A freeze-proof storage tank for storing semiconductor super-chemicals with a tetrafluoro lining

Abstract

The utility model relates to the technical field of anti -freezing storage tank, and disclose a kind of four fluorine lining storage semiconductor super chemical anti -freezing storage tank, including base, the upper surface of base is fixedly installed with placing table, the upper surface of placing table is provided with storage tank, the first servo motor is started by controller control, to drive gear to rotate, gear rotates, to drive rack to move, rack moves, to drive connecting block to move, to drive placing table to move upwards, until placing table moves out the inside of shell after, stop moving at this time, directly place storage tank on placing table, after gear rotates again, to drive placing table to descend, re-enter the inside of shell, to realize the effect of height adjustment to storage tank, to avoid the collision of storage tank and shell, to cause the surface damage of storage tank and shell damage condition, cause unnecessary economic loss.

Description

Technical Field

[0001] This utility model relates to the field of antifreeze storage tank technology, specifically an antifreeze storage tank with a PTFE lining for storing semiconductor superchemicals. Background Technology

[0002] The semiconductor manufacturing process requires the use of a large number of different types of process chemicals, thus necessitating the storage of these industrial chemicals in numerous storage tanks. Polytetrafluoroethylene (PTFE) material possesses corrosion resistance, low-temperature adaptability, and impermeability. Therefore, for the storage needs of semiconductor chemicals, PTFE-lined antifreeze storage tanks can effectively solve the problems of corrosion protection and low-temperature stability.

[0003] Patent number CN222117518U discloses an antifreeze storage tank for storing semiconductor super chemicals, relating to the field of chemical technology. The tank includes a tank body with outer shells on both sides. A shock absorber is provided on one side of the outer shell, and an anti-collision plate is provided at the other end of the shock absorber. The area of ​​the anti-collision plate is the same as that of the outer shell. A roller is rotatably provided in the middle of the anti-collision plate, and the rollers are evenly arranged along the anti-collision plate. A sliding groove is provided in the middle of the base, and a sliding rail is located inside the sliding groove and is slidably connected to the sliding groove. This PTFE-lined antifreeze storage tank for semiconductor superchemicals, compared to existing ordinary chemical antifreeze storage tanks, features shock absorbers on both sides that can offset the impact force when encountering external impacts. After an impact, the anti-collision plate shifts and is no longer in a horizontal state. The rotation of the rollers can guide the items impacting the device to the side, thereby avoiding further damage to the device and extending its service life. Although it can store the storage tank, the placement platform is located inside the outer shell. When personnel place the storage tank, it is easy to cause the storage tank to collide with the outer shell, resulting in damage to the surface of the storage tank and the outer shell, causing unnecessary economic losses. Utility Model Content

[0004] To address the shortcomings of existing technologies, this utility model provides a PTFE-lined antifreeze storage tank for storing semiconductor chemicals. This solves the problem mentioned in the background art where, during storage, the placement platform is located inside the outer shell, and when personnel place the storage tank, it is easy to cause collisions between the storage tank and the outer shell, resulting in damage to both the surface of the storage tank and the outer shell, causing unnecessary economic losses.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a PTFE-lined antifreeze storage tank for storing semiconductor superchemicals, comprising a base, a placement platform fixedly mounted on the upper surface of the base, a storage tank disposed on the upper surface of the placement platform, two vertical plates fixedly mounted on the upper surface of the base, gears movably mounted on adjacent surfaces of the two vertical plates, a first servo motor fixedly mounted on the front surface of the vertical plates, connecting blocks fixedly mounted on the left and right surfaces of the placement platform, a rack fixedly mounted on the outer surface of the connecting blocks, and a baffle fixedly mounted on the lower side of the connecting blocks.

[0006] Furthermore, the upper surface of the base is provided with a shell, the inner wall of the shell is fixedly installed with a telescopic rod, the end of the telescopic rod is fixedly installed with a clamp, the upper surface of the clamp is fixedly installed with a sensor, and the inner wall of the clamp is provided with a sensor plate.

[0007] Furthermore, two side plates are fixedly installed on the rear surface of the base, and positive and negative lead screws are movably installed on the adjacent surfaces of the two side plates. A second servo motor is fixedly installed on the left surface of the side plate, and a movable block is threadedly connected to the outer surface of the positive and negative lead screws. A controller is fixedly installed on the front surface of the base.

[0008] Furthermore, the outer surface of the gear meshes with the rack, and the output end of the first servo motor is fixedly connected to the front end of the gear.

[0009] Furthermore, the sensor is electrically connected to the sensing plate, the surface of the clamping plate is provided with a soft silicone pad, and the lower surface of the outer shell is movably connected to the upper surface of the base.

[0010] Furthermore, the output end of the second servo motor is fixedly connected to the left end of the positive and negative lead screw, and the controller is electrically connected to the sensor, the first servo motor, and the second servo motor.

[0011] Furthermore, the inner wall of the storage tank is provided with an inner lining, the material of which is polytetrafluoroethylene.

[0012] Compared with the prior art, the beneficial effects of this utility model are:

[0013] 1. This PTFE-lined antifreeze storage tank for storing semiconductor chemicals uses a controller to start a first servo motor, which in turn drives a gear to rotate. The gear rotates, which in turn moves a rack, which in turn moves a connecting block, causing the placement platform to move upwards until it moves out of the housing. At this point, the movement stops, and the storage tank is placed directly on the placement platform. Then, the gear rotates again, causing the placement platform to descend and re-enter the housing. This achieves height adjustment of the storage tank, preventing collisions between the storage tank and the housing, thus avoiding damage to the surface of the storage tank and the housing, and preventing unnecessary economic losses.

[0014] 2. This PTFE-lined antifreeze storage tank for storing semiconductor chemicals is activated by a telescopic rod, which moves the clamping plate closer to the surface of the storage tank to clamp it. When the sensor plate detects the contact between the clamping plate and the storage tank, it transmits information to the sensor, which then transmits the information to the controller. The controller then closes the telescopic rod, thus completing the clamping of the storage tank and preventing excessive shaking that could damage it. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall three-dimensional structure of the present invention from a frontal perspective;

[0016] Figure 2 This is a three-dimensional structural diagram of the present invention from a rear view.

[0017] Figure 3 This is a front cross-sectional three-dimensional structural diagram of the present invention;

[0018] Figure 4 This is a schematic diagram of the three-dimensional structure of the present invention in cross-section.

[0019] In the diagram: 1. Base; 2. Placement platform; 3. Storage tank; 4. Vertical plate; 5. Gear; 6. First servo motor; 7. Connecting block; 8. Rack; 9. Baffle; 10. Telescopic rod; 11. Clamping plate; 12. Sensor; 13. Sensing plate; 14. Side plate; 15. Positive and negative lead screws; 16. Second servo motor; 17. Movable block; 18. Outer shell; 19. Controller. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] Example 1:

[0022] Please refer to the following: Figures 1-4 This utility model provides a technical solution: a PTFE-lined antifreeze storage tank for storing semiconductor superchemicals, including a base 1, a placement platform 2 fixedly installed on the upper surface of the base 1, a storage tank 3 disposed on the upper surface of the placement platform 2, two vertical plates 4 fixedly installed on the upper surface of the base 1, gears 5 movably installed on adjacent surfaces of the two vertical plates 4, a first servo motor 6 fixedly installed on the front surface of the vertical plates 4, connecting blocks 7 fixedly installed on the left and right surfaces of the placement platform 2, a rack 8 fixedly installed on the outer surface of the connecting blocks 7, and a baffle 9 fixedly installed on the lower side of the connecting blocks 7. Specifically, when it is necessary to raise the placement platform 2, the controller 19 controls the first servo motor 6 to start, thereby driving the gears 5 to rotate. The rotation of the gears 5 drives the rack 8 to move, and the movement of the rack 8 drives the connecting blocks 7 to move, thereby moving the placement platform 2 upward until the placement platform 2 moves out of the interior of the outer shell 18. At this time, the movement stops, and the storage tank 3 is placed directly on the placement platform 2. Then the gears 5 rotate again, thereby driving the placement platform 2 to descend and re-enter the interior of the outer shell 18.

[0023] In this embodiment, a housing 18 is provided on the upper surface of the base 1. A telescopic rod 10 is fixedly installed on the inner wall of the housing 18. A clamping plate 11 is fixedly installed at the end of the telescopic rod 10. A sensor 12 is fixedly installed on the upper surface of the clamping plate 11. A sensing plate 13 is provided on the inner wall of the clamping plate 11. Specifically, when the housing 18 is closed, the telescopic rod 10 is activated, thereby driving the clamping plate 11 to move. The clamping plate 11 moves and approaches the surface of the storage tank 3, thereby clamping the storage tank 3. At this time, the sensing plate 13 senses that the surface of the clamping plate 11 is in contact with the storage tank 3, and then transmits information to the sensor 12. After sensing the information, the sensor 12 transmits the information to the controller 19. The controller 19 controls the telescopic rod 10 to close, thereby completing the clamping of the storage tank 3.

[0024] In this embodiment, two side plates 14 are fixedly installed on the rear surface of the base 1. Positive and negative lead screws 15 are movably installed on the adjacent surfaces of the two side plates 14. A second servo motor 16 is fixedly installed on the left surface of the side plate 14. A movable block 17 is threadedly connected to the outer surface of the positive and negative lead screws 15. A controller 19 is fixedly installed on the front surface of the base 1. Specifically, when the second servo motor 16 is started, it drives the positive and negative lead screws 15 to rotate, thereby driving the movable block 17 to move. The movement of the movable block 17 drives the outer shell 18 to move, thereby enclosing the storage tank 3 and protecting it.

[0025] In this embodiment, the outer surface of the gear 5 meshes with the rack 8, and the output end of the first servo motor 6 is fixedly connected to the front end of the gear 5. Specifically, the first servo motor 6 drives the gear 5 to rotate, thereby driving the rack 8 to move, and in turn driving the connecting block 7 to move.

[0026] In this embodiment, the sensor 12 is electrically connected to the sensing plate 13, the surface of the clamping plate 11 is provided with a soft silicone pad, and the lower surface of the outer shell 18 is movably connected to the upper surface of the base 1. Specifically, through the design of the sensing plate 13 and the sensor 12, the clamping plate 11 is prevented from excessively clamping the storage tank 3, thereby causing damage to the surface of the storage tank 3.

[0027] In this embodiment, the output end of the second servo motor 16 is fixedly connected to the left end of the positive and negative lead screw 15, and the controller 19 is electrically connected to the sensor 12, the first servo motor 6, and the second servo motor 16.

[0028] In this embodiment, the inner wall of the storage tank 3 is provided with a liner made of polytetrafluoroethylene (PTFE). Specifically, PTFE has corrosion resistance, low temperature adaptability and impermeability. By using PTFE to form a PTFE liner, the problems of corrosion protection and low temperature stability can be effectively solved.

[0029] Working principle: When this utility model is in use, if it is necessary to raise the placement platform 2, the controller 19 controls the first servo motor 6 to start, thereby driving the gear 5 to rotate. The rotation of the gear 5 drives the rack 8 to move, which in turn drives the connecting block 7 to move, thus moving the placement platform 2 upward until it moves out of the interior of the outer shell 18. At this point, the movement stops, and the storage tank 3 is placed directly on the placement platform 2. Then, the gear 5 rotates again, causing the placement platform 2 to descend and re-enter the interior of the outer shell 18. Afterward, the second servo motor 16 starts, driving the forward and reverse lead screw 15 to rotate, which in turn drives the movable block 17 to move. The movement of the movable block 17 causes the outer shell 18 to move, thus enclosing the storage tank 3 and protecting it.

[0030] When the outer casing 18 is closed, the telescopic rod 10 is activated, which drives the clamping plate 11 to move. The clamping plate 11 moves closer to the surface of the storage tank 3, thereby clamping the storage tank 3. At this time, the sensing plate 13 senses that the surface of the clamping plate 11 is in contact with the storage tank 3, and then transmits the information to the sensor 12. After sensing the information, the sensor 12 transmits the information to the controller 19. The controller 19 controls the telescopic rod 10 to close, thereby completing the clamping of the storage tank 3.

[0031] The controller 19 is an existing structure, and the control circuit can be implemented by a person skilled in the art through simple programming. It is common knowledge in the field. It is only used and not modified. Therefore, the control method and circuit connection will not be described in detail.

[0032] The selection of various devices varies depending on the specific circumstances, and should be based on the actual needs and various parameters, taking into account the function and desired effect of the equipment.

[0033] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A PTFE-lined antifreeze storage tank for storing semiconductor superchemicals, comprising a base (1), characterized in that: A placement platform (2) is fixedly installed on the upper surface of the base (1). A storage tank (3) is provided on the upper surface of the placement platform (2). Two vertical plates (4) are fixedly installed on the upper surface of the base (1). Gears (5) are movably installed on the adjacent surfaces of the two vertical plates (4). A first servo motor (6) is fixedly installed on the front surface of the vertical plate (4). Connecting blocks (7) are fixedly installed on the left and right surfaces of the placement platform (2). A rack (8) is fixedly installed on the outer surface of the connecting block (7). A baffle (9) is fixedly installed on the lower side of the connecting block (7).

2. The PTFE-lined antifreeze storage tank for storing semiconductor superchemicals according to claim 1, characterized in that: The upper surface of the base (1) is provided with a shell (18), the inner wall of the shell (18) is fixedly installed with a telescopic rod (10), the end of the telescopic rod (10) is fixedly installed with a clamp (11), the upper surface of the clamp (11) is fixedly installed with a sensor (12), and the inner wall of the clamp (11) is provided with a sensor plate (13).

3. The PTFE-lined antifreeze storage tank for storing semiconductor superchemicals according to claim 1, characterized in that: Two side plates (14) are fixedly installed on the rear surface of the base (1). Positive and negative lead screws (15) are movably installed on the adjacent surfaces of the two side plates (14). A second servo motor (16) is fixedly installed on the left surface of the side plate (14). A movable block (17) is threadedly connected to the outer surface of the positive and negative lead screws (15). A controller (19) is fixedly installed on the front surface of the base (1).

4. The PTFE-lined antifreeze storage tank for storing semiconductor superchemicals according to claim 1, characterized in that: The outer surface of the gear (5) meshes with the rack (8), and the output end of the first servo motor (6) is fixedly connected to the front end of the gear (5).

5. The PTFE-lined antifreeze storage tank for storing semiconductor superchemicals according to claim 2, characterized in that: The sensor (12) is electrically connected to the sensing plate (13), the surface of the clamp (11) is provided with a soft silicone pad, and the lower surface of the outer shell (18) is movably connected to the upper surface of the base (1).

6. The PTFE-lined antifreeze storage tank for storing semiconductor superchemicals according to claim 3, characterized in that: The output end of the second servo motor (16) is fixedly connected to the left end of the positive and negative lead screw (15), and the controller (19) is electrically connected to the sensor (12), the first servo motor (6), and the second servo motor (16).

7. The PTFE-lined antifreeze storage tank for storing semiconductor superchemicals according to claim 1, characterized in that: The inner wall of the storage tank (3) is provided with an inner lining, and the material of the inner lining is polytetrafluoroethylene.

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