Vacuum coating machine coating workpiece rotating frame

Abstract

The utility model discloses a kind of vacuum coating machine coating workpiece rotating frame, it includes: device ontology, the top of the device ontology is fixedly connected with fixed layer, the middle part of the fixed layer is fixedly connected with rotating motor, the connecting end of the rotating motor is penetrated rotating frame, the top of the rotating frame is fixedly connected with sealing structure, the inside of the sealing structure is provided with sealing groove above;The inside of the sealing structure is provided with shaft sleeve groove in middle part, the shaft sleeve groove is provided with shaft sleeve, groove is set up in the shaft sleeve, and groove is filled with magnetic fluid, the middle part of the outer surface of the sealing structure is provided with magnetic pole installation groove, the middle part of the shaft sleeve is provided with rotating slot, sealing is carried out to bearing by the device using magnetic fluid sealing technology, effectively prevent vacuum environment destruction, improve coating quality.

Description

Technical Field

[0001] This utility model relates to the field of rotating frames for coated workpieces, and in particular to a rotating frame for coated workpieces in a vacuum coating machine. Background Technology

[0002] A vacuum coating machine is a device that deposits materials onto the surface of a substrate to form a thin film in a vacuum environment using physical or chemical methods. Its working principle is typically based on physical vapor deposition (PVD) or chemical vapor deposition (CVD) technologies, which can convert solid materials into gaseous atoms, molecules, or ions under high vacuum conditions, and then deposit them onto the target substrate to form a uniform, dense, and strongly adherent thin film.

[0003] A search revealed Chinese Patent Publication No. CN211199395U, which discloses a high-speed rotating frame for a vacuum coating machine workpiece holder, relating to the field of vacuum coating machine technology. This high-speed rotating frame for a vacuum coating machine workpiece holder includes a positioning plate, a connecting plate connected to the top of the positioning plate, a bearing mounting seat connected to the top of the connecting plate, a bearing mounting cover plate connected to the surface of the bearing mounting seat, a limit plate mounted on the surface of the bearing, and a limit cover plate connected to the top of the limit plate. This high-speed rotating frame for a vacuum coating machine workpiece holder achieves better bearing plate fixation and positioning by fixing the positioning plate to the equipment, and simultaneously fixing the connecting plate to the equipment with bolts. The bearing mounting seat is also fixed to the connecting plate with bolts. The bearing is further secured by the bearing mounting cover plate on top of the bearing mounting seat. However, the bearing sealing in this device is poor, which can easily lead to disruption of the vacuum environment and affect the coating quality. Utility Model Content

[0004] The purpose of this utility model is to provide a workpiece rotation frame for a vacuum coating machine, which solves the problems of poor sealing in ordinary coating machine bearings in the prior art.

[0005] To achieve the above objectives, a workpiece rotating frame for a vacuum coating machine is provided, comprising: a device body, a fixing layer fixedly connected to the top of the device body, a rotating motor fixedly connected to the middle of the fixing layer, the connecting end of the rotating motor penetrating the rotating frame, and a sealing structure fixedly connected to the top of the rotating frame, wherein a sealing groove is provided inside the sealing structure.

[0006] The sealing structure has a bushing groove in the middle of its inner side, and a bushing is provided inside the bushing groove. The bushing has a groove and is filled with magnetic fluid. The sealing structure has a magnetic pole mounting groove in the middle of its outer surface, and the bushing has a rotational groove in the middle of its center.

[0007] According to the aforementioned workpiece rotation frame of a vacuum coating machine, a front opening door is provided on the front end of the outer surface of the device body, and a handle is fixedly connected to one side of the upper middle part of the front opening door.

[0008] According to the aforementioned workpiece rotation frame for a vacuum coating machine, a control panel is fixedly connected to the upper front end of the fixed layer, shock-absorbing bases are fixedly connected to the four corners of the bottom of the device body, and a vacuum machine connection end is fixedly connected to the lower side of the middle part of the device body.

[0009] According to the aforementioned workpiece rotating frame for a vacuum coating machine, a rotating base is provided at the bottom of the rotating frame, and an internal slot is provided inside the rotating base. The output shaft of the rotating motor is fixedly connected to a rotating connecting rod downward through a coupling, and the other end of the rotating connecting rod is connected to the rotating base.

[0010] According to the aforementioned workpiece rotation frame for a vacuum coating machine, a first gear is fixedly connected to one end of the rotating connecting rod at its lower end, and a second gear is connected to the two rotating shafts on both sides of the bottom of the rotating base, with the first gear and the second gear meshing with each other.

[0011] According to the aforementioned workpiece rotating frame of a vacuum coating machine, a support rod is fixedly connected above the middle part of the second gear, and a clamping device is fixedly connected above the bottom of the support rod.

[0012] According to the aforementioned workpiece rotating frame for a vacuum coating machine, a hydraulic device is provided in the middle of the clamping device, and a clamping groove is provided above the clamping device with a slidably connected claw, and an anti-slip layer is provided on the claw.

[0013] The above-mentioned solution has the following beneficial effects:

[0014] The device uses magnetohydrodynamic sealing technology to seal the bearing, effectively preventing damage to the vacuum environment and improving the coating quality.

[0015] 2. The magnetohydrodynamic seal of this device has good self-lubricating properties, which reduces bearing wear, extends the service life of the equipment, and ensures the stability and reliability of the rotating frame in a high vacuum environment.

[0016] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0017] The present invention will be further described below with reference to the accompanying drawings and embodiments;

[0018] Figure 1This is a schematic diagram of the overall structure of a workpiece rotating frame for a vacuum coating machine according to the present invention;

[0019] Figure 2 This is a schematic diagram of the rotating frame structure of a workpiece rotating frame for a vacuum coating machine according to the present invention;

[0020] Figure 3 This is a schematic diagram of the sealing device structure of the workpiece rotating frame of a vacuum coating machine according to the present invention;

[0021] Figure 4 This is a schematic diagram of the clamping device structure of the workpiece rotating frame of a vacuum coating machine according to the present invention.

[0022] Legend:

[0023] 1. Device body; 101. Front opening; 102. Handle; 103. Shock-absorbing base; 104. Vacuum machine connection end; 2. Fixing layer; 201. Rotary motor; 202. Control panel; 3. Rotating frame; 301. Rotating base; 302. Internal slot; 303. First gear; 304. Second gear; 305. Support rod; 306. Rotating connecting rod; 4. Sealing structure; 401. Sealing groove; 402. Magnetic pole mounting groove; 403. Bushing groove; 404. Bushing; 405. Rotary slot; 406. Magnetorheological fluid; 5. Clamping device; 501. Clamping slide; 502. Hydraulic device; 503. Claw; 504. Anti-slip layer. Detailed Implementation

[0024] This section will describe in detail the specific embodiments of the present utility model. The preferred embodiments of the present utility model are shown in the accompanying drawings. The purpose of the drawings is to supplement the textual description with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of the present utility model, but they should not be construed as limiting the scope of protection of the present utility model.

[0025] Reference Figure 1-4 This utility model provides a workpiece rotation frame for a vacuum coating machine, comprising: a device body 1, a fixing layer 2 fixedly connected to the top of the device body 1, a rotary motor 201 fixedly connected to the middle of the fixing layer 2, the connecting end of the rotary motor 201 penetrating the rotation frame 3 inward, and a sealing structure 4 fixedly connected to the top of the rotation frame 3. The sealing structure 4 can effectively isolate the external environment, ensure the internal vacuum state, and improve the coating uniformity. A sealing groove 401 is provided inside the upper part of the sealing structure 4.

[0026] A bushing groove 403 is formed in the middle of the inner side of the sealing structure 4. A bushing 404 is disposed inside the bushing groove 403. The bushing 404 has a groove filled with magnetic fluid 406. The magnetic fluid 406 forms a sealing barrier under the action of a magnetic field to prevent gas leakage and ensure the coating quality. A magnetic pole mounting groove 402 is formed in the middle of the outer surface of the sealing structure 4. A magnetic pole is installed in the magnetic pole mounting groove 402. The magnetic pole interacts with the magnetic fluid 406 on the bushing 404. A rotary slot 405 is formed in the middle of the bushing 404.

[0027] The front end of the outer surface of the device body 1 is provided with a front door 101. A handle 102 is fixedly connected to one side of the upper middle part of the front door 101. The handle 102 facilitates the operator to open and close the door.

[0028] A control panel 202 is fixedly connected to the upper front end of the fixed layer 2. A shock-absorbing base 103 is fixedly connected to the four corners of the bottom of the device body 1. A vacuum machine connection end 104 is fixedly connected to the lower side of the middle part of the device body 1. The control panel 202 can monitor and adjust the coating parameters in real time to ensure process stability. The shock-absorbing base 103 effectively reduces operating vibration and improves equipment stability.

[0029] A rotating base 301 is provided at the bottom of the rotating frame 3. An internal slot 302 is provided inside the rotating base 301. The output shaft of the rotating motor 201 is fixedly connected to a rotating connecting rod 306 downward through a coupling. The other end of the rotating connecting rod 306 is connected to the rotating base 301. The rotating connecting rod 306 can rotate the first gear 303 at a constant speed.

[0030] A first gear 303 is fixedly connected to one end of the rotating connecting rod 306 at its lower end. A second gear 304 is connected to the two rotating shafts on both sides of the bottom of the rotating base 301. The first gear 303 and the second gear 304 mesh with each other. The first gear 303 and the second gear 304 can mesh and transmit power, ensuring that the rotating frame 3 rotates smoothly and improving the uniformity of the coating.

[0031] A support rod 305 is fixedly connected to the upper middle part of the second gear 304, and a clamping device 5 is fixedly connected to the upper bottom of the support rod 305. The clamping device 5 is used to fix the workpiece to be coated and ensure that it remains stable during rotation.

[0032] A hydraulic device 502 is provided in the middle of the clamping device 5, and a clamping groove 501 is provided above the clamping device 5.

[0033] A jaw 503 is slidably connected to the clamping groove 501. An anti-slip layer 504 is laid on the jaw 503. The jaw 503 is driven by a hydraulic device 502 to move precisely within the clamping groove 501, firmly clamping the workpiece and preventing slippage.

[0034] Working principle: The operator opens the front door 101 through the handle 102 to load the workpiece. The hydraulic device 502 of the clamping device 5 drives the jaws 503 to slide along the clamping groove 501, and the workpiece is firmly fixed by the anti-slip layer 504. After starting, the rotary motor 201 drives the rotary connecting rod 306 to drive the first gear 303 to rotate. The meshing second gear 304 causes the rotating frame 3 to rotate synchronously on multiple axes through the support rod 305. During the rotation, the magnetic poles in the magnetic pole mounting groove 402 of the sealing structure 4 and the magnetic fluid 406 in the bushing 404 form a dynamic sealing barrier to isolate gas leakage and ensure a vacuum environment. The workpiece receives uniform coating under uniform rotation, and the shock-absorbing base 103 suppresses vibration to ensure process stability.

[0035] The embodiments of the present utility model have been described in detail above with reference to the accompanying drawings. However, the present utility model is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present utility model.

Claims

1. A workpiece rotary holder for a vacuum coater, comprising: The device body (1) is characterized in that a fixing layer (2) is fixedly connected to the top of the device body (1), a rotary motor (201) is fixedly connected to the middle of the fixing layer (2), the connecting end of the rotary motor (201) passes through the rotating frame (3), a sealing structure (4) is fixedly connected to the top of the rotating frame (3), and a sealing groove (401) is opened in the upper part of the interior of the sealing structure (4). The sealing structure (4) has a bushing groove (403) in the middle of its inner side, and a bushing (404) is provided inside the bushing groove (403). The bushing (404) has a groove and is filled with magnetic fluid (406). The sealing structure (4) has a magnetic pole mounting groove (402) in the middle of its outer surface, and the bushing (404) has a rotating groove (405) in the middle.

2. The workpiece rotating frame of a vacuum coating machine of claim 1, wherein, The front end of the outer surface of the device body (1) is provided with a front opening door (101), and a handle (102) is fixedly connected to one side of the upper middle part of the front opening door (101).

3. The workpiece rotating frame of claim 1, wherein, A control panel (202) is fixedly connected to the upper front end of the fixed layer (2), a shock-absorbing base (103) is fixedly connected to the four corners of the bottom of the device body (1), and a vacuum machine connection end (104) is fixedly connected to the lower side of the middle part of the device body (1).

4. The workpiece rotating frame of claim 1, wherein, A rotating base (301) is provided below the bottom of the rotating frame (3). An internal slot (302) is provided inside the rotating base (301). The output shaft of the rotating motor (201) is fixedly connected to a rotating connecting rod (306) via a coupling, and the other end of the rotating connecting rod (306) is connected to the rotating base (301).

5. The workpiece rotating holder of claim 4, wherein, A first gear (303) is fixedly connected to one end of the rotating connecting rod (306) at its lower end. A second gear (304) is connected to the two rotating shafts on both sides of the bottom of the rotating base (301), and the first gear (303) and the second gear (304) mesh with each other.

6. The workpiece rotating holder of claim 5, wherein, A support rod (305) is fixedly connected to the upper part of the middle of the second gear (304), and a clamping device (5) is fixedly connected to the upper part of the bottom of the support rod (305).

7. The workpiece rotating holder of claim 6, wherein, A hydraulic device (502) is provided in the middle of the clamping device (5), and a clamping groove (501) is provided above the clamping device (5).

8. The workpiece rotating holder of claim 7, wherein, A claw (503) is slidably connected to the clamping groove (501), and an anti-slip layer (504) is laid on the claw (503).

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