Temperature control device for semiconductor production

By using infrared temperature sensors to monitor and automatically clean components, the problem of blocked heat dissipation holes has been solved, enabling efficient heat dissipation and automated cleaning of temperature control equipment used in semiconductor production, thus ensuring the stability of equipment temperature.

CN224343547UActive Publication Date: 2026-06-09PINHONG TECH (ZHUHAI) CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
PINHONG TECH (ZHUHAI) CO LTD
Filing Date
2025-07-21
Publication Date
2026-06-09

Smart Images

  • Figure CN224343547U_ABST
    Figure CN224343547U_ABST
Patent Text Reader

Abstract

This utility model relates to a temperature control device for semiconductor production, belonging to the technical field of temperature control equipment. It includes an installation box with an infrared temperature sensor inside. A placement box containing coolant is located on one side of the installation box, and a semiconductor cooling rod is located inside the placement box. A vacuum cleaner is mounted on the upper surface of the installation box, and a heat-dissipating cleaning component is connected to the vacuum cleaner. A blower is located on one side of the installation box and below the placement box. A cooling component is located on the inner wall of the installation box, and a control panel is located on the surface of the installation box. This utility model uses the cooling component, the semiconductor cooling rod, and the blower to push air through a threaded tube, extending the time the air stays inside the placement box and improving the cooling efficiency. The blower head delivers cold air into the installation box, effectively reducing the internal temperature. Through the cleaning component and the vacuum cleaner, the cooling fan drives the cleaning brush to rotate and clean dust. The suction power of the vacuum head removes accumulated dust from the heat dissipation holes, preventing blockage and affecting heat dissipation efficiency.
Need to check novelty before this filing date? Find Prior Art