A filtering and purifying device for waste water treatment in wafer production

Abstract

The utility model relates to the field of wafer production wastewater treatment, especially to a kind of filtering and purifying equipment for wastewater treatment in wafer production, including support leg, filter box, valve, moving plate, filter screen, observation window and water pipe etc., two support legs of front and back are connected in the lower side of filter box left and right, valve is equipped in filter box lower part, moving plate is slidably connected in filter box middle part, filter screen is connected on moving plate, observation window is connected on the front side of filter box upper part, water pipe is connected on the right side of filter box right lower part.The utility model is filtered by wastewater flowing through filter screen, then wastewater flows into spray tank, sodium hydroxide solution and sodium sulfide solution are sprayed into wastewater by electric nozzle operation to treat heavy metal, then treated wastewater flows into sedimentation tank to deposit, so that the impurities in wastewater can be filtered, directly conveyed, dosed to remove heavy metal and deposited, realize multifunction combination, reduce processing cost, improve processing efficiency.

Description

Technical Field

[0001] This utility model relates to the field of wastewater treatment in wafer manufacturing, and in particular to a filtration and purification device for wastewater treatment in wafer manufacturing. Background Technology

[0002] The semiconductor wafer manufacturing process generates a large amount of wastewater containing complex impurities. These impurities include not only various solid particles and organic matter, but also a variety of heavy metal ions such as copper, nickel, and lead. Because wafer manufacturing has extremely high requirements for product purity and performance, if the wastewater is discharged directly without effective treatment, it will cause serious pollution to the ecological environment, harm human health, and also result in a huge waste of water resources.

[0003] In current wafer manufacturing wastewater treatment, solid impurities are typically removed from the wastewater through filtration equipment. The filtered wastewater is then transported to a dosing device where chemical agents are added to remove heavy metal ions. Finally, the treated wastewater is introduced into a sedimentation tank for sedimentation and separation. However, the current treatment method requires multiple independent equipment and processing steps, resulting in a long process flow, complex connections between each step, large land area, high equipment investment costs, increased treatment costs, and reduced treatment efficiency.

[0004] Therefore, it is necessary to design a filtration and purification device for wastewater treatment in wafer manufacturing that can filter impurities in wastewater, directly deliver and add chemicals to remove heavy metals, and perform precipitation treatment, thereby achieving a multi-functional combination, reducing treatment costs, and improving treatment efficiency. Utility Model Content

[0005] To overcome the shortcomings of current treatment methods, which require multiple independent devices and processing steps, have long process flows, complex connections between steps, large footprints, high equipment investment costs, increased processing costs, and reduced processing efficiency, this utility model provides a filtration and purification device for wastewater treatment in wafer manufacturing that can filter impurities in wastewater, directly deliver it for chemical dosing to remove heavy metals, and perform precipitation treatment. This device combines multiple functions, reduces processing costs, and improves processing efficiency.

[0006] The technical solution is: a filtration and purification device for wastewater treatment in wafer manufacturing, comprising support legs, a filter box, valves, a movable plate, a filter screen, an observation window, a first water pump, a water pipe, a spray assembly, and a sedimentation assembly. The filter box has two support legs connected to its lower left and right sides. A valve is located at the bottom of the filter box. A movable plate is slidably connected to the middle of the filter box, and a filter screen is connected to the movable plate. An observation window is connected to the upper front of the filter box. A water pipe is connected to the lower right side of the filter box, and a first water pump is connected to the water pipe. A spray assembly for removing metal substances from the wastewater by spraying a solution is located on the right side of the water pipe. A sedimentation assembly for settling the treated water is located on the spray assembly.

[0007] In one embodiment, a feed pipe is provided on the upper left side of the filter box.

[0008] In one embodiment, a handle is provided on the front side of the movable plate.

[0009] In one embodiment, the spray assembly includes a spray box, electric nozzles, and a second water pump. The spray box is connected to the right side of the water pipe, and two electric nozzles are connected to the upper part of the spray box. The second water pump is connected to the right side of the spray box.

[0010] In one embodiment, the bottom of the spray box is sloped.

[0011] In one embodiment, the sedimentation assembly includes a sedimentation tank, inclined plates, and triangular plates. The sedimentation tank is connected to the right side of the spray box. Multiple valves are also provided at the lower front part of the sedimentation tank. Multiple inclined plates are connected to the inner sides of both the front and rear parts of the sedimentation tank. Multiple triangular plates are connected to the bottom of the sedimentation tank.

[0012] This utility model has the following advantages: 1. This utility model allows wastewater to flow through a filter screen and then flow into a spray box. The electric spray head sprays sodium hydroxide solution and sodium sulfide solution into the wastewater to treat heavy metals. The treated wastewater then flows into a sedimentation tank for precipitation. This allows for the filtration of impurities in the wastewater and direct delivery of chemicals to remove heavy metals and perform precipitation treatment. This achieves a combination of multiple functions, reduces treatment costs, and improves treatment efficiency.

[0013] 2. This utility model uses a moving filter screen. Under the action of the filter box, impurities on the filter screen are scraped off to the bottom of the filter box, then rinsed and discharged by water flowing into the filter box. The filter screen, spray box and sedimentation tank are then rinsed by water. Thus, after use, the filter screen can be moved to clean and rinse impurities, which is convenient for cleaning the device. The operation is simple, the cleaning difficulty is reduced and the cleaning efficiency is improved. Attached Figure Description

[0014] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0015] Figure 2 This is a three-dimensional cross-sectional view of the filter screen and moving plate components of this utility model.

[0016] Figure 3 This is a three-dimensional cross-sectional view of the electric spray head and spray box of this utility model.

[0017] Figure 4 This is a three-dimensional cross-sectional view of the triangular plate and sedimentation tank components of this utility model.

[0018] The above-mentioned attached drawings include the following reference numerals: 1. Support foot, 2. Filter box, 3. Valve, 4. Moving plate, 5. Filter screen, 6. Observation window, 7. First water pump, 8. Water pipe, 9. Spray box, 10. Electric spray head, 11. Second water pump, 12. Sedimentation tank, 13. Inclined plate, 14. Triangular plate. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of this utility model clearer, the following will describe this utility model in further detail with reference to the accompanying drawings. It is hereby declared that the terms "up," "down," "left," "right," "front," "back," "inner," and "outer," etc., appearing or about to appear in this document, are based solely on the accompanying drawings and are not intended to specifically limit this utility model.

[0020] A filtration and purification device for wastewater treatment in wafer manufacturing, such as Figures 1-4 As shown, the system includes support feet 1, filter box 2, valve 3, movable plate 4, filter screen 5, observation window 6, first water pump 7, water pipe 8, spray assembly, and sedimentation assembly. The filter box 2 has two support feet 1 connected to its lower left and right sides. An inlet pipe is located on the upper left side of the filter box 2 to facilitate wastewater inflow. A valve 3 is located at the lower part of the filter box 2. A movable plate 4 is slidably connected to the middle of the filter box 2. A handle is located on the front side of the movable plate 4 for easy manipulation. A filter screen 5 is connected to the movable plate 4. An observation window 6 is connected to the upper front side of the filter box 2. A water pipe 8 is connected to the lower right side of the filter box 2. The first water pump 7 is connected to the water pipe 8. A spray assembly for removing metal substances from the wastewater by spraying a solution is located on the right side of the water pipe 8. A sedimentation assembly for settling the treated water is located on the spray assembly.

[0021] like Figure 1 and Figure 3 As shown, the spray assembly includes a spray box 9, an electric spray head 10, and a second water pump 11. The spray box 9 is connected to the right side of the water pipe 8. The bottom of the spray box 9 is sloped to facilitate water flow. The upper part of the spray box 9 is connected to two electric spray heads 10 on the left and right. The second water pump 11 is connected to the right side of the spray box 9.

[0022] like Figure 1 and Figure 4 As shown, the sedimentation assembly includes a sedimentation tank 12, inclined plates 13 and triangular plates 14. The right side of the spray box 9 is connected to the sedimentation tank 12. Four valves 3 are also provided at the lower front part of the sedimentation tank 12. Nine inclined plates 13 are connected to the inner sides of both the front and rear parts of the sedimentation tank 12. Three triangular plates 14 are connected to the bottom of the sedimentation tank 12.

[0023] This equipment can be used when wastewater treatment is required during wafer manufacturing. The support legs 1, spray tank 9, and sedimentation tank 12 are in contact with the ground. A wastewater delivery pipe is connected to the feed pipe, and electric spray nozzles 10 are connected to sodium hydroxide and sodium sulfide solution delivery pipes respectively. Wastewater flows into the feed pipe, into the filter tank 2, and is filtered through the filter screen 5, leaving impurities on the screen. The wastewater then flows to the bottom of the filter tank 2 for further filtration. The filtration process is observed through the observation window 6. Next, the first water pump 7 is activated, allowing the wastewater to flow into the water pipe 8 and then into the spray tank 9. The bottom of the spray tank 9 is sloped. During the flow, the electric spray nozzles 10 are activated, spraying sodium hydroxide and sodium sulfide solutions into the wastewater for treatment. The sodium hydroxide solution is used to adjust the pH value of the wastewater. This process causes heavy metal ions to form corresponding hydroxide precipitates. Heavy metals that are difficult to remove effectively by using sodium sulfide solution are then treated. Next, the second water pump 11 is started, allowing the treated wastewater to flow into the sedimentation tank 12 for sedimentation. The effective settling area of ​​the sedimentation tank 12 is increased by the inclined plate 13, allowing suspended particles to better contact the surface of the inclined plate 13 and settle down. The triangular plate 14 concentrates particles and impurities, facilitating their collection and discharge, thereby achieving wastewater filtration and purification. This allows for the direct delivery of chemicals to remove heavy metals and perform sedimentation after filtering impurities in the wastewater, achieving a multi-functional combination, reducing treatment costs, and improving treatment efficiency. Subsequently, the treated water is used for further operations and recycling. After use, the electric nozzle 10, the first water pump 7, and the second water pump 11 are turned off.

[0024] When cleaning is required, the filter screen 5 is moved by pulling the movable plate 4. Under the action of the filter box 2, the impurities on the filter screen 5 are scraped off to the lower part of the filter box 2. Then, water is connected to the external water source through the feed pipe to flow into the filter box 2 for rinsing. Then, the valve 3 is turned to open, allowing the water and impurities to be flushed out. After rinsing, the valve 3 is closed, and the movable plate 4 and filter screen 5 are pushed to move back to their original positions. Then, the first water pump 7 and the second water pump 11 are started, allowing water to flow into the filter box 2 to rinse the filter screen 5, and then into the spray box 9 for cleaning. The water then flows into the sedimentation tank 12 for rinsing. Then, the valve 3 at the front of the sedimentation tank 12 is turned to open, allowing the cleaned wastewater and impurities to flow out, thus cleaning the device. After the water is discharged, the first water pump 7 and the second water pump 11 are turned off, and the valve 3 at the front of the sedimentation tank 12 is turned to close. This allows for convenient cleaning of the device while simultaneously moving the filter screen 5 to clean and rinse impurities after use. The operation is simple, reducing the difficulty of cleaning and improving the cleaning efficiency. The device can then be removed.

[0025] Those skilled in the art should understand that the above embodiments do not limit the present invention in any way, and all technical solutions obtained by equivalent substitution or equivalent transformation fall within the protection scope of the present invention.

Claims

1. A filtering and purifying apparatus for waste water treatment in wafer production, characterized by: It includes support feet (1), filter box (2), valve (3), moving plate (4), filter screen (5), observation window (6), first water pump (7), water pipe (8), spray assembly and sedimentation assembly. The filter box (2) is connected to two support feet (1) on the lower left and right sides. The filter box (2) is equipped with a valve (3) at the bottom. The filter box (2) is connected to the moving plate (4) in the middle. The moving plate (4) is connected to the filter screen (5). The filter box (2) is connected to the observation window (6) at the front upper part. The filter box (2) is connected to the water pipe (8) on the lower right side. The water pipe (8) is connected to the first water pump (7). The water pipe (8) is equipped with a spray assembly for spraying solution to remove metal substances in wastewater. The spray assembly is equipped with a sedimentation assembly for sedimenting the treated water.

2. The filtering and purifying apparatus for waste water in wafer production according to claim 1, wherein: the filtering and purifying apparatus is characterized by comprising a plurality of the filtering and purifying units. The filter box (2) has a feed pipe on the upper left side.

3. The filter purification apparatus for treating waste water in wafer production according to claim 1, wherein: the filter purification apparatus is characterized by comprising a filter purification apparatus for treating waste water in wafer production according to claim 1. The movable plate (4) has a handle on the front side.

4. The filtration and purification equipment for wastewater treatment in wafer manufacturing according to claim 1, characterized in that: The spray assembly includes a spray box (9), an electric nozzle (10), and a second water pump (11). The spray box (9) is connected to the right side of the water pipe (8). The upper part of the spray box (9) is connected to two electric nozzles (10) on the left and right. The right side of the spray box (9) is connected to the second water pump (11).

5. The filtration and purification equipment for wastewater treatment in wafer manufacturing according to claim 4, characterized in that: The bottom of the spray box (9) is sloping.

6. The filtration and purification equipment for wastewater treatment in wafer manufacturing according to claim 1, characterized in that: The sedimentation assembly includes a sedimentation tank (12), an inclined plate (13) and a triangular plate (14). The right side of the spray box (9) is connected to the sedimentation tank (12). Multiple valves (3) are also provided at the lower front part of the sedimentation tank (12). Multiple inclined plates (13) are connected to the inner sides of both the front and rear parts of the sedimentation tank (12). Multiple triangular plates (14) are connected to the bottom of the sedimentation tank (12).

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