A wet electronic chemical delivery pipe filtering device

Abstract

The utility model discloses a kind of wet electronic chemical conveying pipeline filter devices, including perfluorinated filter, the perfluorinated filter includes upper cover, shell, connecting piece and filter core, shell upper end is inserted in connecting piece inside, and shell upper end is attached in connecting piece inner bottom surface, upper cover is screwed in connecting piece inside upper end;Supporting assembly, the supporting assembly includes limit ring, connecting rod, connecting plate, adjusting rod and support plate, the limit ring is placed in shell inner bottom surface, connecting rod one end is fixed in limit ring inside, connecting plate is fixed in connecting rod other end, and located in limit ring middle part, adjusting rod is movably connected in connecting plate middle part, support plate is fixed in adjusting rod upper end.The utility model solves the problem that for the convenience of liquid flow and pollution discharge, there is a certain gap between filter core bottom and shell inner bottom surface, after long-term use, affected by liquid flow and sealing washer aging etc., looseness between filter core and upper cover will appear, affect the filtering effect.

Description

Technical Field

[0001] This utility model relates to the field of wet electronic chemical filtration technology, specifically a wet electronic chemical delivery pipeline filtration device. Background Technology

[0002] The wet electronic chemical delivery pipeline filtration system is a filtration device specifically designed for high-purity wet electronic chemicals (such as acids, alkalis, and solvents). It is primarily used to remove particulate impurities, metal ions, and other contaminants from chemicals to ensure that chemicals delivered to semiconductor, panel manufacturing, and other process stages meet ultra-high cleanliness requirements. It can employ perfluorinated filters, which have extremely strong chemical corrosion resistance and can withstand strong acids, strong alkalis, organic solvents, and corrosive gases. It uses PTFE pleated filter elements to achieve absolute filtration precision, completely intercepting target particles or microorganisms.

[0003] In a perfluorinated filter, the upper end of the filter element is screwed onto the inner top surface of the cover, while the rest is placed inside the housing. To facilitate liquid flow and drainage, a certain gap exists between the bottom of the filter element and the inner bottom surface of the housing. After prolonged use, due to liquid flow and aging of the sealing gaskets, the filter element may loosen from the cover, affecting the filtration efficiency. Therefore, a filtration device for wet electronic chemical delivery pipelines is needed to solve the above problems. Utility Model Content

[0004] The purpose of this utility model is to provide a filtration device for a wet electronic chemical transport pipeline, thereby solving the problems mentioned in the background art. To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution:

[0005] This utility model relates to a filtration device for a wet electronic chemical delivery pipeline, comprising:

[0006] A perfluorinated filter, comprising a top cover, a housing, a connector, and a filter element, wherein the upper end of the housing is inserted into the inner side of the connector and the upper end of the housing is attached to the inner bottom surface of the connector, the top cover is screwed onto the upper end of the inner side of the connector and the lower end of the top cover is attached to the upper surface of the housing, and the upper end of the filter element is screwed onto the inner top surface of the top cover.

[0007] The support assembly includes a limiting ring, a connecting rod, a connecting plate, an adjusting rod, and a support plate. The limiting ring is placed on the bottom surface of the housing. One end of the connecting rod is fixed to the inside of the limiting ring. The connecting plate is fixed to the other end of the connecting rod and located in the middle of the limiting ring. The adjusting rod is movably connected to the middle of the connecting plate. The support plate is fixed to the upper end of the adjusting rod.

[0008] Furthermore, the support assembly also includes a threaded hole, which is located in the middle of the connecting plate, and the adjusting rod is screwed into the threaded hole.

[0009] Furthermore, the support plate is located in the middle of the bottom surface of the housing and is attached to the lower surface of the filter element.

[0010] Furthermore, the perfluorinated filter also includes a drain pipe, which is fixed at the middle of the lower end of the housing and communicates with the interior of the housing.

[0011] Furthermore, it also includes an anti-fouling component, which includes a transparent groove and a through hole. The transparent groove is fixed to the lower end of the housing, and the through hole is opened in the middle of the transparent groove and is sleeved on the drain pipe.

[0012] Furthermore, the anti-fouling component also includes a nut, which is screwed onto the lower end of the drain pipe and fits against the lower end of the transparent groove.

[0013] Furthermore, the anti-fouling component also includes two sealing rings, which are fitted onto the drain pipe and located sequentially between the housing, the transparent groove, and the nut.

[0014] This utility model has the following beneficial effects:

[0015] This invention utilizes a support assembly. Based on the height of the filter element, the adjusting rod in the threaded hole moves the support plate. After adjustment, the limiting ring is first inserted downwards into the housing. The limiting ring slides downwards and falls to the inwardly inclined position on the bottom surface of the housing. Then, the upper end of the filter element is installed inside the top cover, and the filter element is placed into the housing. The top cover fits snugly against the housing. The connecting piece is rotated until tightened. At this point, the top cover is firmly against the housing, and the support plate is firmly abutted against the lower end of the filter element. This design prevents the filter element from loosening without affecting liquid flow and wastewater discharge. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the interior of the casing of this utility model;

[0018] Figure 2 This is a schematic diagram of the appearance of the present utility model;

[0019] Figure 3 This is a schematic diagram of the support component structure of this utility model;

[0020] Figure 4 This is a schematic diagram of the transparent groove structure of this utility model.

[0021] The attached diagram lists the components represented by each number as follows:

[0022] 10. Top cover; 11. Housing; 12. Connector; 13. Drain pipe; 14. Filter element; 20. Limiting ring; 21. Connecting rod; 22. Connecting plate; 23. Threaded hole; 24. Adjusting rod; 25. Support plate; 30. Transparent groove; 31. Through hole; 32. Sealing ring; 33. Nut. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] To make the objectives, technical solutions, and advantages of this utility model clearer, the embodiments of this utility model will be described in further detail below with reference to the accompanying drawings.

[0025] Please see Figure 1-3 As shown, this utility model is a filtration device for a wet electronic chemical delivery pipeline, comprising:

[0026] The perfluorinated filter includes a top cover 10, a housing 11, a connector 12, and a filter element 14. The upper end of the housing 11 is inserted into the inside of the connector 12, and the upper end of the housing 11 is attached to the inner bottom surface of the connector 12. The top cover 10 is screwed to the upper end of the inner side of the connector 12, and the lower end of the top cover 10 is attached to the upper surface of the housing 11. The upper end of the filter element 14 is screwed to the inner top surface of the top cover 10.

[0027] The perfluorinated filter also includes a drain pipe 13, which is fixed to the middle of the lower end of the housing 11 and communicates with the inside of the housing 11.

[0028] The top cover 10 and the housing 11 form a filtration space. The connector 12 is used to connect the top cover 10 and the housing 11, and the connection is sealed by a sealing ring. The drain pipe 13 is used to periodically discharge the dirt attached to the outside of the filter element 14. The filter element 14 is used to filter impurities. The top cover 10 has an inlet pipe and an outlet pipe installed on both sides, and an exhaust pipe installed at the top, which is connected to the inlet pipe and the outlet pipe respectively. The liquid flows into the housing 11 from the inlet pipe, is filtered by the filter element 14, flows from the outside of the filter element 14 to the inside, and then flows out from the outlet pipe at the top.

[0029] The support assembly includes a limiting ring 20, a connecting rod 21, a connecting plate 22, an adjusting rod 24, and a support plate 25. The limiting ring 20 is placed on the inner bottom surface of the housing 11. One end of the connecting rod 21 is fixed to the inner side of the limiting ring 20. The connecting plate 22 is fixed to the other end of the connecting rod 21 and is located in the middle of the limiting ring 20. The adjusting rod 24 is movably connected to the middle of the connecting plate 22. The support plate 25 is fixed to the upper end of the adjusting rod 24.

[0030] The support assembly also includes a threaded hole 23, which is located in the middle of the connecting plate 22, and the adjusting rod 24 is screwed into the threaded hole 23.

[0031] The support plate 25 is located in the middle of the bottom surface of the housing 11 and is attached to the lower surface of the filter element 14;

[0032] The limiting ring 20 provides support, the connecting rod 21 provides connection, the connecting plate 22 provides support, the threaded hole 23 and the adjusting rod 24 provide adjustment, and the support plate 25 provides support. The inner diameter of the limiting ring 20 is larger than the outer diameter of the filter element 14, and the outer diameter of the support plate 25 is smaller than the outer diameter of the filter element 14, so that there is a gap between the limiting ring 20 and the support plate 25 to facilitate liquid flow.

[0033] Working principle:

[0034] Adjust the distance between the limiting ring 20 and the support plate 25 according to the height of the filter element 14 used. Hold the limiting ring 20 with one hand and use a screwdriver to turn the adjusting rod 24 on the connecting plate 22. Move the adjusting rod 24 along the threaded hole 23, and then move the support plate 25. After adjustment, put the limiting ring 20 downward into the housing 11. The limiting ring 20 slides down and falls into the inward tilt of the bottom surface of the housing 11. Then install the upper end of the filter element 14 into the upper cover 10 and put the filter element 14 into the housing 11. The upper cover 10 fits into the housing 11. Rotate the connecting piece 12 until it is tightened. At this time, the upper cover 10 fits into the housing 11, and the support plate 25 is firmly against the lower end of the filter element 14.

[0035] This step prevents the filter element 14 from becoming loose without affecting the liquid flow and sewage discharge.

[0036] Please see Figure 2 , Figure 4 As shown, this embodiment, based on the above embodiment, further includes:

[0037] The anti-fouling component includes a transparent groove 30 and a through hole 31. The transparent groove 30 is fixed to the lower end of the housing 11, and the through hole 31 is opened in the middle of the transparent groove 30 and is sleeved on the drain pipe 13.

[0038] The anti-fouling component also includes a nut 33, which is screwed onto the lower end of the drain pipe 13 and fits against the lower end of the transparent groove 30.

[0039] The anti-fouling component also includes a sealing ring 32. There are two sealing rings 32, which are fitted onto the drain pipe 13 and are located between the housing 11, the transparent groove 30 and the nut 33 in sequence.

[0040] The transparent groove 30 is used to catch leaked liquid and has a corrosion-resistant effect. The through hole 31 facilitates the installation of the transparent groove 30. The sealing ring 32 provides a sealing function, and the nut 33 provides a fastening function.

[0041] Working principle:

[0042] Place the sealing ring 32 onto the drain pipe 13, then place the through hole 31 of the transparent groove 30 onto the drain pipe 13, then put on another sealing ring 32, and finally tighten the nut 33 until it is tight. If the perfluorinated filter is used for a long time, the sealing ring at the connection between the connector 12 and the housing 11 will become fatigued and the sealing effect will be insufficient, resulting in liquid leakage, which will leak from the outer surface of the housing 11 into the transparent groove 30.

[0043] This step prevents liquid from leaking into the work environment before staff can address the leak in time, thus avoiding damage to other equipment and pollution of the surrounding environment.

[0044] The preferred embodiments of this utility model disclosed above are merely illustrative of the present utility model. These preferred embodiments do not exhaustively describe all details, nor do they limit the utility model to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of this utility model, thereby enabling those skilled in the art to better understand and utilize it. This utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A wet electronic chemical delivery piping filtration device, characterized by, include: A perfluorinated filter, comprising a top cover (10), a housing (11), a connector (12), and a filter element (14). The upper end of the housing (11) is inserted into the inner side of the connector (12), and the upper end of the housing (11) is attached to the inner bottom surface of the connector (12). The top cover (10) is screwed to the upper end of the inner side of the connector (12), and the lower end of the top cover (10) is attached to the upper surface of the housing (11). The upper end of the filter element (14) is screwed to the inner top surface of the top cover (10). The support assembly includes a limiting ring (20), a connecting rod (21), a connecting plate (22), an adjusting rod (24), and a support plate (25). The limiting ring (20) is placed on the bottom surface of the housing (11). One end of the connecting rod (21) is fixed to the inside of the limiting ring (20). The connecting plate (22) is fixed to the other end of the connecting rod (21) and located in the middle of the limiting ring (20). The adjusting rod (24) is movably connected to the middle of the connecting plate (22). The support plate (25) is fixed to the upper end of the adjusting rod (24).

2. A wet electronic chemical delivery tube filter apparatus according to claim 1, wherein: The support assembly also includes a threaded hole (23), which is located in the middle of the connecting plate (22), and the adjusting rod (24) is screwed into the threaded hole (23).

3. A wet electronic chemical delivery tube filter apparatus according to claim 1, wherein: The support plate (25) is located in the middle of the bottom surface of the housing (11) and is attached to the lower surface of the filter element (14).

4. A wet electronic chemical delivery tube filter apparatus according to claim 1, wherein: The perfluorinated filter also includes a drain pipe (13), which is fixed to the middle of the lower end of the housing (11) and communicates with the inside of the housing (11).

5. A wet electronic chemical delivery tube filter apparatus according to claim 1, wherein: It also includes a dirt-proof component, which includes a transparent groove (30) and a through hole (31). The transparent groove (30) is fixed to the lower end of the housing (11), and the through hole (31) is opened in the middle of the transparent groove (30) and is sleeved on the drain pipe (13).

6. A wet electronic chemical delivery line filtration device according to claim 5, wherein: The anti-fouling component also includes a nut (33), which is screwed to the lower end of the drain pipe (13) and fits against the lower end of the transparent groove (30).

7. A wet electronic chemical delivery tube filter apparatus according to claim 5, wherein: The anti-fouling component also includes a sealing ring (32), there are two sealing rings (32), the two sealing rings (32) are sleeved on the drain pipe (13) and are located between the housing (11), the transparent groove (30) and the nut (33) in sequence.

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