Sorting machine suction device with buffer structure

Abstract

This utility model relates to the field of sorting machine suction nozzles, and more particularly to a sorting machine suction device with a buffer structure. It includes a first buffer assembly and a second buffer assembly; the first buffer assembly is disposed on a base plate, and the second buffer assembly is connected to a suction nozzle; the first buffer assembly has a sliding mechanism, a portion of which is fixed to the base plate, the base plate is connected to another portion via a first buffer member, and the other portion is connected to the second buffer assembly; the second buffer assembly has a suction nozzle fixing block connected to the suction nozzle, and a second buffer member is abutting between the suction nozzle fixing block and the suction nozzle; the first and second buffer members have the same deformation direction. This application transforms the contact between the suction nozzle and the material into a flexible contact by synchronously deforming the first and second buffer assemblies in the same direction, effectively reducing impact pressure and protecting fragile materials; its guide rail-slider mechanism ensures precise linear guidance and reliable operation during the buffering process.

Description

Technical Field

[0001] This utility model relates to the field of sorting machine suction nozzles, and in particular to a sorting machine suction device with a buffer structure. Background Technology

[0002] In the semiconductor wafer sorting process, wafer pickup is a crucial step. Slight differences can exist between wafer thickness and nozzle height; directly pressing the nozzle onto the wafer surface could damage it. Therefore, the pressure applied during wafer pickup must be carefully controlled.

[0003] In chip pick-up structures both domestically and internationally, several methods are commonly used to achieve pressure control: using a voice coil motor for pressing, thus achieving pressure control; using a pressure sensor to monitor pressure; and using a spring buffer to provide a certain amount of cushioning when the nozzle presses down. However, using a voice coil motor for pressing is too expensive, costing two to three times more than the ordinary pressing method. Using a pressure sensor to monitor pressure significantly increases the difficulty of equipment debugging. Utility Model Content

[0004] The purpose of this invention is to provide a sorting machine adsorption device with a buffer structure, so as to solve the problem that there is no simple and effective device for controlling the pressure of the suction nozzle on the material in the prior art.

[0005] The technical solution of this utility model is: a sorting machine adsorption device with a buffer structure, including a first buffer component and a second buffer component; the first buffer component is disposed on a substrate, and the second buffer component is connected to a suction nozzle;

[0006] The first buffer assembly has a sliding mechanism, a part of which is fixed to the substrate. The substrate is connected to another part through the first buffer member, and the other part is connected to the second buffer assembly.

[0007] The second buffer assembly has a nozzle fixing block connected to the nozzle, and a second buffer member is abutting between the nozzle fixing block and the nozzle;

[0008] The first and second buffers have the same deformation direction.

[0009] Preferably, the sliding mechanism includes a guide rail and a slider. The slider is fixed on the substrate along a first direction. The guide rail and the slider are slidably engaged. A nozzle mounting block is connected to the end of the guide rail away from the slider. The bottom end of the guide rail is connected to a first buffer. The nozzle fixing block is fixed to the nozzle mounting block. The nozzle is disposed through the nozzle fixing block along the first direction.

[0010] Preferably, the sliding mechanism is connected to the substrate via a limiting mechanism. The top of the substrate has a limiting end perpendicular to the first direction. The limiting mechanism includes a limiting rod extending through the limiting end along the first direction. The limiting rod is connected to the guide rail and has a limiting adjuster that can abut against the side of the limiting end away from the slider and is connected to the limiting rod.

[0011] Preferably, the outer wall of the limiting rod is provided with threads, and the limiting adjuster is constructed as a nut and is threadedly engaged with the limiting rod.

[0012] Preferably, the suction nozzle is connected to the suction nozzle fixing block via a ball spline. The suction nozzle fixing block has a through hole along the first direction for the ball spline to pass through. A stop block is fixed radially at the top of the ball spline. The stop block abuts against the bottom end of the suction nozzle fixing block. The suction nozzle is located at the bottom end of the ball spline.

[0013] Preferably, the nozzle has a set screw hole in the radial direction, and the ball spline has an annular groove corresponding to the set screw hole, with the set screw passing through the set screw hole and abutting against the annular groove, so that the nozzle is connected to the ball spline.

[0014] Preferably, both the first and second buffers are springs.

[0015] Compared with the prior art, the advantages of this utility model are:

[0016] (1) By having the first and second buffer components deform synchronously in the same direction, the contact between the nozzle and the material is transformed into a flexible contact, which effectively reduces the impact pressure and protects the vulnerable material; its guide rail-slider mechanism ensures the precise linear guidance and reliable operation of the buffer process.

[0017] (2) The adjustable limit mechanism allows for precise adjustment of the pre-tension length of the first spring, thereby controlling the starting point of the buffer stroke and adapting to different working conditions. Attached Figure Description

[0018] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0019] Figure 1 This is a structural diagram of the adsorption device for a sorting machine with a buffer structure according to the present invention.

[0020] Figure 2 This is a structural diagram of the first buffer component of this utility model;

[0021] Figure 3 This is a structural diagram of the second buffer component of this utility model;

[0022] Figure 4 This is a cross-sectional view of the second buffer component of this utility model from one direction;

[0023] Figure 5 This is a cross-sectional view of the second buffer component of this utility model from another direction;

[0024] Figure 6 This is a partial structural diagram of the ball spline described in this utility model;

[0025] The components are as follows: 1. Base plate; 2. Nozzle; 3. First buffer assembly; 31. Sliding mechanism; 311. Slider; 312. Guide rail; 32. First buffer component; 33. Limiting mechanism; 331. Limiting end; 332. Limiting rod; 333. Limiting adjuster; 34. Nozzle mounting block; 4. Second buffer assembly; 41. Nozzle fixing block; 42. Second buffer component; 43. Ball spline; 431. Annular groove; 44. Stop block; 45. Set screw hole. Detailed Implementation

[0026] The present invention will be further described in detail below with reference to specific embodiments:

[0027] like Figure 1 As shown, a sorting machine adsorption device with a buffer structure includes a base plate 1, a suction nozzle 2, a first buffer assembly 3, and a second buffer assembly 4. The suction nozzle 2 is arranged along a first direction, and the first buffer assembly 3 and the second buffer assembly 4 are deformable along the first direction to buffer the pressure on the material when the suction nozzle 2 comes into contact with and adsorbs the material.

[0028] Combination Figure 2 As shown, the first buffer assembly 3 has a sliding mechanism 31, a part of which is fixed to the base plate 1. A first buffer member 32 is disposed on the base plate 1 and connected to another part thereon, and a second buffer assembly 4 is disposed on the other part. The second buffer assembly 4 has a suction nozzle fixing block 41 connected to the suction nozzle 2, and a second buffer member 42 is disposed between the suction nozzle fixing block 41 and the suction nozzle 2. Both the first buffer member 32 and the second buffer member 42 are springs with the same deformation direction. When the suction nozzle 2 comes into contact with the material, the first buffer member 32 and the second buffer member 42 deform synchronously, making the contact between the suction nozzle 2 and the material a flexible contact.

[0029] Specifically, the sliding mechanism 31 includes a guide rail 312 and a slider 311. The slider 311 is fixed to the substrate 1 along a first direction and has a guide groove on one side. The guide rail 312 is disposed in the guide groove and slides in cooperation with the slider 311. The end of the first buffer member 32 away from the substrate 1 is connected to the bottom end of the guide rail 312. A nozzle mounting block 34 is installed on the side of the guide rail 312 away from the slider 311. A nozzle fixing block 41 is fixed to the nozzle mounting block 34, and the nozzle 2 is disposed through the nozzle fixing block 41 along the first direction. When the nozzle 2 contacts the material, the first buffer member 32 is stretched along the first direction to buffer the contact force between the nozzle 2 and the material.

[0030] A limiting mechanism 33 is provided at the top of the sliding mechanism 31. The limiting mechanism 33 is used to give the first buffer member 32 a contractile elastic force under normal conditions. The cross-section of the base plate 1 along the vertical direction is set as a C-shaped structure, and the top end is set as a limiting end 331 perpendicular to the first direction. The limiting mechanism 33 includes a limiting rod 332 that passes through the limiting end 331 along the first direction. The limiting rod 332 is connected to the top end of the guide rail 312 and has a limiting adjuster 333 that can abut against the side of the limiting end 331 away from the slider 311 and is connected to the limiting rod 332. In this embodiment, the outer wall of the limiting rod 332 is provided with threads, and the limiting adjuster 333 is constructed as a nut and threadedly engaged with the limiting rod 332. By adjusting the position of the limiting adjuster 333 on the limiting rod 332, the distance between the bottom end of the guide rail 312 and the base plate 1 can be adjusted, that is, the stretching length of the first buffer member 32 under normal conditions.

[0031] Combination Figures 3-6 As shown, the suction nozzle 2 is connected to the suction nozzle fixing block 41 via a ball spline 43. The suction nozzle fixing block 41 has a through hole along a first direction for the ball spline 43 to pass through. A stop block 44 is fixed radially at the top of the ball spline 43, and the stop block 44 abuts against the bottom end of the suction nozzle fixing block 41. The suction nozzle 2 is located at the bottom end of the ball spline 43. The suction nozzle 2 has a set screw hole 45 radially, and the ball spline 43 has an annular groove 431 corresponding to the set screw hole 45, with a set screw passing through the set screw hole 45 and abutting against the annular groove 431, thereby connecting the suction nozzle 2 to the ball spline 43.

[0032] The above embodiments are only for illustrating the technical concept and features of this utility model, and are intended to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be construed as limiting the scope of protection of this utility model. It is obvious to those skilled in the art that this utility model is not limited to the details of the above exemplary embodiments, and that it can be implemented in other specific forms without departing from the spirit or basic characteristics of this utility model. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of this utility model is defined by the appended claims rather than the foregoing description, and therefore, all changes falling within the meaning and scope of the equivalents of the claims are intended to be included within this utility model.

Claims

1. A sorting machine suction device having a buffer structure, characterized in that, It includes a first buffer component (3) and a second buffer component (4); the first buffer component (3) is disposed on the substrate (1), and the second buffer component (4) is connected to a suction nozzle (2); The first buffer assembly (3) has a sliding mechanism (31), a part of which is fixed to the substrate (1), the substrate (1) is connected to another part through the first buffer member (32), and the other part is connected to the second buffer assembly (4); The second buffer assembly (4) has a nozzle fixing block (41) connected to the nozzle (2), and a second buffer (42) is provided between the nozzle fixing block (41) and the nozzle (2). The first buffer (32) and the second buffer (42) have the same deformation direction.

2. The sorting machine suction device with a buffer structure according to claim 1, characterized in that, The sliding mechanism (31) includes a guide rail (312) and a slider (311). The slider (311) is fixed on the substrate (1) along the first direction. The guide rail (312) and the slider (311) are slidably engaged. A nozzle mounting block (34) is connected to one end of the guide rail (312) away from the slider (311). The bottom end of the guide rail (312) is connected to the first buffer (32). The nozzle fixing block (41) is fixed to the nozzle mounting block (34). The nozzle (2) is disposed through the nozzle fixing block (41) along the first direction.

3. The sorting machine suction device with a buffer structure according to claim 2, characterized in that, The sliding mechanism (31) is connected to the base plate (1) through the limiting mechanism (33). The top of the base plate (1) has a limiting end (331) perpendicular to the first direction. The limiting mechanism (33) includes a limiting rod (332) that passes through the limiting end (331) along the first direction. The limiting rod (332) is connected to the guide rail (312) and has a limiting adjuster (333) that can abut against the side of the limiting end (331) away from the slider (311) and is connected to the limiting rod (332).

4. The sorting machine adsorption device with a buffer structure according to claim 3, characterized in that, The outer wall of the limiting rod (332) is provided with threads, and the limiting adjuster (333) is constructed as a nut and is threadedly engaged with the limiting rod (332).

5. The sorting machine adsorption device with a buffer structure according to claim 1, characterized in that, The suction nozzle (2) is connected to the suction nozzle fixing block (41) via a ball spline (43). The suction nozzle fixing block (41) has a through hole along the first direction for the ball spline (43) to pass through. A stop block (44) is fixed radially at the top of the ball spline (43). The stop block (44) abuts against the bottom end of the suction nozzle fixing block (41). The suction nozzle (2) is located at the bottom end of the ball spline (43).

6. The sorting machine adsorption device with a buffer structure according to claim 5, characterized in that, The nozzle (2) has a set screw hole (45) in the radial direction. The ball spline (43) has an annular groove (431) corresponding to the set screw hole (45). The set screw passes through the set screw hole (45) and abuts against the annular groove (431), so that the nozzle (2) is connected to the ball spline (43).

7. The sorting machine adsorption device with a buffer structure according to claim 1, characterized in that, Both the first buffer (32) and the second buffer (42) are springs.

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