A system for detecting a fracture of a support rod of a dry etching apparatus

Abstract

The utility model discloses a kind of fracture detection systems of support rod for dry etching equipment, including support rod and the sensor module for monitoring the state of support rod, the both ends of the support rod are respectively equipped with glass substrate and lower electrode, the sensor module is electrically connected with control unit by data acquisition module;The sensor module includes pressure sensor element.The utility model provides a kind of fracture detection systems of support rod for dry etching equipment, the design of pressure sensing element is carried out at the connecting place of support rod and lower electrode, so when supporting the glass substrate above by support rod, the pressure state received by support rod can be detected at any time, if it is beyond the safety pressure range set, can be fed back in time by control unit, to facilitate timely shutdown, avoid the generation of security risk.

Description

Technical Field

[0001] This utility model relates to the field of dry engraving technology, and in particular to a fracture detection system for a support rod used in dry engraving equipment. Background Technology

[0002] A dry etching machine is a process testing instrument used in the field of materials science. It is mainly used for etching thin metal or insulating films to create the desired patterns. This equipment utilizes the characteristic that the chemical reactivity of gases in a plasma state is many times stronger than that under normal conditions. Depending on the material to be etched, different gases are selected to react quickly with the material being etched, thereby achieving the etching purpose.

[0003] In dry etching, the glass substrate is fixed to the lower electrode by a support rod. Therefore, the support rod is a supporting structure between the glass substrate and the lower electrode. If the support rod breaks, it will lead to poor contact between the glass substrate and the lower electrode, causing problems such as uneven etching, equipment damage, or even breakage. Therefore, how to detect the condition of the support rod to avoid breakage is a problem that needs to be solved in this field. To this end, a breakage detection system for support rods in dry etching equipment is proposed. Utility Model Content

[0004] Therefore, it is necessary to provide a fracture detection system for the support rod of a dry etching equipment to address the above-mentioned technical problems. By designing a pressure sensor element on the support rod, the pressure state of the support rod can be detected at any time during the support of the glass substrate. This allows for timely production stoppage when the pressure is too high or too low, effectively avoiding potential safety hazards.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0006] A fracture detection system for a support rod in a dry etching device includes a support rod and a sensor module for monitoring the state of the support rod. The support rod has a glass substrate and a lower electrode at both ends, and the sensor module is electrically connected to a control unit through a data acquisition module.

[0007] The sensor module includes a pressure sensor element;

[0008] The pressure sensor element includes a base, a slider, and a spring. The slider is slidably disposed inside the base and fixed to the spring, and one end of the support rod is fixed to the slider.

[0009] A pressure sensor is provided on the bottom wall of the base for connecting to one end of the spring. The pressure sensor is electrically connected to the control unit. The pressure sensor can collect pressure sensing data of the support rod and input it into the control unit for monitoring.

[0010] Furthermore, a dust cover is threaded onto the top of the base, and a through groove is provided on the top of the dust cover for the passage of the support rod.

[0011] Furthermore, the bottom of the dust cover has an upper dustproof protrusion, and the top of the slider has a lower dustproof protrusion at the position corresponding to the upper dustproof protrusion;

[0012] A dustproof labyrinth is formed between the upper dustproof protrusion and the lower dustproof protrusion.

[0013] Furthermore, a dust collection groove is formed between the lower dustproof boss and the support rod.

[0014] Furthermore, the output terminal of the data acquisition module is electrically connected to the input terminal of the control unit, and the input terminal of the data acquisition module is electrically connected to the output terminal of the sensor module;

[0015] The control unit is electrically connected to the device control module and the alarm module. Under the action of the data acquisition module, the sensor module can collect data in the control unit and analyze the data through the signal processing algorithm therein.

[0016] Furthermore, the sensor module also includes a displacement sensor;

[0017] The displacement sensors are distributed at both ends of the support rod and are suspended and fixed by external support components.

[0018] Furthermore, the sensor module also includes a vibration sensor;

[0019] The vibration sensor is directly fixed to the surface of the support rod.

[0020] Furthermore, the sensor module also includes an optical sensor;

[0021] The optical sensor includes an area array camera located on the outside of the support rod.

[0022] Furthermore, the control unit is electrically connected to an external terminal control room.

[0023] Furthermore, the sensor module has multiple components, which are evenly distributed on the lower electrode for assembly with the corresponding support rod.

[0024] Compared with the prior art, the present invention has the following beneficial effects:

[0025] The fracture detection system for the support rod of the dry etching equipment provided by this utility model is designed with a pressure sensing element at the connection between the support rod and the lower electrode. In this way, when the support rod supports the glass substrate above, the pressure state of the support rod can be detected at any time. If it exceeds the set safe pressure range, it can be fed back through the control unit in time, so as to facilitate timely shutdown and avoid the occurrence of safety hazards.

[0026] The dust cover design can block the sliding gap between the slider and the base, thus preventing dust from falling directly into the base and affecting the subsequent application of the pressure sensor. At the same time, the design of the dust cover and the lower dust cover can block some particles that fall into the dust cover. These particles can then be collected by the dust collection groove, preventing them from crossing the lower dust cover and moving further toward the sliding gap between the slider and the base, thus achieving a better dust protection effect.

[0027] By designing the sensor module, displacement, vibration, and optical detection can be performed simultaneously on top of pressure detection. This allows for more comprehensive monitoring of the support rod's condition, thereby improving the accuracy of the detection. Attached Figure Description

[0028] Figure 1 A schematic diagram of the fracture detection system for the support rod of the dry engraving equipment provided by this utility model;

[0029] Figure 2 A schematic diagram of the pressure sensor element structure of the fracture detection system for the support rod of the dry engraving equipment provided by this utility model;

[0030] Figure 3 A schematic diagram of the disassembled structure of the pressure sensor element of the fracture detection system for the support rod of the dry engraving equipment provided by this utility model;

[0031] Figure 4 A cross-sectional structural schematic diagram of the pressure sensor element of the fracture detection system for the support rod of the dry engraving equipment provided by this utility model;

[0032] Figure 5 A schematic diagram of the sensor module structure of the fracture detection system for the support rod of the dry engraving equipment provided by this utility model;

[0033] Figure 6 A schematic diagram of the system structure of the fracture detection system for the support rod of the dry engraving equipment provided by this utility model.

[0034] The markings in the diagram are explained as follows:

[0035] Support rod 1;

[0036] Sensor module 2, pressure sensor element 21, displacement sensor 22, vibration sensor 23, optical sensor 24;

[0037] 240 area scan camera;

[0038] Base 210, slider 211, spring 212, pressure sensor 213, dust cover 214, through groove 215, upper dustproof boss 216, lower dustproof boss 217, dustproof labyrinth 218, dust collection groove 219;

[0039] Data acquisition module 3;

[0040] Control unit 4, equipment control module 41, alarm module 42;

[0041] Glass substrate 5;

[0042] Lower electrode 6. Detailed Implementation

[0043] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.

[0044] As described in the background section, in dry etching, the glass substrate is fixed to the lower electrode by a support rod. Therefore, the support rod is a supporting structure between the glass substrate and the lower electrode. If the support rod breaks, it will lead to poor contact between the glass substrate and the lower electrode, causing problems such as uneven etching, equipment damage, or even breakage.

[0045] To solve this technical problem, this utility model provides a fracture detection system for a support rod used in dry engraving equipment, which is applied to dry engraving.

[0046] For details, please refer to Figures 1-6 As shown, the fracture detection system for the support rod of the dry etching equipment specifically includes a support rod 1 and a sensor module 2 for monitoring the state of the support rod 1. The two ends of the support rod 1 are respectively provided with a glass substrate 5 and a lower electrode 6. The sensor module 2 is electrically connected to the control unit 4 through a data acquisition module 3.

[0047] The sensor module 2 includes a pressure sensor element 21;

[0048] The pressure sensor element 21 includes a base 210, a slider 211 and a spring 212. The slider 211 is slidably disposed inside the base 210 and fixed to the spring 212. One end of the support rod 1 is fixed to the slider 211.

[0049] A pressure sensor 213 is provided on the bottom wall of the base 210 for connection to one end of the spring 212, and the pressure sensor 213 is electrically connected to the control unit 4. The sensor module 2 can collect the sensing data of the support rod 1 and input it into the control unit 4 for monitoring.

[0050] The fracture detection system for the support rod of the dry etching equipment provided by this utility model is designed with a pressure sensing element 21 at the connection between the support rod 1 and the lower electrode 6. In this way, when the support rod 1 supports the glass substrate 5 above, the pressure state of the support rod 1 can be detected at any time. If it exceeds the set safe pressure range, it can be fed back through the control unit 4 in time, so as to facilitate timely shutdown and avoid the occurrence of safety hazards.

[0051] To enable those skilled in the art to better understand the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings.

[0052] It should be noted that, unless otherwise specified, the embodiments and features and technical solutions in the present invention can be combined with each other.

[0053] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0054] Example 1

[0055] Please refer to Figures 1-4 As shown, a fracture detection system for a support rod of a dry etching equipment includes a support rod 1 and a sensor module 2 for monitoring the state of the support rod 1. The two ends of the support rod 1 are respectively provided with a glass substrate 5 and a lower electrode 6. The sensor module 2 is electrically connected to a control unit 4 through a data acquisition module 3.

[0056] The sensor module 2 includes a pressure sensor element 21;

[0057] The pressure sensor element 21 includes a base 210, a slider 211 and a spring 212. The slider 211 is slidably disposed inside the base 210 and fixed to the spring 212. One end of the support rod 1 is fixed to the slider 211. The base 210 is fixed to the surface of the lower electrode 6.

[0058] Among them, a pressure sensor 213 is provided on the bottom wall of the base 210 for connecting to one end of the spring 212, and the pressure sensor 213 is electrically connected to the control unit 4. The sensor module 2 can collect the sensing data of the support rod 1 and input it into the control unit 4 for monitoring.

[0059] When the glass substrate 5 is placed on the top of the support rod 1, the pressure on the support rod 1 is transmitted to the slider 211. After being subjected to pressure, the slider 211 slides downward inside the base 210, eventually compressing the spring 212. The compressed spring 212 then feeds the pressure back to the pressure sensor 213 at the bottom. The pressure sensor 213 can detect the pressure and transmit the detected data to the control unit 4 through the data acquisition module 3, thus achieving real-time detection.

[0060] Example 2

[0061] The fracture detection system for the support rod of the dry engraving equipment provided in Embodiment 1 is further optimized, specifically, as follows: Figure 4 As shown, a dust cover 214 is threaded onto the top of the base 210, and a through groove 215 is provided on the top of the dust cover 214 for the support rod 1 to pass through.

[0062] The bottom of the dust cover 214 has an upper dustproof protrusion 216, and the top of the slider 211 has a lower dustproof protrusion 217 corresponding to the position of the upper dustproof protrusion 216. A dustproof maze 218 is formed between the upper dustproof protrusion 216 and the lower dustproof protrusion 217.

[0063] The lower dustproof boss 217 and the support rod 1 together form a dust collection groove 219;

[0064] When the spring 212 is subjected to pressure from the top glass substrate 5, it will deform. The lowest point of its deformation can still maintain a height gap between the upper dustproof boss 216 and the lower dustproof boss 217 to meet the pressure detection requirements.

[0065] like Figure 4 As shown, the dust cover 214 can shield the sliding gap between the slider 211 and the base 210, thus preventing dust from falling directly into the interior of the base 210 and affecting the subsequent application of the pressure sensor 213. At the same time, the dust cover 216 and the lower dust cover 217 can block some particles that fall into the dust cover 214. These particles can then be collected by the dust collection groove 219, preventing them from crossing the lower dust cover 217 and moving further toward the sliding gap between the slider 211 and the base 210, thus achieving a better dust protection effect.

[0066] Example 3

[0067] The fracture detection system for the support rod of the dry engraving equipment provided in Embodiment 1 or 2 is further optimized, such as... Figure 6 As shown, the output terminal of the data acquisition module 3 is electrically connected to the input terminal of the control unit 4, and the input terminal of the data acquisition module 3 is electrically connected to the output terminal of the sensor module 2. In this embodiment, the data acquisition module 3 is used to acquire sensor signals in real time and transmit the data to the control unit 4.

[0068] The control unit 4 is electrically connected to the device control module 41 and the alarm module 42. The alarm module 42 can be connected to a buzzer. Under the action of the data acquisition module 3, the data of the sensor module 2 can be acquired in the control unit 4 and analyzed by the signal processing algorithm therein.

[0069] The control unit 4 in this embodiment includes a signal processing algorithm and a logic control module (which are well known to those skilled in the art and need not be further described in this embodiment). It is used to analyze sensor data and compare the collected data with preset data (preset sensor safety range data). If the data exceeds the preset safety range value after comparison, the abnormal support rod data can be detected, which can trigger an alarm and control the equipment to stop. The equipment control module 41 is used to cut off the radio frequency power supply and gas supply, stop the process operation, and lock the transmission system. The control unit 4 is electrically connected to the external terminal control room.

[0070] The sensor module 2 is a plurality of them, and the plurality of sensor modules 2 are evenly distributed on the lower electrode 6 for assembly with the corresponding support rod 1;

[0071] During the process of the pressure sensing element 21 in the sensor module 2 detecting the pressure status of the support rod 1 in real time, if the detected pressure exceeds the preset pressure safety range, the control unit 4 will take timely action and issue an alarm through the alarm module 42, so that relevant personnel can take further emergency measures (such as stopping the machine, sounding an alarm, evacuating relevant workers, etc.).

[0072] Example 4

[0073] Further optimizations were made to the fracture detection system for the support rod of the dry engraving equipment provided in Example 3:

[0074] like Figure 5 As shown, the sensor module 2 also includes a displacement sensor 22, which is distributed at both ends of the support rod 1 and suspended and fixed by an external support member;

[0075] like Figure 5As shown, two displacement sensors 22 are distributed at both ends of a single support rod 1. The two displacement sensors 22 detect the displacement at the connection points between the support rod 1 and the glass substrate 5 and the lower electrode 6, respectively.

[0076] The displacement sensor 22 used in this embodiment is specifically a laser displacement sensor. In actual application, the detection end needs to be aligned with the reflective mark set on the surface of the support rod 1 to ensure that the laser beam is incident perpendicularly. The distance is adjusted according to the range (usually 10~100cm). If the detected displacement data exceeds the set threshold during the actual detection process of the displacement sensor 22, an alarm will be triggered by the alarm module 42.

[0077] like Figure 5 As shown, the sensor module 2 also includes a vibration sensor 23;

[0078] The vibration sensor 23 is directly fixed to the surface of the support rod 1. In this embodiment, the vibration sensor 23 is installed on the top of the support rod 1. However, in actual applications, its installation position can be changed, or multiple vibration sensors 23 can be installed simultaneously on the surface of the support rod 1. This allows for multi-point vibration detection of areas with concentrated stress on the surface of the support rod 1. If the detected vibration data exceeds the set threshold during the actual detection process of the vibration sensor 23, an alarm will be triggered by the alarm module 42.

[0079] like Figure 5 As shown, the sensor module 2 also includes an optical sensor 24;

[0080] The optical sensor 24 includes an area array camera 240 disposed on the outside of the support rod 1. In this embodiment, the optical sensor 24 is used to detect surface defects (such as cracks) on the support rod 1. A light source can be added to the area array camera 240 to illuminate the surface of the support rod 1, so that the image captured by the area array camera 240 can be clearer.

[0081] The area scan camera 240 mainly captures and detects the areas where the stress of the support rod 1 is relatively concentrated, or the areas on the surface of the support rod 1 that are most prone to fatigue and fracture in actual production experience.

[0082] After the area scan camera 240 detects the image of the support rod 1 surface in a specific area, the image processing system within the camera first performs calibration: checkerboard calibration + calibration block spacing calibration. Then, crack detection is performed: Canny edge detection + morphological operations + area thresholding. Finally, tilt calculation is performed: feature point matching (SIFT algorithm) + trigonometric function angle calculation. The final output is a real-time display of the support rod surface image and deformation heatmap.

[0083] If the data output to the data acquisition module 3 exceeds the preset safety threshold range, the alarm module 42 will be triggered to issue an alarm and push the data to the monitoring platform.

[0084] Since the actual installation method, specific structure and sensing principle of the displacement sensor 22, vibration sensor 23 and optical sensor 24 are well known technical means in the art, and in this embodiment they are simply set on the surface of the support rod 1 for conventional detection applications, no further explanation is needed in this embodiment.

[0085] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0086] Obviously, the embodiments described above are only some embodiments of this utility model, not all embodiments. The accompanying drawings show preferred embodiments of this utility model, but do not limit the patent scope of this utility model. This utility model can be implemented in many different forms; rather, the purpose of providing these embodiments is to provide a more thorough and comprehensive understanding of the disclosure of this utility model. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing specific embodiments, or make equivalent substitutions for some of the technical features. Any equivalent structures made using the content of this utility model specification and drawings, directly or indirectly applied to other related technical fields, are similarly within the patent protection scope of this utility model.

Claims

1. A fracture detection system for a support rod of a dry engraving equipment, comprising a support rod (1) and a sensor module (2) for monitoring the state of the support rod (1), wherein the sensor module (2) is electrically connected to a control unit (4) via a data acquisition module (3), and the two ends of the support rod (1) are respectively provided with a glass substrate (5) and a lower electrode (6), characterized in that; The sensor module (2) includes a pressure sensor element (21); The pressure sensor element (21) includes a base (210), a slider (211) and a spring (212). The slider (211) is slidably disposed inside the base (210) and fixed to the spring (212). One end of the support rod (1) is fixed to the slider (211). A pressure sensor (213) is provided on the bottom wall of the base (210) for connecting to one end of the spring (212), and the pressure sensor (213) is electrically connected to the control unit (4). The pressure sensor (213) can collect the pressure sensing data of the support rod (1) and input it into the control unit (4) for monitoring.

2. The fracture detection system for the support rod of the dry engraving equipment according to claim 1, characterized in that, The top of the base (210) is threaded with a dust cover (214), and the top of the dust cover (214) is provided with a through groove (215) for the support rod (1) to pass through.

3. The fracture detection system for the support rod of the dry engraving equipment according to claim 2, characterized in that, The bottom of the dust cover (214) has an upper dustproof protrusion (216), and the top of the slider (211) has a lower dustproof protrusion (217) corresponding to the position of the upper dustproof protrusion (216). A dustproof labyrinth (218) is formed between the upper dustproof protrusion (216) and the lower dustproof protrusion (217).

4. The fracture detection system for the support rod of the dry engraving equipment according to claim 3, characterized in that, The lower dustproof boss (217) and the support rod (1) together form a dust collection groove (219).

5. The fracture detection system for the support rod of the dry engraving equipment according to claim 1, characterized in that, The output terminal of the data acquisition module (3) is electrically connected to the input terminal of the control unit (4), and the input terminal of the data acquisition module (3) is electrically connected to the output terminal of the sensor module (2). The control unit (4) is electrically connected to the device control module (41) and the alarm module (42). Under the action of the data acquisition module (3), the sensor module (2) can acquire data in the control unit (4) and analyze the data through the signal processing algorithm in it.

6. The fracture detection system for the support rod of the dry engraving equipment according to claim 5, characterized in that, The sensor module (2) also includes a displacement sensor (22). The displacement sensors (22) are distributed at both ends of the support rod (1) and are suspended and fixed by external support members.

7. The fracture detection system for the support rod of the dry engraving equipment according to claim 5, characterized in that, The sensor module (2) also includes a vibration sensor (23); The vibration sensor (23) is directly fixed to the surface of the support rod (1).

8. The fracture detection system for the support rod of the dry engraving equipment according to claim 5, characterized in that, The sensor module (2) also includes an optical sensor (24); The optical sensor (24) includes an area array camera (240) located on the outside of the support rod (1).

9. The fracture detection system for the support rod of the dry engraving equipment according to claim 5, characterized in that, The control unit (4) is electrically connected to the external terminal control room.

10. The fracture detection system for the support rod of the dry engraving equipment according to claim 1, characterized in that, The sensor module (2) has multiple components, and the multiple sensor modules (2) are evenly distributed on the lower electrode (6) for assembly with the corresponding support rod (1).

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