Microwave plasma reaction system

Abstract

The utility model discloses a microwave plasma reaction system, including: frame, microwave resonance cavity, assembles on the frame, microwave source device, assembles to the microwave resonance cavity outer wall, is used for to microwave resonance cavity inside microwave feed -in, quartz tube, from top to bottom through microwave resonance cavity setting, it has the reaction section in microwave resonance cavity, gas inlet component, with one end of quartz tube intercommunication, is used for the gas into, assembly spare, be located in the quartz tube, along the axial direction of quartz tube and extend to the reaction section, needle body, be located in the reaction section, perpendicular the axial arrangement of quartz tube, set up a plurality of, a plurality of needle body assembly spare is arranged along the axial direction of quartz tube and arranges, blanking component, with another end of quartz tube intercommunication, is used for discharging processing material, the microwave plasma reaction system that the utility model proposes, through microwave energy to gas ionization, can high -efficient production plasma, to material processing effect is good.

Description

Technical Field

[0001] This utility model belongs to the field of microwave reaction device technology, specifically, it relates to an improvement of a microwave plasma reaction system. Background Technology

[0002] Plasma is a state of matter, often referred to as the fourth state of matter. As a unique state of matter, plasma has shown broad application prospects in many fields. For example, in existing industrial production, plasma can be used to clean material surfaces or to process some gaseous or solid materials.

[0003] Existing material handling devices mainly use the following methods to generate plasma: high-frequency electric field method, which generates plasma by ionizing gas through a high-frequency and high-voltage electric field;

[0004] Alternatively, the most commonly used radio frequency plasma method can be employed, which uses a radio frequency power source to excite gas molecules or atoms to generate plasma.

[0005] The above-mentioned plasma generation methods not only have high requirements for voltage and power frequency, but also produce a small amount of plasma, resulting in poor material processing effect.

[0006] The information disclosed in this background section is only intended to enhance the understanding of the background technology of this application, and therefore may include prior art that is not known to those skilled in the art. Utility Model Content

[0007] This invention addresses the aforementioned technical problems existing in existing plasma generation devices by proposing a microwave plasma reaction system that efficiently generates plasma through microwave energy ionization of gas, resulting in good material processing performance.

[0008] To achieve the above-mentioned utility model / design objectives, the present utility model adopts the following technical solution:

[0009] A microwave plasma reaction system, comprising:

[0010] frame;

[0011] A microwave resonant cavity is mounted on the frame;

[0012] A microwave source device is assembled onto the outer wall of the microwave resonant cavity and is used to feed microwaves into the microwave resonant cavity.

[0013] A quartz tube is disposed through the microwave resonant cavity from top to bottom, and it has a reaction section located in the microwave resonant cavity;

[0014] An air intake component is connected to one end of the quartz tube for introducing gas.

[0015] The assembly is located inside the quartz tube and extends along the axial direction of the quartz tube to the reaction section;

[0016] The needle body is located within the reaction section and is arranged perpendicular to the axis of the quartz tube. Multiple needle bodies are provided and assembled on the assembly and arranged along the axis of the quartz tube.

[0017] The material discharge component is connected to the other end of the quartz tube and is used to discharge the processed material.

[0018] Compared with the prior art, the advantages and positive effects of this utility model are:

[0019] The microwave plasma reaction system of this invention features a quartz tube inside a microwave resonant cavity. Multiple needles are arranged side-by-side inside the quartz tube, with their tips positioned on the same side. When the microwave source feeds microwaves into the microwave resonant cavity, the microwaves can pass through the quartz tube and enter the tube. The microwave energy accumulates at the tips of the needles, forming multiple strong electric field regions at their respective tips. During ionization, these multiple strong electric fields simultaneously ionize the gas, resulting in higher ionization efficiency for the working gas and the generation of a large amount of plasma at once. This high plasma quantity allows for more thorough contact with the material during processing, leading to better material processing results.

[0020] Other features and advantages of this utility model will become clearer after reading the detailed embodiments of this utility model in conjunction with the accompanying drawings. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the structure of one embodiment of the microwave plasma reaction system proposed in this utility model;

[0023] Figure 2 yes Figure 1 Enlarged view of a portion at point A;

[0024] Figure 3 yes Figure 1 A magnified view of section B;

[0025] Figure 4 yes Figure 1 A magnified view of a portion at point C;

[0026] Figure 5 This is a top view of one embodiment of the microwave plasma reaction system proposed in this utility model.

[0027] In the diagram, 100 is the main body; 200 is the microwave resonant cavity; 210 is the heat insulation component; 220 is the observation port; 230 is the infrared temperature sensor; 300 is the microwave source device; 310 is the magnetron; 320 is the waveguide; 400 is the quartz tube; 410 is the reaction section; 420 is the first extension section; 430 is the second extension section; 500 is the air intake component; 600 is the assembly part; 610 is the first assembly rod; 620 is the second assembly rod; 630 is the connecting sleeve; 631 is the threaded hole; and 700 is the needle body. 710. Needle body; 720. Tip; 800. Feeding component; 810. Feeding chamber; 820. Feeding chamber; 830. Feeding port; 840. Second flange; 910. First protective component; 911. First connecting flange; 913. Recessed groove; 914. Sealing ring; 915. Steel ring; 920. First fixing component; 921. First interface; 922. Second connecting flange; 923. Insertion part; 940. Second protective component; 941. First flange; 950. Elastic gasket. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0029] In the description of this utility model, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0030] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. In the description of the embodiments, specific features, structures, materials, or characteristics can be combined in any suitable manner in one or more embodiments or examples.

[0031] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature.

[0032] In some embodiments of this application, a microwave plasma reaction system is proposed, comprising:

[0033] The frame 100 is used to form the entire microwave plasma reaction system.

[0034] A microwave resonant cavity 200 is assembled on the body 100;

[0035] A microwave source device 300 is assembled onto the outer wall of the microwave resonant cavity 200 and is used to feed microwaves into the microwave resonant cavity 200.

[0036] The microwave source device 300 includes a plurality of magnetrons 310 and a plurality of waveguides 320 connected to the plurality of magnetrons 310, with the plurality of magnetrons 310 arranged circumferentially along the microwave resonant cavity 200.

[0037] The magnetron 310 is used to connect to a power source to generate microwaves. The microwaves generated by the magnetron 310 are transmitted to the microwave resonant cavity 200 through the waveguide 320 connected to it.

[0038] By uniformly arranging multiple magnetrons 310 in the circumferential direction of the microwave resonant cavity 200, it can be ensured that microwaves are fed into each region of the microwave resonant cavity 200, thus ensuring the uniformity of microwave distribution within the microwave resonant cavity 200.

[0039] A quartz tube 400 is disposed from top to bottom through the microwave resonant cavity 200, and has a reaction section 410 located within the microwave resonant cavity 200. Since the quartz tube 400 is transparent, when the microwave source device 300 feeds microwaves into the microwave resonant cavity 200, the microwaves can enter the reaction section 410 of the quartz tube 400 within the microwave resonant cavity 200.

[0040] A heat insulation component 210 is provided between the quartz tube 400 and the microwave resonant cavity 200.

[0041] An observation port 220 and an infrared temperature sensor 230 are provided on the microwave resonant cavity 200.

[0042] Infrared temperature sensor 230 is used to detect the reaction temperature within reaction section 410.

[0043] The air intake component 500 is connected to one end of the quartz tube 400 and is used to introduce gas.

[0044] The air inlet component 500 can be used to introduce working gas or gaseous substances that need to be processed, such as nitrogen or ethanol, into the quartz tube 400.

[0045] The assembly 600 is located inside the quartz tube 400 and extends along the axial direction of the quartz tube 400 to the reaction section 410.

[0046] The needle body 700 is assembled on the assembly 600 and located in the reaction section 410. It is arranged perpendicular to the axis of the quartz tube 400. Multiple needle bodies 700 are arranged along the axis of the quartz tube 400, and the tips of the multiple needle bodies 700 are located on the same side.

[0047] The mounting accessory 600 is used to install the needle body 700, which is located inside the quartz tube 400. Preferably, multiple needle bodies 700 can be arranged at equal intervals on the mounting accessory 600.

[0048] The needle body 700 has a pointed tip, which causes the microwave energy entering the reaction section 410 to accumulate at the pointed tip of the needle body 700 to form a strong electric field, thereby ionizing the gas to generate plasma. The ionized plasma will form a bright flash.

[0049] Multiple needles 700 are arranged sequentially along the axis of the quartz tube 400. Microwave energy is concentrated at the tip of each needle 700. Each needle 700 ionizes gas to generate plasma. The plasma generated by the ionization of gas at the tips of multiple needles 700 overlaps and connects to form a lightning-like structure. A large amount of plasma is generated by the ionization of multiple needles 700, which has a good effect on material processing.

[0050] The material discharge component 800 is connected to the other end of the quartz tube 400 and is used to discharge the processed material.

[0051] The microwave plasma reaction system in this embodiment can generate plasma by ionizing the working gas with microwaves, and then use the generated plasma to process gaseous or solid materials.

[0052] When processing gaseous substances, working gas can be introduced into the quartz tube 400 through the gas inlet component 500, and microwaves can be fed into the microwave resonant cavity 200 through the microwave source device 300. The microwaves in the microwave resonant cavity 200 pass through the quartz tube 400 and enter the reaction section 410 in the microwave resonant cavity 200. The microwaves entering the reaction section 410 are evenly distributed throughout the entire reaction section 410. Since a needle body 700 is provided in the reaction section 410, and the needle body 700 has a tip, the microwave energy will be concentrated at the tip of the needle body 700 to form a strong electric field, which ionizes the working gas and generates plasma concentrated at the tip region of the needle body 700.

[0053] The gaseous material to be processed can be introduced into the quartz tube 400 through the branch pipe provided on the air inlet component 500, and flow through the plasma generated by ionization to process the gaseous material. The gaseous material after being processed by the plasma can be discharged through the discharge component 800.

[0054] When processing solid materials, such as pyrolyzing waste plastics, the waste plastics to be pyrolyzed can be placed in a quartz tube 400 beforehand, and then a working gas is introduced. Microwaves transfer energy to the reaction section 410 of the quartz tube 400. The working gas is ionized by the strong electric field generated at the multiple needles 700 in the reaction section 410 to generate plasma. The plasma processes the waste plastics in the quartz tube 400, and the processed material can enter the discharge component 800 and be discharged outward through the discharge component 800.

[0055] In some embodiments of this application, a discharge bin is formed on the machine body at a position below the discharge component 800, which is used to receive materials falling from the discharge component 800.

[0056] To facilitate the discharge of harmful gases, a discharge pipe connected to the discharge hopper is installed to discharge the harmful gases generated during material processing.

[0057] In this embodiment of the microwave plasma reaction system, a quartz tube 400 is set inside the microwave resonant cavity 200. Multiple needles 700 are arranged side by side inside the quartz tube 400, with the tips of the needles 700 arranged on the same side. When the microwave source device 300 feeds microwaves into the microwave resonant cavity 200, the microwaves can pass through the quartz tube 400 and enter the quartz tube 400. The microwave energy is concentrated at the tips of the multiple needles 700, and multiple strong electric field regions are formed at the multiple tips of the multiple needles 700. During ionization, multiple strong electric fields simultaneously ionize the gas, resulting in higher ionization efficiency for the working gas and generating a large amount of plasma at once. The large amount of plasma generated allows for more thorough contact with the material during material processing, resulting in better material processing effect.

[0058] In some embodiments of this application, the quartz tube 400 includes a first extension section 420 extending from above the microwave resonant cavity 200 and a second extension section 430 extending from below the microwave resonant cavity 200, both the first extension section 420 and the second extension section 430 being connected to the reaction section 410.

[0059] The first protective component 910 is arranged around the outside of the first telescopic section and is fixedly connected to the microwave resonant cavity 200.

[0060] The first protective component 910 is the first protective cylinder, which is sleeved on the outside of the quartz tube 400 and is made of metal.

[0061] One end of the first protective cylinder is fixedly connected to the microwave resonant cavity 200 via a first flange connected thereto, and the other end is fixedly connected to the first fixing member 920.

[0062] The quartz tube 400 extends from the opening at the top of the first protective cylinder.

[0063] The first fastener 920 is fastened to the top surface of the first protective member 910, and together with the first protective member 910, forms a receiving cavity for the first protruding section 420.

[0064] In some embodiments of this application, the first protective member 910 has a first connecting flange 911 formed at its end, and the first fixing member 920 has a second connecting flange 922 arranged along its circumference. When the first fixing member 920 is inserted between the quartz tube 400 and the first protective member 910, the second connecting flange 922 on the second fixing member fits against the first connecting flange 911, and the two are locked and fixed by bolts.

[0065] A first interface portion 921 communicating with the air intake component 500 is provided on the first fixing member 920, and the first interface portion 921 is communicating with the quartz tube 400.

[0066] The first interface 921 is the first interface, which is provided through the first fixing member 920 and is used to introduce the gas from the air intake member 500 into the quartz tube 400.

[0067] In some embodiments of this application, the second protective member 940 is disposed around the outside of the second telescopic section and is fixedly connected to the microwave resonant cavity 200.

[0068] The second protective component 940 is a second protective cylinder made of metal. It is sleeved on the outside of the second protruding section 430. One end is fixedly connected to the microwave resonant cavity 200 through the second flange, and the other end is fixedly connected to the unloading component 800.

[0069] Specifically, the second protective component 940 has a first flange 941 formed on it, and the material discharge component 800 has a second flange 840 formed on it. The material discharge component 800 is inserted between the quartz tube 400 and the second protective component 940. When the material discharge component 800 is inserted into place, the first flange 941 and the second flange 840 fit together and are fixed by bolts.

[0070] The material feeding component 800 includes a material guiding cavity 810 and a material discharging cavity 820 communicating with the material guiding cavity 810. The inner diameter of the material guiding cavity 810 gradually decreases along the material falling direction, and a material discharging port 830 is provided at the bottom of the material discharging cavity 820.

[0071] By configuring the quartz tube 400 with a first extension section 420 and a second extension section 430 extending from the upper and lower ends of the microwave resonant cavity 200 respectively, and by fitting metal protective parts on the first extension section 420 and the second extension section 430, microwave leakage from the microwave resonant cavity 200 can be prevented.

[0072] In some embodiments of this application, recessed grooves 913 are formed at both ends of the first protective member 910. A sealing ring 914 and a steel ring 915 are fitted on the first protruding section 420 and the second protruding section 430 of the quartz tube 400, respectively, between the inner wall of the recessed groove 913 and the outer wall of the quartz tube 400. Multiple sealing rings 914 and steel rings 915 are provided and are alternately fitted on the quartz tube 400 in sequence.

[0073] The steel ring 915 installed on the quartz tube 400 can be used to ensure the installation accuracy of the quartz tube 400, so that it will not be deviated relative to the first protective component 910.

[0074] In some embodiments of this application, an insertion portion 923 for inserting the fitting 600 is formed on the first fixing member 920. The insertion portion 923 is an insertion groove formed on the first fixing member 920, and the fitting 600 has an insertion protrusion that mates with the insertion groove. The two are inserted and fixed together, which facilitates disassembly and replacement.

[0075] In some embodiments of this application, the needle body 700 includes a needle body 710 and at least a tip 720 formed at one end of the needle body 710.

[0076] The needle body 700 is arranged laterally inside the quartz tube 400. It can be configured as a needle body structure with a tip 720 at one end, or as a needle body structure with tips 720 at both ends.

[0077] When both ends have a tip 720, gas ionization can be performed at both ends of the single needle to generate plasma, thus increasing the amount of plasma produced.

[0078] In some embodiments of this application, an elastic gasket 950 is provided between the end face of the quartz tube 400 and the surface of the blanking component 800 opposite to its end face. The elastic gasket 950 provided between the end face of the quartz tube 400 and the blanking component 800 can prevent the blanking component 800 from directly contacting the quartz tube 400 and causing wear to the quartz tube 400.

[0079] In some embodiments of this application, the assembly 600 includes a first assembly rod 610 and a second assembly rod 620 detachably connected to the first assembly rod 610, and the needle body 700 is provided on the second assembly rod 620.

[0080] By configuring the assembly 600 with a detachable first assembly rod 610 and second assembly rod 620, only the second assembly rod 620 needs to be removed and replaced when the needle body 700 needs to be replaced, without having to replace the entire assembly 600.

[0081] The first assembly rod 610 and the second assembly rod 620 are connected by a connecting sleeve 630. The connecting sleeve 630 is simultaneously fitted onto the ends of the first assembly rod 610 and the second assembly rod 620. The connecting sleeve 630 is provided with two threaded holes 631, which are respectively arranged above and below the connecting sleeve 630. After the connecting sleeve 630 is fitted into place, it can be positioned by screwing bolts into the two threaded holes 631 to abut against the first assembly rod 610 and the second assembly rod 620 respectively.

[0082] In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0083] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions claimed by this utility model.

Claims

1. A microwave plasma reaction system characterized by, Including: frame; A microwave resonant cavity is mounted on the frame; A microwave source device is assembled onto the outer wall of the microwave resonant cavity and is used to feed microwaves into the microwave resonant cavity. A quartz tube is disposed through the microwave resonant cavity from top to bottom, and it has a reaction section located in the microwave resonant cavity; An air intake component is connected to one end of the quartz tube for introducing gas. The assembly is located inside the quartz tube and extends along the axial direction of the quartz tube to the reaction section; The needle body is located within the reaction section and is arranged perpendicular to the axis of the quartz tube. Multiple needle bodies are provided and assembled on the assembly and arranged along the axis of the quartz tube. The material discharge component is connected to the other end of the quartz tube and is used to discharge the processed material.

2. The microwave plasma reaction system of claim 1, wherein, The quartz tube includes: a first extension section extending from above the microwave resonant cavity; The first protective component is arranged around the outside of the first telescopic section and is fixedly connected to the microwave resonant cavity; The first fixing member is fastened to and connected to the first protective member, forming a receiving cavity between the fixing member and the first protective member to accommodate the first protruding section. The first fixing member is provided with a first interface portion that communicates with the air intake component, and the first interface portion communicates with the quartz tube.

3. The microwave plasma reaction system according to claim 2, characterized in that, The first protective member has a first connecting flange, and the first fixing member has a second connecting flange arranged along its circumference. The first fixing member is inserted between the quartz tube and the first protective member. When the first fixing member is inserted into place, the second connecting flange fits against the first connecting flange, and the second connecting flange and the first connecting flange are fixed by bolts.

4. The microwave plasma reaction system according to claim 2, characterized in that, An insertion portion for inserting the fitting is formed on the first fixing member.

5. The microwave plasma reaction system according to claim 1, characterized in that, The quartz tube includes a second protruding section extending from below the microwave resonant cavity; The second protective component is arranged around the outside of the second telescopic section and is fixedly connected to the microwave resonant cavity; The material feeding component is inserted between the quartz tube and the second protective component, and is connected and fixed to the second protective component. A material outlet is formed at the bottom of the material feeding component.

6. The microwave plasma reaction system according to claim 5, characterized in that, The second protective component has a first flange, and the unloading component has a second flange. The first flange and the second flange are attached together and fixed by bolts.

7. The microwave plasma reaction system according to claim 1, characterized in that, The needle body includes a needle body and at least a tip formed at one end of the needle body.

8. The microwave plasma reaction system according to claim 1, characterized in that, An elastic gasket is provided between the end face of the quartz tube and the face of the blanking component and the end face of the quartz tube.

9. The microwave plasma reaction system according to claim 1, characterized in that, The assembly includes a first assembly rod and a second assembly rod detachably connected to the first assembly rod, and the needle body is provided on the second assembly rod.

10. The microwave plasma reaction system according to claim 1, characterized in that, The microwave source device includes multiple magnetrons and multiple waveguides connected to the multiple magnetrons, with the multiple magnetrons arranged circumferentially along the microwave resonant cavity.

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