Furnace door opening and closing device and reaction furnace

Abstract

The utility model discloses a kind of furnace door opening and closing device and reaction furnace, it is related to the technical field of semiconductor equipment.The furnace door opening and closing device includes support plate, fixed support, connecting rod assembly, support arm and driving part, support plate is connected with furnace tube and has avoidance mouth, avoidance mouth is configured as exposing furnace mouth.Fixed support is set at the side of support plate away from furnace tube;The first end of support arm is connected with furnace door, the second end is rotatably connected with fixed support, and first rotation pair around first axis is formed.Connecting rod assembly includes at least two rotatably connected connecting rods, the first end of connecting rod assembly is rotatably connected with the second end of support arm, and second rotation pair around second axis is formed.The second end of connecting rod assembly is rotatably connected with fixed support, and third rotation pair around third axis is formed.Driving part drives the second end of connecting rod assembly to rotate, so that connecting rod assembly drives support arm to swing, to utilize furnace door to open and close avoidance mouth, improve the docking precision of furnace door to furnace mouth.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a furnace door opening and closing device and a reaction furnace. Background Technology

[0002] In semiconductor manufacturing thermal processing (such as diffusion and annealing), a wafer-loaded boat is typically transported into a furnace tube via a conveyor mechanism. The furnace tube contains a high-temperature process chamber, and the furnace opening is sealed by a matching door. Before the process starts, this door moves with the wafer boat to the furnace opening to complete the sealing; after the process ends, the door and the wafer boat move away from the furnace opening simultaneously to remove the processed wafer. To prevent heat from escaping from the high-temperature chamber while the furnace opening is open, causing energy waste, temperature fluctuations, or safety hazards, another backup furnace door must be immediately activated to quickly cover the furnace opening and maintain the stability of the chamber's thermal field.

[0003] However, existing backup furnace door opening and closing mechanisms have significant drawbacks: because the furnace opening area is constantly exposed to high-temperature environments (typically >600℃), it not only affects the service life of the drive components, but also makes the area near the furnace opening prone to deformation. This causes deformation or displacement of the movement path of the opening and closing mechanism installed near the furnace opening. This deformation will cause abnormal resistance to the furnace door during opening and closing, leading to problems such as jamming and poor movement. This not only reduces furnace door switching efficiency and prolongs the process cycle, but may also affect the temperature uniformity of the chamber due to continuous heat leakage, ultimately damaging wafer process quality and equipment reliability. Utility Model Content

[0004] The purpose of this invention is to provide a furnace door opening and closing device and a reaction furnace, so as to extend the service life of the drive components, reduce the probability of the furnace door opening and closing device being blocked due to thermal deformation, and improve the wafer process quality and equipment reliability.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A furnace door opening and closing device for a reactor, the reactor including a furnace tube and a furnace door, the furnace tube having a furnace opening, wherein the furnace door opening and closing device includes: a support plate connected to the furnace tube, the support plate having a clearance opening configured to expose the furnace opening; a fixing frame disposed on the side of the support plate opposite to the furnace tube; a support arm, a first end of the support arm being connected to the furnace door, and a second end being rotatably connected to the fixing frame, forming a first rotational joint about a first axis; a connecting rod assembly including at least two rotatably connected connecting rods, the first end of the connecting rod assembly being rotatably connected to the second end of the support arm, forming a second rotational joint about a second axis, the second end of the connecting rod assembly being rotatably connected to the fixing frame, forming a third rotational joint about a third axis; and a driving member configured to drive the second end of the connecting rod assembly to rotate about the third axis, such that the first end of the connecting rod assembly drives the support arm to swing about the first axis, thereby opening and closing the clearance opening of the furnace door.

[0007] As an optional embodiment of the furnace door opening and closing device, the linkage assembly includes: a first linkage, one end of which is rotatably connected to the fixed frame; and a second linkage, one end of which is rotatably connected to the second end of the support arm; wherein the other end of the first linkage is rotatably connected to the other end of the second linkage, forming a fourth rotational pair about a fourth axis, and the driving member is configured to drive the first linkage to rotate about the third axis.

[0008] As an optional embodiment of the furnace door opening and closing device, the support arm is configured to drive the furnace door to swing in a first plane to open and close the clearance opening; the linkage assembly includes: a third link, connected to the output end of the drive member and extending along a first straight line; wherein, the first straight line is perpendicular to the first plane, and the third link is configured such that the drive member and the support plate are spaced apart on the side away from the furnace tube.

[0009] As an optional embodiment of the furnace door opening and closing device, the driving component includes a linear driving component, the output end of which is rotatably connected to the third connecting rod via a spherical bearing; wherein, the linear driving component is configured to drive the spherical bearing to move in a second plane parallel to the first plane while driving the third connecting rod to rotate relative to the spherical bearing, thereby causing the second end of the connecting rod assembly to rotate around the third axis.

[0010] As an alternative to the furnace door opening and closing device, the furnace door opening and closing device further includes: a fixing seat, the fixing seat being configured to allow the drive element to be installed at intervals on the side of the support plate opposite to the furnace tube.

[0011] As an optional embodiment of the furnace door opening and closing device, the furnace door opening and closing device further includes: a first limiting member disposed on one side of the connecting rod assembly, the first limiting member being configured to limit a first extreme position of the connecting rod assembly so that the furnace door is in a closed position that completely closes the clearance opening; and / or, a second limiting member disposed on the other side of the connecting rod assembly, the second limiting member being configured to limit a second extreme position of the connecting rod assembly so that the furnace door is in an open position that fully opens the clearance opening.

[0012] As an optional embodiment of the furnace door opening and closing device, the first connecting rod and the fixed frame, the first connecting rod and the second connecting rod, the support arm and the fixed frame, and the second connecting rod and the support arm are all rotatably connected by bearing assemblies.

[0013] As an optional embodiment of the furnace door opening and closing device, the furnace door opening and closing device further includes: a shielding member, which covers the bearing assembly.

[0014] As an optional embodiment of the furnace door opening and closing device, the furnace door opening and closing device further includes: a first heat insulation member disposed between the driving member and the support plate, wherein the first heat insulation member is configured to separate the support plate and the driving member.

[0015] As an optional embodiment of the furnace door opening and closing device, the furnace door opening and closing device further includes: a second heat insulation member, disposed on the side of the fixing frame near the clearance opening, and configured to separate the fixing frame and the connecting rod assembly from the clearance opening; wherein, the second heat insulation member is provided with a notch for the support arm to move.

[0016] A reactor includes: a furnace tube; a furnace door; and a furnace door opening and closing device as described in any of the above embodiments, connecting the furnace tube and the furnace door, wherein the furnace door opening and closing device is configured to drive the furnace door to open and close the furnace opening.

[0017] The beneficial effects of this utility model are:

[0018] The furnace door opening and closing device provided by this utility model consists of a support plate connected to the furnace tube, with an avoidance opening on the support plate exposing the furnace opening. A fixed frame is installed on the side of the support plate away from the furnace tube. The furnace door is rotatably connected to the fixed frame via a support arm. A driving component drives the support arm to open and close the furnace door via a linkage assembly rotatably connected to the fixed frame. The fixed frame bears the weight of the furnace door, support arm, and linkage assembly. The fixed frame is spaced apart from the high-temperature furnace opening, reducing the impact of the furnace opening's high temperature on the fixed frame and significantly reducing the positional interference of the moving parts caused by the thermal deformation of the support plate. This ensures the stability of the movement path of the linkage assembly and support arm, ultimately ensuring precise alignment between the furnace door and the furnace opening, with the furnace door completely covering the furnace opening, ensuring uniform temperature in the chamber, and improving wafer process quality and equipment reliability. Simultaneously, the linkage assembly, composed of at least two rotatably connected linkages, is driven by a driving component to rotate the second end of the linkage assembly away from the support arm around a third axis. The second end of the linkage assembly then drives the support arm to swing around a first axis via the first end of the linkage assembly. The swinging of the support arm causes the furnace door to open and close the avoidance opening, thereby realizing the opening and closing of the furnace opening. This design not only extends the distance between the drive unit and the furnace opening to reduce heat radiation damage and increase the service life of the drive unit, but also effectively overcomes the jamming problem of traditional linear drive mechanisms by adaptively absorbing local thermal displacement through the flexible transmission chain formed by the linkage hinge. This further improves the docking accuracy between the furnace door and the furnace opening and reduces the probability that the furnace opening is not completely covered by the furnace door.

[0019] The reactor provided by this utility model includes a furnace tube, a furnace door, and the aforementioned furnace door opening and closing device. The furnace door opening and closing device connects the furnace tube and the furnace door, and drives the furnace door to open and close the furnace opening, thereby improving the docking accuracy between the furnace door and the furnace opening and extending the service life of the driving components. At the same time, it improves the furnace door switching efficiency, ensures the uniformity of the chamber temperature, and thus improves the wafer process quality and the reliability of the equipment. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of the reactor provided in a specific embodiment of this utility model;

[0021] Figure 2 This is a schematic diagram of the structure of the furnace tube and furnace door opening and closing device provided in a specific embodiment of this utility model;

[0022] Figure 3 This is a schematic diagram of the structure of the furnace door opening and closing device provided in a specific embodiment of the present invention when the furnace door is driven to the closed position;

[0023] Figure 4 This is a front view of the furnace door opening and closing device provided in a specific embodiment of the present invention when the furnace door is driven to the closed position;

[0024] Figure 5 This is a schematic diagram of the structure of the furnace door opening and closing device provided in a specific embodiment of the present invention when the furnace door is driven to the open position;

[0025] Figure 6 This is a front view of the furnace door opening and closing device provided in a specific embodiment of the present invention when the furnace door is driven to the open position;

[0026] Figure 7 This is an exploded schematic diagram of the furnace door opening and closing device provided in a specific embodiment of this utility model;

[0027] Figure 8 This is a schematic diagram of the structure of the furnace door opening and closing device provided in a specific embodiment of the present invention, which hides the fixing frame, the shielding component and the heat insulation component when the furnace door is driven to the closed position.

[0028] Figure 9 This is a schematic diagram of the structure of the furnace door opening and closing device provided in a specific embodiment of the present invention, which hides the fixing frame, the shielding component and the heat insulation component when the furnace door is driven to the open position.

[0029] In the picture:

[0030] 100. Rack;

[0031] 200. Furnace tube;

[0032] 300. Furnace door opening and closing device;

[0033] 400. Furnace door;

[0034] A1, First axis; A2, Second axis; A3, Third axis; A4, Fourth axis;

[0035] 1. Fixture; 11. First bearing assembly; 12. Second bearing assembly; 13. First bearing mounting hole; 14. Second bearing mounting hole;

[0036] 2. Linkage assembly; 21. First link; 211. First through hole; 212. Third bearing mounting hole; 213. Third connecting hole; 22. Second link; 221. Second connecting hole; 23. Third link; 24. Third bearing assembly; 25. Fourth bearing assembly;

[0037] 3. Support arm; 31. Connecting rod; 32. Connecting arm; 321. Second through hole; 322. Fourth bearing mounting hole;

[0038] 41. Cylinder; 42. Spherical plain bearing; 421. Support shaft; 422. Bearing section; 43. Magnetic switch;

[0039] 5. Support plate; 51. Clearance opening;

[0040] 6. Fixed base; 61. Fixed vertical plate; 62. Fixed horizontal plate; 63. Support frame;

[0041] 71. First limiting component; 72. Second limiting component; 73. Stop component;

[0042] 81. First heat insulation component; 811. Heat insulation vertical plate; 812. Heat insulation side plate; 82. Second heat insulation component; 821. Fixed section; 822. Shielding section; 8221. Notch;

[0043] 91. First blocking component; 92. Second blocking component; 93. Third blocking component. Detailed Implementation

[0044] To make the technical problem solved by this utility model, the technical solution adopted, and the technical effect achieved clearer, the technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0045] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0046] like Figure 1 and Figure 2 As shown, this embodiment provides a reactor, which is a horizontal semiconductor process equipment. It includes a furnace tube 200, a furnace door 400, and a furnace door opening / closing device 300. The furnace tube 200 is connected to the frame 100 of the semiconductor process equipment. For horizontal semiconductor process equipment, the furnace door opening / closing device 300 is fixed to the frame 100 of the clean bench. For vertical reactors, the furnace door opening / closing device 300 is fixed to the frame of the loading chamber.

[0047] The furnace tube 200 has a furnace opening, and the interior of the furnace tube 200 is a process chamber. A wafer-loaded boat is transported into the high-temperature process chamber by a transport mechanism, and the furnace opening is sealed by a door at one end of the transport mechanism. Before the process starts, the door moves with the wafer boat to the furnace opening to complete the sealing; after the process ends, the door moves away from the furnace opening synchronously with the wafer boat to remove the processed wafer. The furnace door opening and closing device 300 is configured to drive the furnace door 400 to close the furnace opening to maintain the thermal stability within the process chamber. When the next wafer-loaded boat is transported into the process chamber by the transport mechanism, the furnace door opening and closing device 300 drives the furnace door 400 to open the furnace opening.

[0048] The existing furnace door opening and closing device 300 is prone to deformation or displacement due to the long-term high temperature environment in the furnace mouth area. This causes abnormal resistance to the furnace door 400 during the opening and closing process, which in turn leads to problems such as jamming and poor movement.

[0049] To solve the above technical problems, such as Figures 3-7 As shown, this embodiment provides a furnace door opening and closing device 300, which includes a support plate 5, a fixing frame 1, a connecting rod assembly 2, a support arm 3, and a driving component. The support plate 5 is connected to the furnace tube 200 and fixed to the frame 100. The support plate 5 has a clearance opening 51, which is configured to expose the furnace opening. The fixing frame 1 is located on the side of the support plate 5 away from the furnace tube 200. The first end of the support arm 3 is connected to the furnace door 400, and the second end of the support arm 3 is rotatably connected to the fixing frame 1, forming a first rotating joint around a first axis A1. The connecting rod assembly 2 includes at least two rotatably connected connecting rods. The first end of the connecting rod assembly 2 is rotatably connected to the second end of the support arm 3, forming a second rotating joint around a second axis A2. The second end of the connecting rod assembly 2 is rotatably connected to the fixing frame 1, forming a third rotating joint around a third axis A3. The driving component is configured to drive the second end of the linkage assembly 2 to rotate around the third axis A3, causing the first end of the linkage assembly 2 to drive the support arm 3 to swing around the first axis A1, thereby opening and closing the clearance opening 51 using the furnace door 400. When the driving component drives the linkage assembly 2 to swing the support arm 3 around the first axis A1 in a first direction, and the support arm 3 drives the furnace door 400 to rotate until the furnace door 400 completely closes the clearance opening 51, the furnace opening can be completely closed. When the driving component drives the linkage assembly 2 to swing the support arm 3 around the first axis A1 in a second direction opposite to the first direction, and the support arm 3 drives the furnace door 400 to rotate until the furnace door 400 completely opens the clearance opening 51, the furnace opening can be completely opened.

[0050] It should be noted that, as Figure 9 As shown, the first axis A1 and the second axis A2 are parallel and spaced apart along the extension direction of the support arm 3. For example, the second axis A2 is located between the first axis A1 and the first end of the support arm 3; or the second axis A2 is located on the side of the first axis A1 away from the first end of the support arm 3.

[0051] By setting a fixing frame 1 on the side of the support plate 5 away from the furnace tube 200, the fixing frame 1 bears the weight of the furnace door 400, the support arm 3, and the connecting rod assembly 2. The fixing frame 1 is spaced apart from the high-temperature furnace opening, which reduces the impact of high temperature on the fixing frame 1 and significantly reduces the position interference of the moving parts caused by the thermal deformation of the support plate 5. This ensures that the movement path of the connecting rod assembly 2 and the support arm 3 remains stable, and ultimately ensures that the furnace door 400 opens and closes accurately, and the furnace opening is completely covered by the furnace door 400, ensuring the temperature uniformity of the process chamber and improving the wafer process quality and equipment reliability. At the same time, the connecting rod assembly 2, which is composed of at least two rotatably connected connecting rods, is driven by a drive component to rotate the second end of the connecting rod assembly 2 away from the support arm 3 around the third axis A3. Then, the second end of the connecting rod assembly 2 drives the support arm 3 to swing around the first axis A1 through the first end of the connecting rod assembly 2. The swing of the support arm 3 drives the furnace door 400 to open and close the clearance opening 51, thereby realizing the opening and closing of the furnace opening. This design not only extends the distance between the drive unit and the furnace opening to reduce heat radiation damage and increase the service life of the drive unit, but also effectively overcomes the jamming problem of traditional linear drive mechanisms by adaptively absorbing local thermal displacement through the flexible transmission chain formed by the linkage hinge. This further improves the docking accuracy between the furnace door 400 and the furnace opening and reduces the probability that the furnace opening is not completely covered by the furnace door 400.

[0052] To ensure the stability of the furnace door 400 support, such as Figure 3 and Figure 4 As shown, the support arm 3 includes a connecting arm 32 and multiple connecting rods 31 evenly distributed circumferentially along the furnace door 400. The inner end of each connecting rod 31 is connected to the central area of ​​the furnace door 400, and the outer end is fixed to the circumference of the furnace door 400 by fastening screws or plug-in connections. The connecting arm 32 extends radially from between two adjacent connecting rods 31 to the fixing frame 1 and is rotatably connected to the fixing frame 1. The circumferential even distribution and radial extension of the multiple connecting rods 31 significantly improve the symmetry and overall rigidity of the support. The ingenious positioning of the connecting arm 32 makes full use of the structural space and avoids interference with the connecting rods 31. Its radial extension optimizes the force transmission path, while the rotatable connection at the end effectively releases thermal stress or installation stress, prevents structural deformation, and together ensures the long-term stable operation of the furnace door 400 under complex working conditions.

[0053] In one embodiment, such as Figure 3 , Figure 4 and Figure 8As shown, the linkage assembly 2 includes a first linkage 21 and a second linkage 22. One end of the first linkage 21 is rotatably connected to the fixed frame 1, and one end of the second linkage 22 is rotatably connected to the second end of the support arm 3. The other ends of the first linkage 21 and the second linkage 22 are rotatably connected, forming a fourth revolute joint around a fourth axis A4. The driving component is configured to drive the first linkage 21 to rotate around a third axis A3. The linkage assembly 2, formed by the rotatable connection of the first linkage 21 and the second linkage 22, not only extends the distance between the driving component and the furnace opening to reduce heat radiation damage and increase the service life of the driving component, but also effectively overcomes the jamming problem of traditional linear drive mechanisms by adaptively absorbing local thermal displacement through the flexible transmission chain formed by the linkage hinge, further improving the precise docking of the furnace door 400 and the furnace opening.

[0054] For example, the driving component is connected to the middle of the first connecting rod 21. When the driving component drives the first connecting rod 21 to rotate, one end of the first connecting rod 21 rotates relative to the fixed frame 1 around the third axis A3, and the other end drives the second connecting rod 22 to rotate. The second connecting rod 22 drives the second end of the support arm 3 to swing around the first axis A1, and the first end of the support arm 3 drives the furnace door 400 to rotate. The driving force of the driving component is transmitted to the support arm 3 through two stages, and thermal deformation compensation redundancy is formed by extending the transmission chain. When the connecting rod assembly 2 and the support arm 3 are deformed by heat, the adaptive rotation of the hinge node can absorb the deformation, significantly reducing the impact of the thermal deformation of the support plate 5 on the displacement accuracy of the furnace door 400. Compared with the single-link structure, the lever transmission of the double-link disperses the concentration of thermal stress and can still maintain smooth motion characteristics in high-temperature environments, effectively avoiding the risk of jamming.

[0055] In other embodiments, a universal joint is added at the connection between the first end of the support arm 3 and the furnace door 400 to form three-dimensional motion redundancy and eliminate the coupling interference of assembly stress and thermal deformation.

[0056] In one embodiment, the first connecting rod 21 and the fixed frame 1, the first connecting rod 21 and the second connecting rod 22, the support arm 3 and the fixed frame 1, and the second connecting rod 22 and the support arm 3 are all rotatably connected by bearing assemblies. By using bearing assemblies to achieve rotatable connections, not only is the smoothness of rotation of each component improved, but also, under the impact conditions of opening and closing the furnace door 400, the bearing assemblies bear combined radial and axial loads, increasing the load-bearing capacity and thus enhancing the stability of the connecting rod assembly 2, the support arm 3, and the furnace door 400 support.

[0057] For example, such as Figure 6 and Figure 7 As shown, the first connecting rod 21 is rotatably connected to the fixed frame 1 through the first bearing assembly 11, and the support arm 3 is rotatably connected to the fixed frame 1 through the second bearing assembly 12. The first bearing assembly 11 and the second bearing assembly 12 both include a connecting shaft and two bearings, which are respectively located at both ends of the connecting shaft.

[0058] The fixed frame 1 has two first bearing mounting holes 13 opposite each other at one end near the first connecting rod 21, and two second bearing mounting holes 14 opposite each other at one end near the support arm 3. One end of the first connecting rod 21 has a first through hole 211, and the second end of the support arm 3 has a second through hole 321 and a fourth bearing mounting hole 322, with the fourth bearing mounting hole 322 located on the side of the second through hole 321 near the first end of the support arm 3. The connecting shaft of the first bearing assembly 11 passes through the first through hole 211, and the two bearings are respectively installed in the two first bearing mounting holes 13, with both ends of the connecting shaft interference-fitted with the inner holes of the two bearings. The connecting shaft of the second bearing assembly 12 passes through the second through hole 321, and the two bearings are respectively installed in the two second bearing mounting holes 14, with both ends of the connecting shaft interference-fitted with the inner holes of the two bearings.

[0059] The first link 21 and the second link 22 are connected by the third bearing assembly 24, and the second link 22 is connected to the support arm 3 by the fourth bearing assembly 25. Both the third bearing assembly 24 and the fourth bearing assembly 25 include a connecting shaft and a bearing located at one end of the connecting shaft. The other end of the connecting shaft is set as a stepped shaft.

[0060] The first connecting rod 21 has a third bearing mounting hole 212 at one end near the second connecting rod 22. The second connecting rod 22 has a first connecting hole (not shown) and a second connecting hole 221 at both ends. The bearing in the third bearing assembly 24 is mounted in the third bearing mounting hole 212. The small shaft at the other end of the connecting shaft is interference-fitted with the first connecting hole. The stepped face of the stepped shaft limits the movement of the second connecting rod 22 at the end near the first connecting rod 21. The bearing in the fourth bearing assembly 25 is mounted in the fourth bearing mounting hole 322. The small shaft at the other end of the connecting shaft is interference-fitted with the second connecting hole 221. The stepped face of the stepped shaft limits the movement of the second connecting rod 22 at the end away from the first connecting rod 21.

[0061] In one embodiment, the furnace door opening and closing device 300 further includes a shielding member that covers the bearing assembly. The shielding member is fixed to the connecting shaft or the fixing bracket 1 by fastening screws, and is used to shield the bearing, reducing the impact of particles generated by the bearing rotation on the cleanliness of the wafer.

[0062] For example, the shielding components include a first shielding component 91, a second shielding component 92, and a third shielding component 93. The length and width of the first shielding component 91 are adapted to the length and width of the fixing frame 1. Connecting the first shielding component 91 to the front side of the fixing frame 1 allows for simultaneous shielding of the first bearing assembly 11 and the second bearing assembly 12 located within the fixing frame 1. The second shielding component 92 covers the connection between the first connecting rod 21 and the second connecting rod 22, and is used to shield the third bearing assembly 24. The third shielding component 93 covers the connection between the second connecting rod 22 and the support arm 3, and is used to shield the fourth bearing assembly 25.

[0063] In one embodiment, such as Figure 3 , Figure 5 , Figure 8 and Figure 9 As shown, the furnace door opening and closing device 300 includes a first limiting member 71, which is located on one side of the connecting rod assembly 2. The first limiting member 71 is configured to limit the first extreme position of the connecting rod assembly 2, so that the furnace door 400 is in the closed position of the fully closed clearance opening 51. The furnace door opening and closing device 300 also includes a second limiting member 72, which is located on the other side of the connecting rod assembly 2. The second limiting member 72 is configured to limit the second extreme position of the connecting rod assembly 2, so that the furnace door 400 is in the open position of the fully opened clearance opening 51. By setting the first limiting member 71 and the second limiting member 72, the two extreme positions during the rotation of the connecting rod assembly 2 are limited, further improving the precise docking of the furnace door 400 and the furnace opening.

[0064] For example, the first limiting member 71 and the second limiting member 72 are respectively disposed on opposite sides of the first connecting rod 21. The first connecting rod 21 abuts against the first limiting member 71, which can limit the first limit position of the first connecting rod 21 so that the furnace door 400 completely closes the furnace opening. The first connecting rod 21 abuts against the second limiting member 72, which can limit the second limit position of the second connecting rod 22 so that the furnace door 400 fully opens the furnace opening. By setting rigid limiting members at the two limit positions of the first connecting rod 21, a bidirectional hard stop is formed, which further improves the positional accuracy of the opening and closing of the furnace door 400 and the tightness of the furnace opening seal. In addition, by directly limiting the first connecting rod 21, the positional error is reduced compared to setting the limiting at the support arm 3 or the clearance opening 51.

[0065] In one embodiment, the support arm 3 is configured to drive the furnace door 400 to swing within a first plane to open and close the clearance opening 51. The linkage assembly 2 includes a third link 23, which is connected to the output end of the drive member and extends along a first straight line. The first straight line is perpendicular to the first plane. The third link 23 is configured such that the drive member and the support plate 5 are spaced apart on the side opposite to the furnace tube 200 to avoid direct contact between the drive member and the support plate 5, reducing the heat transferred from the support plate 5 to the drive member, thereby reducing heat damage to the drive member in the furnace opening area and extending the service life of the drive member.

[0066] For example, one end of the third link 23 is fixedly connected to the third connecting hole 213 in the middle of the first link 21 by an interference fit or other means, and the other end extends in a direction perpendicular to the first plane (i.e., the plane where the support plate 5 is located) and connects to the drive component, so that the drive component does not contact the support plate 5 and reduces the impact of the heat of the support plate 5 on the drive component; the distance between the drive component and the support plate 5 is related to the length of the third link 23. In the design, the length of the third link 23 is designed according to the spatial layout and heat impact to ensure that after the third link 23 is connected to the drive component, the power transmission of the drive component does not interfere with other components, and at the same time, the impact of the heat of the support plate 5 on the drive component is reduced as much as possible to extend the service life of the drive component.

[0067] In one embodiment, the driving component includes a linear drive, the output end of which is rotatably connected to the third link 23 via a spherical bearing 42. The linear drive is configured to drive the spherical bearing 42 to move within a second plane parallel to the first plane, while simultaneously driving the third link 23 to rotate relative to the spherical bearing 42. This causes the second end of the link assembly 2 to rotate around the third axis A3, efficiently and directly converting the linear output of the linear drive into the required rotation for the third link 23, and precisely driving the second end of the link assembly 2 to rotate around the third axis A3. By precisely controlling the extension / retraction of the linear drive (i.e., the position of the spherical bearing 42 within the second plane), the rotation angle of the third link 23 can be precisely controlled, thereby precisely adjusting the rotation angle and position of the second end of the link assembly 2 around the third axis A3.

[0068] For example, the spherical plain bearing 42 includes a support shaft 421 and a bearing portion 422 disposed at one end of the support shaft 421. The support shaft 421 is connected to the drive end, and the other end of the third link 23 is rotatably connected to the bearing portion 422. The drive end of the linear drive member drives the support shaft 421 to move in the second plane, thereby causing the third link 23 to rotate relative to the spherical plain bearing 42. The rotation of the third link 23 causes the first link 21 to rotate, and the first link 21 drives the support arm 3 to rotate through the second link 22. In turn, the rotation of the support arm 3 causes the furnace door 400 to move.

[0069] To prevent the third link 23 from dislodging from the bearing portion 422, a stop 73 is connected to the end of the third link 23 that is away from the first link 21 after it passes through the bearing portion 422. The stop 73 abuts against the end of the bearing portion 422 of the spherical bearing 42 that is away from the first link 21, so as to prevent the third link 23 from dislodging from the bearing portion 422.

[0070] Precise displacement within the second plane is achieved by driving the spherical bearing 42 with a linear drive component. The support shaft 421 and bearing section 422 of the spherical bearing 42 decouple the linear motion into multi-degree-of-freedom rotation of the third link 23, ensuring efficient transmission of driving force while amplifying the motion stroke through the three-stage link. Simultaneously, the spherical bearing 42 forms a core node for thermal deformation compensation. When the support arm 3 or link assembly 2 expands due to heat, the spherical motion of the bearing section 422 can adaptively absorb radial and / or axial deformation, preventing the transmission chain from jamming.

[0071] For example, the linear drive is a cylinder 41. The piston rod of the cylinder 41 extends and retracts in the second plane. When the piston rod of the cylinder 41 extends, it drives the spherical bearing 42 to move upward. The spherical bearing 42 drives the first connecting rod 21 to rotate upward through the third connecting rod 23, which in turn drives the second connecting rod 22 to rotate upward. The second connecting rod 22 drives the furnace door 400 to move towards the clearance opening 51 through the support arm 3 until the furnace door 400 completely closes the clearance opening 51. At this time, the furnace door 400 is in the closed position. When the piston rod of the cylinder 41 retracts in the second plane, it drives the spherical bearing 42 to move downward. The spherical bearing 42 drives the first connecting rod 21 to rotate downward through the third connecting rod 23, which in turn drives the second connecting rod 22 to rotate downward. The second connecting rod 22 drives the furnace door 400 to move away from the clearance opening 51 through the support arm 3 until the furnace door 400 completely opens the clearance opening 51. At this time, the furnace door 400 is in the open position.

[0072] Specifically, the cylinder body of cylinder 41 is equipped with two magnetic switches 43. The two magnetic switches 43 are used to detect the highest and lowest positions of the piston rod bottom, respectively. When one magnetic switch 43 detects that the bottom of the piston rod is at the highest position, the furnace door 400 completely closes the clearance opening 51, and the furnace door 400 is in the closed position; cylinder 41 stops driving the piston rod to continue extending. When the other magnetic switch 43 detects that the bottom of the piston rod is at the lowest position, the furnace door 400 completely opens the clearance opening 51, and the furnace door 400 is in the open position; cylinder 41 stops driving the piston rod to continue retracting.

[0073] The communication connection between the magnetic switch 43 and the control unit of the cylinder 41 can be designed according to existing technology, which is not the focus of this embodiment and will not be elaborated here.

[0074] Of course, in other embodiments, the linear drive can also be other drive components such as a hydraulic cylinder or an electric actuator.

[0075] In one embodiment, the furnace door opening and closing device 300 further includes a fixing seat 6, which is configured to allow the driving component to be installed at intervals on the side of the support plate 5 away from the furnace tube 200, thereby achieving stable installation of the fixing seat 6 and the support plate 5 at intervals.

[0076] For example, the fixing base 6 includes a fixing vertical plate 61 and a fixing horizontal plate 62 vertically connected to one end of the fixing vertical plate 61. The fixing vertical plate 61 is connected to the support plate 5, and the fixing end of the driving component is installed on the fixing horizontal plate 62. By setting the fixing base 6, the spacing between the driving component and the support plate 5 is achieved, ensuring the stable installation of the driving component.

[0077] In one embodiment, the fixed base 6 further includes a support frame 63, which is installed on the fixed horizontal plate 62 by means of bolts or the like. The cylinder body of the cylinder 41 is fixed on the support frame 63 to raise the height of the cylinder 41, so as to ensure the connection between the third connecting rod 23 and the joint bearing 42 in the initial position.

[0078] In one embodiment, the furnace door opening and closing device 300 further includes a first heat insulation member 81, which is disposed between the drive member and the support plate 5. The first heat insulation member 81 is configured to separate the support plate 5 and the drive member, preventing heat from the furnace opening from being transferred to the drive member through the support plate 5; at the same time, when the furnace door 400 is fully opened, the first heat insulation member 81 can also separate the furnace door 400 from the drive member, preventing heat from the furnace door 400 from being transferred to the drive member, and further extending the service life of the drive member.

[0079] For example, the first heat insulation member 81 includes a heat insulation vertical plate 811 and two heat insulation side plates 812 disposed on opposite sides of the heat insulation vertical plate 811. The heat insulation vertical plate 811 is located between the driving member and the support plate 5, and the two heat insulation side plates 812 surround the opposite sides of the driving member to prevent heat impact between the support plate 5 and the furnace door 400. Further, the first heat insulation member 81 is disposed on a fixed horizontal plate 62, and the first heat insulation member 81 is spaced apart from the support plate 5 to leave space for the furnace door 400. By providing a limiting surface on the fixed horizontal plate 62, which abuts against the heat insulation vertical plate 811, the installation position of the first heat insulation member 81 is restricted.

[0080] In one embodiment, continue to refer to Figure 6 and Figure 7 The furnace door opening and closing device 300 also includes a second heat insulation member 82. The second heat insulation member 82 is located on the side of the fixed frame 1 near the clearance opening 51 and is configured to separate the fixed frame 1 and the connecting rod assembly 2 from the clearance opening 51. The second heat insulation member 82 has a notch 8221 for the support arm 3 to move. The second heat insulation member 82 is used to prevent the heat from the furnace opening from affecting the portion of the fixed frame 1 and the connecting rod assembly 2 that extends out of the fixed frame 1 during movement, reducing the probability of thermal deformation of the fixed frame 1 and the connecting rod assembly 2; at the same time, it reduces the probability of thermal deformation of the first bearing assembly 11, the second bearing assembly 12, the third bearing assembly 24, and the fourth bearing assembly 25, ensuring the smooth movement of the connecting rod assembly 2 and the support arm 3.

[0081] For example, the second heat insulation member 82 includes a fixed section 821 and a shielding section 822 bent in a direction perpendicular to the fixed section 821. The fixed section 821 is fixed to the support plate 5 by fastening screws and is located at one end of the fixing frame 1 near the relief opening 51. The shielding section 822 extends downward from one end of the fixing frame 1 along the circumference of the relief opening 51 to shield the heat from the furnace opening from being transferred to the fixing frame 1 and the portion of the connecting rod assembly 2 extending out of the fixing frame 1. A notch 8221 is located in the portion of the shielding section 822 located circumferentially in the relief opening 51 so that the connecting arm 32 can be rotatably connected to the fixing frame 1 through the notch 8221. The uppermost end of the notch 8221 is higher than the highest swing position of the connecting arm 32, and the lowermost end of the notch 8221 is provided through the end of the shielding section 822.

[0082] In one embodiment, the first limiting member 71, the second limiting member 72, the fixing base 6, and the second heat insulation member 82 are all provided with waist-shaped holes to facilitate position adjustment when connected to the support plate 5.

[0083] During initial installation, first install the fixing frame 1 at the designated position on the support plate 5. Then, connect the first end of the support arm 3 to the furnace door 400, and rotatably connect the second end of the support arm 3 to the second bearing mounting hole 14 on the fixing frame 1 via the second bearing assembly 12. Next, rotatably connect the first connecting rod 21 and the second connecting rod 22 via the third bearing assembly 24, and then rotatably connect the first connecting rod 21 to the first bearing mounting hole 13 on the fixing frame 1 via the first bearing assembly 11. Insert one end of the third connecting rod 23 into the third connecting hole 213. Then, determine the installation position of the fixing seat 6 according to the position of the other end of the third connecting rod 23, so as to align and connect the bearing part 422 of the spherical bearing 42 connected to the piston rod of the cylinder 41 with the other end of the third connecting rod 23. During this process, if the bearing part 422 and the third connecting rod 23 cannot be connected, the installation position of the fixing seat 6 can be adjusted. Similarly, after the bearing part 422 is connected to the third connecting rod 23, the specific installation positions of the first limiting member 71 and the second limiting member 72, as well as the specific installation position of the second heat insulation member 82, are determined through trial operation. This ensures that when the furnace door 400 is completely closed at the clearance opening 51, the first connecting rod 21 just abuts against the first limiting member 71; when the furnace door 400 is completely open at the clearance opening 51, the first connecting rod 21 just abuts against the second limiting member 72; and during the movement of the furnace door 400, the position of the second heat insulation member 82 will not interfere with the swing of the connecting arm 32. Therefore, the oblong holes on the first limiting member 71, the second limiting member 72, the fixing seat 6, and the second heat insulation member 82 make it easier to adjust their positions during installation to ensure precise alignment between the furnace door 400 and the furnace opening.

[0084] The reactor provided in this embodiment includes a furnace tube 200, a furnace door 400, and the aforementioned furnace door opening and closing device 300. The furnace door opening and closing device 300 connects the furnace tube 200 and the furnace door 400, and drives the furnace door 400 to open and close the furnace opening, thereby improving the docking accuracy between the furnace door 400 and the furnace opening and extending the service life of the driving components. At the same time, it improves the switching efficiency of the furnace door 400, ensures the uniformity of the chamber temperature, and thus improves the wafer process quality and the reliability of the equipment.

[0085] The above description is only a preferred embodiment of this utility model. For those skilled in the art, there will be changes in the specific implementation method and application scope based on the idea of ​​this utility model. The content of this specification should not be construed as a limitation of this utility model.

Claims

1. A furnace door opening and closing device, characterized by, For use in a reactor, the reactor includes a furnace tube (200) and a furnace door (400), the furnace tube (200) having a furnace opening, wherein the furnace door opening and closing device includes: A support plate (5) is connected to the furnace tube (200), the support plate (5) having a clearance opening (51) configured to expose the furnace opening; A fixing frame (1) is provided on the side of the support plate (5) away from the furnace tube (200); Support arm (3), the first end of the support arm (3) is connected to the furnace door (400), and the second end is rotatably connected to the fixed frame (1), forming a first rotating pair around the first axis (A1); The linkage assembly (2) includes at least two rotatably connected linkages. The first end of the linkage assembly (2) is rotatably connected to the second end of the support arm (3) and forms a second rotational joint about a second axis (A2). The second end of the linkage assembly (2) is rotatably connected to the fixed frame (1) and forms a third rotational joint about a third axis (A3). The drive element is configured to drive the second end of the linkage assembly (2) to rotate about the third axis (A3), such that the first end of the linkage assembly (2) drives the support arm (3) to swing about the first axis (A1) to open and close the clearance opening (51) using the furnace door (400).

2. The door opening and closing device according to claim 1, characterized in that, The link assembly (2) includes: The first connecting rod (21) is rotatably connected at one end to the fixed frame (1); The second link (22) is rotatably connected at one end to the second end of the support arm (3); The other end of the first link (21) is rotatably connected to the other end of the second link (22) to form a fourth rotational pair about a fourth axis (A4), and the driving member is configured to drive the first link (21) to rotate about the third axis (A3).

3. The furnace door opening and closing device according to claim 1, characterized in that, The support arm (3) is configured to drive the furnace door (400) to swing in a first plane to open and close the clearance opening (51); The link assembly (2) includes: The third link (23) is connected to the output end of the drive unit and extends along the first straight line; Wherein, the first straight line is perpendicular to the first plane, and the third link (23) is configured such that the drive member and the support plate (5) are spaced apart on the side away from the furnace tube (200).

4. The furnace door opening and closing device according to claim 3, characterized in that, The driving component includes a linear driving component, the output end of which is rotatably connected to the third link (23) via a spherical bearing (42); The linear drive is configured to drive the spherical bearing (42) to move in a second plane parallel to the first plane while driving the third link (23) to rotate relative to the spherical bearing (42), thereby causing the second end of the link assembly (2) to rotate around the third axis (A3).

5. The furnace door opening and closing device according to claim 1, characterized in that, The furnace door opening and closing device also includes: A mounting base (6) is configured such that the drive member is spaced apart on the side of the support plate (5) away from the furnace tube (200).

6. The furnace door opening and closing device according to claim 1, characterized in that, The furnace door opening and closing device also includes: A first limiting member (71) is provided on one side of the connecting rod assembly (2). The first limiting member (71) is configured to limit the first extreme position of the connecting rod assembly (2) so that the furnace door (400) is in a closed position that completely closes the clearance opening (51). And / or, a second limiting member (72) is provided on the other side of the linkage assembly (2), the second limiting member (72) being configured to limit the second extreme position of the linkage assembly (2) so that the furnace door (400) is in the open position of fully opening the clearance opening (51).

7. The furnace door opening and closing device according to claim 2, characterized in that, The first connecting rod (21) and the fixed frame (1), the first connecting rod (21) and the second connecting rod (22), the support arm (3) and the fixed frame (1), and the second connecting rod (22) and the support arm (3) are all rotatably connected by bearing assemblies.

8. The furnace door opening and closing device according to claim 7, characterized in that, The furnace door opening and closing device also includes: A shielding element is provided on the bearing assembly.

9. The furnace door opening and closing device according to any one of claims 1-8, characterized in that, The furnace door opening and closing device also includes: A first heat insulation element (81) is disposed between the drive member and the support plate (5), and the first heat insulation element (81) is configured to separate the support plate (5) and the drive member.

10. The furnace door opening and closing device according to any one of claims 1-8, characterized in that, The furnace door opening and closing device also includes: A second heat insulation element (82) is provided on the side of the fixing frame (1) near the clearance opening (51) and is configured to separate the fixing frame (1) and the connecting rod assembly (2) from the clearance opening (51); The second heat insulation component (82) is provided with a notch (8221) for the support arm (3) to move.

11. A reactor, characterized in that, include: Furnace tube (200); Furnace door (400); The furnace door opening and closing device according to any one of claims 1-10 connects the furnace tube (200) and the furnace door (400), and the furnace door opening and closing device is configured to drive the furnace door (400) to open and close the furnace opening.

Images