A levelling device for a conveyor track

Abstract

The utility model relates to the field of semiconductor manufacturing technology discloses a kind of levelling device suitable for conveying track, comprising: conveying structure and levelling device, conveying structure is used to transmit being conveyed medium, conveying structure includes two parallel and interval arrangement conveying tracks, and being conveyed medium is adapted to lap on two conveying tracks;Levelling device is connected with one conveying track, and levelling device can drive corresponding conveying track to move along vertical direction to make two symmetrical interval arrangement conveying tracks produce height difference.The above structure produces in replacement product, needs to change the angle of product upper surface, drives the up-down movement of conveying track by levelling device, realizes the full-automatic levelling function of conveying track, to be compatible with different thickness, there is high and low different etc. Product.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and specifically to a leveling device suitable for a conveyor track. Background Technology

[0002] Currently, the semiconductor packaging device industry has broad market prospects, but it is also accompanied by certain challenges and opportunities. With the rapid development of emerging technologies such as artificial intelligence, the Internet of Things, robotics, and new energy vehicle electronics, the demand for semiconductor devices is growing strongly, leading to more advanced and diversified needs. Among these, breakthroughs in the application of AI chips and high-performance computing scenarios such as data computing centers have become new driving forces for industry development.

[0003] In the automation industry of semiconductor packaging devices, depending on different process steps, frequent turnover is required. In the subsequent production process of semiconductor packaging devices, they usually need to be placed in designated locations for corresponding processing, such as laser etching, visual inspection, QR code reading and recognition, etc. In order to improve accuracy and production yield, such as in the laser etching process, it is necessary to ensure that the processing surface of the product and the laser working surface are relatively parallel.

[0004] Currently, most automated equipment track conveying mechanisms on the market are single and fixed, which cannot be compatible with products with different height differences; and when replacing different products, there are problems such as long debugging time, high debugging difficulty, and difficulty in guaranteeing repeatability accuracy. Utility Model Content

[0005] In view of this, the present invention provides a leveling device suitable for conveyor tracks, in order to solve the problems that most automated equipment track conveying mechanisms on the market are single and fixed, which cannot be compatible with products with different height differences; and that when replacing different products, there are problems such as long debugging time, high debugging difficulty, and difficulty in guaranteeing repeatability accuracy.

[0006] In a first aspect, this utility model provides a leveling device suitable for a conveyor track, comprising:

[0007] A conveying structure for conveying a medium to be conveyed, the conveying structure comprising two parallel and spaced-apart conveying tracks, the medium to be conveyed being adapted to overlap the two conveying tracks.

[0008] A leveling device is connected to one of the conveying tracks. The leveling device can drive the corresponding conveying track to move along the vertical direction so that a height difference is generated between the two symmetrically spaced conveying tracks.

[0009] Beneficial effects: The leveling device can drive the corresponding conveyor track to move vertically, creating a height difference between two symmetrically spaced conveyor tracks. When replacing products during production and needing to change the angle of the product's upper surface, the leveling device drives the conveyor tracks up and down, achieving fully automatic leveling to accommodate products of different thicknesses and heights. Through modular design, only the distance between the two leveling devices needs to be adjusted according to the track length, meeting the requirements for different track lengths.

[0010] In one alternative embodiment, the leveling device includes:

[0011] Base;

[0012] A drive assembly, wherein the fixed end of the drive assembly is fixed to the base, and the output end of the drive assembly can move in the vertical direction;

[0013] A sliding assembly is mounted on the output end of the drive assembly and is connected to the conveyor track.

[0014] In one alternative embodiment, the base includes a first support portion and a second support portion that are perpendicular to each other, the second support portion being connected to the sliding assembly.

[0015] In one alternative embodiment, the base further includes a third support portion mounted on the top of the second support portion, the third support portion being parallel to the second support portion;

[0016] The third support is used to mount the drive assembly.

[0017] Beneficial effects: The third support is parallel to the first support and is located directly above the first support. The first support is used for fixing the guide rail, and is fixed to the equipment panel below the conveyor rail, thus serving to fix and support the entire leveling device.

[0018] In one alternative implementation, the driving component includes:

[0019] A driving member, the driving member being adapted to be installed on the side of the third support portion near the first support portion; the output end of the driving member passes through the third support portion and extends in a direction away from the first support portion;

[0020] A slider is mounted on the output end of the drive unit.

[0021] In one alternative embodiment, the sliding assembly includes a mounting plate and a sliding guide rail, one side of which is connected to the mounting plate and the other side is mounted on the second support portion;

[0022] The mounting plate is fixedly connected to the slider.

[0023] Beneficial effects: When the height difference of the conveyor rails needs to be adjusted, the drive unit is activated. The drive unit moves the slider up and down, which in turn moves the mounting plate up and down along the sliding guide rail. This causes the corresponding conveyor rails to move up and down, creating a height difference between the two conveyor rails. This allows the semiconductors on the two conveyor rails to be at different tilt angles, accommodating different products, improving efficiency during product changeovers, ensuring consistency in repeated changes, guaranteeing accuracy during processing and testing on the rails, reducing equipment costs, and increasing production efficiency. The above structure and steps constitute a fully automatic adjustment method, improving production efficiency, reducing equipment debugging costs during material changeovers, achieving fully automatic leveling, ensuring processing and testing accuracy, reducing inconsistencies from manual adjustments, and ensuring stability during product processing.

[0024] In one optional embodiment, the leveling device further includes a sensor and a sensor sensing plate, wherein the sensor is mounted on the second support via a sensor mounting plate, and the sensor sensing plate is mounted on the mounting plate corresponding to the sensor.

[0025] Beneficial effects: The sensor sensing element is installed on the right side of the mounting plate, the sensor mounting plate is installed on the right side of the second support, and the sensor is installed on the right side of the sensor mounting plate. The sensor is a photoelectric sensor. By adjusting the sensing height of the sensor sensing element, fine-tuning of the origin position is achieved in conjunction with the sensor. Precise control of the height difference of the conveyor track device is achieved through motor transmission, ensuring the repeatability and positioning accuracy of the conveyor track device when adjusting the height difference.

[0026] In one alternative embodiment, the leveling device further includes a limiting block, which is installed on the side of the second support portion away from the driving member;

[0027] The mounting plate has a limiting groove corresponding to the limiting block, and the limiting block is installed in the limiting groove.

[0028] Beneficial effects: During the up-and-down movement of the mounting plate, the upper and lower inner walls of the limiting groove are used to limit the upper and lower limits of the mounting plate's movement, ensuring that the set limit height is not exceeded during the upward movement, thus ensuring the safety and stability of the equipment.

[0029] In one alternative implementation, the drive element is a lead screw motor.

[0030] In one alternative embodiment, at least two leveling devices are provided, and the at least two leveling devices are spaced apart along the conveying direction of the conveying track.

[0031] Beneficial effects: The two mounting plates in the two leveling devices are installed on the same conveyor track. The height difference of the track is controlled by moving up and down, which realizes the compatibility of different packaged devices and the leveling at the process processing position. This ensures the stability of the packaged devices on the conveyor track device and the accuracy of processing and testing. Attached Figure Description

[0032] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0033] Figure 1 This is a schematic diagram of the overall structure of a leveling device suitable for a conveyor track according to an embodiment of the present utility model;

[0034] Figure 2 This is a schematic diagram of the leveling device in the figure;

[0035] Figure 3 This is a schematic diagram of the leveling device from another angle in the figures of this utility model;

[0036] Figure 4 This is an exploded view of the leveling device in the figure.

[0037] Explanation of reference numerals in the attached figures:

[0038] 1. Conveying structure; 11. Conveying track;

[0039] 2. Leveling device; 21. Base; 211. First support part; 212. Second support part; 213. Third support part; 22. Drive assembly; 221. Drive component; 222. Slider; 23. Sliding assembly; 231. Mounting plate; 232. Sliding guide rail;

[0040] 3. Sensors;

[0041] 4. Sensor sensing element;

[0042] 5. Limit block. Detailed Implementation

[0043] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0044] Currently, the semiconductor packaging device industry has broad market prospects, but it is also accompanied by certain challenges and opportunities. With the rapid development of emerging technologies such as artificial intelligence, the Internet of Things, robotics, and new energy vehicle electronics, the demand for semiconductor devices is growing strongly, leading to more advanced and diversified needs. Among these, breakthroughs in the application of AI chips and high-performance computing scenarios such as data computing centers have become new driving forces for industry development.

[0045] In the automation industry of semiconductor packaging devices, depending on different process steps, frequent turnover is required. In the subsequent production process of semiconductor packaging devices, they usually need to be placed in designated locations for corresponding processing, such as laser etching, visual inspection, QR code reading and recognition, etc. In order to improve accuracy and production yield, such as in the laser etching process, it is necessary to ensure that the processing surface of the product and the laser working surface are relatively parallel.

[0046] Currently, most automated equipment track conveying mechanisms on the market are single and fixed, which cannot be compatible with products with different height differences; and when replacing different products, there are problems such as long debugging time, high debugging difficulty, and difficulty in guaranteeing repeatability accuracy.

[0047] To solve the above technical problems, the following will be combined with... Figures 1 to 4 The following describes embodiments of the present invention.

[0048] According to an embodiment of the present invention, a leveling device suitable for a conveyor track is provided, comprising a conveyor structure 1 and a leveling device 2.

[0049] like Figures 1 to 4As shown, the conveying structure 1 includes two parallel conveying tracks 11, spaced apart from each other. The two sides of the medium being conveyed rest on the two conveying tracks 11, and the two conveying tracks 11 work together to convey the medium. In this embodiment, the medium being conveyed is preferably a semiconductor device. Two leveling devices 2 are installed on the side of one of the conveying tracks 11, and the other conveying track is mounted via a fixed base. The two leveling devices 2 are spaced apart along the conveying direction of the conveying track 11. The leveling devices 2 can drive the corresponding conveying track 11 to move vertically, creating a height difference between the two symmetrically spaced conveying tracks 11. When replacing products during production and needing to change the angle of the product's upper surface, the two leveling devices 2 drive the conveying tracks 11 up and down, achieving a fully automatic leveling function to accommodate products of different thicknesses and heights. Through modular design, only the distance between the two leveling devices 2 needs to be adjusted according to the track length to meet the requirements of different track lengths.

[0050] In one embodiment, the leveling device 2 includes a base 21, a drive assembly 22, and a sliding assembly 23.

[0051] like Figures 2 to 4 As shown, the base 21 includes a first support portion 211, a second support portion 212, and a third support portion 213. The first support portion 211 and the second support portion 212 are integrally formed and are perpendicular to each other, forming an L-shaped structure. A slot is provided above the second support portion 212, and the third support portion 213 is installed in the slot. The third support portion 213 is parallel to the first support portion 211 and is located directly above the first support portion 211. The first support portion 211 is used for guide rail fixing and is fixed on the equipment panel below the conveyor track 11, serving to fix and support the entire leveling device 2.

[0052] like Figures 2 to 4 As shown, the drive assembly 22 includes a drive component 221 and a slider 222. The drive component 221 is a lead screw stepper motor. The fixed end of the drive component 221 is installed between the first support portion 211 and the third support portion 213. The upper surface of the fixed end of the drive component 221 is fixed to the side of the third support portion 213 near the first support portion 211. The lower part of the fixed end of the drive component 221 is suspended. The output end of the drive component 221 is arranged upward and passes through the third support portion 213. A slider 222 mounting base is fixed to the output end of the drive component 221. The slider 222 is located above the third support portion 213 and is nested in the slider 222 mounting base.

[0053] like Figures 2 to 4As shown, the sliding assembly 23 includes a mounting plate 231 and a sliding guide rail 232. The mounting plate 231 is vertically placed on the rear side of the second support 212 away from the first support 211. The upper end of the mounting plate 231 is fixed on the slider 222. There are two sliding guide rails 232, which are respectively arranged on both sides of the second support 212. Taking one of them as an example, its specific structure is explained. The sliding guide rail 232 is a cross ball bearing guide rail. The sliding guide rail 232 is vertically arranged. The inner side of the sliding guide rail 232 is fixed on the second support 212, and the outer side of the sliding guide rail 232 is fixed on the mounting plate 231. The mounting plate 231 is correspondingly fixed on the side of the conveying track 11.

[0054] The specific operating steps of the above-mentioned leveling device applicable to the conveyor track are as follows:

[0055] When the height difference of the conveyor track 11 needs to be adjusted, the drive unit 221 is activated. The drive unit 221 drives the slider 222 to move up and down. The slider 222 drives the mounting plate 231 to move up and down along the sliding direction of the sliding guide rail 232, thereby causing the corresponding conveyor track 11 to move up and down. This creates a height difference between the two conveyor tracks 11, allowing the semiconductors on the two conveyor tracks 11 to be at different tilt angles. This is to accommodate different products, improve the efficiency of production when changing products, ensure consistency in repeated changes, ensure the accuracy of processing and testing on the track, reduce equipment costs, and improve production efficiency. The above structure and steps are a fully automatic adjustment method, which improves production efficiency, reduces the debugging costs of equipment changeover production, achieves fully automatic leveling, ensures processing and testing accuracy, reduces the inconsistency of manual adjustment, and ensures the stability of the product processing process.

[0056] like Figure 1 As shown, the two mounting plates 231 in the two leveling devices 2 are installed on the same conveyor track 11. The height difference of the track is controlled by the up and down movement, so as to achieve compatibility of different packaged devices and leveling at the process processing position, ensuring the stability of the packaged devices on the conveyor track 11 and the accuracy of processing and inspection.

[0057] In one embodiment, such as Figures 2 to 4As shown, the leveling device 2 also includes a sensor 3 and a sensor sensing plate 4. The sensor 3 is mounted on the second support 212 via a sensor 3 mounting plate, and the sensor sensing plate 4 is mounted on the mounting plate 231 corresponding to the sensor 3. Specifically, the sensor sensing plate 4 is mounted on the right side of the mounting plate 231, the sensor 3 mounting plate is mounted on the right side of the second support 212, and the sensor 3 is mounted on the right side of the sensor 3 mounting plate. The sensor 3 is a photoelectric sensor 3. By adjusting the sensing height of the sensor sensing plate 4, fine-tuning of the origin position is achieved in conjunction with the sensor 3. Precise control of the height difference of the conveyor track 11 is achieved through motor transmission, ensuring the repeatability and positioning accuracy of the conveyor track 11 when adjusting the height difference.

[0058] In one embodiment, such as Figure 3 As shown, the leveling device also includes a limiting block 5, which is installed on the rear side of the second support 212 away from the drive member 221. The mounting plate 231 has a limiting groove corresponding to the limiting block 5, and the limiting block 5 is installed in the limiting groove. When the mounting plate 231 moves up and down, the upper and lower inner walls of the limiting groove are used to limit the upper limit 5 and lower limit 5 of the mounting plate 231 during movement, ensuring that the height does not exceed the set limit 5 during the upward movement, thus ensuring the safety and stability of the equipment.

[0059] In other possible implementations, the power source for the up-and-down movement is not limited to a lead screw motor, but can be replaced by a linear motor or other mechanisms such as cylinders or cams; the sliding guide 232 is not limited to the cross ball guide of the example, but can be replaced by a linear guide, bearing bushing or other sliding mechanism; the motor mounting method is not limited to front mounting, but can be replaced by side mounting, top mounting, etc.

[0060] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A leveling device for a conveying track, comprising a conveying structure (1) for conveying a medium to be conveyed, the conveying structure (1) comprising two parallel and spaced-apart conveying tracks (11), the medium to be conveyed being adapted to overlap the two conveying tracks (11). Its features are, Also includes: A leveling device (2) is connected to one of the conveying tracks (11). The leveling device (2) can drive the corresponding conveying track (11) to move in the vertical direction so that the two symmetrically spaced conveying tracks (11) generate a height difference. The leveling device (2) includes: Base (21); The driving component (22) has a fixed end fixed to the base (21) and an output end that can move in the vertical direction. A sliding assembly (23) is installed at the output end of the drive assembly (22) and is connected to the conveying track (11); The base (21) includes a first support part (211) and a second support part (212) that are perpendicular to each other, and the second support part (212) is connected to the sliding assembly (23); The base (21) further includes a third support (213), which is mounted on the top of the second support (212) and is parallel to the second support (212); The third support (213) is used to install the drive assembly (22); The driving component (22) includes: A drive member (221) is adapted to be installed on the side of the third support (213) close to the first support (211); the output end of the drive member (221) passes through the third support (213) and extends in a direction away from the first support (211); A slider (222) is mounted on the output end of the drive (221); The sliding assembly (23) includes: a mounting plate (231) and a sliding guide rail (232), one side of the sliding guide rail (232) is connected to the mounting plate (231), and the other side is mounted on the second support part (212); The mounting plate (231) is fixedly connected to the slider (222).

2. The leveling device for a conveyor track according to claim 1, characterized in that, The leveling device (2) further includes a sensor (3) and a sensor sensing plate (4). The sensor (3) is mounted on the second support (212) via a sensor (3) mounting plate, and the sensor sensing plate (4) is mounted on the mounting plate (231) corresponding to the sensor (3).

3. The leveling device for a conveyor track according to claim 1, characterized in that, The leveling device (2) further includes a limiting block (5), which is installed on the side of the second support (212) away from the driving member (221); The mounting plate (231) has a limiting groove corresponding to the limiting block (5), and the limiting block (5) is installed in the limiting groove.

4. The leveling device for a conveyor track according to claim 1, characterized in that, The driving component (221) is a lead screw motor.

5. The leveling device for a conveyor track according to any one of claims 1-4, characterized in that, At least two leveling devices (2) are provided, and at least two leveling devices (2) are spaced apart along the conveying direction of the conveying track (11).

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