Vacuum plug hole machine

Abstract

This application provides a vacuum plugging machine. The vacuum plugging machine includes a support part and a clamping part. The support part is used to support a fixture. The clamping part is disposed in the support part to fix the fixture. The position of the clamping part in the support part is adjustable.

Description

Technical Field

[0001] This application relates to the semiconductor field, and more specifically, to a vacuum plugging machine. Background Technology

[0002] In existing technology, when a vacuum via plugging machine performs resin via plugging on an integrated circuit board, a fixture needs to be placed inside. However, the main chamber of the vacuum via plugging machine is a vacuum environment, so the plane used to support the fixture cannot incorporate a suction design. The fixture can only be fixed by tape, which can easily cause the fixture to move during the process, resulting in poor via plugging. Utility Model Content

[0003] In view of this, one of the objectives of this application is to provide a vacuum plugging machine to solve the above-mentioned problems.

[0004] According to one embodiment of this application, a vacuum plugging machine is provided. The vacuum plugging machine includes a support portion and a clamping portion. The support portion is used to support a fixture. The clamping portion is disposed in the support portion to fix the fixture. The position of the clamping portion in the support portion is adjustable.

[0005] According to one embodiment of this application, the supporting portion includes a groove. The groove is used to allow the clamping portion to move therein.

[0006] According to one embodiment of this application, the clamping portion includes a clamping member that is embedded in the groove and protrudes from the upper surface of the bearing portion.

[0007] According to one embodiment of this application, the clamping member includes a plane. The plane matches the shape of the side surface of the fixture, and the plane contacts the side surface of the fixture when the fixture is clamped.

[0008] According to one embodiment of this application, the clamping member includes a screw.

[0009] According to one embodiment of this application, a plurality of the clamping members are symmetrically arranged in the bearing portion.

[0010] According to one embodiment of this application, the vacuum plugging machine further includes a cylinder. The cylinder is used to control the position of the clamping part in the support part. Attached Figure Description

[0011] The accompanying drawings are provided to further illustrate the present application and form part of the specification. They are used together with the following detailed description to explain the present application, but do not constitute a limitation thereof. In the drawings:

[0012] Figure 1A block diagram illustrating a vacuum plugging machine according to an embodiment of this application.

[0013] Figure 2 A partial schematic diagram illustrating a vacuum plugging machine according to an embodiment of this application.

[0014] Figure 3 A perspective view of a clamping member according to an embodiment of this application is shown.

[0015] Figure 4A and Figure 4B A schematic diagram illustrating a clamping fixture according to an embodiment of this application. Detailed Implementation

[0016] The following disclosure provides various implementations or examples that can be used to achieve different features of this disclosure. Specific examples of components and configurations described below are for simplification purposes. It is understood that these descriptions are illustrative only and are not intended to limit the scope of this disclosure. For example, in the following description, forming a first feature on or over a second feature may include, in some embodiments, the first and second features being in direct contact with each other; and may also include, in some embodiments, additional components being formed between the first and second features, such that the first and second features may not be in direct contact. Furthermore, component symbols and / or reference numerals may be reused in multiple embodiments of this disclosure. Such reuse is for the purpose of brevity and clarity and does not in itself represent a relationship between the different embodiments and / or configurations discussed.

[0017] Furthermore, the use of spatially relative terms, such as "below," "below," "lower than," "above," "above," and similar terms, may be for the convenience of describing the relationship between one component or feature depicted in the figure and one or more other components or features. These spatially relative terms, in addition to the orientation shown in the figure, also encompass various different orientations of the device during use or operation. The device may be placed in other orientations (e.g., rotated 90 degrees or in other orientations), and these spatially relative descriptive terms should be interpreted accordingly.

[0018] While the numerical ranges and parameters used to define the broader scope of this application are approximate values, the relevant values ​​in the specific embodiments have been presented as precisely as possible. However, any numerical value inevitably contains standard deviations due to individual test methods. Here, "approximately" generally means that the actual value is within plus or minus 10%, 5%, 1%, or 0.5% of a particular value or range. Alternatively, the term "approximately" means that the actual value falls within the acceptable standard error of the average value, as determined by those skilled in the art to which this application pertains. It is understood that, except for experimental examples, or unless expressly stated otherwise, all ranges, quantities, values, and percentages used herein (e.g., to describe material usage, duration, temperature, operating conditions, quantity ratios, and the like) are modified with "approximately". Therefore, unless otherwise stated, the numerical parameters disclosed in this specification and the accompanying claims are approximate values ​​and are subject to change as needed. At a minimum, these numerical parameters should be understood as the indicated significant digits and values ​​obtained by applying general rounding. In this context, a range of values ​​is expressed as a distance from one endpoint to the other or between the two endpoints; unless otherwise stated, all ranges of values ​​herein include the endpoints.

[0019] Figure 1 This is a block diagram illustrating a vacuum via-plugging machine 10 according to an embodiment of this application. In some embodiments, the vacuum via-plugging machine 10 is used to perform a resin via-plugging process on an integrated circuit board in a vacuum environment. In some embodiments, the vacuum via-plugging machine 10 includes a support portion 11 and a clamping portion 12. In some embodiments, the support portion 11 is used to support a fixture. In some embodiments, the clamping portion 12 is disposed within the support portion 11 to fix the fixture. In some embodiments, the position of the clamping portion 12 within the support portion 11 is adjustable.

[0020] Figure 2 This diagram illustrates a portion of a vacuum plugging machine 20 according to an embodiment of this application. In some embodiments, the vacuum plugging machine 20 can be applied to... Figure 1 Vacuum plugging machine 10 in the embodiment. Figure 2 The portion shown is a top view of the internal structure of the vacuum plugging machine 20. In some embodiments, the vacuum plugging machine 20 includes a support portion 21 and a clamping portion 22. In some embodiments, the support portion 21 is used to support a fixture. In some embodiments, the clamping portion 22 is disposed within the support portion 21 to fix the fixture. In some embodiments, the position of the clamping portion 22 within the support portion 21 is adjustable.

[0021] In some embodiments, the support portion 21 includes a groove 211. In some embodiments, the groove 211 extends in the x-direction. In some embodiments, the groove 211 is used to allow the clamping portion 22 to move in the x-direction within the groove 211. In some embodiments, the clamping portion 22 includes a clamping member 221. (See reference) Figure 3 , Figure 3 This illustration shows a perspective view of a clamping member 221 according to an embodiment of this application. In some embodiments, the clamping member 221 is embedded in a groove 221 and protrudes from the upper surface of the support portion 21. In some embodiments, the clamping member 221 includes a plane S221. In some embodiments, the plane S221 matches the shape of the side surface of the fixture, wherein the plane S221 contacts the side surface of the fixture when clamping the fixture. With this arrangement, the contact area between each clamping member 221 and the fixture can be increased, thereby improving the fixing effect. In some embodiments, the clamping member 221 may include a screw or other elements that can be used to fix the fixture.

[0022] Refer again Figure 2 In some embodiments, the clamping portion 22 includes a plurality of clamping members 221 (four as shown in the figure). In some embodiments, the plurality of clamping members 221 are symmetrically arranged within the support portion 21. In some embodiments, the vacuum plugging machine 20 may also include a cylinder (not shown). In some embodiments, the cylinder is used to control the position of the clamping portion 22 within the support portion 21. In some embodiments, the cylinder is used to control the position of the clamping members 221 within the groove 211.

[0023] Please refer to Figure 4A and Figure 4B ,in Figure 4A and Figure 4B This is a schematic diagram illustrating the clamping part 22 clamping fixture 30 according to an embodiment of this application. When performing a plugging process, such as... Figure 4A As shown, the user can operate the cylinder to move the plurality of clamping members 221 of the clamping part 22 to the outermost side of the groove 211. Next, the user places the jig 30 into the support part 21. Specifically, the jig 30 is placed between the plurality of clamping members 221. Then, as... Figure 4B As shown, the user manipulates the cylinder again to move the clamping member 221 inward in the groove 211 and contact the side of the fixture 30 with the plane S211 to achieve the function of fixing the fixture 30.

[0024] In some embodiments, the fixture 30 placed in the vacuum plugging machine 20 has two sizes: one is 600*450mm, and the other is 700*550mm. In some embodiments, the spacing between multiple clamping members 221 can be adjusted with one click by setting the control program of the cylinder, thereby matching the size of the fixture to achieve the function of fixing the fixture.

[0025] The vacuum plugging machine proposed in this application can effectively fix the fixture and can easily adjust the spacing of the clamping parts 221 to adapt to fixtures of different sizes, thereby avoiding tape residue contamination of the integrated circuit board due to frequent fixture changes.

[0026] As used herein, the terms “approximately,” “substantially,” “essentially,” and “about” are used to describe and account for small variations. When used in conjunction with an event or situation, the terms may refer to examples where the event or situation occurs precisely or very approximately. As used herein with respect to a given value or range, the term “about” generally means within ±10%, ±5%, ±1%, or ±0.5% of the given value or range. A range may be expressed herein as from one endpoint to another or between two endpoints. Unless otherwise specified, all ranges disclosed herein include endpoints. The term “substantially coplanar” may refer to two surfaces located along the same plane within a few micrometers (μm), for example, within 10 μm, 5 μm, 1 μm, or 0.5 μm along the same plane. When referring to “substantially” identical numerical values ​​or characteristics, the term may refer to values ​​within ±10%, ±5%, ±1%, or ±0.5% of the average of said values.

[0027] As used herein, the terms “approximately,” “substantially,” “essentially,” and “about” are used to describe and explain small variations. When used in conjunction with an event or situation, the terms may refer to examples where the event or situation occurred precisely or where it occurred very approximately. For example, when used in conjunction with a numerical value, the terms may refer to a range of variation less than or equal to ±10% of the numerical value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%. For example, if the difference between two values ​​is less than or equal to ±10% of the average of the values ​​(e.g., less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%), then the two values ​​can be considered "substantially" or "approximately" the same. For example, "substantially" parallel can refer to an angular variation of less than or equal to ±10° relative to 0°, such as less than or equal to ±5°, less than or equal to ±4°, less than or equal to ±3°, less than or equal to ±2°, less than or equal to ±1°, less than or equal to ±0.5°, less than or equal to ±0.1°, or less than or equal to ±0.05°. For example, “basically” vertical can refer to an angular variation of less than or equal to ±10° relative to 90°, such as less than or equal to ±5°, less than or equal to ±4°, less than or equal to ±3°, less than or equal to ±2°, less than or equal to ±1°, less than or equal to ±0.5°, less than or equal to ±0.1°, or less than or equal to ±0.05°.

[0028] For example, if the displacement between two surfaces is equal to or less than 5 μm, equal to or less than 2 μm, equal to or less than 1 μm, or equal to or less than 0.5 μm, then the two surfaces can be considered coplanar or substantially coplanar. If the displacement between any two points on a surface relative to a plane is equal to or less than 5 μm, equal to or less than 2 μm, equal to or less than 1 μm, or equal to or less than 0.5 μm, then the surface can be considered planar or substantially planar.

[0029] As used herein, the terms “conductive,” “electrically conductive,” and “conductivity” refer to the ability to transfer electric current. Conductive materials generally indicate those that exhibit little or no resistance to the flow of electric current. One measure of conductivity is Siemens per meter (S / m). Typically, a conductive material is one with a conductivity greater than approximately 10⁴ S / m (e.g., at least 10⁵ S / m or at least 10⁶ S / m). The conductivity of a material can sometimes vary with temperature. Unless otherwise specified, the conductivity of a material is measured at room temperature.

[0030] As used herein, unless the context clearly indicates otherwise, the singular terms “a / an” and “the” may include plural indicators. In the description of some embodiments, a component provided “on” or “above” another component may cover the case where the preceding component is directly on the following component (e.g., in physical contact with the following component), and the case where one or more intermediate components are located between the preceding and following components.

[0031] As used herein, for ease of description, spatial relative terms such as “below,” “under,” “lower,” “above,” “upper,” “lower,” “left,” “right,” etc., may be used to describe the relationship between one component or feature and another component or feature as illustrated in the figures. In addition to the orientations depicted in the figures, spatial relative terms are intended to cover different orientations of the device in use or operation. The device may be oriented in other ways (rotated 90 degrees or in other orientations), and the spatial relative descriptors used herein shall be interpreted accordingly. It should be understood that when a component is referred to as “connected to” or “coupled to” another component, it may be directly connected to or coupled to said other component, or there may be an intermediate component.

[0032] The foregoing outlines several embodiments and detailed features of this disclosure. The embodiments described in this disclosure can readily serve as the basis for designing or modifying other processes and structures for performing the same or similar purposes and / or obtaining the same or similar advantages of the embodiments introduced herein. These equivalent constructions do not depart from the spirit and scope of this disclosure and various changes, substitutions, and modifications can be made without departing from the spirit and scope of this disclosure.

Claims

1. A vacuum plugging machine, characterized in that, include: The support section is used to support the fixture; as well as A clamping part is disposed in the support part to fix the fixture, and the position of the clamping part in the support part is adjustable; The support portion includes a groove for the clamping portion to move therein; The clamping portion includes a clamping member that is embedded in the groove and protrudes from the upper surface of the bearing portion.

2. The vacuum plugging machine according to claim 1, characterized in that, The clamping member includes a plane that matches the shape of the side of the fixture, and the plane contacts the side of the fixture when the fixture is clamped.

3. The vacuum plugging machine according to claim 1, characterized in that, The clamping element includes a screw.

4. The vacuum plugging machine according to claim 1, characterized in that, Multiple clamping members are symmetrically arranged in the bearing portion.

5. The vacuum plugging machine according to claim 1, characterized in that, Also includes: A cylinder is used to control the position of the clamping part in the bearing part.

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