Auxiliary positioning mechanism for semiconductor precision part detection

Abstract

This utility model relates to the field of positioning mechanism technology and discloses an auxiliary positioning mechanism for the inspection of precision semiconductor components. It includes a fixed base with three sliding grooves on its top. A connecting block is movably connected to the inner sidewall of each sliding groove, and a waist-shaped hole is formed on the inner bottom wall of each sliding groove. A cavity is formed inside the fixed base, and a clamping assembly is disposed within the cavity. A fixing assembly is disposed on the top of each connecting block. This auxiliary positioning mechanism for the inspection of precision semiconductor components, through the cooperation of the clamping and fixing assemblies, can perform multi-directional positioning of precision semiconductor components. The three connecting blocks move synchronously within the sliding grooves, clamping the precision component from different directions, ensuring positioning accuracy. The design of the trapezoidal blocks and rubber pads allows the mechanism to adapt to precision semiconductor components of different shapes and sizes, further improving positioning accuracy and versatility.

Description

Technical Field

[0001] This utility model relates to the field of positioning mechanism technology, and in particular to an auxiliary positioning mechanism for the inspection of semiconductor precision components. Background Technology

[0002] In the semiconductor manufacturing field, the inspection accuracy of precision components directly determines the product yield and performance stability. As semiconductor devices develop towards miniaturization and integration, the size of precision components continues to shrink, such as nanoscale chips and micron-level packaged components. The positioning accuracy requirements during the inspection process reach the submicron or even nanometer level.

[0003] However, existing auxiliary positioning mechanisms for inspecting precision semiconductor components have the following drawbacks:

[0004] (1) The existing positioning methods of auxiliary positioning mechanisms for semiconductor precision component inspection may have problems such as insufficient positioning accuracy and poor adaptability;

[0005] (2) Some simple fixtures may only be able to position parts of a specific shape and size. For precision semiconductor parts of different specifications, the fixtures need to be changed frequently, which is cumbersome and inefficient.

[0006] Therefore, this utility model provides an auxiliary positioning mechanism for the inspection of precision semiconductor components. Utility Model Content

[0007] (a) Technical problems to be solved

[0008] The technical problem solved by the utility model is to provide an auxiliary positioning mechanism for the inspection of semiconductor precision parts with high practicality, which solves the problems mentioned in the background art that the positioning method of the existing auxiliary positioning mechanism for the inspection of semiconductor precision parts may have insufficient positioning accuracy and requires frequent change of fixtures for semiconductor precision parts of different specifications.

[0009] (II) Technical Solution

[0010] To achieve the above objectives, this utility model is implemented through the following technical solution: an auxiliary positioning mechanism for testing precision semiconductor components, including a fixed base, three sliding grooves on the top of the fixed base, a connecting block movably connected to the inner sidewall of each sliding groove, an oblong hole on the inner bottom wall of each sliding groove, a cavity inside the fixed base, a clamping assembly inside the cavity, and a fixing assembly on the top of the connecting block;

[0011] The clamping assembly includes a worm gear rotatably connected to the inner wall of the cavity. A worm wheel meshes with the surface of the worm gear. Three arc-shaped grooves are formed on the top of the worm wheel. A connecting rod is provided on the inner surface of the arc-shaped grooves and the waist-shaped hole. The top of the connecting rod is fixedly connected to the bottom of the connecting block. A limit block is fixedly connected to the bottom of the connecting rod. The top of the limit block is in contact with the bottom of the fixing seat.

[0012] The fixing component includes a mounting block disposed on the top of the connecting block. The top of the mounting block has a countersunk hole, and the inner side wall of the countersunk hole is provided with a screw. The top of the connecting block has a threaded groove adapted to the screw. One end of the mounting block is fixedly connected to a trapezoidal block, and one side of the trapezoidal block is fixedly connected to a rubber pad.

[0013] Optionally, a limiting rod is fixedly connected to one side of the connecting block, and a circular hole adapted to the limiting rod is opened on the inner side wall of the slide groove. The limiting rod is movably connected to the inner side wall of the circular hole, so that the moving trajectory of the connecting block always remains straight, ensuring the stability and accuracy of the clamping assembly during operation.

[0014] Optionally, one end of the worm gear extends to the outside of the cavity, and a knob is fixedly connected to one end of the worm gear. The surface of the knob is provided with anti-slip texture, which makes it easier and more stable to turn the knob, and it is not easy to slip. This improves the convenience of operation and also ensures the controllability of the positioning and adjustment process.

[0015] Optionally, both sides of the bottom of the fixed base are fixedly connected to support legs. The support legs are rectangular in shape, which can adapt to different work platforms and enhance the applicability of the positioning mechanism.

[0016] Optionally, positioning blocks are fixedly connected to both sides of the top of the connecting block, and positioning grooves adapted to the positioning blocks are opened on both sides of the mounting block, so as to ensure the accuracy of the mounting block installation, so that it can maintain the correct position and angle when fixing semiconductor precision parts and improve the positioning accuracy.

[0017] Optionally, a washer is provided on the inner wall of the countersunk hole. The top of the washer contacts the bottom of the screw. The washer also plays a role in preventing loosening, reducing the loosening of the screw due to vibration or long-term use, and ensuring the stability and reliability of the connection.

[0018] (III) Beneficial Effects

[0019] This utility model provides an auxiliary positioning mechanism for inspecting precision semiconductor components, which has the following advantages:

[0020] 1. This auxiliary positioning mechanism for semiconductor precision component inspection, through the cooperation of clamping and fixing components, can perform multi-directional positioning of semiconductor precision components. Three connecting blocks move synchronously in the slide groove, which can clamp the precision component from different directions, ensuring the accuracy of positioning. The design of trapezoidal blocks and rubber pads allows the mechanism to adapt to semiconductor precision components of different shapes and sizes, further improving the positioning accuracy and versatility.

[0021] 2. The auxiliary positioning mechanism for testing precision semiconductor components has a mounting block connected to a connecting block by screws, and the cooperation of a positioning block and a positioning groove makes the installation and removal of the mounting block more convenient. At the same time, the setting of the shim can prevent the screws from loosening and ensure the stability of the connection. This makes the operation simpler when it is necessary to replace the mounting block of different specifications to adapt to different precision semiconductor components. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0023] Figure 2 This is a schematic diagram of the support leg structure of this utility model;

[0024] Figure 3 This is a schematic diagram of the fixing base structure of this utility model;

[0025] Figure 4 This is a schematic diagram of the mounting block structure of this utility model.

[0026] In the diagram: 1. Fixed base; 101. Connecting block; 2. Clamping assembly; 201. Worm gear; 202. Worm wheel; 203. Connecting rod; 204. Limiting block; 3. Fixed assembly; 301. Mounting block; 302. Screw; 303. Trapezoidal block; 304. Rubber pad; 4. Limiting rod; 5. Knob; 6. Support leg; 7. Positioning block; 8. Washer. Detailed Implementation

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0028] Please see Figures 1 to 4This utility model provides a technical solution: an auxiliary positioning mechanism for testing semiconductor precision components, including a fixed base 1, three sliding grooves on the top of the fixed base 1 to limit the movement direction of the connecting block 101, the connecting block 101 is movably connected to the inner side wall of each sliding groove, the waist-shaped hole is opened on the inner bottom wall of each sliding groove, a cavity is opened inside the fixed base 1, a clamping component 2 is arranged inside the cavity, and a fixing component 3 is arranged on the top of the connecting block 101;

[0029] The clamping assembly 2 includes a worm gear 201 rotatably connected to the inner wall of the cavity. The worm gear 201 has a self-locking function, which can maintain its current position when it stops rotating, ensuring the stability of the clamping force. A worm wheel 202 meshes with the surface of the worm gear 201. The top of the worm wheel 202 has three arc-shaped grooves. The shape of the arc-shaped grooves guides the connecting rod 203 to move along a specific trajectory in the waist-shaped hole, thereby realizing the synchronous movement of the connecting block 101. The connecting rod 203 is provided on the inner surface of the arc-shaped grooves and the waist-shaped hole. The top of the connecting rod 203 is fixedly connected to the bottom of the connecting block 101, and the bottom of the connecting rod 203 is fixedly connected to a limit block 204. The top of the limit block 204 contacts the bottom of the fixed seat 1. The worm gear 201 is a high-precision worm gear with a module m=2 and a number of teeth z1=10. When meshing with the worm wheel 202 with a number of teeth z2=50 and a transmission ratio i=z2 / z1=5, the transmission efficiency is ≥90%.

[0030] The fixing component 3 includes a mounting block 301 disposed on the top of the connecting block 101. The top of the mounting block 301 has a countersunk hole, and the inner side wall of the countersunk hole is provided with a screw 302, which can firmly fix the mounting block 301 to the connecting block 101 to ensure the stability of the fixing component 3. The top of the connecting block 101 has a threaded groove that matches the screw 302. One end of the mounting block 301 is fixedly connected to a trapezoidal block 303. Its trapezoidal shape design can better fit the edge of the semiconductor precision component and increase the contact area with the precision component. One side of the trapezoidal block 303 is fixedly connected to a rubber pad 304. The fixing component 3 includes a mounting block 301 disposed on the top of the connecting block 101. The top of the mounting block 301 has a countersunk hole with a diameter of φ6mm and a depth of 3mm, which matches the M5 screw 302 with a thread precision of 6g.

[0031] A limiting rod 4 is fixedly connected to one side of the connecting block 101. A circular hole adapted to the limiting rod 4 is opened on the inner side wall of the slide groove. The limiting rod 4 is movably connected to the inner side wall of the circular hole, so that the movement trajectory of the connecting block 101 always remains straight, ensuring the stability and accuracy of the clamping assembly during operation.

[0032] One end of the worm gear 201 extends to the outside of the cavity, and a knob 5 is fixedly connected to one end of the worm gear 201. The surface of the knob 5 is provided with anti-slip texture, which makes it easier and more stable to turn the knob 5, and it is not easy to slip. This improves the ease of operation and also ensures the controllability of the positioning and adjustment process.

[0033] Both sides of the bottom of the fixed base 1 are fixedly connected to support legs 6. The support legs 6 are rectangular in shape, which can adapt to different work platforms and enhance the applicability of the positioning mechanism.

[0034] Positioning blocks 7 are fixedly connected to both sides of the top of the connecting block 101. Positioning grooves that match the positioning blocks 7 are opened on both sides of the mounting block 301, ensuring the accuracy of the mounting block 301 installation, so that it can maintain the correct position and angle when fixing semiconductor precision parts, and improving the positioning accuracy.

[0035] A washer 8 is provided on the inner wall of the countersunk hole. The top of the washer 8 contacts the bottom of the screw 302. The washer 8 also plays a role in preventing loosening, reducing the loosening of the screw 302 due to vibration or long-term use, and ensuring the stability and reliability of the connection.

[0036] In this invention, the working steps of the device are as follows:

[0037] First step: When it is necessary to clamp and position the precision semiconductor component, the operator turns the knob 5, which drives the worm 201 to rotate. With the worm 201 and worm wheel 202 meshing with each other, the rotation of the worm 201 will cause the worm wheel 202 to start rotating. When the worm wheel 202 rotates, the arc-shaped slide groove will push the connecting rod 203, causing the connecting rod 203 to move along the waist-shaped hole. This causes the connecting block 101 to slide in the slide groove along with the connecting rod 203. The three connecting blocks 101 move towards or away from the center at the same time, thereby realizing the clamping or releasing operation of the precision semiconductor component.

[0038] The second step: The fixing component 3 is mainly used for the trapezoidal block 303 adapted to different semiconductor precision parts. The mounting block 301 is fixedly connected to the connecting block 101 by the screw 302. During installation, the screw 302 is passed through the countersunk hole at the top of the mounting block 301 and screwed into the threaded groove at the top of the connecting block 101. The trapezoidal block 303 and the rubber pad 304 at one end of the mounting block 301 can better fit the surface of the semiconductor precision part, play a role in buffering and increasing friction, and improve the stability of positioning.

[0039] It should be noted that the device structure and accompanying drawings of this utility model mainly describe the principle of this utility model. In terms of the technical aspects of this design principle, the setting of the power mechanism, power supply system and control system of the device is not fully described. However, under the premise that those skilled in the art understand the principle of the above utility model, the specific details of its power mechanism, power supply system and control system can be clearly understood. The control method in the application document is automatic control through a controller. The control circuit of the controller can be implemented by those skilled in the art through simple programming.

[0040] All standard parts used can be purchased from the market, and can be customized according to the instructions and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the existing technology. The machinery, parts and equipment adopt conventional models in the existing technology, and the structure and principle of the components known to those skilled in the art can be known by those skilled in the art through technical manuals or conventional experimental methods.

[0041] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A kind of auxiliary positioning mechanism for semiconductor precision detection, including fixed seat (1), it is characterized in that: The top of the fixed base (1) is provided with three sliding grooves, and a connecting block (101) is movably connected to the inner side wall of each sliding groove. A waist-shaped hole is provided on the inner bottom wall of each sliding groove. A cavity is provided inside the fixed base (1), and a clamping component (2) is provided inside the cavity. A fixing component (3) is provided on the top of the connecting block (101). The clamping assembly (2) includes a worm gear (201) rotatably connected to the inner wall of the cavity. A worm wheel (202) meshes with the surface of the worm gear (201). The top of the worm wheel (202) is provided with three arc-shaped grooves. A connecting rod (203) is provided together with the inner surface of the arc-shaped grooves and the waist-shaped hole. The top of the connecting rod (203) is fixedly connected to the bottom of the connecting block (101). The bottom of the connecting rod (203) is fixedly connected to a limiting block (204). The top of the limiting block (204) is in contact with the bottom of the fixed seat (1). The fixing component (3) includes a mounting block (301) disposed on the top of the connecting block (101). The top of the mounting block (301) is provided with a countersunk hole, and a screw (302) is provided on the inner side wall of the countersunk hole. The top of the connecting block (101) is provided with a threaded groove that matches the screw (302). One end of the mounting block (301) is fixedly connected to a trapezoidal block (303), and one side of the trapezoidal block (303) is fixedly connected to a rubber pad (304).

2. The auxiliary positioning mechanism for detecting a semiconductor precision part according to claim 1, characterized in that: A limiting rod (4) is fixedly connected to one side of the connecting block (101), and a circular hole adapted to the limiting rod (4) is opened on the inner side wall of the slide groove. The limiting rod (4) is movably connected to the inner side wall of the circular hole.

3. The auxiliary positioning mechanism for inspecting precision semiconductor components according to claim 1, characterized in that: One end of the worm (201) extends to the outside of the cavity, and a knob (5) is fixedly connected to one end of the worm (201). The surface of the knob (5) is provided with anti-slip texture.

4. The auxiliary positioning mechanism for inspecting precision semiconductor components according to claim 1, characterized in that: Both sides of the bottom of the fixed base (1) are fixedly connected to support legs (6), and the support legs (6) are rectangular in shape.

5. The auxiliary positioning mechanism for inspecting precision semiconductor components according to claim 1, characterized in that: The top two sides of the connecting block (101) are fixedly connected with positioning blocks (7), and the two sides of the mounting block (301) are provided with positioning grooves that are compatible with the positioning blocks (7).

6. The auxiliary positioning mechanism for inspecting precision semiconductor components according to claim 1, characterized in that: A gasket (8) is provided on the inner wall of the countersunk hole, and the top of the gasket (8) is in contact with the bottom of the screw (302).

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