A humidity sensor with high sensitivity
By combining a streamlined groove design with a water-permeable protective layer in the humidity sensor, the problem of insufficient sensitivity in traditional humidity sensors is solved, achieving high sensitivity and fast response, and improving the stability and service life of the equipment.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- HEBEI UNIV OF TECH
- Filing Date
- 2025-06-18
- Publication Date
- 2026-06-23
AI Technical Summary
Traditional humidity sensors are insufficient in terms of sensitivity and response speed, and cannot quickly and effectively capture subtle changes in humidity. Furthermore, long-term use may lead to a decrease in sensitivity, affecting the stability and reliability of the device.
The device uses an insulating substrate to bond a lower moisture-sensitive film and an upper moisture-sensitive film together. The films have streamlined grooves to increase adsorption points. Combined with the water-permeable design of the protective layer, the moisture absorption efficiency and sensitivity are improved. Signal transmission is achieved by connecting pins with electroplated silver paste.
The sensitivity and response speed of the humidity sensor have been improved, enhancing the stability and reliability of the equipment and extending its service life.
Smart Images

Figure CN224399332U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of humidity sensor technology, and in particular to a humidity sensor with high sensitivity. Background Technology
[0002] In the current field of humidity detection technology, humidity sensors are widely used as key components in various industries and fields, including but not limited to meteorological monitoring, agricultural production, industrial control, and smart home systems. However, traditional humidity sensors have certain limitations in practical applications, especially in improving sensitivity, where they face numerous challenges.
[0003] Traditional humidity sensors are often designed with a focus on basic functionality: accurately reflecting changes in relative humidity in the environment. However, as demands for accuracy and response speed increase, existing technologies have gradually revealed some shortcomings. For example, many humidity sensors, due to their structural design or material selection, cannot quickly and effectively capture subtle changes in humidity, directly affecting the accuracy of the measurement results. Furthermore, some sensors may experience a decrease in sensitivity during long-term use, impacting the stability and reliability of the device. Utility Model Content
[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a highly sensitive humidity sensor.
[0005] To achieve the above objectives, the present invention adopts the following technical solution: a high-sensitivity humidity sensor, comprising an insulating substrate, wherein a lower humidity-sensitive film for absorbing water resources from the external environment is attached to the insulating substrate, and a double-ended electrode is provided on the side of the lower humidity-sensitive film away from the insulating substrate, and an upper humidity-sensitive film for absorbing water resources from the external environment is attached to the side of the double-ended electrode away from the lower humidity-sensitive film, and streamlined grooves for expanding the adsorption points are provided on the lower humidity-sensitive film and the upper humidity-sensitive film.
[0006] As a further description of the above technical solution:
[0007] The dual-ended electrode includes a substrate, and both ends of the substrate are provided with electroplated silver paste. The substrate is also fixed with pins for connecting to an external display device by electroplated silver paste.
[0008] As a further description of the above technical solution:
[0009] The upper humidity-sensitive film has a protective layer attached to the side away from the double-ended electrodes to protect the internal structure of the sensor, and the protective layer is provided with a water inlet for air and water permeability.
[0010] As a further description of the above technical solution:
[0011] The materials of the lower and upper humidity-sensitive films are not limited to polyimide, polystyrene, and polyvinyl alcohol.
[0012] As a further description of the above technical solution:
[0013] The metal components on the dual-ended electrodes are all made of copper.
[0014] This utility model has the following beneficial effects:
[0015] 1. In this utility model, by providing streamlined grooves on the lower and upper humidity-sensitive films, the surface area of the lower and upper humidity-sensitive films can be increased, and more water molecule contact points can be added, thereby improving the moisture absorption efficiency and the sensitivity of the humidity sensor. At the same time, the streamlined grooves can help guide airflow, so that water vapor in the air can more effectively contact different parts of the moisture-sensitive film. This helps to improve the overall moisture absorption and sensing speed and uniformity, and ensure the accuracy of humidity sensor monitoring.
[0016] 2. In this utility model, by providing a protective layer on the outermost side of the humidity sensor, external pollutants can be prevented from directly contacting the sensitive upper humidity-sensitive film and electrodes. Furthermore, the protective layer has streamlined grooves, which allow water vapor to pass through, thus helping to extend the sensor's service life and maintain its stable performance. Attached Figure Description
[0017] Figure 1 A perspective view of a high-sensitivity humidity sensor proposed in this utility model;
[0018] Figure 2 The explosion of a high-sensitivity humidity sensor proposed in this utility model Figure 1 ;
[0019] Figure 3 The explosion of a high-sensitivity humidity sensor proposed in this utility model Figure 2 .
[0020] Legend:
[0021] 1. Insulating substrate; 2. Lower humidity-sensitive film; 3. Dual-ended electrode; 301. Substrate; 302. Electroplating paste; 303. Lead; 4. Upper humidity-sensitive film; 5. Protective layer; 6. Streamlined groove; 7. Water inlet. Detailed Implementation
[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0023] Example 1: Please refer to Figure 1-3 The present invention provides an embodiment of a high-sensitivity humidity sensor, comprising an insulating substrate 1, a lower humidity-sensitive film 2 for absorbing water resources from the external environment attached to the insulating substrate 1, and a double-ended electrode 3 provided on the side of the lower humidity-sensitive film 2 away from the insulating substrate 1. At the same time, an upper humidity-sensitive film 4 for absorbing water resources from the external environment is attached to the side of the double-ended electrode 3 away from the lower humidity-sensitive film 2, and streamlined grooves 6 for expanding the adsorption points are provided on the lower humidity-sensitive film 2 and the upper humidity-sensitive film 4.
[0024] Working principle: First, the lower humidity-sensitive film 2 and the upper humidity-sensitive film 4 are made of high molecular polymer materials such as polyimide, polystyrene, and polyvinyl alcohol, which have good moisture absorption properties. Then, in a low humidity environment, these materials are in a dry state with a low dielectric constant. When the ambient humidity increases, the materials absorb water molecules in the air, and their dielectric constant increases significantly. Subsequently, this change in dielectric constant is directly reflected in the change in capacitance value, thereby realizing the detection of humidity. In addition, streamlined grooves 6 are designed on the lower humidity-sensitive film 2 and the upper humidity-sensitive film 4, which increases their effective surface area and improves the contact opportunity with water molecules in the air per unit time. This helps to accelerate the moisture absorption / dehumidification process, improve the sensor's response speed, and increase sensitivity. At the same time, it also helps to distribute water vapor evenly throughout the entire humidity-sensitive area and avoid local saturation.
[0025] In a preferred embodiment, the dual-ended electrode 3 includes a substrate 301, and the two ends of the substrate 301 are provided with electroplated silver paste 302. Meanwhile, the substrate 301 is fixed with pins 303 for connecting to an external display device through the electroplated silver paste 302.
[0026] like Figure 2 As shown: the two sets of pins 303 are located at the left and right ends of the lower humidity-sensitive film 2 and the upper humidity-sensitive film 4, respectively, and the pins 303 are located at the rear end of the sensor.
[0027] In a preferred embodiment, a protective layer 5 for protecting the internal structure of the sensor is attached to the side of the upper humidity-sensitive film 4 away from the double-ended electrode 3, and the protective layer 5 is provided with a water inlet 7 for air and water permeability.
[0028] like Figure 1As shown: the protective layer 5 is made of polytetrafluoroethylene, and there are several sets of water inlets 7, which are evenly distributed on the protective layer 5.
[0029] In a preferred embodiment, the materials of the lower humidity-sensitive film 2 and the upper humidity-sensitive film 4 are not limited to polyimide, polystyrene, or polyvinyl alcohol.
[0030] In a preferred embodiment, all metal components on the dual-ended electrode 3 are made of copper.
[0031] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.
Claims
1. A highly sensitive humidity sensor, comprising an insulating substrate (1), characterized in that: A lower humidity-sensitive film (2) for absorbing water resources from the external environment is attached to the insulating substrate (1), and a double-ended electrode (3) is provided on the side of the lower humidity-sensitive film (2) away from the insulating substrate (1). At the same time, an upper humidity-sensitive film (4) for absorbing water resources from the external environment is attached to the side of the double-ended electrode (3) away from the lower humidity-sensitive film (2), and streamlined grooves (6) for expanding the adsorption points are provided on the lower humidity-sensitive film (2) and the upper humidity-sensitive film (4).
2. The high-sensitivity humidity sensor according to claim 1, characterized in that: The dual-ended electrode (3) includes a substrate (301), and the two ends of the substrate (301) are provided with electroplated silver paste (302). Meanwhile, the substrate (301) is fixed with pins (303) for connecting an external display device through the electroplated silver paste (302).
3. A high-sensitivity humidity sensor according to claim 2, characterized in that: The upper humidity-sensitive film (4) has a protective layer (5) attached to the side away from the double-ended electrode (3) to protect the internal structure of the sensor, and the protective layer (5) is provided with a water inlet (7) for air and water permeability.
4. A high-sensitivity humidity sensor according to claim 3, characterized in that: The materials of the lower humidity-sensitive film (2) and the upper humidity-sensitive film (4) are not limited to polyimide, polystyrene, and polyvinyl alcohol.
5. A high-sensitivity humidity sensor according to claim 4, characterized in that: The metal components on the dual-ended electrode (3) are all made of copper.