Platform support mechanism and gluing system

Abstract

A platform support mechanism applied to a glue coating system includes a support frame and a plurality of adjusting assemblies arranged on the support frame for adjusting parallelism of a platform, the plurality of adjusting assemblies are arranged in a square shape and are arranged to uniformly bear weight of the platform, each adjusting assembly includes a screw rod screwed with the support frame and a support cap screwed on a top of the screw rod, the support cap has a support surface for supporting the platform, wherein the screw rod is rotated and translated relative to the support frame for adjusting height of the support surface to a predetermined position, and then precisely adjusting parallelism of the platform. A glue coating system with the platform support mechanism is also provided, including the platform for placing a semiconductor substrate and a coating knife translated relative to the platform, the coating knife has a slit glue outlet for coating glue on the semiconductor substrate, the platform support mechanism can adjust parallelism of the platform to a set threshold, and ensure that glue coated on the semiconductor substrate does not overflow.

Description

Technical Field

[0001] This utility model relates to an adhesive application system, and also to a platform support mechanism applied to the adhesive application system. Background Technology

[0002] The adhesive application system includes a slit-type adhesive nozzle and a platform for placing a semiconductor substrate. The nozzle is used to apply adhesive to the semiconductor substrate as it moves relative to the platform. To ensure that the adhesive applied to the semiconductor substrate does not overflow, the platform needs to have extremely high parallelism.

[0003] In the existing technology, the platform is installed on the support frame by screws. The screw connection method requires drilling holes in the platform. Since the platform is made of stone, the drilling process can easily cause the platform to crack, have low load-bearing capacity, and cannot adjust the parallelism of the platform.

[0004] For the reasons mentioned above, there is an urgent need for a platform support structure for an adhesive application system that can solve the above problems. Utility Model Content

[0005] The purpose of this utility model is to overcome the shortcomings of the prior art and provide a platform support structure and adhesive application system that is not easily damaged, has a large load-bearing capacity, and can adjust the parallelism of the platform.

[0006] This utility model is implemented as follows: a platform support mechanism is applied to an adhesive application system. The platform support mechanism includes a support frame and multiple adjustment components disposed on the support frame for adjusting the parallelism of the platform. The multiple adjustment components are arranged in a square and configured to evenly bear the weight of the platform. Each adjustment component includes:

[0007] The screw is arranged vertically, and its lower end is screwed to the support frame.

[0008] The support cap is screwed to the upper end of the screw rod. The support cap has a support surface for supporting the platform. The screw rod rotates and translates relative to the support frame to adjust the height of the support surface to a predetermined position.

[0009] Preferably, the number of adjustment components is an even number greater than or equal to four, and the even number of adjustment components are located at both ends of the support frame along its length and arranged in an array.

[0010] Preferably, the middle part of the support frame is further provided with symmetrically spaced adjustment components for supporting the platform at both ends along its width direction.

[0011] Furthermore, the adjusting assembly also includes a lower nut, which is screwed to the lower end of the screw and abuts against the support frame to prevent the screw from rotating relative to the support frame.

[0012] Furthermore, the adjusting assembly also includes an upper nut, which is screwed to the upper end of the screw and abuts against the support cap to prevent the support cap from rotating relative to the screw.

[0013] Preferably, the support frame has a plurality of vertically arranged support positions and a plurality of lateral connecting positions respectively fixedly connected between two adjacent support positions, and a plurality of adjustment components are respectively located at the upper end of the plurality of support positions.

[0014] Furthermore, the lower end of the support position is provided with a reinforcing part to increase the force-bearing area between the support position and the force-bearing surface.

[0015] Preferably, the support cap is a truncated cone structure that is larger at the top and smaller at the bottom.

[0016] Furthermore, the upper end of the support cap is connected to a top cover for increasing the support area between the support cap and the platform.

[0017] This utility model provides a platform support mechanism for use in an adhesive application system, including a support frame and multiple adjustment components disposed on the support frame for adjusting the parallelism of the platform. The multiple adjustment components are arranged in a square and are configured to evenly bear the weight of the platform. Each adjustment component includes a screw screwed to the support frame and a support cap screwed to the top of the screw. The support cap has a support surface for supporting the platform. The screw rotates and translates relative to the support frame to adjust the height of the support surface to a predetermined position, thereby precisely adjusting the parallelism of the platform.

[0018] This utility model also provides an adhesive application system, including the above-mentioned platform support architecture, and further including:

[0019] Platform used to mount semiconductor substrates;

[0020] The coating blade is capable of translating relative to the platform and has a slit-type adhesive outlet for uniformly coating the semiconductor substrate.

[0021] This invention also provides a coating system with a platform support mechanism, including a platform for placing a semiconductor substrate and a coating blade that moves relative to the platform. The coating blade has a slit-type adhesive outlet for coating the semiconductor substrate. The platform support mechanism can adjust the parallelism of the platform to within a set threshold, ensuring that the adhesive applied to the semiconductor substrate does not overflow. Attached Figure Description

[0022] To more clearly illustrate the technical solution of this utility model, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a structural diagram of the platform support mechanism provided in this embodiment of the utility model.

[0024] Figure 2 This is a structural diagram of the adjustment component in the platform support mechanism provided in this embodiment of the utility model.

[0025] Figure 3 This is a structural diagram of the support cap in the adjustment assembly provided in this embodiment of the utility model.

[0026] Figure 4 This is a structural diagram of the platform support mechanism used to support the platform in the glue application system provided in this embodiment of the utility model.

[0027] Figure 5 This is a structural diagram of the adhesive application system provided in an embodiment of the present invention.

[0028] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings.

[0029] The reference numerals in the attached figures are explained as follows:

[0030] Platform support mechanism 100, support frame 110, support position 111, lateral connection position 112, accommodating space 113, reinforcing position 114, adjusting component 120, screw 121, support cap 122, support surface 1221, threaded hole 1222, lower nut 123, lower nut 124, top cover 125.

[0031] Platform 200, adsorption area 210, guide hole 220;

[0032] Ejector mechanism 300, ejector assembly 310, power component 320;

[0033] 400 for the applicator blade, 410 for the glue outlet. Detailed Implementation

[0034] In this invention, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "middle," "vertical," "horizontal," "lateral," and "longitudinal" indicate the orientation or state relationship based on the orientation or state relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this invention and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0035] Furthermore, in addition to indicating location or state relationships, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in certain situations to indicate a dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this utility model based on the specific circumstances.

[0036] Furthermore, the terms "installation," "setup," "equipped with," "connection," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this utility model based on the specific circumstances.

[0037] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, components, or parts, which may be the same or different in type and construction, and are not intended to indicate or imply the relative importance or quantity of the indicated devices, components, or parts. Unless otherwise stated, "a plurality of" means two or more.

[0038] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0039] like Figures 1-3 As shown in the figure, a platform support mechanism 100 provided in this embodiment of the present invention is applied to an adhesive application system. The platform support mechanism 100 includes a support frame 110 and a plurality of adjustment components 120 disposed on the support frame 110 for adjusting the parallelism of the platform 200. In this embodiment, the plurality of adjustment components 120 are arranged in a square and are arranged to evenly bear the weight of the platform 200. The platform 200 is preferably a marble platform.

[0040] Each adjustment component 120 includes:

[0041] The screw 121 is arranged vertically, and its lower end is screwed to the support frame 110. In this embodiment, the screw 121 is vertically screwed to the support frame 110 to distribute the weight of the screw 121 to the support frame 110. Preferably, the depth of the screw 121 screwed into the support frame 110 is greater than the outer diameter of the screw 121 to enhance the strength of the connection between the screw 121 and the support frame 110 and improve the stability between the two.

[0042] The support cap 122 is screwed to the upper end of the screw 121. The support cap 122 has a support surface 1221 for supporting the platform 200. The screw 121 rotates and translates relative to the support frame 110 to adjust the height of the support surface 1221 to a predetermined position, thereby precisely adjusting the parallelism of the platform 200.

[0043] In this embodiment, the screw 121 and the support cap 122 are preferably fitted with coarse threads. The coarse threads have a larger pitch, which creates a gap between the screw 121 and the support cap 122. This gap can be used to finely adjust the angle of the support surface 1221, increase the contact area between the support surface 1221 and the platform 200, and facilitate the support cap 122 to stably support the platform 200.

[0044] like Figure 3 As shown, preferably, the support cap 122 has a threaded hole 1222 that mates with the screw 121. After the screw 121 is screwed into the support cap 122, it abuts against the top surface of the threaded hole 1222 to reduce the load on the screw threads, thereby extending the service life of the support cap 122.

[0045] like Figure 1 As shown, preferably, the number of adjustment components 120 is an even number greater than or equal to four. The even number of adjustment components 120 are located at both ends of the support frame 110 along its length and are arranged in an array to evenly bear the weight of the platform 200.

[0046] like Figure 1 As shown, preferably, the middle part of the support frame 110 is further provided with symmetrically spaced adjustment components 120' for supporting the platform 200 at both ends along its width direction, which further plays the role of sharing the weight of the platform.

[0047] like Figure 2 As shown, the adjustment assembly 120 further includes a lower nut 123 and an upper nut 124. The lower nut 123 is screwed onto the screw rod 121 and abuts against the support frame 110 to prevent the screw rod 121 from rotating relative to the support frame 110. The upper nut 124 is screwed onto the screw rod 121 and abuts against the support cap 122 to prevent the support cap 122 from rotating relative to the screw rod 121. The lower nut 123 fixes and limits the adjusted screw rod 121 to a predetermined height, and the upper nut 124 fixes and limits the support cap 122 to ensure the stability between the support cap 122 and the platform.

[0048] like Figure 1As shown, preferably, the support frame 110 includes a plurality of vertically arranged support positions 111 and a plurality of transverse connecting positions 112 respectively fixedly connected between two adjacent support positions 111. In this embodiment, the plurality of transverse connecting positions 112 are all connected to the upper end of the support positions 111, and the plurality of adjusting components 120 are respectively located above the plurality of support positions 111, so that the plurality of support positions 111 evenly bear the weight of the platform supported by the adjusting components 120, avoiding the phenomenon of bending and deformation of the transverse connecting positions 112 of the support frame 110 due to the load, which not only extends the service life of the support frame 110, but also improves the supporting strength of the support frame 110.

[0049] The center of the support position 112 is coaxially set with the center of the screw 121, which further enhances the support strength of the support position 112.

[0050] Furthermore, the lower end of the support position 111 is provided with a reinforcing position 114 for increasing the force-bearing area between the support position 111 and the force-bearing surface (such as the ground), and the reinforcing position 114 improves the stability between the lower end of the support position 111 and the force-bearing surface.

[0051] Furthermore, the lower end of the support position 111 is connected to a horizontally arranged pressure plate (not shown). The pressure plate reduces the pressure between the support position 111 and the force-bearing surface. In this embodiment, the pressure plate is composed of multiple spliced ​​small pressure plates, which facilitates quick assembly and disassembly between the pressure plate and the support frame 110.

[0052] like Figure 3 As shown, preferably, the support cap 122 is a truncated cone structure with a large upper end and a small lower end. This structure is used to increase the support area between the support cap 122 and the platform 200, thereby improving the stability between the adjustment component 120 and the platform 200.

[0053] like Figure 2 As shown, the upper end of the support cap 122 is further connected to a top cover 125 for increasing the support area between the support cap 122 and the platform 200. The top cover 125 expands the support area between the support cap 122 and the platform 200, further improving the stability of the adjustment component 120 and the platform 200.

[0054] Preferably, the support cap 122 and the top cover 125 are magnetically connected, and both have built-in magnets that attract each other. This structural design avoids the phenomenon that the heavy platform 200 is damaged due to the large resistance between the two when it is moved relative to the support frame 110.

[0055] Preferably, the cross-sections of the support cap 122 and the top cover 125 are both circular. In this embodiment, the outer diameter of the top cover 125 is larger than the upper outer diameter of the support cap 122, so as to form a layer-by-layer expansion of the support area of ​​the platform support mechanism, further improving the stability between the platform support mechanism 100 and the platform 200.

[0056] like Figure 4 and Figure 5 As shown, this utility model also provides an adhesive application system, including the above-mentioned platform support frame 110 structure, and further including:

[0057] Platform 200 is used to place semiconductor substrate 10 and has adsorption area 210 for adsorbing and fixing semiconductor substrate 10. Guide holes 220 are uniformly arranged in adsorption area 210 through platform 200.

[0058] The ejector mechanism 300 includes ejector assemblies 310 respectively inserted into guide holes 220, and a power component 320 for driving the ejector assemblies 310 to move up and down. The power component 320 includes, but is not limited to, a rotary motor, a telescopic cylinder, and a lead screw motor. In this embodiment, a lead screw motor is preferred. The power component 320 drives the ejector assembly 310 to rise from a first height position to a second height position for receiving the semiconductor substrate transferred by the robot arm. The power component 320 also drives the ejector assembly 310 to descend from the second height position to the first height position for placing the semiconductor substrate 10 on a flat surface. On platform 200, the semiconductor substrate 10 is adsorbed and fixed on platform 200 by the vacuum adsorption force generated by the vacuum adsorption device, which facilitates the uniform coating of adhesive on semiconductor substrate 10; support frame 110 has a receiving space 113 for accommodating ejector pin mechanism 300. Ejector pin mechanism 300 is directly or indirectly installed on support frame 110. In this embodiment, receiving space 113 is formed by multiple support positions 111 surrounding it. Setting ejector pin mechanism 300 in receiving space 113 of support frame 110 saves installation space, reduces the external volume of adhesive coating system, and is conducive to product miniaturization;

[0059] The adhesive application system also includes a coating blade 400 that can be translated relative to the platform 200. The coating blade 400 has a slit-type adhesive outlet 410 for applying adhesive to the semiconductor substrate 10. The platform support mechanism can adjust the parallelism of the platform 200 to within a set threshold to ensure that the adhesive applied to the semiconductor substrate does not overflow.

[0060] The above description is the preferred embodiment of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications are also considered to be within the protection scope of this utility model.

Claims

1. A platform support mechanism, applied in an adhesive application system, characterized in that, The platform support mechanism includes a support frame and multiple adjustment components mounted on the support frame for adjusting the parallelism of the platform. The multiple adjustment components are arranged in a square pattern to evenly bear the weight of the platform. Each adjustment component includes: The screw is arranged vertically, and its lower end is screwed to the support frame. A support cap is screwed to the upper end of the screw rod. The support cap has a support surface that is compatible with the support platform. The screw rod rotates and translates relative to the support frame to adjust the height of the support surface to a predetermined position.

2. The platform support structure according to claim 1, characterized in that, The number of adjustment components is an even number, greater than or equal to four, and the even number of adjustment components are located at both ends of the support frame along its length and arranged in an array.

3. The platform support structure according to claim 2, characterized in that, The support frame also has symmetrically spaced adjustment components at both ends along its width direction in the middle section for supporting the platform.

4. The platform support structure according to claim 1, characterized in that, The adjusting assembly also includes a lower nut, which is screwed to the lower end of the screw and abuts against the support frame to prevent the screw from rotating relative to the support frame.

5. The platform support mechanism according to claim 1, characterized in that, The adjusting assembly also includes an upper nut, which is screwed to the upper end of the screw and abuts against the support cap to prevent the support cap from rotating relative to the screw.

6. The platform support structure according to claim 1, characterized in that, The support frame has multiple vertically arranged support positions and multiple horizontal connecting positions that are fixedly connected between two adjacent support positions. The multiple adjustment components are directly or indirectly installed on the upper end of the multiple support positions.

7. The platform support structure according to claim 6, characterized in that, The lower end of the support is provided with a reinforcing part to increase the force-bearing area between the support and the force-bearing surface.

8. The platform support structure according to claim 1, characterized in that, The support cap is a truncated cone structure that is larger at the top and smaller at the bottom.

9. The platform support structure according to claim 8, characterized in that, The upper end of the support cap is connected to a top cover for increasing the support area between the support cap and the platform.

10. An adhesive application system, characterized in that, The platform support architecture, including any one of claims 1 to 9, further includes: Platform used to mount semiconductor substrates; The coating blade is capable of translating relative to the platform and has a slit-type adhesive outlet for uniformly coating the semiconductor substrate.

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