High temperature sintering furnace CVD dosing system
By adopting a combined design of chemical delivery, injection, spraying and nitrogen cooling sleeves in the high-temperature sintering furnace, the problems of easy carbonization and clogging of CVD chemicals at high temperatures are solved, and uniform spraying and reaction of chemicals are achieved, ensuring sintering quality.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SUZHOU KILN PARTNER MASCH TECH CO LTD
- Filing Date
- 2025-04-18
- Publication Date
- 2026-06-16
AI Technical Summary
CVD chemicals are prone to premature high-temperature carbonization or pipe blockage in high-temperature sintering furnaces, leading to abnormal chemical injection and affecting sintering quality.
The combined design of chemical delivery pipe, chemical injection pipe, nitrogen injection pipe, chemical spraying pipe and nitrogen cooling jacket ensures that CVD chemicals are evenly sprayed and reacted in the furnace, while nitrogen cooling prevents high-temperature carbonization and blockage.
This ensures smooth injection and uniform spraying of CVD chemicals, preventing high-temperature carbonization and pipe blockage, and guaranteeing sintering quality and process requirements.
Smart Images
Figure CN224365342U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of kiln technology, and in particular to a CVD dosing system for a high-temperature sintering furnace. Background Technology
[0002] During the sintering process of lithium iron phosphate (LFP) powder, it is necessary to periodically or irregularly add liquid or gaseous organic materials to the high-temperature sintering furnace to supplement the carbon source, which requires the use of chemical vapor deposition (CVD) technology. However, when the CVD solution is injected into the high-temperature sintering furnace through pipelines, the CVD solution is prone to premature high-temperature carbonization, or even blockage of the pipelines, resulting in abnormal injection of the CVD solution, which cannot react with the material and affects normal sintering. Utility Model Content
[0003] Based on the above problems, the purpose of this utility model is to provide a CVD dosing system for a high-temperature sintering furnace, which enables the smooth injection and uniform spraying of CVD chemicals to ensure sintering quality.
[0004] To achieve the above objectives, the present invention adopts the following technical solution:
[0005] A high-temperature sintering furnace CVD dosing system includes a chemical delivery pipe, a chemical injection pipe, a nitrogen injection pipe, a chemical spraying pipe, and a nitrogen cooling jacket, wherein:
[0006] The chemical delivery pipe is located outside the furnace, and CVD chemicals are introduced into the chemical delivery pipe.
[0007] One end of the chemical injection pipe is connected to the chemical delivery pipe, and the other end of the chemical injection pipe extends into the furnace and is connected to the chemical spraying pipe.
[0008] The nitrogen injection pipe is connected to the chemical injection pipe outside the furnace. The nitrogen injection pipe is used to mix nitrogen into the CVD chemical solution.
[0009] The chemical spray pipe is located above the material in the furnace. The chemical spray pipe is used to spray the CVD chemical solution onto the surface of the material and diffuse it in the furnace after it is vaporized at high temperature.
[0010] The nitrogen cooling sleeve is installed outside the chemical filling pipe and extends from the outside of the furnace into the furnace. The nitrogen cooling sleeve is used to blow nitrogen onto the surface of the chemical filling pipe.
[0011] As an optional solution, multiple drug injection pipes are provided. Each drug injection pipe is equipped with a nitrogen branch pipe, and each drug injection pipe is equipped with a peristaltic pump. The inlet end of the peristaltic pump is connected to the drug delivery pipe and is equipped with a ball valve. The outlet end of the peristaltic pump is connected to the nitrogen branch pipe and is equipped with a check valve.
[0012] As an alternative, a first flow meter for calculating the CVD chemical input is installed on the chemical delivery pipe.
[0013] As an optional solution, a solenoid valve is installed on the medicine delivery pipe.
[0014] As an alternative, a second flow meter for calculating the nitrogen input volume is installed on the nitrogen injection pipe.
[0015] As an alternative, the chemical delivery pipe extends from one side of the furnace to the top of the furnace, and the chemical delivery pipe is connected to the chemical tank.
[0016] As an alternative, the chemical spray pipes are arranged horizontally between the heating elements and materials inside the furnace, and multiple spray nozzles are provided on the chemical spray pipes.
[0017] The beneficial effects of this utility model are:
[0018] This high-temperature sintering furnace CVD dosing system guides CVD chemicals into the furnace through chemical delivery pipes, chemical injection pipes, nitrogen injection pipes, and chemical spraying pipes. After being vaporized at high temperature, the CVD chemicals are sprayed onto the material surface or into the furnace to react with the materials. The system has a simple structure, is easy to install and maintain. In addition, it is equipped with a nitrogen cooling jacket to cool the CVD chemicals entering the furnace, preventing premature high-temperature carbonization or even pipe blockage caused by the CVD chemicals being injected, thus ensuring process requirements are met. Attached Figure Description
[0019] Figure 1 This is a schematic diagram of the structure of the high-temperature sintering furnace CVD dosing system provided in this embodiment of the utility model;
[0020] Figure 2 This is a schematic diagram of the high-temperature sintering furnace CVD dosing system provided in this embodiment of the utility model.
[0021] In the attached image:
[0022] 1. Chemical delivery pipe; 2. Chemical injection pipe; 3. Nitrogen injection pipe; 4. Chemical spray pipe; 5. Nitrogen cooling jacket; 6. Nitrogen branch pipe; 7. Peristaltic pump; 8. Ball valve; 9. Check valve; 10. First flow meter; 11. Solenoid valve; 12. Second flow meter; 13. Spray nozzle; 14. Furnace chamber; 15. Material; 16. Heating element. Detailed Implementation
[0023] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.
[0024] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0025] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0026] In the description of this embodiment, terms such as "upper," "lower," "left," and "right" are based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of description and simplification of operation, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.
[0027] Furthermore, the terms "first" and "second" are merely used to distinguish between different terms in description and do not have any special meaning.
[0028] Please see Figure 1 and Figure 2 As shown, this embodiment provides a high-temperature sintering furnace CVD dosing system, including a chemical delivery pipe 1, a chemical injection pipe 2, a nitrogen injection pipe 3, a chemical spraying pipe 4, and a nitrogen cooling jacket 5, wherein:
[0029] The chemical delivery pipe 1 is located outside the furnace 14, and CVD chemical is introduced into the chemical delivery pipe 1.
[0030] One end of the chemical injection pipe 2 is connected to the chemical delivery pipe 1, and the other end of the chemical injection pipe 2 extends into the furnace 14 and is connected to the chemical spray pipe 4.
[0031] Nitrogen injection pipe 3 is connected to chemical injection pipe 2 outside furnace 14. Nitrogen injection pipe 3 is used to mix nitrogen into CVD chemical solution.
[0032] The chemical spray pipe 4 is located above the material 15 in the furnace 14. The chemical spray pipe 4 is used to spray the CVD chemical solution onto the surface of the material 15 and diffuse it in the furnace 14 after it is vaporized at high temperature.
[0033] The nitrogen cooling sleeve 5 is fitted outside the chemical filling pipe 2 and extends from outside the furnace 14 into the furnace 14. The nitrogen cooling sleeve 5 is used to blow nitrogen onto the surface of the chemical filling pipe 2.
[0034] Therefore, CVD chemicals are guided into the furnace 14 through chemical delivery pipe 1, chemical injection pipe 2, nitrogen injection pipe 3, and chemical spraying pipe 4. After being vaporized at high temperature, the CVD chemicals are sprayed onto the surface of material 15 or into the furnace 14 to react with the material 15. The structure is simple and easy to install and maintain. In addition, a nitrogen cooling jacket 5 is provided to cool the CVD chemicals entering the furnace 14, preventing premature high-temperature carbonization or even blockage of the pipes when the CVD chemicals are injected, thus ensuring the process requirements are met.
[0035] Optionally, multiple medicine injection pipes 2 are provided, and a nitrogen branch pipe 6 is provided on the nitrogen injection pipe 3 corresponding to each medicine injection pipe 2. Each medicine injection pipe 2 is equipped with a peristaltic pump 7. The inlet end of the peristaltic pump 7 is connected to the medicine delivery pipe 1, and a ball valve 8 is provided at the inlet end. The outlet end of the peristaltic pump 7 is connected to the nitrogen branch pipe 6, and a one-way valve 9 is provided at the outlet end.
[0036] The number of chemical injection pipes 2 and nitrogen injection pipes 3 is not limited and can be flexibly adjusted according to actual needs to ensure precise matching between each chemical injection pipe 2 and nitrogen branch pipe 6, so as to achieve uniform mixing of CVD chemicals and nitrogen. In addition, through the design of ball valve 8 and check valve 9, each chemical injection pipe 2 can independently control the flow rate of CVD chemicals and the mixing ratio of nitrogen. The dual protection of ball valve 8 and check valve 9 effectively prevents CVD chemicals backflow and leakage, improving the safety and stability of the system.
[0037] Optionally, a first flow meter 10 for calculating the CVD chemical input is installed on the chemical delivery pipe 1. The first flow meter 10 monitors the CVD chemical flow rate in real time to ensure accurate CVD chemical input. The first flow meter 10 is preferably a metal float flow meter.
[0038] Optionally, a solenoid valve 11 is installed on the chemical delivery pipe 1 to precisely control the flow of CVD chemicals and meet the delivery requirements.
[0039] Optionally, a second flow meter 12 is installed on the nitrogen injection pipe 3 to calculate the nitrogen input volume. The nitrogen flow rate is monitored in real time by the second flow meter 12 to ensure the accuracy of the nitrogen input volume. Here, the second flow meter 12 is a float flow meter.
[0040] Optionally, the chemical delivery pipe 1 extends from one side of the furnace 14 to the top of the furnace 14, and the chemical delivery pipe 1 is connected to a chemical tank. Thus, the CVD chemical in the chemical tank is supplied to the top of the furnace 14 via the chemical delivery pipe 1 to connect to the chemical injection pipe 2, ensuring efficient spraying of the subsequent chemical spray pipe 4.
[0041] Optionally, the chemical spray pipes 4 are arranged horizontally between the heating elements 16 and the material 15 inside the furnace 14, and the chemical spray pipes 4 are provided with multiple spray nozzles 13. This ensures that the CVD chemical is atomized evenly, covers a wide area, and improves the reaction efficiency with the material 15.
[0042] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.
Claims
1. A high-temperature sintering furnace CVD dosing system, characterized in that, It includes a medicine delivery pipe (1), a medicine injection pipe (2), a nitrogen injection pipe (3), a medicine spraying pipe (4), and a nitrogen cooling jacket (5), wherein: The chemical delivery pipe (1) is located outside the furnace (14), and CVD chemical solution is introduced into the chemical delivery pipe (1); One end of the chemical injection pipe (2) is connected to the chemical delivery pipe (1), and the other end of the chemical injection pipe (2) extends into the furnace (14) and is connected to the chemical spray pipe (4); The nitrogen injection pipe (3) is connected to the chemical injection pipe (2) outside the furnace (14), and the nitrogen injection pipe (3) is used to mix nitrogen into the CVD chemical solution; The chemical spray pipe (4) is located above the material (15) in the furnace (14). The chemical spray pipe (4) is used to spray the CVD chemical solution onto the surface of the material (15) and diffuse it into the furnace (14) after it is vaporized at high temperature. The nitrogen cooling sleeve (5) is sleeved outside the chemical injection pipe (2) and extends from outside the furnace (14) into the furnace (14). The nitrogen cooling sleeve (5) is used to blow nitrogen onto the surface of the chemical injection pipe (2).
2. The high-temperature sintering furnace CVD dosing system according to claim 1, characterized in that, Multiple medicine injection pipes (2) are provided. A nitrogen branch pipe (6) is provided on each medicine injection pipe (2) corresponding to each medicine injection pipe (2). A peristaltic pump (7) is provided on each medicine injection pipe (2). The inlet end of the peristaltic pump (7) is connected to the medicine delivery pipe (1), and a ball valve (8) is provided at the inlet end. The outlet end of the peristaltic pump (7) is connected to the nitrogen branch pipe (6), and a one-way valve (9) is provided at the outlet end.
3. The high-temperature sintering furnace CVD dosing system according to claim 1, characterized in that, The chemical delivery pipe (1) is equipped with a first flow meter (10) for calculating the input amount of the CVD chemical.
4. The high-temperature sintering furnace CVD dosing system according to claim 1, characterized in that, A solenoid valve (11) is installed on the medicine delivery pipe (1).
5. The high-temperature sintering furnace CVD dosing system according to claim 1, characterized in that, The nitrogen injection pipe (3) is equipped with a second flow meter (12) for calculating the amount of nitrogen input.
6. The high-temperature sintering furnace CVD dosing system according to claim 1, characterized in that, The medicine delivery pipe (1) extends from one side of the furnace (14) to the top of the furnace (14), and the medicine delivery pipe (1) is connected to the medicine tank.
7. The high-temperature sintering furnace CVD dosing system according to claim 1, characterized in that, The chemical spray pipe (4) is arranged horizontally between the heating element (16) and the material (15) in the furnace (14), and the chemical spray pipe (4) is provided with multiple spray nozzles (13).