Cooling electrode assembly, heating device and semiconductor process equipment

Abstract

The utility model belongs to the technical field of semiconductor process equipment, disclose a kind of cooling electrode assembly, heating device and semiconductor process equipment, cooling electrode assembly includes cooling jacket, first electrode, fixed seat and second electrode, cooling jacket has first cooling cavity, cooling jacket is also provided with the first inlet and first outlet of intercommunication first cooling cavity, first electrode is fixed in the first end of cooling jacket, first electrode has insertion cavity, first electrode is used to connect external power supply, fixed seat is fixed in the second end of cooling jacket, the first end of second electrode is threaded fixed seat, and is inserted in the insertion cavity of first electrode, the outer wall of the first end of second electrode and the inner wall in insertion cavity one is provided with insertion protrusion, another is provided with the insertion slot matched with insertion protrusion;Heating device includes at least one group of above-mentioned cooling electrode assembly, and semiconductor process equipment uses above-mentioned heating device, to improve the firmness between first electrode and second electrode.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor process equipment technology, and in particular to a cooling electrode assembly, a heating device, and semiconductor process equipment. Background Technology

[0002] In existing high-temperature vacuum furnaces, the furnace body is a vacuum-sealed environment, and the temperature inside the furnace can exceed 1000 degrees Celsius. The cooling electrode assembly is a key connecting component between the heating element inside the furnace and the external power supply. The cooling electrode assembly generally includes a cooling jacket, a first electrode, and a second electrode. One end of the cooling jacket is fixedly connected to the first electrode of the external power supply, and the other end is provided with a cooling jacket mounting base. The first end of the second electrode passes through the cooling jacket and the cooling jacket mounting base and is connected to the first electrode by bolts. The second end of the second electrode is connected to the heating element inside the furnace. Currently, existing technologies have high requirements for the performance of the above-mentioned cooling electrode assembly. For example, the sealing performance needs to meet the requirements of waterproofing and leakage; the insulation performance needs to meet the requirements of preventing short circuits between conductive parts; and the firmness performance needs to meet the requirements of being firmly fixed between the electrodes. However, in existing technologies, in order to facilitate the connection between the first electrode and the second electrode, bolts are used to connect them. In some cases, due to the relative rotation of the first electrode and the second electrode, the connection between them is unstable, which affects the temperature inside the furnace and results in low product quality. Utility Model Content

[0003] The purpose of this invention is to provide a cooling electrode assembly, a heating device, and a semiconductor process equipment, which improves the robustness between the first electrode and the second electrode.

[0004] To achieve this objective, the present invention adopts the following technical solution:

[0005] Cooling electrode assembly, comprising:

[0006] A cooling jacket, the cooling jacket having a first cooling cavity, and the cooling jacket further having a first inlet and a first outlet communicating with the first cooling cavity;

[0007] A first electrode is fixed to the first end of the cooling sleeve. The first electrode is insulated from the cooling sleeve. The first electrode is provided with a plug-in cavity and is used to connect to an external power source.

[0008] A mounting base is fixed to the second end of the cooling jacket, and the mounting base is configured to be fixed to an external device;

[0009] The second electrode passes through the fixed base, and its first end is inserted into the insertion cavity. One of the outer wall of the first end of the second electrode and the inner wall of the insertion cavity is provided with an insertion protrusion, and the other is provided with an insertion groove that engages with the insertion protrusion. The insertion protrusion is inserted into the insertion groove to restrict the relative rotation of the first electrode and the second electrode.

[0010] In some embodiments, the insertion protrusion is disposed on the inner wall of the insertion cavity, the insertion groove is disposed on the outer wall of the first end of the second electrode, and the insertion groove passes through the first end of the second electrode along the axial direction of the second electrode.

[0011] In some embodiments, the opening of the insertion cavity is provided with a guide ramp, which is configured to guide the first end of the second electrode to move into the insertion cavity.

[0012] In some embodiments, a guide protrusion is provided on the guide slope, and the guide protrusion is disposed opposite to the insertion protrusion so that the second electrode can be guided to the insertion protrusion through the guide protrusion.

[0013] In some embodiments, the first end of the cooling sleeve is provided with a first insulating ring, a second insulating ring and a first sealing ring, the first sealing ring being sandwiched between the outer ring of the first insulating ring and the inner ring of the second insulating ring, and the first electrode pressing against the cooling sleeve pressing against the first insulating ring, the second insulating ring and the first sealing ring.

[0014] In some embodiments, a third sealing ring is provided between the fixing base and the cooling sleeve.

[0015] A heating device is also provided, the heating device comprising:

[0016] At least one set of the above-mentioned cooling electrode assembly;

[0017] The third electrode is provided in a one-to-one correspondence with the cooling electrode assembly. The first end of the third electrode is connected to the second end of the second electrode, and the second end of the third electrode is connected to the heating element.

[0018] In some embodiments, a fixing groove is provided on one of the second end of the second electrode and the first end of the third electrode, and the other of the second end of the second electrode and the first end of the third electrode is inserted into the fixing groove. The second end of the second electrode and the first end of the third electrode are fixed by a locking member.

[0019] In some embodiments, the second end of the second electrode or the first end of the third electrode is provided with two opposing clips, and the second end of the second electrode or the first end of the third electrode is also provided with a slit, the slit extending from the bottom of the fixing groove along the axial direction of the second electrode or the third electrode away from the fixing groove, the slit being disposed between the two clips.

[0020] In some embodiments, the heating device further includes a mounting cover, a second cooling chamber is provided inside the mounting cover, and a second inlet and a second outlet communicating with the second cooling chamber are also provided on the mounting cover;

[0021] The mounting cover is provided with a through electrode mounting hole, and the third electrode passes through the electrode mounting hole so that the first electrode and the heating element are located on opposite sides of the mounting cover, and the fixing base is fixed to the mounting cover.

[0022] In some embodiments, the heating device is further provided with a first temperature monitoring element for monitoring the temperature of the coolant in the first cooling chamber; and / or, the heating device is further provided with a second temperature monitoring element for monitoring the temperature of the coolant in the second cooling chamber; and / or, the heating device is further provided with a third temperature monitoring element, the monitoring end of which is located on the side of the mounting cover facing the heating element.

[0023] In some embodiments, an insulating cylinder is sleeved on the outside of the third electrode, and a low thermal conductivity element is provided on the side of the mounting cover facing the heating element, the low thermal conductivity element surrounding the outside of the insulating cylinder.

[0024] In some embodiments, a boss is provided on the side of the low thermal conductivity element facing the heating element. The boss is provided with a plurality of avoidance grooves distributed along its circumference. A portion of the electrode mounting holes are correspondingly disposed in the avoidance grooves, and another portion of the electrode mounting holes penetrate the boss.

[0025] In some embodiments, the mounting cover includes a support disk and a support cover plate. The upper end surface of the support disk is provided with an inner groove. The support cover plate covers the groove of the inner groove to form a second cooling cavity. The electrode mounting hole passes through the support disk and the support cover plate. The fixing seat is fixed in the electrode mounting hole. The second inlet and the second outlet are located on the support cover plate.

[0026] In some embodiments, the electrode mounting holes are arranged in a spiral pattern radiating outward from the center of the support disk. The bottom of the inner groove is also provided with a rib, which connects to the adjacent fixing seat to form a spiral flow channel in the second cooling cavity. The lower end face of the support disk is also provided with a water inlet groove. The opening of the water inlet groove is closed with a water inlet cover plate. The bottom of the inner groove is provided with a water inlet, which is located at the spiral center of the flow channel. One end of the water inlet groove is connected to the water inlet. The other end of the water inlet groove is connected to a second inlet located on the upper end face of the support disk. The second outlet is connected to the spiral outlet of the flow channel.

[0027] A semiconductor process apparatus is also provided, which includes a reaction chamber and the heating device described above, wherein the heating element is disposed within the reaction chamber.

[0028] The beneficial effects of this utility model are:

[0029] When fixing the second electrode, the insertion protrusion at the first end of the second electrode is inserted into the insertion groove. This allows the connection between the first electrode and the second electrode to be limited by the insertion protrusion and the insertion groove. The insertion protrusion embedded in the insertion groove can also prevent relative rotation between the first electrode and the second electrode, thereby making the connection between the two more stable, ensuring the firmness between them, and minimizing the impact of loosening on the heating effect. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of the cooling electrode assembly connected to the heating element of this utility model;

[0031] Figure 2 yes Figure 1 Cross-sectional view;

[0032] Figure 3 yes Figure 2 Enlarged view of point A in the middle;

[0033] Figure 4 yes Figure 1 Exploded view;

[0034] Figure 5 This is a perspective view of the first electrode in this utility model;

[0035] Figure 6 This is a front view of the first electrode in this utility model.

[0036] Figure 7 yes Figure 6 Cross-sectional view along the SS direction;

[0037] Figure 8 This is a perspective view of the second electrode in this utility model;

[0038] Figure 9This is a schematic diagram of the heating device in this utility model from one perspective;

[0039] Figure 10 This is a schematic diagram of the heating device in this utility model from another perspective;

[0040] Figure 11 This is a bottom view of the heating device in this utility model;

[0041] Figure 12 This is a top view of the heating device in this utility model;

[0042] Figure 13 This is a schematic diagram of the third electrode connected to the heating element in this utility model;

[0043] Figure 14 This is a schematic diagram of the mounting cover without the supporting cover plate in this utility model;

[0044] Figure 15 yes Figure 14 PP cross section

[0045] Figure 16 This is a schematic diagram of the water inlet cover plate of the present invention.

[0046] In the picture:

[0047] 100. Cooling electrode assembly;

[0048] 1. Cooling jacket; 11. First cooling chamber; 12. First inlet; 13. First outlet; 2. First electrode; 21. Insertion cavity; 22. Insertion protrusion; 23. Guide slope; 24. Guide protrusion; 25. Mounting hole; 26. First stop; 3. Fixing base; 4. Second electrode; 41. Insertion groove; 42. Fixing groove; 43. Slit; 44. Clip; 5. First insulating ring; 6. Second insulating ring; 7. First sealing ring; 8. Insulating sleeve; 9. Second sealing ring; 10. Sealing plate; 101. Third insulating ring; 1011. Second stop; 102. Fixing plate; 103. First temperature monitoring component; 104. Fixed connector; 105. Third sealing ring;

[0049] 200, Third electrode; 300, Heating element; 301, Mounting plane; 400, Insulating cylinder; 500, Mounting cover; 501, Second inlet; 502, Second outlet; 503, Support plate; 504, Support cover plate; 505, Inner groove; 506, Water inlet groove; 507, Water inlet cover plate; 508, Water inlet; 509, Rib; 600, Second temperature monitoring element; 700, Temperature monitoring hole; 800, Low thermal conductivity element; 801, Boss; 802, Avoidance groove; 900, Connector; 901, Connecting plane. Detailed Implementation

[0050] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0051] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0052] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0053] In the description of this embodiment, the terms "upper," "lower," "left," and "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0054] like Figures 1 to 16As shown, this application provides a cooling electrode assembly 100, which includes a cooling sleeve 1, a first electrode 2, a fixing base 3 and a second electrode 4. The cooling sleeve 1 has a first cooling chamber 11. The cooling sleeve 1 is also provided with a first inlet 12 and a first outlet 13 communicating with the first cooling chamber 11, so as to circulate coolant in the first cooling chamber 11 through the first inlet 12 and the first outlet 13. The coolant here is not specifically limited and can be, but is not limited to, water. The first electrode 2 is fixed to the first end of the cooling sleeve 1, and the first electrode 2 is insulated from the cooling sleeve 1. The first electrode 2 has a insertion cavity 21 and is used to connect to an external power source. The fixing seat 3 is fixed to the second end of the cooling sleeve 1, and the cooling sleeve 1 is fixed to an external device such as a mounting cover 500 through the fixing seat 3. The second electrode 4 passes through the fixing seat 3, and the first end of the second electrode 4 is inserted into the insertion cavity 21 of the first electrode 2. One of the outer wall of the first end of the second electrode 4 and the inner wall of the insertion cavity 21 is provided with an insertion protrusion 22, and the other is provided with an insertion groove 41 that mates with the insertion protrusion 22. The insertion protrusion 22 is inserted into the insertion groove 41 to restrict the relative rotation of the first electrode 2 and the second electrode 4.

[0055] When fixing the second electrode 4, the insertion protrusion 22 at the first end of the second electrode 4 is inserted into the insertion groove 41. The insertion protrusion 22 and the insertion groove 41 limit the connection between the first electrode 2 and the second electrode 4. The insertion protrusion 22 embedded in the insertion groove 41 can also prevent relative rotation between the first electrode 2 and the second electrode 4, thereby making the connection between the two more stable, ensuring the firmness between the two, and minimizing the impact of loosening on the heating effect of the heating element connected through the second electrode 4.

[0056] like Figure 4 As shown, in some embodiments, the end of the first electrode 2 facing away from the cooling sleeve 1 is provided with a mounting hole 25, which connects to the insertion cavity 21. The first end of the second electrode 4 is also provided with a threaded hole, and the fixing connector 104 is screwed into the threaded hole through the mounting hole 25. Exemplarily, the fixing connector 104 is a connecting bolt. That is, in this application, on the one hand, the first electrode 2 and the second electrode 4 are connected by the fixing connector 104; on the other hand, the first electrode 2 and the second electrode 4 are further restricted by the cooperation of the insertion protrusion 22 and the insertion groove 41, thereby ensuring the stability of the connection between the two. Exemplarily, the mounting hole 25 is a countersunk hole. In order to ensure sealing, the end face of the first electrode 2 facing away from the cooling sleeve 1 is also provided with a groove, which surrounds the mounting hole 25. The groove is provided with a second sealing ring 9, and the end face of the first electrode 2 facing away from the cooling sleeve 1 is also covered with a sealing plate 10. The sealing plate 10 and the first electrode 2 can be connected by, but is not limited to, bolts or welding. Thus, the sealing plate 10 and the second sealing ring 9 seal the mounting hole 25, ensuring a tight seal.

[0057] like Figure 5 and Figure 7 As shown, in some embodiments, the insertion protrusion 22 is disposed on the inner wall of the insertion cavity 21, and the insertion groove 41 is disposed on the outer wall of the first end of the second electrode 4, and the insertion groove 41 penetrates through the first end of the second electrode 4 along the axial direction of the second electrode 4, so that the second electrode 4 can be directly inserted into the cavity 21 during installation, which is convenient for disassembly and installation. Furthermore, two insertion protrusions 22 are disposed opposite each other on the inner wall of the insertion cavity 21, and two insertion grooves 41 are also disposed opposite each other on the second electrode 4, further ensuring stable connection.

[0058] To facilitate the insertion of the second electrode 4 into the first electrode 2, a guide slope 23 is provided at the opening of the insertion cavity 21. The guide slope 23 guides the first end of the second electrode 4 into the insertion cavity 21. The guide slope 23 surrounds the opening of the insertion cavity 21. In the current embodiment, the diameter of the opening of the insertion cavity 21 gradually increases from one end of the mounting hole 25 towards the end closer to the second electrode 4, making the opening of the insertion cavity 21 a flared shape. To further facilitate the alignment of the insertion protrusion 22 with the insertion groove 41 and avoid multiple adjustments, a guide protrusion 24 is also provided on the guide slope 23. The guide protrusion 24 is positioned opposite the insertion protrusion 22, and the two transition smoothly. Thus, when the insertion groove 41 is aligned with the guide protrusion 24, the second electrode 4 can be directly pushed to guide it to the insertion protrusion 22, allowing the insertion protrusion 22 to enter the insertion groove 41.

[0059] like Figures 2 to 4 As shown, after the second electrode 4 is inserted into the cooling sleeve 1, in order to ensure insulation, the second electrode 4 is isolated from the cooling sleeve 1. An insulating sleeve 8 is also provided on the outside of the second electrode 4, and the insulating sleeve 8 abuts against the first electrode 2.

[0060] like Figures 2 to 4 As shown, to ensure insulation and sealing between the first electrode 2 and the cooling sleeve 1, the first end of the cooling sleeve 1 is provided with a first insulating ring 5, a second insulating ring 6, and a first sealing ring 7. The first sealing ring 7 is sandwiched between the outer ring of the first insulating ring 5 and the inner ring of the second insulating ring 6. The first insulating ring 5 is sleeved on the outside of the insulating sleeve 8. The first electrode 2 and the cooling sleeve 1 press the first insulating ring 5, the second insulating ring 6, and the first sealing ring 7 together. The first insulating ring 5 and the second insulating ring 6 ensure insulation between the first electrode 2 and the cooling sleeve 1, while the first sealing ring 7 ensures sealing between the cooling sleeve 1 and the first electrode 2. By placing the first sealing ring 7 between the first insulating ring 5 and the second insulating ring 6, the risk of the first sealing ring 7 undergoing plastic deformation due to excessive compression can be reduced, thus avoiding sealing failure due to deformation. For example, the first insulating ring 5 and the second insulating ring 6 can be, but are not limited to, made of ceramic or Teflon.

[0061] To ensure the stable fixation between the first electrode 2 and the cooling sleeve 1, such as Figure 3 and Figure 4 As shown, a first stop portion 26 is circumferentially provided on the outer wall of the first electrode 2, and a third insulating ring 101 is sleeved on the outer side of the first electrode 2, abutting against the first stop portion 26. A second stop portion 1011 is circumferentially provided on the outer wall of the third insulating ring 101. A fixing plate 102 is also sleeved on the outer side of the first electrode 2, and the fixing plate 102 abuts against the second stop portion 1011. The fixing plate 102 and the cooling sleeve 1 are provided with corresponding fixing holes. Bolts are used to fix the fixing plate 102 and the cooling sleeve 1 through the fixing holes, thereby pressing the first insulating ring 5, the second insulating ring 6, and the first sealing ring 7. Exemplarily, the first insulating ring 5 may be, but is not limited to, a ceramic ring.

[0062] like Figure 4 As shown, in some embodiments, a first temperature monitoring element 103 is also provided on the cooling jacket 1. The first temperature monitoring element 103 is used to monitor the temperature of the coolant in the first cooling chamber 11, thereby monitoring the temperature change in the first cooling chamber 11 and adjusting the coolant flow rate according to the temperature feedback. In the current embodiment, the monitoring end of the first temperature monitoring element 103 is placed on the outer wall of the cooling jacket 1, so as to monitor the temperature change of the coolant in the first cooling chamber 11 by the change of the outer wall of the cooling jacket 1; in other embodiments, the monitoring end of the first temperature monitoring element 103 can also be placed directly in the first cooling chamber 11. In order to ensure the seal between the fixing seat 3 and the cooling jacket 1, a third sealing ring 105 is clamped between the fixing seat 3 and the cooling jacket 1. The fixing seat 3 and the cooling jacket 1 can be fixed with bolts, which facilitates disassembly and assembly. The first temperature monitoring element 103 can be, but is not limited to, a temperature sensor.

[0063] like Figures 9 to 13As shown, this application also provides a heating device, which includes at least one set of the above-mentioned cooling electrode assembly 100. Each cooling electrode assembly 100 is provided with a third electrode 200 corresponding to each other. The first end of the third electrode 200 is connected to the second end of the second electrode 4, and the second end of the third electrode 200 is connected to the heating element 300, so that the heating element 300 can be placed in the reaction chamber for heating. The heating element 300 is generally made of graphite material. Since the first electrode 2 is an external electrode located outside the reaction chamber, the path of the second electrode 4 is relatively long. If the second electrode 4 is a long graphite electrode, it is prone to breakage. In order to avoid the above risk, the second electrode 4 is connected to the third electrode 200 for transfer. In this embodiment, the third electrode 200 is a graphite electrode, while the second electrode 4 is a molybdenum electrode. The graphite electrode and the molybdenum electrode have complementary properties at high temperatures, which improves heating efficiency and temperature uniformity. Moreover, the use of a molybdenum electrode for the second electrode 4 also improves the overall strength. Since the second electrode 4 is a molybdenum electrode, the fixing connector 104 that secures the first electrode 2 and the second electrode 4 is made of molybdenum bolts, ensuring that both are made of the same material and preventing them from melting due to excessive temperature caused by arcing. If the fixing connector 104 were made of stainless steel, the high-temperature mechanical strength of stainless steel would be lower than that of molybdenum. When the local contact area between the first electrode 2 and the second electrode 4 decreases, leading to a significant increase in current density at the connection point, the temperature of the fixing connector 104 would rise sharply. At high temperatures, the tensile strength of stainless steel would rapidly decrease, quickly reaching near zero, leading to breakage. Molybdenum bolts, however, maintain higher strength than stainless steel bolts under the same operating conditions, preventing breakage. Therefore, molybdenum bolts are chosen. In this embodiment, the first electrode 2 is a copper electrode. It is understood that molybdenum is easily oxidized at high temperatures to form molybdenum trioxide. The sealing plate 10 and the second sealing ring 9 seal the mounting hole 25, thereby reducing the entry of oxygen into the fixing connector 104, slowing down the oxidation process of the fixing connector 104, and ensuring a stable connection.

[0064] like Figure 4 and Figure 8As shown, in some embodiments, a fixing groove 42 is provided on one of the second end of the second electrode 4 and the first end of the third electrode 200, and the other of the second end of the second electrode 4 and the first end of the third electrode 200 is inserted into the fixing groove 42. Taking the fixing groove 42 being provided on the second end of the second electrode 4 as an example, the fixing groove 42 extends axially from the second end of the second electrode 4, and a first through hole is provided on the groove wall of the fixing groove 42. The first end of the third electrode 200 is inserted into the fixing groove 42, and a second through hole corresponding to the first through hole is provided on the first end of the third electrode 200. A locking member passes through the first through hole and the second through hole to lock the second electrode 4 and the third electrode 200. The locking member can be, but is not limited to, a bolt. It is understood that the bolt can be used in conjunction with a nut to reduce the occurrence of poor contact. Specifically, the second end of the second electrode 4 has two clamping pieces 44, which are disposed opposite to each other on the end face of the second end of the second electrode 4. The space held by the two clamping pieces 44 is the aforementioned fixing groove 42, the end face of the second end of the second electrode 4 is the bottom of the groove, and the two clamping pieces 44 are the groove walls. A first through hole is disposed on the two clamping pieces 44. Therefore, when the first end of the third electrode 200 is inserted between the two clamping pieces 44, the two clamping pieces 44 can undergo a certain deformation, resulting in a larger contact area with the third electrode 200 and allowing the two clamping pieces 44 to more stably fix the third electrode 200. To further increase the contact area, the second electrode 4 is also provided with a slit 43. The slit 43 extends from the bottom of the fixing groove 42 along the axial direction of the second electrode 4 in a direction away from the fixing groove 42, and the slit 43 is located between the two clamping pieces 44. In the current embodiment, the fixing groove 42 and the slit 43 are located on the second electrode 4. The presence of the fixing groove 42 and the slit 43 on the molybdenum electrode ensures stability. In other words, in the current embodiment, the aforementioned fixing groove 42 and slit 43 are provided on the second electrode 4 to minimize the need to create the same fixing groove 42 and slit 43 on the third electrode 200 (graphite electrode). This is because graphite is relatively brittle, and as a powder-sintered material, its ductility is lower than that of molybdenum. Consequently, when the second electrode 4 is inserted into the fixing groove 42, the stress deformation during the clamping process of the third electrode 200 can easily damage the third electrode 200, causing clamping failure. Using the second electrode 4 to clamp the third electrode 200 effectively avoids both of these issues. Figure 9As shown, in some embodiments, the heating device further includes a mounting cover 500, which has a second cooling chamber. The mounting cover 500 is also provided with a second inlet 501 and a second outlet 502 communicating with the second cooling chamber, so that coolant is circulated into the second cooling chamber through the second inlet 501 and the second outlet 502 to cool the mounting cover 500. The mounting cover 500 is also provided with a plurality of electrode mounting holes, and the cooling electrode assembly 100 is provided in a one-to-one correspondence with the through holes. The third electrode 200 passes through the electrode mounting holes, so that the heating element 300 connected to the first electrode 2 and the third electrode 200 is located on both sides of the mounting cover 500, and the fixing seat 3 is fixed to the mounting cover 500. The fixing seat 3 can be connected to the mounting cover 500 by means of welding, etc., so that the heating element 300 can be placed in the reaction chamber for heating by covering the reaction chamber with the mounting cover 500.

[0065] like Figures 14 to 16 As shown, specifically, the mounting cover 500 includes a support plate 503 and a support cover plate 504. The upper end surface of the support plate 503 is provided with an inner groove 505. The support cover plate 504 covers the groove of the inner groove 505 to form the aforementioned second cooling chamber. Electrode mounting holes pass through the support plate 503 and the support cover plate 504, and the fixing seat 3 is welded and fixed in the electrode mounting holes. The second inlet 501 and the second outlet 502 are located on the support cover plate 504 to connect with the second cooling chamber. Further, the electrode mounting holes are arranged in a spiral pattern radiating outward from the center of the support plate 503 on the support plate 503. The bottom of the inner groove 505 is also provided with a rib 509, which connects to the adjacent fixing seat 3 to form a spiral flow channel in the second cooling chamber. In addition, the bottom of the inner groove 505 is provided with a water inlet 508, which is located at the spiral center of the flow channel. In the current embodiment, the second inlet 501 and the second outlet 502 are located at the edge of the support plate 503, thereby reducing interference between the pipes connecting them and the cooling electrode assembly 100. To further extend the coolant flow time, the lower end face of the support plate 503 is also provided with a water inlet groove 506. The opening of the water inlet groove 506 is sealed with a water inlet cover 507 to form a water inlet channel. One end of the water inlet channel is connected to the second inlet 501, and the other end is connected to the water inlet 508 located at the spiral center of the flow channel. The second outlet 502 is directly connected to the spiral outlet of the spiral flow channel. This allows the coolant to enter the water inlet channel from the second inlet 501 when injected, then flow to the spiral center, and finally flow out from the second outlet 502 through the spiral flow channel. Figure 2 , Figures 10 to 12As shown, in some embodiments, a low thermal conductivity element 800 is provided on the side of the mounting cover 500 facing the heating element 300. The low thermal conductivity element 800 surrounds the outside of the third electrode 200, and the orthogonal projection of the heating element 300 onto the mounting cover 500 falls within the range of the low thermal conductivity element 800, thereby playing a role in heat insulation, reducing heat leakage, and preventing burns to personnel. In the current embodiment, the low thermal conductivity element 800 is made of a material with a thermal conductivity of less than or equal to 10 W / (m·K), such as graphite felt. To prevent electrical conduction between the third electrode 200 and the low thermal conductivity element 800, an insulating cylinder 400 is also sleeved on the outside of the third electrode 200, and the low thermal conductivity element 800 surrounds the outside of the insulating cylinder 400, thereby isolating the third electrode 200 from the low thermal conductivity element 800. In the current embodiment, a step is provided on the end of the insulating cylinder 400 facing the insulating sleeve 8, and the insulating sleeve 8 abuts against the step of the insulating cylinder 400. In addition, in order to facilitate the connection of the third electrode 200 to the heating element 300, the electrode mounting hole penetrates the low thermal conductivity element 800.

[0066] It should be noted here that the heating element 300 is divided into an upper heating element and a lower heating element, wherein the upper heating element is flat (e.g., Figure 1 As shown in the figure), while the lower heating element is annular (as shown in the figure). Figure 13 As shown in the diagram, the upper heating element is located in the middle of the lower heating element, as... Figure 1 As shown, the upper heating element and the third electrode 200 are directly connected by bolts. And as... Figure 10 and Figure 13 As shown, the lower heating element is connected to a connector 900 disposed at the second end of the third electrode 200; the length of the connector 900 on each third electrode 200 may be different, thereby allowing the lower heating elements to be arranged in layers; in the current embodiment, as... Figure 13 As shown, the connector 900 can be integrally formed with the third electrode 200, or as... Figure 10 As shown, the connector 900 and the third electrode 200 are connected by bolts. The outer peripheral surface of the lower heating element has a mounting plane 301, and the connector 900 has a connecting plane 901. Both the connecting plane 901 and the mounting plane 301 have electrode mounting holes for bolts to pass through. The electrode mounting holes on the connecting plane 901 are through holes, while those on the mounting plane 301 can be threaded holes. This allows the lower heating element and the connector 900 to be connected by bolts, thereby increasing the contact area between the connector 900 and the lower heating element through the mounting plane 301 and the connecting plane 901, thus improving the heating effect. In other embodiments, the electrode mounting holes on the connecting plane 901 and the mounting plane 301 are through holes, allowing for connection using bolts and nuts.

[0067] Continue as Figures 10 to 12As shown, in some embodiments, a boss 801 is provided on the side of the low thermal conductivity body 800 facing the heating body 300. The boss 801 is provided with a plurality of avoidance grooves 802 distributed circumferentially thereon. A portion of the electrode mounting holes are correspondingly disposed in the avoidance grooves 802, while another portion of the electrode mounting holes are disposed on the boss 801 and penetrate the boss 801, and are also surrounded by the plurality of avoidance grooves 802. For example, the electrode mounting hole of the third electrode 200 connected to the lower heating body is defined as the first hole, and the electrode mounting hole of the third electrode 200 connected to the upper heating body is defined as the second hole. A portion of the first holes correspond to the avoidance grooves 802, and another portion of the first holes penetrate the boss 801. Each first hole penetrating the boss 801 is located between adjacent avoidance grooves 802, and the second hole also penetrates the boss 801, so that the first hole surrounds the second hole, thereby making the lower heating body surround the upper heating body. Different connectors 900 are distinguished by the electrode mounting holes disposed in different positions to avoid connection errors. Meanwhile, the aforementioned boss 801 can also engage with a low thermal conductivity element (not shown in the figure) on the external crystal boat lifting mechanism, thereby facilitating the docking of the two mechanisms. The low thermal conductivity element 800 on the crystal boat lifting mechanism is prior art and will not be described in detail.

[0068] like Figure 9 and Figure 11 As shown, in some embodiments, the heating device further includes a second temperature monitoring element 600, which is mounted on the mounting cover 500. The second temperature monitoring element 600 monitors the temperature of the coolant in the second cooling chamber, providing a basis for adjusting the coolant flow rate. In the current embodiment, the monitoring end of the second temperature monitoring element 600 is placed on the outer wall of the mounting cover 500, allowing feedback on the temperature of the coolant in the second cooling chamber based on the temperature of the mounting cover 500. In another alternative embodiment, the monitoring end of the second temperature monitoring element 600 is located inside the second cooling chamber. Furthermore, the heating device also includes a third temperature monitoring element, which is also mounted on the mounting cover 500. The monitoring end of the third temperature monitoring element passes through the mounting cover 500 and the low thermal conductivity element 800, placing its monitoring end on the side of the mounting cover 500 facing the heating element 300. This allows for real-time monitoring of the temperature on one side of the heating element 300. When the mounting cover 500 is placed on the reaction chamber, the third temperature monitoring element monitors the temperature inside the reaction chamber to regulate the reaction temperature in real time. For example, a temperature monitoring hole 700 is provided on the mounting cover 500, and the monitoring end of the third temperature monitoring element monitors the temperature inside the reaction chamber through the temperature monitoring hole 700.

[0069] This application also provides a semiconductor process apparatus, which includes a reaction chamber and the heating device described above. A mounting cover 500 is disposed on the reaction chamber, so that the heating element 300 is placed inside the reaction chamber to heat the reaction chamber.

[0070] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A cooling electrode assembly, characterized in that, include: Cooling jacket (1), the cooling jacket (1) having a first cooling cavity (11), the cooling jacket (1) also having a first inlet (12) and a first outlet (13) communicating with the first cooling cavity (11); The first electrode (2) is fixed to the first end of the cooling sleeve (1). The first electrode (2) is insulated from the cooling sleeve (1). The first electrode (2) is provided with a plug-in cavity (21). The first electrode (2) is used to connect to an external power source. A fixing seat (3) is fixed to the second end of the cooling sleeve (1), and the fixing seat (3) is configured to be fixed to an external device; The second electrode (4) passes through the fixed base (3). The first end of the second electrode (4) is inserted into the insertion cavity (21). One of the outer wall of the first end of the second electrode (4) and the inner wall of the insertion cavity (21) is provided with an insertion protrusion (22), and the other is provided with an insertion groove (41). The insertion protrusion (22) is inserted into the insertion groove (41) to restrict the relative rotation of the first electrode (2) and the second electrode (4).

2. The cooling electrode assembly according to claim 1, characterized in that, The insertion protrusion (22) is disposed on the inner wall of the insertion cavity (21), the insertion groove (41) is disposed on the outer wall of the first end of the second electrode (4), and the insertion groove (41) penetrates the first end of the second electrode (4) along the axial direction of the second electrode (4).

3. The cooling electrode assembly according to claim 2, characterized in that, The cavity opening of the insertion cavity (21) is provided with a guide slope (23), which is configured to guide the first end of the second electrode (4) to move into the insertion cavity (21).

4. The cooling electrode assembly according to claim 3, characterized in that, The guide slope (23) is provided with a guide protrusion (24), which is disposed opposite to the insertion protrusion (22) so that the second electrode (4) can be guided to the insertion protrusion (22) through the guide protrusion (24).

5. The cooling electrode assembly according to claim 1, characterized in that, The first end of the cooling sleeve (1) is provided with a first insulating ring (5), a second insulating ring (6) and a first sealing ring (7). The first sealing ring (7) is sandwiched between the outer ring of the first insulating ring (5) and the inner ring of the second insulating ring (6). The first electrode (2) and the cooling sleeve (1) press the first insulating ring (5), the second insulating ring (6) and the first sealing ring (7) together.

6. The cooling electrode assembly according to claim 1, characterized in that, A third sealing ring (105) is sandwiched between the fixed base (3) and the cooling sleeve (1).

7. A heating device, characterized in that, The heating device includes: At least one set of cooling electrode assemblies (100) as described in any one of claims 1-6; The third electrode (200) is provided in a one-to-one correspondence with the cooling electrode assembly (100). The first end of the third electrode (200) is connected to the second end of the second electrode (4), and the second end of the third electrode (200) is connected to the heating element (300).

8. The heating device according to claim 7, characterized in that, A fixing groove (42) is provided on one of the second end of the second electrode (4) and the first end of the third electrode (200). The other end of the second electrode (4) and the first end of the third electrode (200) are inserted into the fixing groove (42). The second end of the second electrode (4) and the first end of the third electrode (200) are fixed by a locking member.

9. The heating device according to claim 8, characterized in that, The second end of the second electrode (4) or the first end of the third electrode (200) is provided with two opposing clips (44). The second end of the second electrode (4) or the first end of the third electrode (200) is also provided with a slit (43). The slit (43) extends from the bottom of the fixing groove (42) along the axial direction of the second electrode (4) or the third electrode (200) away from the fixing groove (42). The slit (43) is located between the two clips (44).

10. The heating device according to claim 7, characterized in that, The heating device further includes a mounting cover (500), which has a second cooling chamber inside. The mounting cover (500) also has a second inlet (501) and a second outlet (502) communicating with the second cooling chamber. The mounting cover (500) is provided with a through electrode mounting hole, and the third electrode (200) passes through the electrode mounting hole so that the first electrode (2) and the heating element (300) are located on both sides of the mounting cover (500), and the fixing seat (3) is fixed on the mounting cover (500).

11. The heating device according to claim 10, characterized in that, The heating device is also provided with a first temperature monitoring element (103), which is used to monitor the temperature of the coolant in the first cooling chamber (11); And / or, the heating device is further provided with a second temperature monitoring element (600), which is used to monitor the temperature of the coolant in the second cooling chamber; And / or, the heating device is further provided with a third temperature monitoring element, the monitoring end of the third temperature monitoring element being located on the side of the mounting cover (500) facing the heating body (300).

12. The heating device according to claim 10, characterized in that, An insulating cylinder (400) is sleeved on the outside of the third electrode (200), and a low thermal conductivity element (800) is provided on the side of the mounting cover (500) facing the heating body (300), and the low thermal conductivity element (800) surrounds the outside of the insulating cylinder (400).

13. The heating device according to claim 12, characterized in that, The low thermal conductivity body (800) has a boss (801) on the side facing the heating body (300). The boss (801) has several avoidance grooves (802) distributed along its circumference. A portion of the electrode mounting holes are correspondingly arranged in the avoidance grooves (802), and another portion of the electrode mounting holes penetrate the boss (801).

14. The heating device according to claim 10, characterized in that, The mounting cover (500) includes a support plate (503) and a support cover plate (504). The upper end surface of the support plate (503) is provided with an inner groove (505). The support cover plate (504) covers the groove of the inner groove (505) to form the second cooling chamber. The electrode mounting hole passes through the support plate (503) and the support cover plate (504). The fixing seat (3) is fixed in the electrode mounting hole. The second inlet (501) and the second outlet (502) are located on the support cover plate (504).

15. The heating device according to claim 14, characterized in that, The electrode mounting holes are arranged in a spiral shape radiating outward from the center of the support plate (503). The bottom of the groove (505) is also provided with a rib (509), which is connected to the adjacent fixing seat (3) to form a spiral flow channel in the second cooling cavity. The lower end face of the support plate (503) is also provided with a water inlet groove (506). The opening of the water inlet groove (506) is closed with a water inlet cover plate (507). The bottom of the groove (505) is provided with a water inlet (508), which is located at the spiral center of the flow channel. One end of the water inlet groove (506) is connected to the water inlet (508). The other end of the water inlet groove (506) is connected to the second inlet (501) located on the upper end face of the support plate (503). The second outlet (502) is connected to the spiral outlet of the flow channel.

16. The heating device according to claim 7, characterized in that, The heating element (300) includes an annular lower heating element. A connector (900) is provided at the second end of the third electrode (200). An mounting plane (301) is provided on the outer peripheral surface of the lower heating element. A connecting plane (901) is provided on the connector (900). The connecting plane (901) is connected to the mounting plane (301).

17. A semiconductor process apparatus, including a reaction chamber, characterized in that, The semiconductor process equipment further includes a heating device as described in any one of claims 7-16, wherein the heating element (300) is disposed within the reaction chamber.

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