A process chamber support device

Abstract

The application discloses a process cavity bearing device, and relates to the technical field of semiconductor processing.The fixed caster wheels and the movable caster wheels at the bottom of the frame are used to move the cavity to a target position.After the height is preliminarily adjusted by the caster cup, the nut on the adjusting base is rotated, the cavity is calibrated by cooperation between the nut and the adjusting holes at the bottom of the cavity, and accurate butt joint with an external system is ensured.Then, the quick plug and the threaded interface assembly of the integrated assembly are quickly connected with the corresponding interfaces of the cavity, integrated butt joint of the gas circuit, the circuit and the water circuit is completed, and one person can complete the installation operation, so that the technical problem that the cavity is difficult to install due to low structural integration is solved, and the technical effect that the cavity is easy to install due to high structural integration is achieved.

Description

Technical Field

[0001] This application relates to the field of semiconductor processing technology, and in particular to a process cavity carrier device. Background Technology

[0002] In the field of semiconductor equipment, the installation and maintenance of process chambers are critical aspects, and their structural design directly affects the operating efficiency and stability of the equipment.

[0003] In existing technologies, the installation of process chambers usually requires multiple people to work together to lift and transport them, and they are fixed by mechanical supports. The related water, gas, electrical circuits, and special gas pipelines are scattered, and the electrical control components are mostly concentrated in an integrated electrical cabinet. When the process chamber needs to be replaced, all kinds of connecting wires and pipelines need to be disconnected one by one. During maintenance, the corresponding components need to be found in the integrated electrical cabinet. However, this structure has low integration, making the installation of the chamber difficult.

[0004] In view of this, we provide a process cavity support device to solve the above problems. Utility Model Content

[0005] The purpose of this application is to solve the technical problem that low structural integration makes cavity installation difficult. To solve the above technical problem, a process cavity support device with high structural integration that makes cavity installation easy is provided.

[0006] To achieve the above objectives, the embodiments of this application adopt the following technical solution: a process cavity support device, comprising: a cavity; a frame, wherein the bottom of the frame is provided with feet, fixed casters and movable casters; an adjusting base, the adjusting base is connected to the frame, and an adjusting bottom hole is provided below the cavity, the adjusting bottom hole being connected to the adjusting base; an integrated component, the integrated component being disposed inside the frame, the integrated component including circuit, air circuit, water circuit, special gas pipeline and vacuum pipeline, the circuit being installed with a wire groove, the air circuit using an integrated solenoid valve island, the water circuit having a hand valve installed on the frame, and an interface component being provided at one end of the integrated component; the fixed casters and movable casters at the bottom of the frame drive the cavity to move, the cavity height is initially adjusted by the feet, and then the cavity is calibrated by the adjusting base, the integrated component integrates the circuit, air circuit, water circuit, special gas pipeline and vacuum pipeline into a whole, and is connected to the cavity through the interface component to complete the cavity installation.

[0007] Furthermore, according to an embodiment of this application, the frame has a three-point support design, and the frame is used to stably support the cavity.

[0008] Furthermore, according to an embodiment of this application, a nut is provided on the adjusting base, and the nut on the adjusting base cooperates with the adjusting bottom hole at the bottom of the cavity, so that the cavity can be calibrated by rotating the nut.

[0009] Furthermore, according to an embodiment of this application, an electrical box is provided on the rear side of the frame, and the electrical box can be moved along with the frame as a whole.

[0010] Furthermore, according to an embodiment of this application, the electrical box is provided with electrical components corresponding to the cavity.

[0011] Furthermore, according to an embodiment of this application, the integrated component is connected to the cavity via an interface component, the interface component employing a quick-connect and threaded interface.

[0012] Furthermore, according to an embodiment of this application, the hand valve is installed on the frame and is used to quickly control the opening and closing of the water circuit.

[0013] Furthermore, according to the embodiments of this application, the fixed casters are connected to the frame via a fixed shaft, and the movable casters are connected to the frame via a movable shaft.

[0014] Furthermore, according to embodiments of this application, the interface of the integrated component includes interfaces corresponding to vacuum lines and special gas lines.

[0015] Furthermore, according to the embodiments of this application, the feet are used to make preliminary adjustments to the overall height of the frame, the fixed casters are used to limit the direction of movement, and the movable casters are used to assist the movement of the frame.

[0016] Compared with the prior art, this application has the following advantages: the cavity is moved to the target position by the fixed casters and movable casters at the bottom of the frame. After the initial height adjustment is made by using the feet, the nut on the adjustment base is turned. The cavity is calibrated by the cooperation of the nut and the adjustment hole at the bottom of the cavity, ensuring accurate docking with the external system. Then, the quick-connect and threaded interface components of the integrated components are quickly connected to the corresponding interfaces of the cavity to complete the integrated docking of the air circuit, circuit and water circuit. The installation operation can be completed by a single person, thus solving the technical problem of difficult cavity installation due to low structural integration and achieving the technical effect of easy cavity installation due to high structural integration. Attached Figure Description

[0017] The present application will be further described below with reference to the accompanying drawings and embodiments.

[0018] Figure 1 This is a schematic diagram of the structure of a process cavity support device according to an embodiment of this application.

[0019] Figure 2 This is a schematic diagram of the side structure of a process cavity support device according to an embodiment of this application.

[0020] Figure 3 This is a schematic diagram of the connection between a process cavity support device and a cavity body according to an embodiment of this application.

[0021] In the attached diagram: 1. Frame; 12. Adjustable base; 13. Movable casters; 14. Fixed casters; 15. Foot cups; 2. Electrical box; 3. Circuit; 4. Air circuit; 5. Interface assembly; 6. Special gas pipeline; 7. Cavity. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of this utility model clear and complete, the embodiments of this utility model will be further described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are only some, not all, embodiments of this utility model, and are merely used to explain the embodiments of this utility model. They are not intended to limit the embodiments of this utility model. All other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0023] In the description of this utility model, it should be noted that the terms "center," "middle," "upper," "lower," "left," "right," "inner," "outer," "top," "bottom," "side," "vertical," and "horizontal," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "a," "first," "second," "third," "fourth," "fifth," and "sixth" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0024] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0025] For purposes of simplicity and illustration, the principles of the embodiments are described primarily by way of example. In the following description, numerous specific details are set forth to provide a thorough understanding of the embodiments. However, it will be apparent to those skilled in the art that these embodiments may not be limited to these specific details in practice. In some instances, well-known methods and structures have not been described in detail to avoid unnecessarily obscuring these embodiments. Furthermore, all embodiments can be used in combination with each other.

[0026] Example 1:

[0027] like Figure 1 , 2 As shown in Figure 3, this embodiment provides a process cavity support device, which includes: a cavity 7; a frame 1, the bottom of which is provided with feet 15, fixed casters 14 and movable casters 13, an adjusting base 12 connected to the frame 1, and an adjusting bottom hole connected to the adjusting base 12; an integrated component, which is set inside the frame 1, and includes a circuit 3, a gas path 4, a water path, a special gas pipeline 6 and a vacuum pipeline. The circuit 3 is equipped with a wire groove, the gas path 4 adopts an integrated solenoid valve island, and the hand valve of the water path is installed on the frame 1. One end of the integrated component is provided with an interface component 5; the fixed casters 14 and movable casters 13 at the bottom of the frame 1 drive the cavity 7 to move, the height of the cavity 7 is coarsely adjusted by the feet 15, and the cavity 7 is calibrated by the adjusting base 12. The integrated component integrates the circuit 3, gas path 4, water path, special gas pipeline and vacuum pipeline into a whole, and is connected to the cavity 7 through the interface component 5 to complete the installation of the cavity 7.

[0028] The cavity 7 is moved to the target position using the fixed casters 14 and movable casters 13 at the bottom of the frame 1. After the initial height adjustment using the foot cups 15, the cavity 7 is precisely calibrated using the adjusting base 12 to ensure accurate docking with the external system. Then, the quick-connect and threaded interface components 5 of the integrated components are quickly connected to the corresponding interfaces of the cavity 7 to complete the integrated docking of the air circuit 4, the circuit 3, and the water circuit. The installation operation can be completed by a single person, thus solving the technical problem of difficult installation of the cavity 7 due to low structural integration and achieving the technical effect of easy installation of the cavity 7 due to high structural integration.

[0029] Example 2:

[0030] like Figure 1 , 3 As shown, the frame 1 has a three-point support design and is used to stably support the cavity 7.

[0031] Firstly, the fixed casters 14 and movable casters 13 at the bottom work together to achieve overall movement. The three-point support structure can evenly distribute the weight of the cavity 7, preventing the cavity 7 from tilting or shaking due to uneven force, and providing a stable foundation for the movement process. After reaching the installation position, when coarsely adjusting the height with the help of the feet 15, the three-point support can ensure that the frame 1 remains balanced during height adjustment and prevent one-sided tipping. During the process of fine adjustment of the cavity 7 through the adjusting base 12 and subsequent connection of integrated components to the cavity 7, the three-point support further enhances the structural rigidity of the frame 1, effectively resisting the external forces generated during connection operations or the operation of the cavity 7, and always stably supporting the cavity 7, ensuring the smoothness of the entire installation process and the accuracy of the cavity 7 docking. Ultimately, it can be completed safely and efficiently by a single person. A quick-release latch is set between the cavity 7 and the adjusting base 12. During normal operation, the latch secures the cavity. During maintenance, the latch can be released by simply pulling it, without disassembling the adjusting base, which can realize the individual hoisting or replacement of the cavity and improve the flexibility of module replacement.

[0032] like Figure 1 , 2 As shown in Figure 3, a nut is provided on the adjusting base 12. The nut on the adjusting base 12 cooperates with the adjusting bottom hole at the bottom of the cavity 7. By rotating the nut, the cavity 7 can achieve precise position calibration. An electrical box 2 is provided on the rear side of the frame 1. The electrical box 2 can be moved along with the frame 1 as a whole.

[0033] After the cavity 7 is moved to the target position by the casters at the bottom of the frame 1 and coarse adjustment is completed, the nut on the adjusting base 12 engages with the adjusting bottom hole at the bottom of the cavity 7. The operator can then rotate the nut to achieve high-precision fine adjustment of the cavity 7 using the thread transmission principle, ensuring accurate docking between the cavity 7 and the external system. At the same time, the electrical box 2 set at the rear of the frame 1 moves synchronously with the overall frame 1. During the adjustment of the cavity 7 position, the pre-integrated electrical components in the electrical box 2 always maintain electrical connection with the cavity 7, avoiding cable pulling or rewiring problems caused by the fixed electrical box 2 in traditional designs. After the cavity 7 position is finely adjusted, the electrical box 2 can immediately provide stable power and control signals to the cavity 7, achieving immediate use. In addition, when maintenance or replacement of the cavity 7 is required, the design of the electrical box 2 moving with the frame 1 allows the cavity 7 and the electrical system to be removed from the work area simultaneously, greatly shortening downtime and improving equipment maintenance efficiency. This achieves the technical effect of high structural integration and easy installation of the cavity 7.

[0034] like Figure 1 , 2 As shown, electrical components corresponding to cavity 7 are installed inside electrical box 2. The integrated assembly is connected to cavity 7 through interface assembly 5, which uses quick-connect and threaded interfaces.

[0035] After the cavity 7 moves along the frame 1 and completes its position fine-tuning, the pre-integrated electrical components in the electrical box 2 immediately provide customized power and control signals to the cavity 7, enabling precise adjustment of process parameters. At the same time, the interface component 5 of the integrated components quickly connects with the corresponding interface of the cavity 7. The quick-connect interface uses a spring locking mechanism to achieve instantaneous connection of the gas path 4 and the circuit 3, while the threaded interface ensures a high-sealing connection of the vacuum pipeline and the special gas pipeline 6. This design allows the cavity 7 to quickly enter the operating state after mechanical positioning without additional wiring or complex debugging, thanks to the collaborative work of the electrical box 2 and the integrated components. During maintenance, operators can instantly disconnect all connections through the quick-connect interface and then pull the cavity 7 and the frame 1 out of the maintenance area as a whole. The modular electrical components in the electrical box 2 support online replacement, further shortening downtime and achieving high efficiency and intelligence throughout the entire process from installation to maintenance of the cavity 7.

[0036] like Figure 1 , 2 As shown in Figure 3, the hand valve is installed on the frame 1 and is used to quickly control the opening and closing of the water circuit.

[0037] After the cavity 7 is positioned and connected to the interface component 5, the operator can directly and quickly control the water circuit opening and closing via the hand valve installed on the frame 1: when open, water flows through the water circuit in the integrated component to the cavity 7 to meet the process cooling or cleaning requirements; when closed, the water circuit can be immediately cut off, facilitating the maintenance, replacement, or emergency handling of the cavity 7. The design of integrating the hand valve into the frame 1 eliminates the step of finding the corresponding valve in the distributed pipelines in the traditional structure, making the water circuit control operation more intuitive and convenient, reducing operation time. At the same time, combined with the overall mobility and integrated interface of the device, it further improves the efficiency and safety of water circuit management during the installation, operation, and maintenance of the cavity 7.

[0038] like Figure 1 , 3 As shown, the fixed caster 14 is connected to the frame 1 by a fixed shaft, and the movable caster 13 is connected to the frame 1 by a movable shaft.

[0039] Fixed casters 14 are connected to the frame 1 via fixed axles, maintaining directional stability during movement and ensuring the device moves in a straight line along a preset path. Movable casters 13 are connected to the frame 1 via movable axles, allowing for flexible steering. Together with the fixed casters 14, they enable multi-directional movement of the device, including steering and translation, facilitating the precise pushing of the cavity 7 to its installation position. This connection design ensures linear stability during movement through the fixed casters 14 while enhancing operational convenience in confined spaces through the flexible steering of the movable casters 13. A single person can easily push the cavity 7 to adjust its position, avoiding the laborious problem of traditional multi-person handling. This lays a foundation for efficient movement for subsequent height adjustments and interface docking.

[0040] like Figure 1, 2 As shown, the interfaces of the integrated components include interfaces corresponding to the vacuum line and the special gas line 6.

[0041] Once cavity 7 has moved along frame 1 and completed its positional fine-tuning, the integrated component's interface immediately plays a crucial role: operators quickly and securely connect the integrated component's vacuum interface to cavity 7's vacuum system using quick-connect and threaded interfaces, providing a high-vacuum environment for cavity 7. Simultaneously, the special gas pipeline 6 interface, with its leak-proof threaded design, ensures the safe delivery of corrosive or flammable and explosive gases, meeting the specific requirements of semiconductor processes. This design allows cavity 7 to quickly establish a connection between the vacuum and special gas systems via the integrated component's unified interface after mechanical positioning, without additional sealing operations or complex adjustments. During maintenance, the quick-connect interface supports rapid disconnection, and the modular piping design allows for individual replacement of vacuum or special gas modules without overall disassembly. The targeted design of the integrated component interface enables efficient connection and safe control of the vacuum and special gas systems throughout the entire process of cavity 7's installation and maintenance.

[0042] like Figure 1 , 3 As shown, the foot cup 15 is used to make preliminary adjustments to the overall height of the frame 1, the fixed caster 14 is used to limit the direction of movement, and the movable caster 13 is used to assist the movement of the frame 1.

[0043] First, the movable casters 13 assist the frame 1 in moving flexibly, while the fixed casters 14 restrict the direction of movement to ensure the device moves stably along the preset path, together pushing the cavity 7 to the installation area. Once in position, the feet 15 are used to coarsely adjust the overall height of the frame 1, quickly adapting to the basic height requirements of the installation environment, laying the foundation for subsequent fine-tuning of the base 12. The coarse adjustment function of the feet 15, combined with the directional movement and flexible steering of the casters, achieves an efficient transition from transporting to positioning the device. Furthermore, the step-by-step adjustment ensures that the cavity 7 reaches a rough height benchmark at the initial stage of installation, reducing the amount of subsequent fine-tuning and improving overall installation efficiency. Simultaneously, a single person can complete the movement and coarse adjustment operations, solving the inconvenience of traditional multi-person lifting and transport. This achieves the technical effect of high structural integration and simplified installation of the cavity 7.

[0044] Although the illustrative specific embodiments of this application have been described above to enable those skilled in the art to understand this application, this application is not limited to the scope of the specific embodiments. For those skilled in the art, all applications utilizing the concept of this application are protected as long as various variations are within the spirit and scope of this application as defined and determined by the appended claims.

Claims

1. A process cavity support device, comprising: cavity; Its characteristic is that the frame is provided with feet, fixed casters and movable casters at the bottom of the frame; An adjustable base is provided, which is connected to the frame. An adjustable bottom hole is provided below the cavity, and the adjustable bottom hole is connected to the adjustable base. An integrated component is disposed inside the frame. The integrated component includes circuits, air circuits, water circuits, special gas pipelines, and vacuum pipelines. The circuits are equipped with wire grooves. The air circuits adopt integrated solenoid valve islands. The manual valve of the water circuit is installed on the frame. An interface component is provided at one end of the integrated component. The fixed casters and movable casters at the bottom of the frame drive the cavity to move. The height of the cavity is initially adjusted by the foot cups, and then the cavity is calibrated by the adjusting base. The integrated assembly combines the circuit, the air circuit, the water circuit, the special gas pipeline and the vacuum pipeline into a whole, and connects to the cavity through the interface assembly to complete the cavity installation.

2. The process cavity support device according to claim 1, characterized in that, The frame has a three-point support design and is used to stably support the cavity.

3. The process cavity support device according to claim 1, characterized in that, The adjustment base is provided with a nut, which cooperates with the adjustment hole at the bottom of the cavity. The position of the cavity is calibrated by rotating the nut.

4. The process cavity support device according to claim 1, characterized in that, An electrical box is located at the rear of the frame, and the electrical box can be moved along with the frame as a whole.

5. A process cavity support device according to claim 4, characterized in that, The electrical box contains electrical components corresponding to the cavity.

6. The process cavity support device according to claim 1, characterized in that, The integrated component is connected to the cavity through the interface component, which employs a quick-connect and threaded interface.

7. The process cavity support device according to claim 1, characterized in that, The hand valve is mounted on the frame and is used to quickly control the opening and closing of the water circuit.

8. A process cavity support device according to claim 1, characterized in that, The fixed casters are connected to the frame via a fixed shaft, and the movable casters are connected to the frame via a movable shaft.

9. A process cavity support device according to claim 1, characterized in that, The interfaces of the integrated component include interfaces corresponding to the vacuum pipeline and the special gas pipeline.

10. A process cavity support device according to claim 1, characterized in that, The feet are used for initial adjustment of the overall height of the frame, the fixed casters are used to limit the direction of movement, and the movable casters are used to assist the frame in moving.

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