Miniature motion testing platform

Abstract

The utility model discloses a kind of micro motion adjustment platform, including base, power mechanism, sliding assembly, bearing platform and feedback device being set on base, wherein, recess, first recess and second recess are equipped with on the base, the recess is between first recess and second recess;The power mechanism is set on the recess, for driving the bearing platform moves along the sliding assembly, the power mechanism includes stator and mover;The bearing platform is set on the power mechanism and sliding assembly, for carrying the workpiece being adjusted and measured;The feedback device includes first feedback device and second feedback device, the first feedback device is used to feedback the maximum preset in-place position of bearing platform movement, the second feedback device is used to feedback the real-time displacement of bearing platform movement.The utility model passes through the power mechanism of direct drive control design, and the displacement of bearing platform is fed back by feedback device, improves the adjustment precision of adjustment platform.

Description

Technical Field

[0001] This utility model belongs to the field of drive equipment technology, specifically relating to a micro motion adjustment platform. Background Technology

[0002] With the continuous iteration and upgrading of various industries in China, the requirements for the process and processing precision of equipment are constantly increasing, and the precision requirements for platforms with micro-stroke motion are also increasing. Traditional micro-motion platforms are gradually unable to meet the special process requirements. Therefore, there is a large market demand for micro-motion adjustment platforms with high integration and small size in various industries.

[0003] The information disclosed in this background section is intended only to enhance the understanding of the overall background of this utility model and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Utility Model Content

[0004] The purpose of this invention is to provide a miniature linear adjustment platform that can solve the technical problem of low platform accuracy in the prior art.

[0005] To achieve the above objectives, a specific embodiment of this utility model provides a miniature motion adjustment platform, including a base, a power mechanism, a sliding component, a support platform, and a feedback device disposed on the base.

[0006] The base has alternating recesses, a first groove, and a second groove, with the recesses located between the first and second grooves. A power mechanism, located on the recesses, drives the support platform to move along the sliding assembly. The power mechanism includes a stator and a mover. The support platform, mounted on the power mechanism and the sliding assembly, supports the workpiece being tested. The feedback device includes a first feedback device and a second feedback device. The first feedback device provides feedback on the maximum preset position of the support platform's movement, and the second feedback device provides feedback on the real-time displacement of the support platform.

[0007] In one or more embodiments of this utility model, the power mechanism is a miniature linear motor, the stator is mounted on the cavity, the mover is mounted on the stator, and the upper end of the mover is connected to the bearing platform for driving the bearing platform to move.

[0008] In one or more embodiments of this utility model, the sliding assembly includes a slide rail and a slider. The slide rail is mounted on the first groove and the second groove. The slider is slidably connected to the slide rail. The upper end of the slider is fixedly connected to the bearing platform.

[0009] In one or more embodiments of the present invention, the base has a first end near the first groove and a second end near the second groove, a boss is provided at the second end, and the second feedback device is provided on the boss.

[0010] In one or more embodiments of this utility model, the first feedback device is disposed at the first end of the base.

[0011] In one or more embodiments of this utility model, the first feedback device is selected from a photoelectric sensor, and the second feedback device is selected from an optical encoder or a magnetic encoder.

[0012] In one or more embodiments of this utility model, the micro motion adjustment platform further includes a limiting component, which is installed at both ends of the first groove or the second groove to prevent the slider from sliding out of the slide rail.

[0013] In one or more embodiments of the present invention, the bearing platform further includes an impact protection member, which is disposed on the side of the bearing platform and protrudes outward from the side, for preventing hard collisions between the bearing platform and the limiting component.

[0014] In one or more embodiments of this utility model, the micro motion adjustment platform further includes a first connecting plate and a second connecting plate, wherein the first connecting plate is used to connect the support platform and the first feedback device, and the second connecting plate is used to connect the first feedback device and the base.

[0015] In one or more embodiments of this utility model, the micro motion adjustment platform further includes a connector, which is mounted on the second feedback device and is used to connect the support platform and the second feedback device.

[0016] Compared with existing technologies, the miniature linear adjustment platform of this invention features a direct-drive control design. Direct-drive control eliminates the mechanical conversion link compared to the indirect control in existing technologies, improving the accuracy and miniaturization of the drive. Furthermore, this invention uses a first feedback device and a second feedback device to accurately feed back the maximum preset position and real-time movement position of the workpiece being adjusted, driven by the support platform, ensuring the accuracy of the workpiece's movement. In addition, limiting components and impact protection components further limit and protect the reciprocating motion of the support platform and slider, and the compact and precise connection and cooperation between all components further guarantee the platform's reliability. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the structure of the micro-adjustment platform in a specific embodiment of the present invention;

[0019] Figure 2 This is a left-side view of the micro-adjustment platform in a specific embodiment of the present invention;

[0020] Figure 3 This is a right-side view of the micro-adjustment platform in a specific embodiment of the present invention;

[0021] Figure 4 This is a rear view schematic diagram of the micro-adjustment platform in a specific embodiment of the present invention;

[0022] Figure 5 This is a schematic diagram of the base structure in a specific embodiment of the present utility model;

[0023] Figure 6 This is a side view of the base in a specific embodiment of the present invention.

[0024] Explanation of key figure labels:

[0025] 1-Base, 2-Cavity, 31-First Groove, 32-Second Groove, 5-Bearing Platform;

[0026] 6-Power mechanism, 61-Stator, 62-Motor; 7-Sliding component, 71-Slide rail, 72-Slider;

[0027] 81-First feedback device, 82-Second feedback device, 9-Impact protection component, 10-Limiting component;

[0028] 11-First end, 12-Second end, 14-Boss;

[0029] 15-First connecting plate, 16-Second connecting plate, 17-Connector. Detailed Implementation

[0030] To enable those skilled in the art to better understand the technical solutions in the present utility model, the following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments in the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0031] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by terms such as "vertical", "horizontal", "top", "bottom", "upper", "lower", "front", "rear", etc. is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model.

[0032] Refer Figures 1 to 6 As shown, a micro motion measurement and adjustment platform disclosed in a specific embodiment of the present utility model is used for the measurement and adjustment of the motion displacement of small workpieces such as semiconductors. It includes a base 1, a power mechanism 6, a sliding component 7, a carrying platform 5, and a feedback device provided on the base 1. The base 1 has opposite first end 11 and second end 12, and an upper surface. A concave cavity 2 is recessed downward at a substantially middle position on the upper surface of the base 1, and a first groove 31 and a second groove 32 are arranged at intervals with the concave cavity 2. The concave cavity 2 is located between the first groove 31 and the second groove 32. The first groove 31 is provided near the first end 11, and the second groove 32 is provided near the second end 12. The extending direction of the first groove 31 and the second groove 32 is defined as the first direction, and several reserved holes are provided on the upper end surface of the carrying platform 5.

[0033] In one or more embodiments of the present utility model, in combination Figure 1 As shown, the power mechanism 6 is a micro linear motor, which includes a stator 61 and a mover 62. The stator 61 is clamped on the concave cavity 2, and the mover 62 is installed on the stator 61. The upper end of the mover 62 is connected to the carrying platform 5, and is used to drive the carrying platform 5 to perform a linear movement along the first direction, and then drive the measured micro workpiece installed on the carrying platform 5 to perform a linear movement for position measurement. Since the motor force in the micro linear motor directly acts on the load, compared with the traditional servo motor, there is no mechanical conversion link, and the mover 62 is directly connected to the carrying platform 5, which improves the driving accuracy.

[0034] In combination Figure 4 As shown, the sliding component 7 includes a slide rail 71 and a slider 72, Figure 4The diagram shows a pair of slide rails and a slider. A pair of slide rails 71 are respectively mounted on the first groove 31 and the second groove 32 along a first direction. The lower end of the slider 72 is slidably connected to the slide rails 71. The slider 72 is fixedly mounted on the lower end surface of the support platform 5. Driven by the power mechanism 6, the support platform 5 achieves linear motion by moving the slider 72 within the slide rails 71. In one or more embodiments of this utility model, the slide rail 71 can be selected as a cross ball bearing guide or a miniature ball bearing guide; this application does not limit this. The precision of the slide rails 71 and the slider 72 needs to match the positioning precision of the power mechanism 6 to ensure the accuracy of the drive.

[0035] Combination Figures 2-3 As shown, the feedback device includes a first feedback device 81 and a second feedback device 82. The first feedback device 81 is used to provide feedback on the maximum preset position of the carrier platform 5, and the second feedback device 82 is used to provide feedback on the real-time displacement of the carrier platform 5. The specific feedback values ​​are fed back to a controller (not shown in the figure) connected to the feedback device signal. Based on the feedback data, the controller can further adjust the driving displacement, moving speed, etc. of the mover 62 of the power mechanism 6.

[0036] In one or more embodiments of this utility model, the first feedback device 81 is a position feedback device, specifically a photoelectric sensor. The second feedback device 82 is a precision feedback device, specifically an optical encoder and / or a magnetic encoder. The first feedback device 81 is mounted on the first end 11 of the base 1, and the second feedback device 82 is mounted on the boss 14 near the second end 12 of the base 1. In this embodiment, when the mover 62 drives the bearing platform 5 to move on the slide rail 71, the real-time movement position of the workpiece being measured driven by the bearing platform 5 is obtained through the first feedback device 81 and the second feedback device 82, and then its micro-displacement is measured.

[0037] In one or more embodiments of this utility model, reference Figures 1-4 As shown, the miniature motion adjustment platform also includes a limiting component 10, which is disposed at both ends of the first groove 31 or the second groove 32 of the base. The limiting component 10 is used to restrict the movement displacement of the slider 72, preventing the slider 72 from sliding off the slide rail 71 during the sliding process, thereby preventing potential damage. In this embodiment, the limiting component 10 is an "L"-shaped limiting plate, with its lower end fixed to the side end face of the base 1.

[0038] In one or more embodiments of this utility model, the supporting platform 5 is further provided with an impact protection member 9. The impact protection member 9 protrudes from the front or rear face of the supporting platform 5 in the direction of movement to prevent hard collisions that may occur between the supporting platform 5 and the limiting component 10 during movement. Specifically, it prevents hard collisions that may occur with one side of the L-shaped limiting plate of the limiting component 10. In this embodiment, the impact protection member 9 is a hollow cylindrical structure protruding from the first direction side face of the supporting platform 5. It is made of rubber or other relatively soft materials, and this application does not limit this. When the mover 62 drives the supporting platform 5 to reciprocate on the slide rail 71, the impact protection device 9 installed on the supporting platform 5 protects the supporting platform 5 and the limiting component 10, avoiding direct collisions and thus ensuring the accuracy of the drive.

[0039] In one or more embodiments of this utility model, the micro motion adjustment platform further includes cables for providing electrical connections between the first feedback device 81, the second feedback device 82, the mover 62, and the controller.

[0040] In one or more embodiments of this utility model, reference Figure 2 As shown, the miniature motion adjustment platform also includes a first connecting plate 15 and a second connecting plate 16. The first connecting plate 15 is used to connect the support platform 5 and the first feedback device 81, and the second connecting plate 16 is used to connect the first feedback device 81 and the base 1. Specifically, the first connecting plate 15 is connected to the end face of the support platform 5 near the first groove 31, and the bottom end of the first connecting plate 15 abuts against the top side of the first feedback device 81; the second connecting plate 16 is connected to the side of the base 1 near the first groove 31, and the top end abuts against the bottom end of the first feedback device 81.

[0041] In one or more embodiments of this utility model, reference Figure 3 As shown, the miniature motion adjustment platform also includes a connector 17, which is mounted on the second feedback device 82. The connector 17 is used to connect the support platform 5 and the second feedback device 82. In this embodiment, the connector 17 is connected to the support platform 5, and the bottom side of the connector 17 abuts against the top side of the second feedback device 82.

[0042] In the adjustment and use of this utility model's miniature motion adjustment platform, the workpiece to be adjusted is fixed to the upper end surface of the support platform 5 through a pre-drilled hole. Then, the adjustment platform is powered on, and the mover 62 of the power mechanism 6 begins linear motion under the action of the magnetic field, driving the support platform 5 to begin a small linear motion along the slide rail 71 in the first direction, thereby synchronously causing the workpiece to be adjusted to perform a small linear motion. The displacement of the workpiece driven by the support platform 5 is measured by the second feedback device 82 and fed back to the controller. Simultaneously, the maximum displacement of the workpiece driven by the support platform 5 is fed back by the first feedback device 81. The two ends of the slide rail 71 are limited by the limiting components 10 to prevent the slider 72 from sliding off the slide rail 71. The impact protection components 9 at both ends are used to protect the support platform 5 to prevent adjustment errors caused by hard collisions between the support platform 5 and the limiting components 10.

[0043] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0044] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A miniature motion calibration platform, characterized in that, Includes a base, a power mechanism, a sliding component, a support platform, and a feedback device mounted on the base, wherein... The base is provided with alternating recesses, a first groove, and a second groove, with the recesses located between the first groove and the second groove; The power mechanism is disposed on the cavity and is used to drive the bearing platform to move along the sliding assembly. The power mechanism includes a stator and a mover. The support platform is mounted on the power mechanism and the sliding assembly, and is used to support the workpiece to be tested; The feedback device includes a first feedback device and a second feedback device. The first feedback device is used to provide feedback on the maximum preset position of the carrier platform, and the second feedback device is used to provide feedback on the real-time displacement of the carrier platform.

2. The micro motion adjustment platform according to claim 1, characterized in that, The power mechanism is a miniature linear motor. The stator is mounted on the cavity, and the mover is mounted on the stator. The upper end of the mover is connected to the support platform to drive the support platform to move.

3. The micro motion adjustment platform according to claim 1, characterized in that, The sliding assembly includes a slide rail and a slider. The slide rail is mounted on the first groove and the second groove. The slider is slidably connected to the slide rail. The upper end of the slider is fixedly connected to the support platform.

4. The micro motion adjustment platform according to claim 1, characterized in that, The base has a first end near the first groove and a second end near the second groove. A boss is provided at the second end, and the second feedback device is provided on the boss.

5. The micro motion adjustment platform according to claim 4, characterized in that, The first feedback device is located at the first end of the base.

6. The micro motion adjustment platform according to claim 5, characterized in that, The first feedback device is selected from a photoelectric sensor, and the second feedback device is selected from an optical encoder or a magnetic encoder.

7. The micro motion adjustment platform according to claim 3, characterized in that, The micro motion adjustment platform also includes a limiting component, which is installed at both ends of the first groove or the second groove to prevent the slider from sliding out of the slide rail.

8. The micro motion calibration platform according to claim 7, characterized in that, The bearing platform also includes an impact protection component, which is located on the side of the bearing platform and protrudes outward to prevent hard collisions between the bearing platform and the limiting component.

9. The micro motion adjustment platform according to claim 1, characterized in that, The micro motion adjustment platform also includes a first connecting plate and a second connecting plate. The first connecting plate is used to connect the support platform and the first feedback device, and the second connecting plate is used to connect the first feedback device and the base.

10. The micro motion adjustment platform according to claim 1, characterized in that, The micro motion adjustment platform also includes a connector, which is mounted on the second feedback device and is used to connect the support platform and the second feedback device.

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