A seal structure for a heating element and sheath heater junction

Abstract

The utility model relates to the technical field of semiconductor manufacturing equipment, specifically disclose a kind of sealing structure of heating body and sheath heater junction, comprising: heating body and sheath heater, the sheath heater is passed by the perforation set on heating body, and the outer surface of sheath heater is connected between heating body by soldering material. When heating block is placed in vacuum chamber, the junction of sheath heater and heating body is welded to form sealing structure by soldering material, so that the temperature insulation area is not communicated with external atmosphere, the sealing between sheath heater and heating body, so that it is not necessary to frequently extract gas in vacuum chamber, facilitate the control of vacuum degree in vacuum chamber, save electric energy.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, and more specifically, to a sealing structure at the connection between a heating element and a sheath heater. Background Technology

[0002] Semiconductor thin film technology is the process of depositing materials on the surface of a wafer through physical or chemical means. The chemical vapor deposition process of semiconductor wafers is carried out in a vacuum chamber, and various metal heaters, including aluminum, as well as ceramic heaters are typically used as heating elements for semiconductor wafers.

[0003] In the prior art, the heating block includes a heating body 1, a support body 5 at the bottom of the heating body 1, and a heat insulation region 6 formed inside the heating body 1. A through hole 13 is provided at the bottom of the heating body 1 to connect the heat insulation region 6 with the outside. A sheath heater 2 is provided inside the heating body 1 above the heat insulation region 6. The two electrical terminals of the sheath heater 2 pass through the heating body 1 and the support body 5 and extend to the outside of the support body 5. When the heating block is placed in a vacuum chamber 7, the heat insulation region 6 is connected to the vacuum chamber 7, thereby achieving a vacuum insulation effect between the upper and lower parts of the heating body 1. Since the lower part of the support body 5 is outside the vacuum chamber 7, the connection between the sheath heater 2 and the heating body 1 is not sealed, and the connection between the support body 5 and the sheath heater 2 is also not sealed. This will allow the heat insulation region 6 to be connected to the outside atmosphere, requiring frequent extraction of gas from the vacuum chamber 7 to maintain the vacuum level of the vacuum chamber 7, which will waste electrical energy.

[0004] Therefore, it is necessary to propose a sealing structure at the connection between the heating element and the sheath heater in order to at least partially solve the problems existing in the prior art. Utility Model Content

[0005] The utility model description section introduces a series of simplified concepts, which will be further explained in detail in the detailed description section. This utility model description section is not intended to limit the key features and essential technical features of the claimed technical solution, nor is it intended to determine the scope of protection of the claimed technical solution.

[0006] To at least partially solve the above problems, this utility model provides a sealing structure at the connection between a heating element and a sheath heater, comprising: a heating element and a sheath heater, wherein the sheath heater is passed through a perforation provided on the heating element, and the outer surface of the sheath heater is connected to the heating element by solder.

[0007] Preferably, the outer side of the sheathed heater is a metal protective tube, and the material of the metal protective tube is the same as that of the heating element.

[0008] Preferably, the metal protective tube is made of aluminum or an aluminum-containing alloy.

[0009] Preferably, the outer side of the sheathed heater is a metal protective tube, and a welding layer is provided on the outer side of the metal protective tube. Part of the welding layer is located inside the perforation, and another part is located outside the perforation.

[0010] Preferably, the material of the weld layer is aluminum or an aluminum-containing alloy.

[0011] Preferably, the weld layer is connected to the heating element by solder.

[0012] Preferably, the bottom end of the perforation is provided with a connecting hole, the inner diameter of which is larger than the inner diameter of the perforation.

[0013] Preferably, the connection hole contains solder.

[0014] Preferably, the solder protrudes from the connection hole.

[0015] Preferably, the melting point of the solder is higher than the operating temperature of the sheath heater.

[0016] Compared with the prior art, the present invention has at least the following beneficial effects:

[0017] The sealing structure at the connection between the heating element and the sheath heater of this utility model, when the heating block is placed in the vacuum chamber, the connection between the sheath heater and the heating element is formed by welding with solder to form a sealing structure, thereby preventing the insulation area from being connected to the outside atmosphere. The seal between the sheath heater and the heating element eliminates the need for frequent extraction of gas from the vacuum chamber, facilitating the control of the vacuum level in the vacuum chamber and saving energy.

[0018] The sealing structure at the connection between the heating element and the sheath heater described in this utility model, other advantages, objectives and features of this utility model will be partly apparent from the following description, and partly understood by those skilled in the art through study and practice of this utility model. Attached Figure Description

[0019] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0020] Figure 1 This is a schematic diagram of the sealing structure at the connection between the heating element and the sheath heater described in this utility model applied to the heating block;

[0021] Figure 2 for Figure 1 A schematic diagram of the heating block in the vacuum chamber;

[0022] Figure 3 This is a schematic diagram of the first structure of the sealing structure at the connection between the heating element and the sheath heater described in this utility model;

[0023] Figure 4 This is a schematic diagram of the second structure of the sealing structure at the connection between the heating element and the sheath heater described in this utility model;

[0024] Figure 5 This is a schematic diagram of the connection hole in the sealing structure at the connection between the heating element and the sheath heater described in this utility model;

[0025] Figure 6 This is a schematic diagram of a third type of sealing structure at the connection between the heating element and the sheath heater described in this utility model. Detailed Implementation

[0026] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments, so that those skilled in the art can implement it based on the description.

[0027] It should be understood that terms such as “having,” “comprising,” and “including” as used herein do not exclude the presence or addition of one or more other elements or combinations thereof.

[0028] like Figures 1-3 As shown, this utility model provides a sealing structure at the connection between a heating element and a sheath heater, including: a heating element 1 and a sheath heater 2, wherein the sheath heater 2 is passed through a through hole 11 provided on the heating element 1, and the outer surface of the sheath heater 2 is connected to the heating element 1 by solder 3.

[0029] The sheathed heater 2 includes: a metal protective tube with a heating element inside, and an insulating layer between the heating element and the metal protective tube; the insulating layer is magnesium oxide powder; the sheathed heater 2 is constructed by inserting the heating element into the metal protective tube, filling it with magnesium oxide powder to ensure electrical insulation between the heating element and the metal protective tube, and then tightly compressing the magnesium oxide powder between the metal protective tube and the heating element through rolling and rotary forging processes.

[0030] The sheath heater 2 passes through the perforation 11, and the heating body 1 and the metal protective tube on the outside of the sheath heater 2 are welded together by solder 3 to form a weld, which seals the sheath heater 2 and the heating body 1.

[0031] When the heating block is placed inside the vacuum chamber 7, the connection between the sheath heater 2 and the heating body 1 is welded together with solder 3 to form a sealed structure, thereby preventing the insulation area 6 from being connected to the outside atmosphere. The internal pressure of the vacuum chamber 7 usually needs to be controlled between 1-100 Torr (Torr is a unit of pressure). The seal between the sheath heater 2 and the heating body 1 eliminates the need for frequent extraction of gas from the vacuum chamber 7, facilitating the control of the vacuum level inside the vacuum chamber 7 and saving energy.

[0032] In one embodiment, the outer side of the sheathed heater 2 is a metal protective tube, and the material of the metal protective tube is the same as that of the heating element 1.

[0033] Furthermore, the metal protective tube is made of aluminum or an aluminum-containing alloy.

[0034] Specifically, the material of the metal protective tube can be selected from aluminum profiles of series 1, 2, 3, 4, 5, 6 and 7.

[0035] In the existing technology, the heating element 1 is usually made of aluminum, while the metal protective tube on the outside of the sheath heater 2 is usually made of Incoloy alloy or stainless steel. Since the melting point difference between Incoloy alloy or stainless steel and aluminum is large, they are not easy to weld. Therefore, it is not easy to form a sealed structure at the connection between the heating element 1 and the sheath heater 2.

[0036] In order to tightly compress the magnesium oxide powder inside the metal protective tube, the strength of the metal protective tube material needs to reach a certain level. Depending on the operating environment of the sheath heater 2, copper, steel, 304 stainless steel or Incoloy alloy are preferred. However, metal protective tubes made of these materials are not easy to weld to the aluminum heating element 1, resulting in gaps at the connection between the heating element 1 and the sheath heater 2.

[0037] Therefore, in order to achieve a seal and ensure the working performance of the heating element 1 and the sheath heater 2, the metal protective tube and the heating element 1 are made of the same material, for example, both are made of aluminum, or the heating element 1 is made of aluminum and the metal protective tube of the sheath heater 2 is made of aluminum alloy, so as to facilitate welding at the connection between the two to form a sealed structure.

[0038] When aluminum or aluminum alloy is selected as the material for the metal protective tube, the high ductility of aluminum results in poor compression of the internal magnesium oxide powder, which can easily shorten the life of the heating element. However, this problem can be solved by optimizing the compression process. In this invention, if there is a gap at the connection between the heating element 1 and the sheath heater 2, welding is used to achieve a seal.

[0039] In one embodiment, the outer side of the sheath heater 2 is a metal protective tube, and a welding layer 4 is provided on the outer side of the metal protective tube. A portion of the welding layer 4 is located inside the perforation 11, and another portion is located outside the perforation 11.

[0040] Unlike the previous embodiments, in this embodiment, the material of the metal protective tube can still be selected from copper, steel, 304 stainless steel or Incoloy alloy. Then, a welding layer 4 that can be welded to the heating element 1 is plated on the outside of the metal protective tube. The axial length of the welding layer 4 through the hole 11 is greater than the length of the hole 11, so that part of the welding layer 4 is located inside the hole 11 and the other part is located outside the hole 11, thereby ensuring that the solder 3 can weld the welding layer 4 to the heating element 1 to form a sealed structure.

[0041] Furthermore, the material of the welding layer 4 is aluminum or an alloy containing aluminum.

[0042] Since the heating element 1 is preferably made of aluminum, the material of the welding layer 4 can also be selected from aluminum profiles of series 1, 2, 3, 4, 5, 6, and 7.

[0043] Aluminum can be plated on the surface of the metal protective tube of the sheathed heater 2 to form a weld layer 4.

[0044] Furthermore, the welding layer 4 is connected to the heating element 1 via solder 3.

[0045] The weld layer 4, formed of aluminum or an aluminum-containing alloy, can be welded to the heating element 1 by solder 3 to form a sealed structure, thereby achieving a seal between the sheath heater 2 and the heating element 1.

[0046] In one embodiment, the bottom end of the perforation 11 is provided with a connecting hole 12, and the inner diameter of the connecting hole 12 is larger than the inner diameter of the perforation 11.

[0047] Furthermore, solder 3 is provided inside the connection hole 12.

[0048] In all the aforementioned embodiments, the connection between the bottom surface of the heating element 1 and the sheath heater 2 is directly welded;

[0049] Unlike the previous embodiments, in this embodiment, the connecting hole 12 and the through hole 11 form a stepped hole, and the solder 3 can be placed in the connecting hole 12, thereby increasing the connection area between the solder 3 and the metal protective tube and the heating element 1, thereby improving the sealing effect.

[0050] Furthermore, the solder 3 protrudes from the connection hole 12.

[0051] After welding, the solder 3 protrudes from the connection hole 12 to further ensure the connection stability between the metal protective tube and the heating element 1 and prevent leakage due to micropores.

[0052] In one embodiment, the melting point of the solder 3 is higher than the operating temperature of the sheath heater 2.

[0053] The selection of solder 3 is mainly based on the consideration that it should not be affected by the operating temperature of the sheath heater 2, so as to further ensure the connection stability between the metal protective tube and the heating element 1.

[0054] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0055] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0056] Although the embodiments of this utility model have been disclosed above, they are not limited to the applications listed in the specification and embodiments. They can be applied to various fields suitable for this utility model. For those skilled in the art, other modifications can be easily made. Therefore, without departing from the general concept defined by this utility model, this utility model is not limited to the specific details and the illustrations shown and described herein.

Claims

1. A sealing structure at the connection between a heating element and a sheath heater, characterized in that, include: A heating element (1) and a sheath heater (2) are provided, wherein the sheath heater (2) is passed through a perforation (11) provided on the heating element (1), and the outer surface of the sheath heater (2) is connected to the heating element (1) by solder (3).

2. The sealing structure at the connection between the heating element and the sheath heater according to claim 1, characterized in that, The outer side of the sheath heater (2) is a metal protective tube, and the material of the metal protective tube is the same as that of the heating element (1).

3. The sealing structure at the connection between the heating element and the sheath heater according to claim 2, characterized in that, The metal protective tube is made of aluminum or an alloy containing aluminum.

4. The sealing structure at the connection between the heating element and the sheath heater according to claim 1, characterized in that, The outer side of the sheath heater (2) is a metal protective tube, and a welding layer (4) is provided on the outer side of the metal protective tube. A part of the welding layer (4) is located inside the perforation (11), and another part is located outside the perforation (11).

5. The sealing structure at the connection between the heating element and the sheath heater according to claim 4, characterized in that, The material of the weld layer (4) is aluminum or an alloy containing aluminum.

6. The sealing structure at the connection between the heating element and the sheath heater according to claim 4, characterized in that, The weld layer (4) is connected to the heating element (1) by solder (3).

7. The sealing structure at the connection between the heating element and the sheath heater according to claim 1, characterized in that, The bottom end of the perforation (11) is provided with a connecting hole (12), and the inner diameter of the connecting hole (12) is larger than the inner diameter of the perforation (11).

8. The sealing structure at the connection between the heating element and the sheath heater according to claim 7, characterized in that, The connecting hole (12) is provided with solder (3).

9. The sealing structure at the connection between the heating element and the sheath heater according to claim 8, characterized in that, The solder (3) protrudes from the connecting hole (12).

10. The sealing structure at the connection between the heating element and the sheath heater according to claim 1, characterized in that, The melting point of the solder (3) is higher than the operating temperature of the sheath heater (2).

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