Multi-axis optical measurement apparatus and integrated device

CN224339861UActive Publication Date: 2026-06-09BEIJING NORMAL UNIVERSITY
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Patent Information

Application Number
CN202520977671.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-05-16
Publication Date
2026-06-09
Estimated Expiration
2035-05-16

AI Technical Summary

Technical Problem

Existing optical measurement devices are insufficient in terms of measurement accuracy and spatial angle adjustment, making it difficult to meet the requirements of high-precision measurement.

Method used

A multi-axis optical measurement device is adopted, including an XYZ three-axis adjustment stage and adjustment mechanism, to realize the position and spatial angle adjustment of the detection element. Combined with fine adjustment and coarse adjustment functions, the measurement accuracy and angle adjustment flexibility are improved.

Benefits of technology

It achieves high-precision micro-displacement control and three-dimensional spatial attitude adjustment, adapting to test samples with various shapes and surface features, thus improving measurement accuracy and effectiveness.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a kind of multi-axis optical measuring device and integrated equipment.The multi-axis optical measuring device includes: base;Support frame, be located at base and be used to place measured sample;Measuring support, be located at base, measuring support includes XYZ three-axis adjustment platform and adjusting mechanism, adjusting mechanism is connected with the output execution end of XYZ three-axis adjustment platform;Detection element, install in the output execution end of adjusting mechanism and be used to monitor measured sample;Wherein, XYZ three-axis adjustment platform is used to adjust the position of detection element on X axis, Y axis and Z axis translation freedom respectively, and the adjustment on at least one translation freedom in X axis, Y axis and Z axis translation freedom includes fine adjustment, adjusting mechanism is used to adjust the space angle of detection element on at least one rotation freedom.The utility model multi-axis optical measuring device improves measurement precision and spatial measurement angle diversity, help to improve measurement convenience and accuracy.
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