Infrared heating tube and vacuum furnace
By designing a multi-segment infrared heating element and a reflective coating, the problem of uneven temperature on the heating plate of the vacuum furnace is solved, the heating uniformity and the service life of the heating tube are improved, and infrared radiation waste is reduced.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- ZHONGKE TONGQI SEMICON (JIANGSU) CO LTD
- Filing Date
- 2025-07-08
- Publication Date
- 2026-06-09
AI Technical Summary
The uneven temperature of the heating plate in existing vacuum furnaces leads to uneven heating, affecting product quality and potentially shortening the lifespan of the heating tubes, while also resulting in significant waste of infrared radiation.
It adopts a multi-segment infrared heating element and reflective coating design. By independently controlling the heating power and the setting of the reflective coating, the temperature uniformity of the heating plate is improved, the heat loss at the end is compensated, and the temperature difference between the edge and the center is reduced.
This improved the temperature uniformity of the vacuum furnace heating plate, reduced infrared radiation waste, and extended the service life of the heating tube.
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Figure CN224343391U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of vacuum furnace technology, and in particular to an infrared heating tube and a vacuum furnace. Background Technology
[0002] Existing vacuum welding equipment is a specialized device for welding workpieces. Its structure mainly includes a controller, a sealable cavity, a vacuum pump, a heating device, a heating plate, and a cooling device. The heating plate is located within the sealable cavity and is used to place the workpiece. The heating and cooling devices are located below the heating plate and are connected to the controller, which regulates the heating and cooling of the heating plate. The vacuum pump is located outside the sealable cavity and performs vacuuming to ensure the welding process is conducted in an oxygen-free environment, ensuring welding quality and reducing internal voids, thus improving the reliability of the weldment. Currently, commercially available infrared heaters consist of an outer sleeve and an internal heating element. The outer sleeve is often made of transparent quartz, while the internal heating element is often a halogen or carbon fiber heating element. These commonly used materials are all continuous heating elements, which can cause uneven heating, resulting in a higher temperature concentration in the middle of the heater and lower temperatures at both ends. This uneven heating affects the quality of the heated product and may also shorten the lifespan of the heating element, potentially causing safety issues. Furthermore, when using infrared heaters with transparent quartz sleeves, the infrared radiation generated by the heating element is emitted in all directions (360 degrees). However, during the heating process, we only need infrared radiation emitted towards the stage, resulting in wasted infrared radiation emitted in the opposite direction. This also causes heating of unnecessary components. Additionally, the heating plate of the vacuum furnace exhibits poor temperature uniformity. Summary of the Invention
[0003] This invention provides an infrared heating tube to solve the problem of poor temperature uniformity of the heating plate in the vacuum furnace in the prior art.
[0004] An infrared heating tube includes a vacuum chamber, multiple infrared heating elements, a power supply, electrodes, and multiple reflective coatings. The reflective coatings are disposed within the vacuum chamber, the infrared heating elements are disposed within the vacuum chamber, and the reflective coatings are disposed below the infrared heating elements. The infrared heating elements are symmetrically arranged, and the spacing between the heating wires of the infrared heating elements located in the center of the vacuum chamber is greater than the spacing between the heating wires of the infrared heating elements located on both sides of the vacuum chamber.
[0005] According to the infrared heating tube of this utility model, the infrared heating element is an independent infrared emitting element or an electrically connected infrared heating element.
[0006] According to the infrared heating tube of this utility model, the infrared heating element is an independent infrared emitting element, and the heating power of the independent infrared emitting element is controlled by a controller alone.
[0007] According to the infrared heating tube of this utility model, the reflective coating includes a half-gold plating layer and a half-white plating layer. The half-gold plating layers are symmetrically arranged and disposed on the outside of the vacuum cavity. The half-white plating layers are symmetrically arranged and disposed on the inside of the vacuum cavity.
[0008] According to the infrared heating tube of this utility model, the reflective coating is a high-temperature resistant reflective material.
[0009] According to the infrared heating tube of this utility model, the electrode is made of an electrode material with good electrical conductivity and low heating rate.
[0010] The infrared heating tube according to this utility model also includes a quartz sleeve, which is sleeved on the vacuum cavity.
[0011] A vacuum furnace includes an infrared heating tube as described in any of the above claims, wherein a plurality of the infrared heating tubes are disposed inside the vacuum furnace and are evenly and parallelly distributed below a heating plate.
[0012] The density of the first and third infrared emitters in this invention is higher than that of the second infrared emitter. This means that the heating power of the first and third infrared emitters is greater than that of the second infrared emitter, compensating for heat loss at the ends. The infrared heating tube radiates heat to the heating plate, improving the temperature uniformity of the vacuum furnace's heating plate. Multiple independent infrared emitters can actively compensate for heat loss at the edges of the heating plate, reducing the temperature difference between the edges and the center. Attached Figure Description
[0013] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0014] Figure 1 This is a schematic diagram of the front view structure of the infrared heating tube in the first embodiment;
[0015] Figure 2 This is a schematic diagram of the front view structure of the infrared heating tube in the second embodiment;
[0016] Figure 3 This is a schematic diagram of the structure of a vacuum furnace;
[0017] Figure 4This is a magnified view of the structure of part A;
[0018] Reference numerals: 1. Power supply; 2. Electrode; 4. Reflective coating; 5. Quartz sleeve; 6. Vacuum chamber; 31. Direct irradiation line of infrared heating wire; 32. Reflective line of reflective coating; 7. First infrared emitter; 8. Second infrared emitter; 9. Third infrared emitter; 10. First independent infrared emitter; 20. Second independent infrared emitter; 30. Third independent infrared emitter. Detailed Implementation
[0019] The embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and should not be construed as limiting the scope of this utility model.
[0020] In the description of the embodiments of this utility model, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this utility model. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0021] In the description of the embodiments of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this utility model based on the specific circumstances.
[0022] In this embodiment of the utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.
[0023] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.
[0024] The following is combined Figure 1-4 An infrared heating tube according to an embodiment of the present invention includes a vacuum cavity 6, multiple infrared heating elements, a power supply 1, electrodes 2, and multiple reflective coatings 4. The multiple infrared heating elements preferably consist of a first infrared emitter 7, a second infrared emitter 8, and a third infrared emitter 9. The reflective coatings 4 are disposed within the vacuum cavity 6. The infrared heating elements are disposed within the vacuum cavity 6, and the reflective coatings 4 are disposed below the infrared heating elements. The infrared heating elements are symmetrically arranged, and the spacing between the heating wires of the infrared heating elements located in the center of the vacuum cavity is greater than the spacing between the heating wires of the infrared heating elements located on both sides of the vacuum cavity. That is, the heating wires of the first infrared emitter 7 and the third infrared emitter 9 are denser than those of the second infrared emitter 8. The infrared heating elements generate direct infrared irradiation lines 31, which are reflected by the reflective coatings 4 to produce reflective lines 32.
[0025] In some embodiments, the infrared heating element is an independent infrared emitter or an electrically connected infrared heating element.
[0026] In some embodiments, the infrared heating element is an independent infrared emitter, and the heating power of each independent infrared emitter is controlled by a controller individually. That is, the independent infrared emitters are preferably a first independent infrared emitter 10, a second independent infrared emitter 20, and a third independent infrared emitter 30. The heating power of each of the first independent infrared emitter 10, the second independent infrared emitter 20, and the third independent infrared emitter 30 is controlled by a controller individually to achieve high temperature uniformity.
[0027] In some embodiments, the reflective coating 4 includes a half-gold plating layer and a half-white plating layer. The half-gold plating layers are symmetrically arranged and disposed on the outside of the vacuum cavity. The half-white plating layers are symmetrically arranged and disposed on the inside of the vacuum cavity.
[0028] In some embodiments, the reflective coating 4 is a high-temperature resistant reflective material.
[0029] In some embodiments, electrode 2 is made of an electrode material with good electrical conductivity and low heat generation rate.
[0030] In some embodiments, a quartz sleeve 5 is also included, which is sleeved on the vacuum chamber 6.
[0031] A vacuum furnace includes the aforementioned infrared heating tubes. Multiple infrared heating tubes are arranged inside the vacuum furnace, uniformly and parallelly distributed below a heating plate. Vacuum furnace equipment typically uses multiple sets of parallel infrared heaters as a heating mechanism to heat the workpiece. The temperature of these multiple sets of infrared heaters often concentrates from the periphery inwards, resulting in a higher temperature at the center.
[0032] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.
Claims
1. An infrared heating tube, characterized in that, It includes a vacuum cavity, multiple infrared heating elements, a power supply, electrodes, and multiple reflective coatings; the reflective coatings are disposed inside the vacuum cavity, the infrared heating elements are disposed inside the vacuum cavity, the reflective coatings are disposed below the infrared heating elements, the infrared heating elements are symmetrically arranged, and the spacing between the heating wires of the infrared heating elements located in the middle of the vacuum cavity is greater than the spacing between the heating wires of the infrared heating elements located on both sides of the vacuum cavity.
2. The infrared heating tube according to claim 1, characterized in that, The infrared heating element is either an independent infrared emitter or an electrically connected infrared heating element.
3. The infrared heating tube according to claim 2, characterized in that, If the infrared heating element is an independent infrared emitting element, then the heating power of the independent infrared emitting element is controlled separately by the controller.
4. The infrared heating tube according to claim 1, characterized in that, The reflective coating includes a half-gold plating layer and a half-white plating layer. The half-gold plating layers are symmetrically arranged and are disposed on the outside of the vacuum cavity. The half-white plating layers are symmetrically arranged and are disposed on the inside of the vacuum cavity.
5. The infrared heating tube according to claim 1, characterized in that, The reflective coating is made of a high-temperature resistant reflective material.
6. The infrared heating tube according to claim 1, characterized in that, The electrode is made of an electrode material with good electrical conductivity and low heat generation rate.
7. The infrared heating tube according to claim 1, characterized in that, It also includes a quartz sleeve, which is fitted onto the vacuum chamber.
8. A vacuum furnace, characterized in that, The vacuum furnace includes an infrared heating tube as described in any one of claims 1 to 7, wherein a plurality of the infrared heating tubes are provided inside the vacuum furnace, and the infrared heating tubes are evenly and parallelly distributed below the heating plate.