Cooling device and manual sintering apparatus

Abstract

The utility model discloses a cooling device relates to sintering equipment technical field, including cooling plate subassembly, cooling device, tray subassembly and temperature monitoring subassembly, tray subassembly sets up on cooling plate subassembly, and the tray subassembly is used for placing the product to be cooled, and cooling device is used for cooling the cooling plate subassembly, temperature monitoring subassembly includes temperature sensor, temperature controller and alarm, and temperature sensor is used for detecting the temperature of product to be cooled, and temperature sensor is connected with temperature controller signal, can with the temperature data transmission of detection to temperature controller, and the alarm is connected with temperature controller, when detecting product to be cooled and cooling to the preset temperature, the alarm alarms. The utility model discloses still provides a kind of manual sintering equipment, including the cooling device as described above. The utility model can effectively improve cooling efficiency, reduce cooling time, also can avoid the product oxidation caused by temperature not reaching preset temperature and taking out product.

Description

Technical Field

[0001] This utility model relates to the field of sintering equipment technology, and in particular to a cooling device and a manual sintering device. Background Technology

[0002] With the rise of third-generation semiconductors, silver sintering technology has been widely applied in the industry. Silver sintering equipment is an essential tool for realizing this process. Due to the high price of automated silver sintering equipment, companies or laboratories with limited budgets typically use manual silver sintering equipment. Currently, manual sintering equipment, due to space constraints, generally designs its cooling zone to allow the aluminum block to cool naturally in the air. For example, the Italian AMX P51 / P52 series manual sintering equipment places the AMB tray directly onto the aluminum block cooling platform for natural cooling, resulting in a slow cooling rate. Furthermore, during the cooling process, personnel cannot know when the cooling process is complete and the product can be removed. Removing the product before the designated cooling temperature is reached can easily lead to oxidation.

[0003] Therefore, a cooling device and a manual sintering apparatus are provided to solve the aforementioned problems existing in the prior art. Utility Model Content

[0004] The purpose of this invention is to provide a cooling device and a manual sintering equipment to solve the problems existing in the prior art. It can effectively improve cooling efficiency, reduce cooling time, and also prevent product oxidation caused by taking out the product before the preset temperature is reached.

[0005] To achieve the above objectives, this utility model provides the following solution:

[0006] This utility model provides a cooling device, including a cooling plate assembly, a cooling device, a tray assembly, and a temperature monitoring assembly. The tray assembly is disposed on the cooling plate assembly and is used to place a product to be cooled. The cooling device is used to cool the cooling plate assembly. The temperature monitoring assembly includes a temperature sensor, a temperature controller, and an alarm. The temperature sensor is used to detect the temperature of the product to be cooled and is signal-connected to the temperature controller, enabling the transmission of the detected temperature data to the temperature controller. The alarm is connected to the temperature controller and sounds an alarm when the product to be cooled is detected to have cooled to a preset temperature.

[0007] Preferably, the cooling device is a cooling fan, and the cooling fan is located below the cooling plate assembly.

[0008] Preferably, the cooling plate assembly includes a lower cooling plate and an upper cooling plate arranged sequentially from bottom to top. The upper cooling plate has a plurality of first cooling holes, and the lower cooling plate has a plurality of second cooling holes. The first cooling holes and the second cooling holes are used for the passage of cold air blown out by the cooling fan.

[0009] Preferably, both the upper cold plate and the lower cold plate are rectangular plates, and the upper cold plate has multiple rows of first cooling holes along its length, with adjacent rows of first cooling holes being staggered. The multiple second cooling holes on the lower cold plate are distributed in a honeycomb pattern.

[0010] Preferably, it also includes a connecting base plate, on which a support plate is provided, and the cooling fan and the cooling plate assembly are both disposed on the support plate.

[0011] Preferably, the tray assembly is a magnetic tray assembly, including a bottom tray and a pressure film sheet. The bottom tray is used to place the product to be cooled, and the pressure film sheet is used to press the protective film onto the product to be cooled. The bottom tray is made of magnet, and the pressure film sheet is made of magnetic steel sheet.

[0012] Preferably, the bottom tray is further provided with an air inlet and an exhaust outlet, which are respectively located on opposite sides of the bottom tray.

[0013] Preferably, both the air inlet and the air outlet are provided with multiple portions.

[0014] Preferably, the alarm is a buzzer.

[0015] This utility model also provides a manual sintering device, including the cooling device described above.

[0016] The present invention achieves the following technical advantages over the prior art:

[0017] This invention includes a cooling plate assembly, on which a tray assembly is placed for placing the product to be cooled. A cooling device is provided to cool the cooling plate assembly, thereby cooling the product. Compared to existing natural cooling methods, this effectively improves cooling efficiency and reduces cooling time. Furthermore, a temperature monitoring component is included to detect the temperature of the product to be cooled. When the product reaches a preset temperature, an alarm is triggered, reminding staff to remove the product. This effectively prevents product oxidation caused by removing the product before reaching the preset temperature, ensuring consistent operating standards among different personnel. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the cooling device in an embodiment of the present invention;

[0020] Figure 2 This is a schematic diagram of the upper cold plate in an embodiment of the present invention;

[0021] Figure 3 This is a schematic diagram of the lower cold plate in an embodiment of the present invention;

[0022] Figure 4 This is a schematic diagram of the bottom tray structure in an embodiment of the present invention;

[0023] Figure 5 This is a schematic diagram showing the arrangement of the vent holes in the bottom tray in an embodiment of this utility model;

[0024] Figure 6 This is a schematic diagram showing the arrangement of the air inlet hole on the bottom tray in an embodiment of this utility model;

[0025] Figure 7 This is a schematic diagram of the structure of the pressure sheet in an embodiment of the present invention;

[0026] Figure 8 This is a schematic diagram of the alarm device setup in an embodiment of this utility model.

[0027] Explanation of reference numerals in the attached drawings: 1-Connecting base plate; 2-Bearing plate; 3-Support frame; 4-Cooling fan; 5-Fan sheet metal; 6-Cooling plate assembly; 601-Upper cold plate; 602-First cooling hole; 603-Lower cold plate; 604-Second cooling hole; 7-Temperature sensor; 8-Tray assembly; 801-Bottom tray; 802-Exhaust hole; 803-Inlet hole; 804-Panicle pressure plate; 9-Thermostat; 10-Alarm. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0029] The purpose of this invention is to provide a cooling device and a manual sintering equipment to solve the problems existing in the prior art. It can effectively improve cooling efficiency, reduce cooling time, and also prevent product oxidation caused by taking out the product before the preset temperature is reached.

[0030] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0031] Example 1

[0032] like Figures 1-8 As shown, this embodiment provides a cooling device, mainly including a cooling plate assembly 6, a cooling device, a tray assembly 8, and a temperature monitoring component. The tray assembly 8 is disposed on the cooling plate assembly 6 and is used to place a product to be cooled, wherein the product to be cooled can be an AMB substrate. The cooling device is used to cool the cooling plate assembly 6, thereby cooling the product to be cooled. The temperature monitoring component includes a temperature sensor 7, a temperature controller 9, and an alarm 10. The temperature sensor 7 is used to detect the temperature of the product to be cooled, and the temperature sensor 7 is signal-connected to the temperature controller 9, enabling the transmission of the detected temperature data to the temperature controller 9. The alarm 10 is connected to the temperature controller 9, and when the product to be cooled is detected to have cooled to a preset temperature (e.g., 49°C), the alarm 10 sounds an alarm, reminding the staff to remove the product.

[0033] This embodiment includes a cooling plate assembly 6, on which a tray assembly 8 is placed for placing the product to be cooled. A cooling device is provided to cool the cooling plate assembly 6, thereby cooling the product. Compared with existing natural cooling methods, this effectively improves cooling efficiency and reduces cooling time. Furthermore, a temperature monitoring component is provided to detect the temperature of the product to be cooled. When the product is detected to have cooled to a preset temperature, an alarm is triggered to remind staff to remove the product. This effectively prevents product oxidation caused by removing the product before it reaches the preset temperature, ensuring that different personnel operate according to a unified standard.

[0034] In this embodiment, the cooling device is a cooling fan 4, and the cooling fan 4 is disposed below the cooling plate assembly 6.

[0035] In this embodiment, the cooling plate assembly 6 includes a lower cooling plate 603 and an upper cooling plate 601 arranged sequentially from bottom to top. The upper cooling plate 601 has a plurality of first cooling holes 602, and the lower cooling plate 603 has a plurality of second cooling holes 604. The cold air blown out by the cooling fan 4 can cool the product to be cooled through the second cooling holes 604 and the first cooling holes 602.

[0036] In a preferred embodiment, both the upper cold plate 601 and the lower cold plate 603 are rectangular plates, and the upper cold plate 601 has multiple rows of first cooling holes 602 arranged along its length, with adjacent rows of first cooling holes 602 staggered. The multiple second cooling holes 604 on the lower cold plate 603 are distributed in a honeycomb pattern, which allows the cold air blown by the cooling fan 4 to flow evenly to the upper cold plate 601, achieving uniform cooling of the product to be cooled. Moreover, combined with the cooling fan 4 below, the cooling efficiency can be greatly improved.

[0037] Alternatively, other cooling devices can be selected according to specific work needs. For example, a cooling channel can be set in the cooling plate, and circulating coolant or cooling water can be passed through the cooling channel for rapid cooling.

[0038] In this embodiment, a connecting base plate 1 is also included, on which a support plate 2 is provided. The cooling fan 4 is mounted on the support plate 2 via a fan sheet metal 5, and the cooling plate assembly 6 is mounted on the support plate 2 via a support frame 3.

[0039] In this embodiment, the tray assembly 8 is a magnetic tray assembly, including a bottom tray 801 and a pressure film sheet 804. The bottom tray 801 is used to place the product to be cooled, and the pressure film sheet 804 is used to press the protective film (specifically, a Teflon protective film) onto the product to be cooled. The bottom tray 801 is made of a magnet, and the pressure film sheet 804 is made of a magnetic steel sheet. Through the cooperation of the magnet and the magnetic steel sheet, magnetic pressure film is achieved. Compared with the traditional AMB tray cover that uses a snap ring structure for pressure film, which requires a wrench for installation and removal, this embodiment does not require a wrench. The protective film can be removed by manually removing the magnetic steel sheet, which is convenient for personnel operation and greatly shortens the operation time.

[0040] Furthermore, as a preferred embodiment, the bottom tray 801 is made of a high-temperature resistant magnet (e.g., a high-temperature resistant AlNiCo magnet), and the pressure film 804 is made of a high-temperature resistant special magnetic composite material steel sheet (e.g., a Q235 low-carbon steel sheet with a nano-coating). This improves the high-temperature resistance and avoids the problem that traditional AMB tray covers are prone to deformation under long-term high temperatures, resulting in the protective film not being pressed tightly and causing oxidation of the AMB substrate.

[0041] In this embodiment, the bottom tray 801 is also provided with an air inlet 803 and an exhaust outlet 802. The air inlet 803 and the exhaust outlet 802 are respectively provided on opposite sides of the bottom tray 801, which makes the exhaust more smooth and less prone to blockage, avoids oxidation of the AMB substrate, and solves the problem of poor exhaust when the air outlet and air inlet pipe are located on the same side on the traditional AMB tray.

[0042] The air inlet 803 and the exhaust outlet 802 are provided in multiple ways. In a preferred embodiment, the air inlet 803 can be provided in two ways, and the exhaust outlet 802 can be provided in six ways.

[0043] In this embodiment, the alarm 10 can be selected according to specific working needs, for example, it can be a buzzer.

[0044] In this embodiment, the cooling device is applied to the Archimedes Semiconductor AMX P51 equipment. The actual measured time required for the tooling temperature to drop from 260°C to 50°C, the time for installing and removing the top cover, and the automatic alarm function are as follows:

[0045] 1. The original design required 900 seconds for cooling, while this embodiment only requires 300 seconds, improving efficiency by 66.7%;

[0046] 2. When the temperature drops to 49℃, the buzzer will automatically sound an alarm.

[0047] 3. The temperature of the cooling device is displayed in real time;

[0048] 4. The original design used a snap-on design, requiring a wrench to install and remove the top cover, with the total process taking no less than 120 seconds. In this embodiment, the magnetic pressure film structure takes only 10 seconds, improving efficiency by 91.6%.

[0049] This embodiment also provides a manual sintering device, including the cooling device described above.

[0050] This utility model uses specific examples to illustrate its principles and implementation methods. The above description of the embodiments is only for the purpose of helping to understand the method and core idea of ​​this utility model. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the idea of ​​this utility model. In summary, the content of this specification should not be construed as a limitation of this utility model.

Claims

1. A cooling device, characterized in that: The device includes a cooling plate assembly, a cooling device, a tray assembly, and a temperature monitoring assembly. The tray assembly is disposed on the cooling plate assembly and is used to place the product to be cooled. The cooling device is used to cool the cooling plate assembly. The temperature monitoring assembly includes a temperature sensor, a temperature controller, and an alarm. The temperature sensor is used to detect the temperature of the product to be cooled and is signal-connected to the temperature controller, enabling it to transmit the detected temperature data to the temperature controller. The alarm is connected to the temperature controller and sounds an alarm when it detects that the product to be cooled has cooled to a preset temperature.

2. The cooling device according to claim 1, characterized in that: The cooling device is a cooling fan, and the cooling fan is located below the cooling plate assembly.

3. The cooling device according to claim 2, characterized in that: The cooling plate assembly includes a lower cooling plate and an upper cooling plate arranged sequentially from bottom to top. The upper cooling plate has a plurality of first cooling holes, and the lower cooling plate has a plurality of second cooling holes. The first cooling holes and the second cooling holes are used for the passage of cold air blown out by the cooling fan.

4. The cooling device according to claim 3, characterized in that: Both the upper and lower cold plates are rectangular plates, and the upper cold plate has multiple rows of first cooling holes along its length, with adjacent rows of first cooling holes staggered. The lower cold plate has multiple second cooling holes distributed in a honeycomb pattern.

5. The cooling device according to any one of claims 2-4, characterized in that: It also includes a connecting base plate, on which a support plate is provided, and the cooling fan and the cooling plate assembly are both disposed on the support plate.

6. The cooling device according to claim 1, characterized in that: The tray assembly is a magnetic tray assembly, including a bottom tray and a pressure film sheet. The bottom tray is used to place the product to be cooled, and the pressure film sheet is used to press the protective film onto the product to be cooled. The bottom tray is made of magnet, and the pressure film sheet is made of magnetic steel sheet.

7. The cooling device according to claim 6, characterized in that: The bottom tray is also provided with an air inlet and an exhaust outlet, which are respectively located on opposite sides of the bottom tray.

8. The cooling device according to claim 7, characterized in that: Both the air inlet and the air outlet are provided with multiple ports.

9. The cooling device according to claim 1, characterized in that: The alarm is a buzzer.

10. A manual sintering device, characterized in that: Includes the cooling device as described in any one of claims 1-9.

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