Chip sampling tool
By designing a chip sampling fixture and using movable parts to block the through slots to form a receiving cavity, the problem of chips falling off during the gripping process was solved, achieving efficient chip collection and inspection, and improving product quality and production efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- DIODES TECH CHENGDU
- Filing Date
- 2025-06-13
- Publication Date
- 2026-06-23
AI Technical Summary
In existing technologies, chips are prone to cracks or pin marks on the back side due to manual sampling during the gripping process, and they are also prone to falling onto the wafer surface or material strip, resulting in quality problems and additional losses.
Design a chip sampling fixture, including a receiving component and a handle. A chip receiving cavity is formed by sealing the through slot with a movable component. The chip is blown into the receiving cavity by a machine welding head to prevent it from falling out. The chip can be collected and inspected by moving the movable component.
This effectively prevents chips from falling out, improves sampling efficiency, reduces quality problems and production costs, and increases the yield rate.
Smart Images
Figure CN224399008U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor equipment technology, and more specifically, to a chip sampling fixture. Background Technology
[0002] Abnormalities in chip bonding process parameters, machine operation, or ejector pins can cause cracks or ejector pin marks on the back of the chip during the gripping process, leading to product reliability failure. To address this product quality risk, operators must manually sample chips from each robot daily and inspect them under a high-powered microscope to confirm the presence of ejector pin cracks on the back of the chip.
[0003] Currently, operators manually pick up ejector pin imprint samples using tweezers. During this manual process, the small size of the chips often leads to them falling onto the wafer surface, causing chip overlap and other quality issues. Alternatively, chips may fall onto the product material strip, damaging the mold during product encapsulation and causing additional losses. Manual sampling with tweezers is particularly problematic because the chips are small and easily fall onto the wafer surface or product material strip during handling. Utility Model Content
[0004] This application provides a chip sampling fixture that replaces manual sampling with tweezers, thus avoiding the risk of chip dropping.
[0005] This application provides a chip sampling fixture, including:
[0006] The tooling body includes a receiving component and a handle connecting the receiving component, wherein the receiving component is provided with a through groove extending vertically.
[0007] A movable component, connecting the receiving component and / or the handle, is used to block the opening of the through slot under external force and form a chip receiving cavity with the through slot for accommodating the chip, and to open the opening under external force so that the chip falls out of the chip receiving cavity.
[0008] In some embodiments, the movable member is slidably connected to the receiving member;
[0009] The bottom of the receiving component is provided with a receiving cavity, and the two side walls of the receiving cavity are respectively provided with first sliding grooves;
[0010] The movable part includes a sliding part and a connecting part that connects to the sliding part. The sliding part is used to block and open the slot under the action of the connecting part. The sliding part is provided with two sliding fit structures that are relatively distributed. The sliding fit structures are used to slide and connect with the first slot.
[0011] In some embodiments, a slide rail is further provided on the bottom surface of the handle, the connecting portion is provided with a sliding member, the sliding member is provided with a second sliding groove, and the second sliding groove is slidably connected to the slide rail.
[0012] In some embodiments, the movable member is rotatably connected to the receiving member; the bottom of the receiving member is provided with an arc-shaped slide rail; the movable member includes a sliding part and a rotating part connected to the sliding part; the rotating part is rotatably connected to the bottom surface of the handle; the sliding part is used to slide along the slide rail under the drive of the rotating part to block and open the slot.
[0013] In some embodiments, the bottom surface of the handle is provided with a rear stop, which is disposed on the rear side of the sliding part and is used to limit the rearward movement of the sliding part.
[0014] In some embodiments, the bottom surface of the handle is further provided with a front stop, which is disposed on the front side of the sliding part and is used to limit the forward movement of the sliding part.
[0015] In some embodiments, the bottom surface of the handle is provided with a push-pull button.
[0016] In some embodiments, the top surface of the receiving member is an inclined surface, and the inclination angle between the top surface and the horizontal plane is between 0° and 30°.
[0017] In some embodiments, the upper wall of the handle is a convex arc surface.
[0018] In some embodiments, the handle is provided with an anti-slip structure.
[0019] The chip sampling fixture provided in this application allows the operator to place the fixture directly below the chip to be sampled and push or pull the movable part to the opening of the through slot to close it, thus forming a semi-closed chip receiving cavity with an open top and a closed bottom. Subsequently, a weak airflow from the machine's soldering head blows the chip into the chip receiving cavity formed by the movable part and the through slot. This concentrates the chip sample within the receiving component's chip receiving cavity, preventing the chip from falling onto the wafer surface or the material strip. During inspection, the movable part is moved out of the slot, connecting the through slot to the outside, and the chip sample falls directly from the chip receiving cavity onto the blue film for inspection.
[0020] The chip sampling fixture provided in this application can replace manual sampling, accept and collect chips and store them centrally, avoiding chip overlap caused by falling onto the wafer surface or damage to the mold when falling onto the material strip for encapsulation. By moving the movable part to completely remove the chip from the bottom of the slot, the chip can be placed on the blue film for inspection, thereby improving sampling efficiency, increasing yield, and saving costs. Attached Figure Description
[0021] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.
[0022] Figure 1 This is a schematic diagram of the structure of a chip sampling fixture provided in some embodiments of this application;
[0023] Figure 2 A schematic diagram of the chip sampling fixture provided in some embodiments of this application from another perspective;
[0024] Figure 3 for Figure 2 Top view;
[0025] Figure 4 for Figure 2 The main view;
[0026] Figure 5 This is a schematic diagram of the upper wall of the handle in a chip sampling fixture provided in some embodiments of this application.
[0027] The attached figures are labeled as follows:
[0028] 10-Chip sampling fixture;
[0029] 11-Tooling body; 12-Moving parts;
[0030] 111-Receiving part; 112-Handle; 113-Slide rail; 114-Front stop; 115-Rear stop; 116-Push-pull button; 121-Sliding part; 122-Connecting part; 123-Sliding component;
[0031] 111a - Through groove; 112a - Upper wall surface; 1111a - Groove opening; 1111 - Receiving cavity; 1112 - First sliding groove; 1211 - Sliding fit structure;
[0032] A - Horizontal plane. Detailed Implementation
[0033] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0034] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains; the terminology used in the description of this application is for the purpose of describing particular embodiments only and is not intended to limit the application; the terms "comprising" and "having," and any variations thereof, in the description, claims, and accompanying drawings of this application are intended to cover non-exclusive inclusion. The terms "first," "second," etc., in the description, claims, or accompanying drawings of this application are used to distinguish different objects, not to describe a specific order or hierarchy.
[0035] In this application, the reference to "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment that is mutually exclusive with other embodiments.
[0036] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "attachment" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.
[0037] In the embodiments of this application, the same reference numerals denote the same components, and for the sake of brevity, detailed descriptions of the same components are omitted in different embodiments. It should be understood that the thickness, length, width, and other dimensions of various components in the embodiments of this application shown in the accompanying drawings, as well as the overall thickness, length, width, and other dimensions of the integrated device, are merely illustrative and should not constitute any limitation on this application.
[0038] Currently, operators use tweezers to manually pick up chips for sampling. During manual sampling, the chips are small and easily fall onto the wafer surface, causing chip overlap and other quality issues, or they fall onto the material strip and damage the molding die, increasing the defect rate and thus increasing production costs.
[0039] In response to this, this application provides a chip sampling fixture. The fixture is handheld for sampling, and the machine receiving part has a groove in the middle. When the operator samples, the chip on the machine can be blown into the receiving part to prevent the chip from falling onto the wafer surface or the product strip. By moving the movable part out of the groove, the chip can be dropped out, which facilitates the inspection of the chip.
[0040] In this application, "multiple" means two or more (including two).
[0041] Please refer to Figure 1 and Figure 2 , Figure 1 A schematic diagram of the chip sampling fixture provided in this application; Figure 2 This is a schematic diagram of the chip sampling fixture provided in some embodiments of this application from another perspective.
[0042] This application provides a chip sampling fixture, including a fixture body 11 and a movable component 12. The fixture body 11 includes a receiving component 111 and a handle 112. The handle 112 is connected to the receiving component 111. The receiving component 111 is provided with a through groove 111a extending vertically. The movable component 12 can connect the receiving component 111 and the handle 112, or the movable component 12 can be connected to the receiving component 111, or the movable component 12 can be connected to the handle 112. The movable component 12 can move to the opening 1111a of the through groove 111a under the action of external force, completely blocking the lower part of the opening 1111a. The movable component 12 serves to receive the chip, and in the completely blocked state, a semi-closed chip receiving cavity 1111 is formed between the movable component 12 and the through groove 111a of the receiving component 111.
[0043] The receiving member 111 in this embodiment can be a block, box, strip, or plate structure, etc., and has a through groove 111a opened vertically, that is, along its thickness direction. The through groove 111a can be a triangular groove, square groove, round groove, trapezoidal groove, or polygonal groove, etc. The opening size of the through groove 111a can be the same along the thickness direction, or it can gradually decrease or increase along the thickness direction and toward the bottom of the through groove 111a, or it can be a variable diameter. This application does not limit this.
[0044] The handle 112 can be strip-shaped or rod-shaped and can be set on the side wall of the receiving part 111. The handle 112 and the receiving part 111 can be welded, fastened with locking parts, hung, snapped, or magnetically connected, or they can be integrally formed. This application does not limit this, as long as the connection strength between the handle 112 and the receiving part 111 is ensured and that it is easy to grip or to operate with external equipment.
[0045] The movable part 12 can be plate-shaped, block-shaped, strip-shaped, or a combination structure. The movable part 12 can be set at the bottom, inside, or side of the tooling body 11. The movable part 12 is movably connected to the handle 112, so that the movable part 12 can move relative to the handle 112 to switch between the blocking position and the maximum open position. When the movable part 12 is in the blocking position, at least a part of the movable part 12 can block the slot 1111a of the through groove 111a and form a gapless connection structure with the slot 1111a, so that the chip receiving cavity 1111 formed between the movable part 12 and the through groove 111a of the receiving part 111 is a sealed cavity with an upper opening, so as to ensure that the chip will not come out of the through groove 111a.
[0046] For example, the movable member 12 in this application is a plate-shaped structure, and a plane is provided on its top corresponding to the position of the slot 1111a. The size of the plane is larger than the size of the slot 1111a, so that it can completely cover the slot 1111a of the receiving member 111 to form a semi-closed cavity. The plane of the movable member 12 can receive the chip, and when the movable member 12 gradually moves out of the slot 1111a, the plane of the movable member 12 rubs against the bottom surface of the slot 1111a, scraping the chip on the plane, causing the chip to fall from the open slot 1111a below.
[0047] The chip sampling fixture 10 provided in this application embodiment can sample multiple chips simultaneously, effectively preventing chips from falling out, and placing the collected chips on the detection device for detection. It has a simple structure, is easy to operate, and is more efficient.
[0048] In one specific embodiment, the movable member 12 is slidably connected to the receiving member 111. Specifically, the bottom of the receiving member 111 is provided with a receiving cavity 1111, and the two side walls of the receiving cavity 1111 are respectively provided with first sliding grooves 1112. The movable member 12 includes a sliding part 121 and a connecting part 122. The connecting part 122 is connected to the sliding part 121. The sliding part 121 is used to switch between a blocking position and an opening position under the action of the connecting part 122, thereby blocking or opening the slot 1111a. The sliding part 121 is provided with two relatively distributed sliding mating structures 1211, which can be slidably connected to the first sliding grooves 1112. The two sliding mating structures 1211 can be integrally formed with the sliding part 121, or can be detachably connected to the sliding part 121, for example, by fixing with locking members such as screws, or by snap-fitting, or by magnetic connection.
[0049] When chip collection is required, the movable component 12 is pushed or pulled. The movable component 12 slides along the two first sliding grooves 1112 via two sliding fit structures 1211 until it reaches the end of the first sliding groove 1112. At this point, the movable component 12 completely seals the opening 1111a of the through groove 111a. The movable component 12 and the receiving component 111 are slidably connected. The first sliding grooves 1112 on both sides limit the sliding of the movable component 12 towards the opening 1111a, which improves the movement accuracy and stability of the movable component 12.
[0050] like Figure 3 As shown. Furthermore, the bottom surface of the handle 112 is also provided with a slide rail 113, which is located on the rear side of the sliding part 121. The connecting part 122 is provided with a slider 123, which can be a slider or a sliding plate structure. Correspondingly, the slider 123 is provided with a second groove, which is distributed on the rear side of the first groove 1112. The slider 123 is slidably connected to the slide rail 113 through the second groove. Thus, during movement, the movable part 12 is limited on both its front and rear sides by the groove structure, preventing the movable part 12 from disengaging and improving the movement accuracy of the movable part 12, achieving precise guidance.
[0051] In another specific embodiment, the movable part 12 is rotatably connected to the receiving part 111. The bottom of the receiving part 111 is provided with an arc-shaped slide. The movable part 12 includes a sliding part 121 and a rotating part. The rotating part is connected to the sliding part 121 and is rotatably connected to the bottom surface of the handle 112. The sliding part 121 is used to slide along the slide under the drive of the rotating part to block and open the slot 1111a.
[0052] Specifically, the rotating part is rotatably connected to the bottom surface of the handle 112 via a rotating shaft. The sliding part 121 is located on the side of the rotating part facing the receiving part 111. A stop can be provided at the end of the slide of the receiving part 111. The movable part 12 is moved around the rotating shaft and moves along the slide of the receiving part 111 until it reaches the position of the stop. At this time, the movable part 12 can completely block the slot 1111a. Due to the limiting effect of the stop, the movable part 12 cannot be dislodged from the slide. When it is necessary to open the slot 1111a, the movable part 12 can be rotated in the opposite direction to open the slot 1111a. The rotation opening and closing scheme adopted in this embodiment is precise, convenient and quick to operate.
[0053] To prevent the movable part 12 from dislodging from the rear end of the first slide groove 1112 and the second slide groove, a rear stop 115 can be provided on the bottom surface of the handle 112. The rear stop 115 can be provided on the rear side of the sliding part 121, and the rear stop 115 is used to restrict the rearward movement of the sliding part 121 to prevent the movable part 12 from dislodging from the slide groove. When the sliding part 121 moves to contact the rear stop 115, this position is the open position, and the sliding part 121 can fully open the groove 1111a.
[0054] To further improve the movement accuracy of the movable part 12, a front stop 114 can be provided on the bottom surface of the handle 112. The front stop 114 is located on the front side of the sliding part 121. The front stop 114 can restrict the forward movement of the sliding part 121 so that when the sliding part 121 moves to contact the front stop 114, this position is the blocking position, and the sliding part 121 can completely block the slot 1111a. Combined with the limiting effect of the rear stop 115, it can be ensured that the sliding part 121 of the movable part 12 can accurately switch between the open position and the blocking position.
[0055] In addition, a push-pull button 116 is provided on the bottom surface of the handle 112. The movable part 12 can be easily operated by pushing and pulling the button 116, which improves the ease of operation of the movable part 12.
[0056] To prevent the receiving part 111 from colliding with the machine during its movement when placed at the bottom of the machine, a downward inclined surface can be provided on the top of the receiving part 111 along the direction of the first slide groove 1112 and away from the direction of the rear stop 115.
[0057] like Figure 4 As shown. Optionally, the inclination angle α between the inclined plane and the horizontal plane A is between 0° and 30°. Within this range, collisions between the receiving component 111 and the machine above can be avoided, and the volume of the chip receiving cavity 1111 is moderate.
[0058] like Figure 5 As shown, the upper wall surface 112a of the handle 112 is a convex arc surface to increase the contact area between the handle 112 and the hand, making it easier to grip.
[0059] In addition, the handle 112 is provided with an anti-slip structure, which can be an anti-slip groove, an anti-slip protrusion, or an anti-slip texture provided on the handle 112. The anti-slip structure can be provided on the entire circumference of the handle 112, or on the upper wall 112a of the handle 112, or on the gripping part of the handle 112, so as to increase the friction between the handle and the hand and improve the operating accuracy.
[0060] By applying this application, the chip sampling fixture 10 is placed below the machine. The movable part 12 is pushed or pulled to the opening 1111a of the through slot 111a to close the slot 1111a, thus forming a chip receiving cavity 1111 between the movable part 12 and the through slot 111a. Then, the slot 1111a of the fixture is aligned with the chip to be retrieved and placed below the chip. The chip on the machine is blown into the slot 1111a, preventing it from falling onto the wafer surface, causing chip overlap, or falling onto the material strip and damaging the mold during encapsulation, thereby improving sampling efficiency and saving costs. Operating the push-pull button 116 at the bottom of the chip sampling fixture 10 allows the sample chip to be placed directly onto the blue film from below the chip receiving cavity 1111 for inspection.
[0061] The chip sampling fixture provided in this application has been described in detail above. Specific examples have been used to illustrate the principles and implementation methods of this application. The descriptions of the embodiments above are only for the purpose of helping to understand the method and core ideas of this application. It should be noted that those skilled in the art can make several improvements and modifications to this application without departing from the principles of this application, and these improvements and modifications also fall within the protection scope of the claims of this application.
Claims
1. A chip sampling fixture, characterized in that, include: The tooling body (11) includes a receiving part (111) and a handle (112) connecting the receiving part (111). The receiving part (111) is provided with a through groove (111a) that runs vertically through the tooling. The movable part (12) connects the receiving part (111) and / or the handle (112). The movable part (12) is used to block the slot (1111a) of the through slot (111a) under external force and form a chip receiving cavity (1111) with the through slot (111a) for accommodating the chip, and to open the slot (1111a) under external force so that the chip falls out of the chip receiving cavity (1111).
2. The chip sampling fixture according to claim 1, characterized in that, The movable part (12) is slidably connected to the receiving part (111); The bottom of the receiving component (111) is provided with a receiving cavity (1111), and the two side walls of the receiving cavity (1111) are respectively provided with first sliding grooves (1112). The movable part (12) includes a sliding part (121) and a connecting part (122) connecting the sliding part (121). The sliding part (121) is used to block and open the slot (1111a) under the drive of the connecting part (122). The sliding part (121) is provided with two relatively distributed sliding fit structures (1211). The sliding fit structure (1211) is used to slide and connect with the first slide groove (1112).
3. The chip sampling fixture according to claim 2, characterized in that, It also includes a slide rail (113) disposed on the bottom surface of the handle (112), the connecting part (122) is provided with a sliding member (123), the sliding member (123) is provided with a second sliding groove, and the second sliding groove is slidably connected to the slide rail (113).
4. The chip sampling fixture according to claim 1, characterized in that, The movable part (12) is rotatably connected to the receiving part (111); The bottom of the receiving part (111) is provided with an arc-shaped slide. The movable part (12) includes a sliding part (121) and a rotating part connected to the sliding part (121). The rotating part is rotatably connected to the bottom surface of the handle (112). The sliding part (121) is used to slide along the slide under the drive of the rotating part to block and open the slot (1111a).
5. The chip sampling fixture according to claim 4, characterized in that, The bottom surface of the handle (112) is provided with a rear stop (115), which is located on the rear side of the sliding part (121) and is used to limit the rearward movement of the sliding part (121).
6. The chip sampling fixture according to claim 5, characterized in that, The bottom surface of the handle (112) is also provided with a front stop (114), which is located on the front side of the sliding part (121) and is used to limit the forward movement of the sliding part (121).
7. The chip sampling fixture according to any one of claims 1 to 6, characterized in that, The bottom surface of the handle (112) is provided with a push-pull button (116).
8. The chip sampling fixture according to claim 1, characterized in that, The top surface (111b) of the receiving component (111) is an inclined surface, and the inclination angle between the top surface (111b) and the horizontal plane (A) is between 0° and 30°.
9. The chip sampling fixture according to claim 1, characterized in that, The upper wall surface (112a) of the handle (112) is a convex arc surface.
10. The chip sampling fixture according to claim 9, characterized in that, The handle (112) is provided with an anti-slip structure.