Planetary rotary coating fixture

Abstract

The utility model discloses a kind of planetary rotary coating clamps, it is related to vacuum coating technical field, including rotating table component and guard frame assembly, the middle of rotating table component is provided with guard frame assembly, and the top surface edge of rotating table component is provided with clamp assembly, and the bottom middle of rotating table component is provided with rotating machine group. The planetary rotary coating clamp, by being provided with guard frame assembly, the structure of using its setting can effectively protect the structural protection of each group independent clamp assembly sub-motor, to avoid its structure to be influenced by external factors, leading to the rotation adjustment of clamp assembly to material, to ensure the operation stability of device, in addition rotating table component, guard frame assembly, clamp assembly and rotating machine group are relatively modular structure between each other Settings, so that effectively ensure the maintenance convenience of device, to ensure the efficiency of operation, and facilitate operation.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, specifically a planetary rotary coating fixture. Background Technology

[0002] Vacuum deposition is a technique that uses physical or chemical methods to deposit materials onto the surface of a substrate to form a thin film in a high-vacuum environment. Its core advantage lies in the fact that the vacuum environment reduces impurities, ensuring the purity and uniformity of the film layer.

[0003] Planetary rotary coating fixtures are equipment accessories used for vacuum coating, achieving uniform film deposition through the rotational motion of the substrate in multiple axes. Their core design involves the substrate revolving around a central axis while simultaneously rotating on its own axis at a higher speed; this dual rotation mechanism significantly improves the uniformity of film thickness.

[0004] This fixture typically consists of multiple smaller clamps on which the substrate is placed. During the coating process, the substrate not only revolves around the main shaft of the equipment (rotates around the central axis), but also rotates on its own axis at a faster speed. This planetary motion mode reduces film thickness differences in local areas, making it particularly suitable for high-precision applications.

[0005] Conventional planetary rotary coating fixtures, with their rotating substructures, lack adequate structural safety protection, making them susceptible to external factors affecting the rotation and processing of materials. Summary of the Invention

[0006] The purpose of this invention is to provide a planetary rotary coating fixture to solve the problems mentioned in the background art.

[0007] To achieve the above objectives, the present invention provides the following technical solution: a planetary rotary coating fixture, comprising a rotary table component and a protective frame assembly, wherein the protective frame assembly is disposed in the middle of the rotary table component, and a clamping assembly is disposed on the edge of the top surface of the rotary table component, and a rotating unit is disposed in the middle of the bottom of the rotary table component; the protective frame assembly comprises a stabilizing frame, a fixed seat and a protective sleeve, wherein the fixed seat is connected and disposed in the middle of the bottom of the stabilizing frame, and a protective sleeve is connected around the stabilizing frame.

[0008] Furthermore, the rotary table component includes a main table body, an assembly base, and a fixing component. The assembly base is vertically installed near the edge of the main table body, and a fixing component is provided at the bottom of the assembly base.

[0009] Furthermore, the mounting base and fasteners are arranged in a circular array structure with the main platform as the center and are distributed in six groups. The mounting base is vertically embedded in the main platform, and the fasteners are located at the bottom of the main platform and connected to the lower end of the mounting base.

[0010] Furthermore, the stabilizer and the fixed base are fixedly connected, and the protective sleeve is arranged in a ring array structure with the stabilizer as the center and there are six groups of them. The stabilizer and the protective sleeve are connected to each other by a hinge structure, and the protective sleeve adopts a left and right closed structure.

[0011] Furthermore, the clamping assembly includes an electric clamping platform, grippers, a sub-motor, and a connecting seat. The grippers are mounted on the top of the electric clamping platform, and the sub-motor is mounted on the bottom of the electric clamping platform. The connecting seat is connected to the bottom of the sub-motor.

[0012] Furthermore, the grippers are arranged in a circular array with the electric clamping platform as the center and are distributed in three groups. The sub-motor and the connecting seat are welded together, and the top surface of the mounting seat has a groove structure that matches the bottom surface structure of the connecting seat.

[0013] Furthermore, the rotating unit includes a main motor, a base, a connecting platform, and a support platform. The base is provided at the bottom of the main motor, and the connecting platform is connected to the top of the main motor. A support platform is provided in the middle of the top of the connecting platform.

[0014] Furthermore, the base has holes at its four opposite corners for bolt installation, and the main motor is welded to the base. The connecting platform and the support platform are integrally formed, with the connecting platform connected to the bottom center of the main body. The fixed seat flange is connected to the top of the support platform.

[0015] This utility model provides a planetary rotary coating fixture, which has the following advantages:

[0016] 1. This utility model, by providing a protective frame assembly, in which a protective sleeve and a stabilizing frame are connected by hinges, ensures that the middle part of the entire clamping assembly is located within the protective sleeve with a left-right opening and closing structure. The structure of the protective sleeve provides good structural protection for the sub-motor. Through the above-mentioned structure, the clamping assembly can be effectively protected and its stable operation can be ensured, thereby avoiding unnecessary influence of external factors on the axial rotation of the clamping assembly, thus ensuring stable coating of the workpiece. At the same time, the protective sleeve and stabilizing frame connected by hinges also facilitate the opening or closing of the structure, thereby facilitating the disassembly and assembly of the clamping assembly and the rotary table component, avoiding unnecessary structural interference, and thus ensuring the flexibility of the structure.

[0017] In this invention, the entire protective frame assembly is connected to the top of the support platform via a flange structure, while the clamp assembly is connected to the top of the assembly base via a base. Furthermore, the entire rotating unit is connected to the bottom center of the rotating table component via a connecting platform. This structural design allows for a modular design of the entire device, facilitating the assembly and disassembly of various structural components. This provides convenience for maintenance and operation, improves maintenance efficiency, and avoids time-consuming and labor-intensive operations. The combination of the rotating table component, protective frame assembly, clamp assembly, and rotating unit also ensures good stability after assembly. The base at the bottom of the main motor fixes the entire device to the mounting surface, preventing unnecessary structural offsets that could affect material processing. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the axial side view of the main body of a planetary rotary coating fixture according to the present invention.

[0019] Figure 2 This is a schematic diagram of the rotating table component of a planetary rotary coating fixture according to the present invention.

[0020] Figure 3 This is a three-dimensional structural diagram of the protective frame assembly of a planetary rotary coating fixture according to this utility model;

[0021] Figure 4 This is a three-dimensional structural diagram of the clamping assembly of a planetary rotary coating fixture according to the present invention;

[0022] Figure 5 This is a three-dimensional structural diagram of the rotating unit of a planetary rotary coating fixture according to the present invention.

[0023] In the diagram: 1. Rotary table component; 101. Main table body; 102. Assembly base; 103. Fixture; 2. Guard frame assembly; 201. Stabilizer; 202. Fixture base; 203. Protective sleeve; 3. Clamp assembly; 301. Electric clamp; 302. Gripper; 303. Sub-motor; 304. Connecting seat; 4. Rotating unit; 401. Main motor; 402. Base; 403. Connecting platform; 404. Support platform. Detailed Implementation

[0024] The embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and should not be construed as limiting the scope of this utility model.

[0025] like Figures 1 to 5As shown, a planetary rotary coating fixture includes a rotary table component 1 and a guard assembly 2. The guard assembly 2 is disposed in the middle of the rotary table component 1, and a clamp assembly 3 is installed on the edge of the top surface of the rotary table component 1. A rotating unit 4 is installed in the middle of the bottom of the rotary table component 1. The guard assembly 2 includes a stabilizing frame 201, a fixed seat 202, and a protective sleeve 203. The fixed seat 202 is connected to the middle of the bottom of the stabilizing frame 201, and the protective sleeve 203 is connected around the stabilizing frame 201. The stabilizing frame 201 and the fixed seat 202 are fixedly connected. The protective sleeve 203 is arranged in a ring array structure with the stabilizing frame 201 as the center and is distributed in six groups. The stabilizing frame 201 and the protective sleeve 203 are connected to each other by a hinge structure, and the protective sleeve 203 adopts a left-right closed structure. The rotary table component 1 is configured with a main table body 101, an assembly base 102, and a fixing member 103. The assembly base 102 is vertically mounted on the main table body 101 near its edge, and the fixing member 103 is located at the bottom of the assembly base 102. The assembly base 102 and the fixing member 103 are arranged in a circular array with the main table body 101 as the center, and there are six groups of them. The assembly base 102 is vertically inserted into the main table body 101, and the fixing member 103 is located at the bottom of the main table body 101 and connected to the lower end of the assembly base 102. The protective sleeve 203 and the stabilizer 201 are connected by hinges, so that the middle part of the entire clamping assembly 3 is located in the protective sleeve 203 with a left-right opening and closing structure. The structure of the protective sleeve 203 provides good structural protection for the sub-motor 303.

[0026] like Figures 1 to 5As shown, the clamping assembly 3 includes an electric clamping platform 301, grippers 302, a sub-motor 303, and a connecting seat 304. Grippers 302 are mounted on the top of the electric clamping platform 301, and the sub-motor 303 is mounted on the bottom of the electric clamping platform 301. The bottom of the sub-motor 303 is connected to the connecting seat 304. The grippers 302 are arranged in a circular array around the electric clamping platform 301, with three groups distributed in this array. The sub-motor 303 and the connecting seat 304 are welded together. The top surface of the mounting base 102 has a groove structure that matches the bottom surface structure of the connecting seat 304. The rotating unit 4 includes a main motor 401, a base 402, a connecting platform 403, and a support platform 404. The base 402 is located at the bottom of the main motor 401. The top of the machine 401 is connected to a connecting platform 403, and a support platform 404 is set in the middle of the top of the connecting platform 403. The four opposite corners of the base 402 are provided with holes for bolt installation. The main motor 401 is welded to the base 402. The connecting platform 403 and the support platform 404 are integrated. The connecting platform 403 is connected to the bottom middle of the main platform 101. The fixed seat 202 is flanged and connected to the top of the support platform 404. The entire guard frame assembly 2 is connected to the top of the support platform 404 using the flange structure. The clamp assembly 3 is connected to the top of the mounting base 102 using the base 402. In addition, the entire rotating unit 4 is connected to the bottom middle of the rotating platform component 1 using the connecting platform 403.

[0027] In summary, as Figures 1 to 5 As shown, when using this planetary rotary coating fixture, the entire rotary table component 1 is first assembled by connecting the main table body 101 and the connecting table 403, so that the rotary table component 1 and the rotating unit 4 can be quickly assembled. At the same time, the base 402 of the main motor 401 is used with bolts to fix it to the mounting structure surface.

[0028] Then, the six sets of clamping assemblies 3 are combined with the top of the mounting base 102 using the connecting seat 304 at the bottom of the sub-motor 303, and the entire protective frame assembly 2 is installed on the top center of the support platform 404 using the fixing seat 202 in the middle of the bottom of the stabilizer 201 and the flange structure. At the same time, the protective sleeve 203 around the stabilizer 201 is clamped in the middle of the clamping assembly 3 to provide structural protection.

[0029] Under the operation of the main motor 401, the top rotating table component 1 and clamping assembly 3 will rotate axially in the vertical direction. Under the operation of the sub-motor 303, the electric clamping table 301 and the gripper 302 holding the material will rotate axially in the vertical direction with the sub-motor 303 as the center.

[0030] The embodiments of this utility model are given for illustrative and descriptive purposes only, and are not intended to be exhaustive or to limit the utility model to the forms disclosed. Many modifications and variations will be apparent to those skilled in the art. The embodiments were chosen and described in order to better illustrate the principles and practical applications of this utility model, and to enable those skilled in the art to understand this utility model and design various embodiments with various modifications suitable for a particular purpose.

Claims

1. A planetary spin coater jig comprising a spin table member (1) and a guard assembly (2), characterised in that: The rotating table component (1) is provided with a guard frame assembly (2) in the middle, and the top surface edge of the rotating table component (1) is provided with a clamp assembly (3) mounted, and the bottom middle of the rotating table component (1) is provided with a rotating machine group (4), the guard frame assembly (2) comprises a stabilizing frame (201), a fixed seat (202) and a protective sleeve (203), the bottom middle of the stabilizing frame (201) is connected and mounted with the fixed seat (202), and the periphery of the stabilizing frame (201) is connected with the protective sleeve (203).

2. The planetary spin coater chuck of claim 1, wherein, The rotating table component (1) comprises a main table body (101), an assembly seat (102) and a fixing piece (103), the assembly seat (102) is vertically mounted on the edge of the main table body (101), and the bottom of the assembly seat (102) is provided with the fixing piece (103).

3. A planetary spin coater chuck as defined in claim 2, wherein, The assembly seat (102) and the fixing piece (103) are arranged in a circular array structure with the main table body (101) as the center and are distributed in six groups, the assembly seat (102) is vertically embedded in the main table body (101), and the fixing piece (103) is arranged at the bottom of the main table body (101) and connected with the lower end of the assembly seat (102).

4. The planetary spin coater chuck of claim 1 wherein, The stabilizing frame (201) and the fixed seat (202) are fixedly connected, the protective sleeve (203) is arranged in a circular array structure with the stabilizing frame (201) as the center and is distributed in six groups, the stabilizing frame (201) and the protective sleeve (203) are connected through a hinge structure, and the protective sleeve (203) is arranged in a left-right closing structure.

5. The planetary spin coater chuck of claim 2 wherein, The clamp assembly (3) comprises an electric clamp table (301), a clamp jaw (302), a sub motor (303) and a link seat (304), the top of the electric clamp table (301) is provided with the clamp jaw (302), the bottom of the electric clamp table (301) is provided with the sub motor (303), and the bottom of the sub motor (303) is connected with the link seat (304).

6. A planetary spin coater chuck as claimed in claim 5, wherein, The clamp jaw (302) is arranged in a circular array structure with the electric clamp table (301) as the center and is distributed in three groups, the sub motor (303) and the link seat (304) are weldedly connected, and the top surface of the assembly seat (102) is provided with a groove structure matched with the bottom surface structure of the link seat (304).

7. The planetary spin coater chuck of claim 2 wherein, The rotating machine group (4) comprises a main motor (401), a base (402), a link table (403) and a support table (404), the bottom of the main motor (401) is provided with the base (402), the top of the main motor (401) is connected with the link table (403), and the top middle of the link table (403) is provided with the support table (404).

8. A planetary spin coater chuck as defined in claim 7, wherein, The four diagonal holes of the base (402) are provided with hole structures for bolt installation, the main motor (401) and the base (402) are weldedly connected, the link table (403) and the support table (404) are arranged in an integral structure, the link table (403) is connected to the bottom middle of the main table body (101), and the fixed seat (202) is flange-connected and combined with the top of the support table (404).

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