A fluorine-based mixed gas path vacuum processing system

Abstract

The application relates to the technical field of gas production treatment equipment, in particular to a fluorine-containing mixed gas vacuum pumping treatment system. The system comprises a gas treatment main path and a tail gas treatment branch path, a first valve, a first check valve and a main tail gas treatment unit are sequentially arranged on the gas treatment main path; a second valve, an alumina filling tank, a vacuum pump, a second check valve and a tail gas treatment unit are sequentially arranged on the tail gas treatment branch path. A large amount of fluorine-containing gas can be treated through the gas treatment main path, the residual fluorine-containing tail gas can be treated through the tail gas treatment branch path, the alumina filling tank can react with fluorine gas, and the corrosion of the aluminum alloy blade of the vacuum pump is reduced. The system is also provided with a communication branch path, which further improves the tail gas treatment effect. The treatment system of the application effectively solves the problems of poor fluorine-containing tail gas treatment and unclean residual tail gas treatment in the prior art, improves the efficiency of the vacuum pump and prolongs the service life of the equipment.

Description

Technical Field

[0001] This application mainly relates to the field of gas production and processing equipment technology, and in particular to a fluorine-based mixed gas path vacuum processing system. Background Technology

[0002] In the production process of fluorine-based mixed gases, gas treatment, especially tail gas treatment, is crucial. Currently, for high-concentration fluorine tail gas, inert gas is typically added for dilution before being discharged into a water scrubbing tower for neutralization. However, existing technologies have several problems. On the one hand, the treatment of fluorine-containing tail gas is not thorough enough, and residual tail gas is not fully purified, failing to meet increasingly stringent environmental standards. Specifically, existing systems do not comprehensively treat residual fluorine-containing tail gas in pipelines, easily leading to tail gas accumulation in certain areas, which is difficult to effectively remove, thus affecting the stable operation and safety of the entire production system. On the other hand, fluorine is chemically extremely reactive; even low concentrations of residual fluorine can react with the aluminum alloy blades of the vacuum pump in the vacuum system, forming solid aluminum fluoride. This reduces vacuum pump efficiency, shortens equipment lifespan, increases equipment maintenance costs and replacement frequency, and impacts production efficiency and economic benefits. Utility Model Content

[0003] This invention provides a fluorine-based mixed gas vacuum treatment system that can efficiently treat fluorine-containing exhaust gas while reducing corrosion of the vacuum pump and improving the stability and service life of the equipment.

[0004] The technical solution provided by this utility model is as follows:

[0005] A fluorine-based mixed gas path vacuum treatment system includes: a main gas treatment path and an exhaust gas treatment branch path;

[0006] The main gas treatment pipeline and the exhaust gas treatment branch pipeline are connected in parallel to the main gas pipeline channel;

[0007] The gas treatment main line is provided with a first valve, a first check valve and a main exhaust gas treatment unit in sequence;

[0008] The exhaust gas treatment branch is sequentially equipped with a second valve, an alumina filling tank, a vacuum pump, a second one-way valve, and an exhaust gas treatment unit.

[0009] Furthermore, the first valve is located near the beginning of the main gas treatment pipeline, and the first check valve is located near the inlet of the main exhaust gas treatment unit.

[0010] The second valve is located near the beginning of the exhaust gas treatment branch, and the second check valve is located near the intake end of the exhaust gas treatment unit.

[0011] Furthermore, the alumina filling tank includes a tank body, and the tank body is filled with alumina filler.

[0012] Furthermore, a vacuum diaphragm valve is also provided on the exhaust gas treatment branch; the vacuum diaphragm valve is arranged between the vacuum pump and the second one-way valve.

[0013] Furthermore, the fluorine-based mixed gas vacuum treatment system of this application also includes a connecting branch, one end of which is connected to the main gas treatment line and located at the rear end of the first valve; the other end of which is connected to the exhaust gas treatment branch and located at the rear end of the second valve; a third valve is provided on the connecting branch. Preferably, it is located between the second valve and the second check valve.

[0014] Furthermore, the first valve, the second valve, and the third valve are pneumatic valves.

[0015] Furthermore, the main exhaust gas treatment unit and the secondary exhaust gas treatment unit are water scrubbing tower exhaust gas treatment equipment.

[0016] Furthermore, the main exhaust gas treatment unit is larger in scale than the secondary exhaust gas treatment unit.

[0017] Beneficial effects:

[0018] This application provides a fluorine-based mixed gas vacuum treatment system, comprising: a main gas treatment line and a tail gas treatment branch line; the main gas treatment line and the tail gas treatment branch line are connected in parallel to the main gas line channel; the main gas treatment line is sequentially provided with a first valve, a first check valve, and a main tail gas treatment unit; the tail gas treatment branch line is sequentially provided with a second valve, an alumina filling tank, a vacuum pump, a second check valve, and a secondary tail gas treatment unit. The main gas treatment line can process large quantities of fluorine-containing gas, the tail gas treatment branch line can treat residual fluorine-containing tail gas, and the alumina filling tank can react with the fluorine gas, reducing corrosion of the aluminum alloy blades of the vacuum pump. The system also includes connecting branches to further improve the tail gas treatment effect. This application's treatment system effectively solves the problems of poor treatment of fluorine-containing tail gas and incomplete treatment of residual tail gas in the prior art, improves the efficiency of the vacuum pump, and extends the service life of the equipment. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the first structure of the fluorine-based mixed gas path vacuum treatment system of this utility model;

[0021] Figure 2 This is a schematic diagram of the second structure of the fluorine-based mixed gas path vacuum treatment system of this utility model;

[0022] Reference numerals: 10, main gas pipeline; 20, main gas treatment pipeline; 21, first valve; 22, first check valve; 23, main exhaust gas treatment unit; 30, exhaust gas treatment branch; 31, second valve; 32, alumina filling tank; 33, vacuum pump; 34, second check valve; 35, exhaust gas treatment unit; 36, vacuum diaphragm valve; 40, third valve. Detailed Implementation

[0023] To enable those skilled in the art to better understand the technical solutions in this application, the technical solutions in the embodiments of this application will be clearly and completely described below. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0024] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly set on the other component; when a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to the other component.

[0025] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0026] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "a plurality of" or "several" means two or more, unless otherwise explicitly specified.

[0027] It should be noted that the structures, proportions, sizes, etc., shown in the accompanying drawings of this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the conditions under which this application can be implemented. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size should still fall within the scope of the technical content disclosed in this application, provided that they do not affect the effects and purposes that this application can produce.

[0028] See Figure 1-2 The present application provides a fluorine-based mixed gas path vacuum treatment system, comprising: a main gas treatment path 20 and a tail gas treatment branch path 30;

[0029] The main gas treatment pipeline and the exhaust gas treatment branch pipeline are connected in parallel to the main gas pipeline channel 10;

[0030] The gas processing main line is sequentially provided with a first valve 21, a first check valve 22 and a main exhaust gas processing unit 23;

[0031] The exhaust gas treatment branch is sequentially equipped with a second valve 31, an alumina filling tank 32, a vacuum pump 33, a second one-way valve 34, and an exhaust gas treatment unit 35.

[0032] The processing system of this application can treat a large amount of fluorine-containing gas in the main gas pipeline channel through the main gas treatment pipeline, and the large amount of fluorine-containing gas flows to the main tail gas treatment unit. For the residual fluorine-containing tail gas in the main gas pipeline channel, the vacuum pump in the tail gas treatment branch is used to evacuate the gas, and the gas can then flow to the tail gas treatment unit, so that the residual gas is effectively treated. At the same time, the alumina filling tank in the tail gas treatment branch can react with the fluorine gas, which greatly reduces the corrosion of the aluminum alloy blades of the vacuum pump, improves the efficiency of the vacuum pump, and extends its service life.

[0033] The components involved in the connection scheme of the processing system in this application include: gas main pipeline channel 1, high-concentration fluorine gas tail gas emission regulating valve PCV-01, vacuum pneumatic valve ECV-01, a 316LSS alumina filling tank with a height of 120CM, a diameter of 30CM, and a water volume of 40L, a vacuum pump, a vacuum pump outlet check valve CV-01, a vacuum pump diaphragm valve V-01, and a gas processing main pipeline check valve CV-02; the specific use of the processing system in this application is as follows:

[0034] Open PCV-01 and set the discharge pressure to 5 PSIG per second. After draining the main pipeline pressure to a slightly positive pressure of 3 PSIG, close PCV-01.

[0035] - Turn on ECV-01;

[0036] - After turning on the vacuum pump, manually open the diaphragm valve V-01;

[0037] -Start the vacuum pump to create a vacuum;

[0038] - Fluorine-containing exhaust gas is drawn into the T-01 alumina filling tank by a vacuum pump, where a chemical reaction occurs: 6F2 + 2Al2O3 → 4AlF3 + 3O2, producing ALF3 solid. Residual fluorine gas is removed before the vacuum pump.

[0039] The oxygen and other non-corrosive exhaust gases produced by the reaction are extracted by a vacuum pump and discharged into the exhaust gas treatment system. Since the residual fluorine-containing exhaust gas in the system has already reacted with alumina, the resulting oxygen is non-corrosive, greatly reducing corrosion of the aluminum alloy blades of the vacuum pump, thus improving the efficiency of the vacuum pump and extending its service life.

[0040] Furthermore, the first valve is located near the beginning of the main gas treatment pipeline, and the first check valve is located near the inlet of the main exhaust gas treatment unit.

[0041] The second valve is located near the beginning of the exhaust gas treatment branch, and the second check valve is located near the intake end of the exhaust gas treatment unit.

[0042] Furthermore, the alumina filling tank includes a tank body, and the tank body is filled with alumina filler.

[0043] Furthermore, a vacuum diaphragm valve 36 is also provided on the exhaust gas treatment branch; the vacuum diaphragm valve is arranged between the vacuum pump and the second one-way valve.

[0044] Furthermore, the fluorine-based mixed gas path vacuum treatment system of this application also includes a connecting branch, one end of which is connected to the main gas treatment path and located at the rear end of the first valve; the other end of which is connected to the tail gas treatment branch and located at the rear end of the second valve, preferably located between the second valve and the second check valve; a third valve 40 is provided on the connecting branch.

[0045] The design of the connecting branch allows the residual fluorine-containing exhaust gas in the pipeline between the first valve and the first check valve in the main gas treatment pipeline to be evacuated and flowed to the exhaust gas treatment unit by the vacuum pump in the exhaust gas treatment branch; effectively improving the treatment of residual exhaust gas in the system pipeline, and making the exhaust gas treatment cleaner and more thorough.

[0046] Furthermore, the first valve, the second valve, and the third valve are pneumatic valves.

[0047] Furthermore, the main tail gas treatment unit and the secondary tail gas treatment unit are water scrubbing tower tail gas treatment equipment; the main tail gas treatment unit is larger in scale than the secondary tail gas treatment unit; both are existing fluorine-containing gas water scrubbing tower tail gas treatment equipment.

[0048] In summary, the processing system of this application can handle large quantities of fluorine-containing gas through the main gas treatment path, and can treat residual fluorine-containing tail gas through the tail gas treatment branch path. The alumina filling tank can react with the fluorine gas, reducing corrosion of the aluminum alloy blades of the vacuum pump. This system also includes connecting branches to further improve the tail gas treatment effect. The processing system of this application effectively solves the problems of poor treatment of fluorine-containing tail gas and incomplete treatment of residual tail gas in the prior art, improves the efficiency of the vacuum pump, and extends the service life of the equipment.

[0049] The fluorine-based mixed gas path vacuum processing system of this application also includes an existing controller. The first valve, second valve, third valve and vacuum diaphragm valve in this application are all existing pneumatic valves, and each pneumatic valve and vacuum pump are connected to the controller. The controller has an existing control system and control program built in, and controls the opening and closing of the valves and the operation of the vacuum pump through the existing control program.

[0050] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A fluorine-based mixed gas path vacuum processing system characterized by comprising: include: Main gas treatment circuit and branch exhaust gas treatment circuit; The main gas treatment pipeline and the exhaust gas treatment branch pipeline are connected in parallel to the main gas pipeline channel; The gas treatment main line is provided with a first valve, a first check valve and a main exhaust gas treatment unit in sequence; The exhaust gas treatment branch is sequentially equipped with a second valve, an alumina filling tank, a vacuum pump, a second one-way valve, and an exhaust gas treatment unit.

2. The fluorine-based mixed gas path vacuuming system according to claim 1, wherein The first valve is located near the beginning of the main gas treatment line, and the first check valve is located near the inlet of the main exhaust gas treatment unit; the second valve is located near the beginning of the exhaust gas treatment branch line, and the second check valve is located near the inlet of the exhaust gas treatment unit.

3. The fluorine-based mixed gas path vacuuming system according to claim 1, wherein An alumina-filled tank includes a tank body, and the tank body is filled with alumina.

4. The fluorine-based gas mixture handling system according to any one of claims 1 to 3, wherein A vacuum diaphragm valve is also provided on the exhaust gas treatment branch; the vacuum diaphragm valve is arranged between the vacuum pump and the second check valve.

5. The fluorine-based gas mixture handling system according to any one of claims 1 to 3, wherein It also includes a connecting branch, one end of which is connected to the main gas treatment line and located at the rear end of the first valve; the other end of which is connected to the exhaust gas treatment branch and located at the rear end of the second valve; a third valve is provided on the connecting branch.

6. The fluorine-based mixed gas path vacuuming system according to claim 5, wherein A vacuum diaphragm valve is also provided on the exhaust gas treatment branch; the vacuum diaphragm valve is arranged between the vacuum pump and the second check valve.

7. The fluorine-based gas mixture handling system according to any one of claims 1 to 3, 6, wherein The first, second, and third valves are pneumatic valves.

8. The fluorine-based gas mixture handling system according to any one of claims 1 to 3, 6, wherein The main exhaust gas treatment unit and the secondary exhaust gas treatment unit are water scrubbing tower exhaust gas treatment equipment.

9. The fluorine-based mixed gas path vacuuming system according to claim 8, wherein The main exhaust gas treatment unit is larger than the secondary exhaust gas treatment unit.

Images