A simple wafer loading and unloading device

Abstract

The utility model provides a simple wafer feeding and discharging device, including lift electric jar, rotary electric jar, lift seat, rotary seat, the output of lift electric jar is equipped with lift seat, the top of lift seat is equipped with rotary electric jar, the output of rotary electric jar is equipped with rotary seat, the top of rotary seat is equipped with and is arranged side by side horizontal shift electric jar no.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a simple wafer loading and unloading device. Background Technology

[0002] In the semiconductor wafer manufacturing process, loading and unloading devices are frequently used. Currently, existing wafer manufacturing equipment typically uses two robotic arms to alternately load and unload wafers. However, these loading and unloading devices are relatively large, occupy a lot of space, and are expensive, increasing the manufacturing cost of wafers. Furthermore, replacing and maintaining this device is very inconvenient. Utility Model Content

[0003] The present invention aims to provide a simple wafer loading and unloading device to overcome the shortcomings of the prior art.

[0004] To solve the above-mentioned technical problems, the technical solution of this utility model is: a simple wafer loading and unloading device, including a lifting electric cylinder, a rotary electric cylinder, a lifting base, and a rotating base. The output end of the lifting electric cylinder is provided with a lifting base, and a rotary electric cylinder is provided above the lifting base. The output end of the rotary electric cylinder is provided with a rotating base. A horizontal moving electric cylinder I and a horizontal moving electric cylinder II are arranged side by side above the rotating base. The output end of the horizontal moving electric cylinder I is provided with a material picking gripper I, and the output end of the horizontal moving electric cylinder II is provided with a material picking gripper II. The material picking gripper I and the material picking gripper II are located in the middle position between the two horizontal moving electric cylinders, and the material picking gripper II and the material picking gripper I are stacked vertically, with the material picking gripper II located directly above the material picking gripper I.

[0005] Furthermore, the aforementioned simple wafer loading and unloading device also includes a support, which is a columnar assembly with an open top and a columnar mounting cavity inside. The lifting electric cylinder is installed in the mounting cavity of the support, and the front and rear side plates of the mounting cavity are detachably connected to the support body.

[0006] Furthermore, in the aforementioned simplified wafer loading and unloading device, the first picking gripper is connected to the first transverse electric cylinder via the first transverse base. The first transverse base is L-shaped, with one end connected to the first transverse electric cylinder and the other end extending between the two transverse electric cylinders and connected to the first picking gripper. The second picking gripper is connected to the second transverse electric cylinder via the second transverse base. The second transverse base is T-shaped, with one end connected to the raised base located below it and the other end stacked on top of the first transverse base and connected to the second picking gripper. The raised base is connected to the output end of the second transverse electric cylinder.

[0007] Furthermore, in the aforementioned simple wafer loading and unloading device, one end of the transverse shifter is equipped with a detection sensor, which is located on the opposite side of the loading gripper and is used to detect the presence or absence of the product.

[0008] Furthermore, in the aforementioned simple wafer loading and unloading device, a pressure plate is provided above one end of each of the first and second transverse shifters. The first and second pick-up grippers are inserted into the grooves at the bottom of the pressure plate and are connected to the first and second transverse shifters respectively through the pressure plate.

[0009] Furthermore, in the aforementioned simple wafer loading and unloading device, the first picking gripper is a Y-shaped thin plate, including a connecting part and a positioning part. The connecting part extends along the moving direction of the first transverse electric cylinder and is connected to the first transverse electric cylinder. The positioning part is fork-shaped, with symmetrical inclined surfaces on the upper and lower surfaces of the ends of its two forks, and an adsorption port is provided at the connection between the positioning part and the connecting part.

[0010] Furthermore, in the aforementioned simplified wafer loading and unloading device, a first and a second drag chain are arranged side by side between the first and second drag cylinders. The fixed ends of the first and second drag chains are both mounted on a rotating base. The movable end of the first drag chain is mounted on a first drag chain bracket, and the movable end of the second drag chain is mounted on a second drag chain bracket. The first drag chain bracket is located below the first drag cylinder. The second drag chain bracket is located on the side of the raised base near the first drag cylinder and is located below the first drag cylinder.

[0011] Compared with the prior art, the beneficial effects of this utility model are: the wafer loading and unloading device of this utility model has a compact and small structure, occupies little space, is easy to lay out, has a relatively low cost, effectively reduces the manufacturing cost of wafers, and is also convenient for later maintenance. Attached Figure Description

[0012] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0013] Figure 1 This is a three-dimensional structural diagram of the simplified wafer loading and unloading device of this utility model;

[0014] Figure 2 This is a top view of the simplified wafer loading and unloading device of this utility model.

[0015] Figure 3 This is a side view of the simplified wafer loading and unloading device of this utility model.

[0016] Figure 4 This is a schematic diagram of the structure of the simple wafer loading and unloading device of this utility model;

[0017] In the diagram: 1. Lifting electric cylinder; 2. Rotating electric cylinder; 3. Lifting seat; 4. Rotating seat; 5. Horizontal movement electric cylinder one; 6. Horizontal movement electric cylinder two; 7. Material handling gripper one; 71. Connecting part; 72. Positioning part; 73. Suction port; 8. Material handling gripper two; 9. Stand; 10. Horizontal movement seat one; 11. Horizontal movement seat two; 12. Elevating seat; 13. Detection sensor; 14. Pressure plate; 15. Cable chain one; 16. Cable chain two; 17. Cable chain bracket one; 18. Cable chain bracket two. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0019] Example 1

[0020] like Figure 1-4 As shown, a simple wafer loading and unloading device includes a lifting electric cylinder 1, a rotating electric cylinder 2, a lifting seat 3, and a rotating seat 4. The lifting electric cylinder 1 has a lifting seat 3 at its output end, the rotating electric cylinder 2 is located above the lifting seat 3, the rotating electric cylinder 2 has a rotating seat 4 at its output end, and two horizontal moving electric cylinders 5 and 6 are arranged side by side above the rotating seat 4. The output end of the horizontal moving electric cylinder 5 has a picking gripper 7, and the output end of the horizontal moving electric cylinder 6 has a picking gripper 8. The picking gripper 7 and the picking gripper 8 are located in the middle position between the two horizontal moving electric cylinders, and the picking gripper 7 and the picking gripper 8 are stacked vertically, with the picking gripper 8 located directly above the picking gripper 7. This invention achieves multi-directional movement of the picking gripper through a lifting electric cylinder, a rotating electric cylinder, and two transverse electric cylinders, enabling flexible material picking. Furthermore, the picking gripper 8 and picking gripper 7 are stacked vertically, facilitating simultaneous loading and unloading in stacked wafer cassettes and improving loading and unloading efficiency. In addition, the wafer loading and unloading device of this invention has a compact and small structure, occupies little space, is easy to lay out, has relatively low cost, and is also easy to maintain in the later stages.

[0021] like Figure 1-3As shown, the aforementioned simplified wafer loading and unloading device also includes a support 9, which is a cylindrical assembly with an open top and an internal cylindrical mounting cavity. The lifting cylinder 1 is installed in the mounting cavity of the support 9, and the front and rear side plates of the mounting cavity are detachably connected to the main body of the support 9 for easy maintenance. The bottom of the support 9 also has mounting holes, allowing the loading and unloading device to be installed into wafer manufacturing equipment. Assembly and disassembly are simple and convenient. Installing the lifting cylinder 1 in the mounting cavity of the support 9 not only saves installation space but also improves overall stability and safety.

[0022] like Figure 1-3 As shown, the first picking gripper 7 is connected to the first transverse electric cylinder 5 via the first transverse base 10. The first transverse base 10 is L-shaped, with one end connected to the first transverse electric cylinder 5 and the other end extending between the two transverse electric cylinders to connect with the first picking gripper 7. The second picking gripper 8 is connected to the second transverse electric cylinder 6 via the second transverse base 11. The second transverse base 11 is T-shaped, with one end connected to the raised base 12 located below it and the other end stacked on top of the first transverse base 10 to connect with the second picking gripper 8. The raised base 12 is connected to the output end of the second transverse electric cylinder 6.

[0023] like Figure 1 , 2 As shown, one end of the transverse shift seat 11 is also provided with a detection sensor 13. The detection sensor 13 is located on the opposite side of the material handling gripper 8 and is used to detect whether the product is present or not, so as to facilitate the material handling gripper to accurately pick up the material.

[0024] like Figure 1-3 As shown, a pressure plate 14 is provided above one end of each of the first and second transverse sliding seats 10 and 11. The first and second picking claws 7 and 8 are inserted into the grooves at the bottom of the pressure plate 14 and are connected to the first and second transverse sliding seats 10 and 11 respectively through the pressure plate 14. The first and second picking claws 7 and 8 of this utility model are made of ceramic and are installed by pressure plate, which makes disassembly and assembly more convenient and reduces the manufacturing difficulty of the picking claws. In addition, in order to prevent the picking claws from falling out of the grooves at the bottom of the pressure plate 14 during disassembly and assembly, a through hole is provided in the middle of the insertion end of the first and second picking claws 7 and 8, and a pin is provided on the first and second transverse sliding seats 10 and 11 to be inserted into the through hole.

[0025] like Figure 4As shown, the first picking gripper 7 is a Y-shaped thin plate, including a connecting part 71 and a positioning part 72. The connecting part 71 extends along the moving direction of the first transverse electric cylinder 5 and is connected to the first transverse electric cylinder 5. The positioning part 72 is fork-shaped, with symmetrical inclined surfaces on the upper and lower surfaces of the ends of the two forks for easy insertion. An adsorption port 73 is provided at the connection between the positioning part 72 and the connecting part 71. The adsorption port 73 is connected to a vacuum generator (not shown in the figure) and is used to fix the wafer by adsorption during picking. In this embodiment, the second picking gripper 8 has the same structure as the first picking gripper 7 and will not be described in detail here.

[0026] like Figure 2-3 As shown, a cable chain 15 and a cable chain 16 are arranged side-by-side between the first transverse electric cylinder 5 and the second transverse electric cylinder 6. The fixed ends of the first cable chain 15 and the second cable chain 16 are both mounted on the rotating seat 4. The movable end of the first cable chain 15 is mounted on the first cable chain bracket 17, and the movable end of the second cable chain 16 is mounted on the second cable chain bracket 18. The first cable chain bracket 17 is located below the first transverse seat 10. The second cable chain bracket 18 is located on the side of the raised seat 12 near the first transverse electric cylinder 5 and below the first transverse seat 10. By placing the first cable chain 15 and the second cable chain 16 in the gap between the first transverse electric cylinder 5 and the second transverse electric cylinder 6, the overall structure becomes more compact.

[0027] In summary, the wafer loading and unloading device of this utility model has a compact and small structure, occupies little space, is easy to lay out, has a relatively low cost, effectively reduces the manufacturing cost of wafers, and is also convenient for later maintenance.

[0028] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0029] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A simple wafer loading and unloading device, characterized by: The device includes a lifting electric cylinder, a rotating electric cylinder, a lifting base, and a rotating base. The lifting electric cylinder has a lifting base at its output end, and a rotating electric cylinder is located above the lifting base. The rotating electric cylinder has a rotating base at its output end, and two horizontal moving electric cylinders are arranged side by side above the rotating base. The output end of the horizontal moving electric cylinder has a material-grabbing gripper, and the output end of the horizontal moving electric cylinder has a material-grabbing gripper. The material-grabbing gripper is located in the middle between the two horizontal moving electric cylinders, and the material-grabbing gripper is stacked on top of the material-grabbing gripper, with the material-grabbing gripper directly above the material-grabbing gripper.

2. The simple wafer on-off device according to claim 1, wherein: It also includes a stand, which is a column-shaped assembly with an open top and a column-shaped mounting cavity inside. The lifting electric cylinder is installed in the mounting cavity of the stand, and the front and rear side plates of the mounting cavity are detachably connected to the stand body.

3. The simple wafer on-off device according to claim 1, wherein: The first material handling gripper is connected to the first horizontal moving electric cylinder via the first horizontal moving base. The first horizontal moving base is L-shaped, with one end connected to the first horizontal moving electric cylinder and the other end extending between the two horizontal moving electric cylinders and connected to the first material handling gripper. The second material handling gripper is connected to the second horizontal moving electric cylinder via the second horizontal moving base. The second horizontal moving base is T-shaped, with one end connected to the raised base located below it and the other end stacked on top of the first horizontal moving base and connected to the second material handling gripper. The raised base is connected to the output end of the second horizontal moving electric cylinder.

4. The simple wafer on-off device according to claim 3, wherein: A detection sensor is provided at one end of the transverse shifter, which is located on the opposite side of the material handling gripper and is used to detect the presence or absence of a product.

5. The simplified wafer loading and unloading device according to claim 3, characterized in that: A pressure plate is provided above one end of each of the transverse shift seats 1 and 2. The material handling claws 1 and 2 are inserted into the grooves at the bottom of the pressure plate and are connected to the transverse shift seats 1 and 2 respectively through the pressure plate.

6. The simplified wafer loading and unloading device according to claim 1 or 3, characterized in that: The material handling gripper is a Y-shaped thin plate, including a connecting part and a positioning part. The connecting part extends along the moving direction of the transverse electric cylinder and is connected to the transverse electric cylinder. The positioning part is fork-shaped, with symmetrical inclined surfaces on the upper and lower surfaces of the ends of the two forks. An adsorption port is provided at the connection between the positioning part and the connecting part.

7. The simplified wafer loading and unloading device according to claim 1, characterized in that: Between the first and second transverse electric cylinders, there are also two parallel cable chains, the fixed ends of the first and second cable chains are mounted on the rotating seat, the movable end of the first cable chain is mounted on the first cable chain bracket, and the movable end of the second cable chain is mounted on the second cable chain bracket. The first cable chain bracket is located below the first transverse seat; the second cable chain bracket is located on the side of the raised seat near the first transverse electric cylinder and below the first transverse seat.

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