fixing plate is fixedly connected to the inner wall of the bearing bracket.

[0010] As a preferred technical solution of this utility model, each of the sliding groove columns has a fixed ring fixedly connected to its outer surface, and the side of each set of fixed rings that are close to each other is fixedly connected to the upper surface and the bottom surface of the bearing frame, respectively.

[0011] As a preferred embodiment of this utility model, each set of sliding groove columns has a support ring fixedly connected to one end of each other, and the outer surface of each support ring is fixedly connected to the inner wall of the bearing frame.

[0012] As a preferred embodiment of this utility model, each of the support rings has an mounting ring fixedly connected to its upper surface and back surface, and the inner wall of each mounting ring is fixedly connected to the outer surface of the electric push rod.

[0013] As a preferred embodiment of this utility model, the upper and bottom surfaces of the outer ring of the rotating bearing are fixedly connected with limiting rings, and the outer surface of each limiting ring is fixedly connected to the inner wall of the bearing frame.

[0014] Compared with the prior art, the beneficial effects of this utility model are as follows: by setting up a linkage structure between the butterfly spring and the electric push rod with the upper and lower bearing bracket, the electric push rod can drive the sliding column to squeeze the butterfly spring to generate dynamic preload, thereby absorbing the vibration energy of the molecular pump during high-speed rotation in real time, accurately controlling the axial displacement of the rotating bearing, effectively reducing vibration wear and extending the life of the bearing and equipment. At the same time, the integrated controller and sliding groove column design make the structure compact and easy to maintain. Compared with the traditional rigid fixing method, it has a faster response and stronger adaptability under high-speed variable working conditions, and is especially suitable for high-precision vacuum scenarios. Attached Figure Description

[0015] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This is a schematic diagram of the bearing bracket in this utility model;

[0018] Figure 3 This is a schematic diagram of the controller in this utility model;

[0019] Figure 4 This is a schematic diagram of the sliding groove column in this utility model;

[0020] Figure 5 This is a schematic diagram of the structure of the electric push rod in this utility model;

[0021] In the diagram: 1. Bearing bracket; 2. Disc spring; 3. Connecting ring; 4. Rotary bearing; 5. Limiting ring; 6. Sliding column; 7. Fixing ring; 8. Protective cover; 9. Wiring pipe; 10. Controller; 11. Fixing plate; 12. Sliding groove column; 13. Support ring; 14. Electric push rod; 15. Mounting ring. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Example

[0024] Please see Figure 1-5 The present invention provides the following technical solution: a molecular pump bearing fixing structure, including a bearing frame 1, with butterfly springs 2 arranged above and below the bearing frame 1, a rotating bearing 4 fixedly connected to the inner wall of the bearing frame 1, a controller 10 and two sets of sliding groove columns 12 respectively arranged inside the bearing frame 1, an electric push rod 14 arranged inside each sliding groove column 12, and a sliding column 6 slidably connected inside each sliding groove column 12, with the ends of each set of sliding columns 6 close to each other fixedly connected to the telescopic end of the electric push rod 14, and the ends of the two sets of sliding columns 6 far from each other fixedly connected to the sides of the two butterfly springs 2 close to each other.

[0025] In this embodiment, the rotating bearing 4 is an angular contact ball bearing, which is a specially designed rolling bearing. The line connecting the contact points of its rolling elements and the inner and outer ring raceways forms a certain angle with the radial plane of the bearing. This design enables the bearing to bear both radial load and unidirectional axial load at the same time, and the rigidity and rotational accuracy can be improved by adjusting the preload.

[0026] Specifically, each of the two butterfly springs 2 has a connecting ring 3 fixedly connected to its opposite side. Each connecting ring 3 is made of nickel-based alloy. In this embodiment, the connecting ring 3 can fix the butterfly spring 2 to the inner top wall and inner bottom wall of the molecular pump bearing fixing cavity. At the same time, the connecting ring 3 is made of nickel-based alloy, which can improve the stability of the butterfly spring 2.

[0027] Specifically, a wiring conduit 9 is fixedly connected to the inner wall of the bearing bracket 1, and a protective cover 8 is snapped onto the top of the wiring conduit 9. In this embodiment, the wiring conduit 9 facilitates wiring, while the protective cover 8 provides protection when the wiring conduit 9 is not in use.

[0028] Specifically, a fixing plate 11 is fixedly connected to the back of the controller 10. The back of the fixing plate 11 is fixedly connected to the inner wall of the bearing bracket 1. In this embodiment, the controller 10 can be fixed by the fixing plate 11. At the same time, the controller 10 is a single-chip microcomputer control device, which is a microcomputer system that integrates a central processing unit, memory, input / output interface, timer / counter and other functional modules on a single chip. It can control external devices or systems through pre-written programs. It has the characteristics of small size, low cost, high reliability and customizable functions, and is widely used in industrial control, consumer electronics, smart home and automotive electronics.

[0029] Specifically, each sliding groove post 12 has a fixing ring 7 fixedly connected to its outer surface. The side of each set of fixing rings 7 that is close to each other is fixedly connected to the upper surface and the bottom surface of the bearing frame 1, respectively. In this embodiment, the fixing rings 7 can fix the sliding groove post 12 to the bearing frame 1, thereby improving the firmness of the sliding groove post 12.

[0030] Specifically, each set of sliding groove columns 12 has a support ring 13 fixedly connected to one end of each other. The outer surface of each support ring 13 is fixedly connected to the inner wall of the bearing frame 1. In this embodiment, the support ring 13 can support the sliding groove column 12 into the bearing frame 1, thereby enabling the sliding groove column 12 to be used stably.

[0031] Specifically, each support ring 13 has a mounting ring 15 fixedly connected to its upper and back surfaces. The inner wall of each mounting ring 15 is fixedly connected to the outer surface of the electric push rod 14. In this embodiment, the electric push rod 14 can be connected to the mounting ring 15 through the mounting ring 15, and the electric push rod 14 can extend and retract stably.

[0032] Specifically, the upper and lower surfaces of the outer ring of the rotating bearing 4 are fixedly connected to limit rings 5. The outer surface of each limit ring 5 is fixedly connected to the inner wall of the bearing frame 1. In this embodiment, the connection between the rotating bearing 4 and the bearing frame 1 can be limited and reinforced by the limit rings 5, thereby improving the stability of the equipment connection.

[0033] The working principle and usage process of this utility model are as follows: In use, the bearing bracket 1 is first fixed inside the molecular pump. The rotating bearing 4 is fixed to the inner wall of the bearing bracket 1 by the limiting ring 5. Its inner ring is interference-fitted with the rotating shaft of the molecular pump. Then, the two ends of the butterfly spring 2 are connected to the inner top wall and inner bottom wall of the bearing fixing cavity by the nickel-based alloy connecting ring 3, so that the butterfly spring 2 is pre-compressed to provide initial axial preload. When the molecular pump rotates at high speed, the controller 10 drives the electric push rod 14 to extend and retract according to the preset program, which drives the sliding column 6 to slide in the sliding groove column 12, dynamically adjusting the compression of the butterfly spring 2, thereby actively compensating for the possible axial displacement of the bearing. At the same time, the limiting ring 5 restricts the radial displacement. The linkage design of "electric push rod 14 + butterfly spring 2" is used to suppress the vibration of the bearing and extend the service life of the bearing and equipment.

[0034] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A molecular pump bearing fixing structure, characterized in that: The bearing includes a bearing frame (1), with butterfly springs (2) provided above and below the bearing frame (1). A rotating bearing (4) is fixedly connected to the inner wall of the bearing frame (1). A controller (10) and two sets of sliding groove columns (12) are respectively provided inside the bearing frame (1). An electric push rod (14) is provided inside each of the sliding groove columns (12). A sliding column (6) is slidably connected inside each of the sliding groove columns (12). The ends of each set of sliding columns (6) that are close to each other are fixedly connected to the telescopic end of the electric push rod (14). The ends of the two sets of sliding columns (6) that are far apart from each other are fixedly connected to the sides of the two butterfly springs (2) that are close to each other.

2. The molecular pump bearing fixing structure according to claim 1, characterized in that: Each of the two butterfly springs (2) has a connecting ring (3) fixedly connected to one side away from the other, and each connecting ring (3) is made of nickel-based alloy.

3. The molecular pump bearing fixing structure according to claim 1, characterized in that: The inner wall of the bearing bracket (1) is fixedly connected to a wiring pipe (9), and a protective cap (8) is snapped onto the top of the wiring pipe (9).

4. The molecular pump bearing fixing structure according to claim 1, characterized in that: A fixing plate (11) is fixedly connected to the back of the controller (10), and the back of the fixing plate (11) is fixedly connected to the inner wall of the bearing frame (1).

5. The molecular pump bearing fixing structure according to claim 1, characterized in that: Each of the sliding groove columns (12) has a fixed ring (7) fixedly connected to its outer surface. The side of each set of fixed rings (7) that are close to each other is fixedly connected to the upper surface and the bottom surface of the bearing frame (1).

6. The molecular pump bearing fixing structure according to claim 1, characterized in that: Each set of sliding groove columns (12) has a support ring (13) fixedly connected to one end of each other, and the outer surface of each support ring (13) is fixedly connected to the inner wall of the bearing frame (1).

7. The molecular pump bearing fixing structure according to claim 6, characterized in that: Each of the support rings (13) has a mounting ring (15) fixedly connected to its upper surface and back surface, and the inner wall of each mounting ring (15) is fixedly connected to the outer surface of the electric push rod (14).

8. The molecular pump bearing fixing structure according to claim 1, characterized in that: The upper and lower surfaces of the outer ring of the rotating bearing (4) are fixedly connected to limit rings (5), and the outer surface of each limit ring (5) is fixedly connected to the inner wall of the bearing frame (1).

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