An integrated heat retaining ring for epitaxial furnace

Abstract

The utility model discloses a whole type heat preservation ring of epitaxial furnace, including heat insulation main body ring, the inner surface of heat insulation main body ring is equipped with helical rising groove, the inside of heat insulation main body ring both sides is equipped with temperature measuring channel for placing temperature sensor respectively, the lower surface and the side of heat insulation main body ring are equipped with the positioning recess for cooperating positioning installation with epitaxial furnace body respectively, the peripheral edge outer surface of heat insulation main body ring is equipped with stress release slit, and the stress release slit is filled with flexible graphite rope. The utility model discloses a whole type heat preservation ring structure, can effectively improve the penetration problem of corrosive gas, improves the service life of temperature sensor, and it completely eliminates the splicing gap between blocks, can significantly reduce heat loss, reduces epitaxial furnace operation energy consumption, and the heat field distribution in the furnace is more uniform and stable, is favorable for promoting temperature uniformity, and the whole has higher mechanical strength and structural stability, and the service life is long.

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