Adjusting device and test head
By designing an adjustment device on the probe station test head, and utilizing a connecting plate and hinge assembly to achieve multi-directional position adjustment and flipping of the test head cabinet, the problems of low testing accuracy and efficiency in the existing technology are solved, and the stability and automation of probe connection are improved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- HANGZHOU GUANGLI TEST EQUIP CO LTD
- Filing Date
- 2025-07-21
- Publication Date
- 2026-06-09
AI Technical Summary
Existing probe station test heads have testing accuracy issues, and the connection between the test module and the test head requires manual operation and flipping, resulting in low efficiency.
Design an adjustment device including multiple connecting plates and fasteners, which is connected to the test head cabinet through a hinge assembly to achieve fine adjustment of the test head cabinet in the horizontal and vertical directions, and to achieve flipping through the hinge assembly to ensure accurate connection of the probe with the probe card on the platform.
It improves testing accuracy and efficiency, reduces manual operation, and enables automated position adjustment and flipping of the test head cabinet, ensuring the stability and accuracy of probe connection.
Smart Images
Figure CN224341632U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor technology, and in particular to a test head for a probe station. Background Technology
[0002] Wafer testing equipment includes a tester and a probe station (probe card). During measurement, the wafer is carried on a carrier disk inside the probe station. The wafer is connected to the probes on the probe card through the pads of the chip on the wafer. The probe station is equipped with a test head, which is stably connected to the tester through a cable. The test head is connected to the probes on the probe card by the contact of the spring pins on the test head and the probes on the probe card to complete the test path for parameter measurement.
[0003] In the prior art, a test head for a probe station (patent number: 201910096178.3) is disclosed, which realizes the closed and open states between the cover plate and the box body by rotating the shaft. First, the test head needs to be manually operated to rotate. Second, the test module (such as SMU, source measurement unit) is set in the cabinet on one side of the probe station and connected to the test head by cable. Due to the circuit distance, there is a problem with the test accuracy. Utility Model Content
[0004] This utility model is designed to solve all or part of the problems of the prior art. This utility model provides one such solution.
[0005] In a first aspect, this application provides an adjustment device, characterized in that it includes at least one set of adjustment components, each set of adjustment components being matched with one side of the test head cabinet to drive the position adjustment of the test head cabinet, the adjustment component including at least two connecting plates with overlapping areas; the two connecting plates in contact with each other are provided with fasteners in the overlapping areas, one of the connecting plates having a one-way through groove, the fastener passing through the one-way through groove and connecting to the other connecting plate; one of the connecting plates of the adjustment component is detachably fixed to one side of the test head cabinet.
[0006] In one embodiment, the at least two connecting plates with overlapping areas sequentially include a first connecting plate, a second connecting plate, and a third connecting plate. The first connecting plate is detachably connected to one side of the test head cabinet, and the third connecting plate is connected to the platform via a hinge assembly. The first connecting plate, the second connecting plate, the third connecting plate, and the hinge assembly are sequentially connected in pairs via fasteners and one-way through slots to achieve position adjustment of the test head cabinet in the horizontal and vertical directions.
[0007] In one embodiment, the connecting plate has a one-way through groove that is perpendicular to the direction of gravity of the test head cabinet, for adjusting the position of the test head cabinet in the horizontal direction.
[0008] In one embodiment, the third connecting plate has a unidirectional through groove with the same weight as the test cabinet, and the third connecting plate is provided with a lifting component to support the hinge assembly for adjusting the position of the test cabinet in the vertical direction.
[0009] In one embodiment, the connecting plate is provided with a driving member for driving it to translate along the opening direction of the unidirectional through slot.
[0010] In one embodiment, the drive element includes a mounting block disposed on a connecting plate and a long screw passing through the mounting block and connected to another connecting plate.
[0011] In one embodiment, two long screws are provided, one of which slides through the mounting block and is threadedly connected to another connecting plate, and the other long screw is threadedly connected to the mounting block and connected to another connecting plate.
[0012] Another object of the present invention is to provide a test head, including a platform, a test head cabinet, a hinge assembly, and an adjustment device. The adjustment device is rotatably mounted on the platform via the hinge assembly. The adjustment device is detachably connected to the test head cabinet to drive the test head cabinet to rotate and adjust its position. The adjustment device adopts the aforementioned adjustment device.
[0013] In one embodiment, the stage carries a probe card, and the test head cabinet is equipped with a needle tower via a base. The lower end of the spring needle of the needle tower is in contact with the probe on the probe card.
[0014] In one embodiment, an interface board is mounted on the upper end of the spring pin, and the interface board is connected to the test module inside the test cabinet via a dedicated cable.
[0015] This utility model provides an adjustment device and a test head, including a platform, a test head cabinet, a hinge assembly, and an adjustment device. The adjustment device is rotatably mounted on the platform via the hinge assembly. The adjustment device is detachably connected to the test head cabinet to drive the test head cabinet to rotate and adjust its position. By rotating the hinge assembly, the adjustment device and the test head cabinet rotate as a whole, realizing a closed and open state with respect to the platform. Furthermore, the adjustment device can achieve fine-tuning of the test head cabinet's position in the horizontal and vertical directions, allowing the probes on the test head cabinet to accurately connect with the probe clips on the platform. Attached Figure Description
[0016] To more clearly illustrate the technical solutions in the embodiments or related technologies of this application, the accompanying drawings used in the description of the embodiments or related technologies will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0017] Figure 1 A front view of the test head in one embodiment;
[0018] Figure 2 A cross-sectional view of a test head in one embodiment;
[0019] Figure 3 This is a schematic diagram of the structure of a test head in one embodiment. Detailed Implementation
[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0021] Example 1
[0022] An adjustment device includes at least one set of adjustment components, each set of adjustment components being coordinated with one side of a test head cabinet to drive the position adjustment of the test head cabinet. The adjustment components include at least two connecting plates with overlapping areas; the two contacting connecting plates are provided with fasteners in the overlapping areas, one of the connecting plates has a one-way through groove, and the fastener passes through the one-way through groove and connects to the other connecting plate; one of the connecting plates of the adjustment components is detachably fixed to one side of the test head cabinet.
[0023] Because the test head cabinet will be connected to the platform using non-fixed methods such as hinges, there may be installation errors. Therefore, this adjustment device is used to make fine adjustments to the horizontal and vertical positions of the test head cabinet. Specifically, multiple connecting plates are set up in the adjustment component. The connecting plates contact each other and form an overlapping area. With the help of fasteners and one-way slots, one of the connecting plates can be moved along the opening direction of the one-way slot, thus achieving the position adjustment of the test head cabinet. The setting of multiple connecting plates can achieve position adjustment in multiple directions.
[0024] In one embodiment, at least two connecting plates with overlapping areas sequentially include a first connecting plate, a second connecting plate, and a third connecting plate. The first connecting plate is detachably connected to one side of the test head cabinet, and the third connecting plate is connected to the platform via a hinge assembly. The first connecting plate, the second connecting plate, the third connecting plate, and the hinge assembly are sequentially connected in pairs via fasteners and one-way through slots to achieve position adjustment of the test head cabinet in the horizontal and vertical directions.
[0025] This embodiment achieves position adjustment in multiple directions (front, back, left, right, up, and down) through the cooperation of three connecting plates. For example, the first and second connecting plates are equipped with one-way slots and fasteners to achieve horizontal position adjustment in the left and right directions. The second and third connecting plates are equipped with one-way slots and fasteners to achieve horizontal position adjustment in the front and back directions. The third connecting plate is equipped with one-way slots and fasteners, and in conjunction with the hinge assembly, it achieves vertical position adjustment in the up and down directions.
[0026] In one embodiment, the connecting plate has a one-way through groove that is perpendicular to the direction of gravity of the test head cabinet, for adjusting the position of the test head cabinet in the horizontal direction.
[0027] In this embodiment, one-way through slots can be formed on the first connecting plate, the second connecting plate, and the third connecting plate. Even if the one-way through slots used in conjunction on the first connecting plate and the second connecting plate are formed on either the first connecting plate or the second connecting plate, if they are formed on the first connecting plate, the fastener passes through the first connecting plate and connects to the second connecting plate, and the fastener does not move with the first connecting plate. If they are formed on the second connecting plate, the fastener passes through the second connecting plate and connects to the first connecting plate, and the fastener does not move with the first connecting plate.
[0028] Specifically, when the test head cabinet is separated from the platform, the first connecting plate is installed on the front side of the test head cabinet. At this time, the first connecting plate receives the downward gravity of the test head cabinet. In order for the test head cabinet to be able to move in the horizontal direction, the opening direction of the one-way through groove is either the left-right horizontal direction or the front-back horizontal direction. Because the opening direction of the one-way through groove is perpendicular to the direction of gravity, the first connecting plate will not be displaced downward due to the overall downward gravity of the test head cabinet after the fasteners are loosened.
[0029] In one embodiment, the third connecting plate has a unidirectional through groove with the same weight as the test cabinet, and the third connecting plate is provided with a lifting component to support the hinge assembly for adjusting the position of the test cabinet in the vertical direction.
[0030] In this embodiment, during the engagement of the third connecting plate with the hinge assembly, a one-way through slot can be formed on the third connecting plate. After the fasteners are prevented from loosening by the support of the lifting component, the third connecting plate moves downward.
[0031] In one embodiment, the connecting plate is provided with a driving member for driving it to translate along the opening direction of the unidirectional through slot. The driving member may include a mounting block disposed on a connecting plate and a long screw passing through the mounting block and connected to another connecting plate. Two long screws are provided, one of which slides through the mounting block and is threadedly connected to the other connecting plate, and the other long screw is threadedly connected to the mounting block and connected to the other connecting plate.
[0032] For example, taking the cooperation between the first connecting plate and the second connecting plate as an example, assuming that the one-way through groove is opened on the second connecting plate, the driving component is installed on the first connecting plate.
[0033] It is worth noting that the lifting component can adopt a similar structure to the driving component, for example, consisting of a mounting block and a long screw.
[0034] Example 2
[0035] A test head includes a platform, a test head cabinet, a hinge assembly, and an adjustment device. The adjustment device is rotatably mounted on the platform via the hinge assembly. The adjustment device is detachably connected to the test head cabinet to drive the test head cabinet to rotate and adjust its position. The adjustment device is the aforementioned adjustment device.
[0036] Specifically, such as Figure 1 and Figure 2 As shown, the test head includes a test head cabinet 1 on the upper side and a platform 5 on the lower side. A needle tower 3 is installed at the bottom of the test head cabinet 1 via a base 2. A flexible hose 4 is also provided on one side of the test head cabinet 1, which is electrically connected to the cabinet of the test machine. The platform 5 carries a probe card 6. The lower end of the spring needle of the needle tower 3 makes contact with the probe on the probe card 6. An interface board (located inside the test head cabinet 1) is installed at the upper end of the spring needle. The interface board is connected to the test module inside the test machine cabinet 1 via a dedicated line.
[0037] like Figure 3 As shown, the test head cabinet 1 and the platform 5 are connected by a hinge assembly 9 and an adjustment device 8, enabling the test head cabinet 1 to rotate from 180° to 0°.
[0038] In addition, the test head cabinet is also equipped with an RFID reader / writer 7. The probe card 6 has a tag at the position corresponding to the RFID reader / writer 7. By reading the tag, the relevant information of the probe card can be obtained.
[0039] It is worth noting that the adjustment device is connected via a connecting plate. Figure 1 The front has eight screw holes for detachable fixing, and connection plates can be installed on both the front and rear sides of the test cabinet 1.
[0040] Example 3
[0041] Based on the content of Embodiments 1 and 2 above, this embodiment schematically shows a diagram of a test head, as shown in the figure.
[0042] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application.
Claims
1. An adjusting device, characterized in that, It includes at least one set of adjustment components, each set of adjustment components is matched with one side of the test head cabinet to drive the position adjustment of the test head cabinet. The adjustment component includes at least two connecting plates with overlapping areas; the two connecting plates that are in contact with each other are provided with fasteners in the overlapping areas, one of the connecting plates has a one-way through groove, and the fastener passes through the one-way through groove and is connected to the other connecting plate; one of the connecting plates of the adjustment component is detachably fixed to one side of the test head cabinet.
2. The adjusting device according to claim 1, characterized in that, The at least two connecting plates with overlapping areas include a first connecting plate, a second connecting plate, and a third connecting plate in sequence. The first connecting plate is detachably connected to one side of the test head cabinet. The third connecting plate is connected to the platform through a hinge assembly. The first connecting plate, the second connecting plate, the third connecting plate, and the hinge assembly are connected in pairs through fasteners and one-way through slots to achieve position adjustment of the test head cabinet in the horizontal and vertical directions.
3. The adjusting device according to claim 2, characterized in that, The connecting plate has a one-way through groove that is perpendicular to the direction of gravity of the test head cabinet, which is used to adjust the position of the test head cabinet in the horizontal direction.
4. The adjusting device according to claim 2, characterized in that, The third connecting plate has a unidirectional through groove with the same weight as the test cabinet, and the third connecting plate is equipped with a lifting component to support the hinge assembly for adjusting the position of the test cabinet in the vertical direction.
5. The adjusting device according to claim 3, characterized in that, The connecting plate is provided with a driving component for driving it to translate along the opening direction of the unidirectional through slot.
6. The adjusting device according to claim 5, characterized in that, The driving component includes a mounting block disposed on a connecting plate and a long screw passing through the mounting block and connected to another connecting plate.
7. The adjusting device according to claim 6, characterized in that, Two long screws are provided. One long screw slides through the mounting block and is threadedly connected to another connecting plate. The other long screw is threadedly connected to the mounting block and is also connected to another connecting plate.
8. A test head, characterized in that, The device includes a platform, a test head cabinet, a hinge assembly, and an adjustment device. The adjustment device is rotatably mounted on the platform via the hinge assembly. The adjustment device is detachably connected to the test head cabinet to drive the test head cabinet to rotate and adjust its position. The adjustment device is the adjustment device described in any one of claims 1-7.
9. The test head according to claim 8, characterized in that, The platform carries a probe card, and the test head cabinet is equipped with a needle tower via a base. The lower end of the spring needle of the needle tower is in contact with the probe on the probe card.
10. The test head according to claim 9, characterized in that, An interface board is installed at the upper end of the spring pin, and the interface board is connected to the test module inside the test cabinet via a dedicated cable.