A single wafer detection fixture
By designing a single-wafer inspection fixture that includes a fixed support, a positioning support, a guide rod, and an elastic element, the problem of unstable inspection position and decreased accuracy caused by unstable manual clamping during single-wafer inspection is solved, achieving higher inspection reliability and accuracy.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- ZHUHAI WEIZHAO SEMICONDUCTOR CO LTD
- Filing Date
- 2025-08-28
- Publication Date
- 2026-06-26
AI Technical Summary
In the semiconductor manufacturing process, individual wafers are small in size, thin in thickness and fragile. When manually clamped and inspected, they are prone to displacement or uneven force, resulting in unstable inspection position and reduced test accuracy.
A single wafer inspection fixture was designed, including a fixed support, a positioning support, a guide rod, and an elastic element. The elastic potential energy of the elastic element drives the clamping block to abut against the working recess, thereby achieving stable clamping of the single wafer and avoiding displacement and deviation during the inspection process.
It improves the reliability and accuracy of single wafer inspection, ensures the stability of the inspection position, and reduces the risk of wafer side chipping.
Smart Images
Figure CN224419251U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor equipment technology, and specifically to a single wafer inspection fixture. Background Technology
[0002] In semiconductor manufacturing, after a series of technical processes, silicon wafers need to be cut into individual wafers through dicing processes (such as wafer dicing, wafer thinning, and slitting) for subsequent processing, packaging, and application. After the entire wafer is diced, the quality inspection of individual wafers is particularly critical. In particular, the quality of the side edges (such as chipping, cracks, burrs, and stress defects) directly affects the reliability of subsequent packaging and device performance. However, in the actual inspection process, individual wafers are small in size, thin in thickness, and fragile. During manual clamping and inspection, they are prone to displacement or uneven force, which can lead to unstable inspection positions or decreased test accuracy. Utility Model Content
[0003] In view of this, this application provides a single wafer inspection fixture to solve the aforementioned technical problems.
[0004] In a first aspect, embodiments of this application disclose a single-wafer inspection fixture for measuring and inspecting the morphological quality of a single wafer. The fixture includes a fixed support, a positioning support, a guide rod, and an elastic element. The fixed support has a movable slot, the positioning support is connected within the movable slot, and the guide rod is connected to the fixed support and passes through the movable slot and the positioning support, supporting and guiding the positioning support's movement within the movable slot. The elastic element is arranged opposite to each other on the positioning support within the movable slot, with one end of the elastic element away from the positioning support abutting against the inner wall of the movable slot away from the positioning support. The fixed support has a working recess at its top, one side of which is connected to the opening of the movable slot. The positioning support has a clamping block corresponding to the working recess, the clamping block being driven by the elastic potential energy of the elastic element to abut against the side wall of the working recess.
[0005] In one possible example, the clamping block is integrally connected to the side of the positioning support facing the working recess, and the top of the clamping block and the positioning support are located on the same plane.
[0006] In one possible example, the clamping block is located on the same plane as the top of the fixed support on the working recess.
[0007] In one possible example, a telescopic rod is provided on one side of the fixed support. One end of the telescopic rod is inserted into the movable groove and threadedly fixed to the positioning support. The other end of the telescopic rod has an operating nut on the outside of the fixed support.
[0008] In one possible example, the side of the positioning support away from the telescopic rod maintains a predetermined distance from the inner wall of the movable groove on the side away from the positioning support.
[0009] In one possible example, one side of the fixed support is provided with a positioning through hole communicating with the movable slot, and the telescopic rod is matched in the positioning through hole.
[0010] In one possible example, the positioning support has a positioning blind hole on the side opposite to the telescopic rod, and part of the elastic element is connected in the positioning blind hole.
[0011] In one possible example, both the end of the clamping block and the sidewall of the working recess are provided with an elastic buffer coating.
[0012] In one possible example, one side of the fixed support is provided with a guide hole communicating with the movable groove, and the guide rod is fixed in the guide hole.
[0013] In one possible example, the guide rod, the elastic element, and the telescopic rod are parallel to each other.
[0014] In summary, compared with the prior art, this application discloses a single wafer inspection fixture, including a fixed support, a positioning support, a guide rod, and an elastic element. The fixed support has a movable groove for accommodating the positioning support. The guide rod is connected to the fixed support and passes through the movable groove and the positioning support. The elastic element is arranged opposite to the positioning support in the movable groove, and the end of the elastic element away from the positioning support abuts against the inner wall of the movable groove away from the positioning support. The top of the fixed support has a working recess, one side of which is connected to the opening of the movable groove. The positioning support has a clamping block corresponding to the working recess. The clamping block is driven by the elastic potential energy of the elastic element to abut against the side wall of the working recess. Thus, the reliability of single wafer inspection is improved through the above configuration. Attached Figure Description
[0015] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0016] Figure 1 This is a three-dimensional structural schematic diagram of the single-wafer inspection fixture of this application;
[0017] Figure 2 This is an exploded view of the single-wafer inspection fixture of this application;
[0018] Figure 3 This is a top view of the single-wafer inspection fixture of this application. Detailed Implementation
[0019] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this application. Rather, they are merely examples of apparatuses and methods consistent with some aspects of this application as detailed in the claims.
[0020] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element. Furthermore, components, features, and elements with the same names in different embodiments of this application may have the same meaning or different meanings, the specific meaning of which must be determined by its interpretation in that specific embodiment or further in conjunction with the context of that specific embodiment.
[0021] It should be understood that the specific embodiments described herein are merely illustrative of this application and are not intended to limit this application.
[0022] In the following description, the use of suffixes such as "module," "part," or "unit" to denote elements is solely for the purpose of illustrative purposes and has no specific meaning in itself. Therefore, "module," "part," or "unit" may be used interchangeably.
[0023] In the description of this application, it should be noted that the terms "upper," "lower," "left," "right," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0024] The technical solutions shown in this application will be described in detail below through specific embodiments. It should be noted that the order of description of the following embodiments is not intended to limit the priority of the embodiments.
[0025] Please refer to Figures 1 to 3 The single-wafer inspection fixture of this application is used to measure and inspect the morphological quality of a single wafer 5, and includes a fixed support 1, a positioning support 2, a guide rod 3 and an elastic element 4.
[0026] In the specific implementation process, the fixed support 1 is provided with a movable groove 11 to accommodate the positioning support 2, the guide rod 3 and the elastic element 4.
[0027] The positioning support 2 is connected inside the movable groove 11, and the guide rod 3 is connected to the fixed support 1 and passes through the movable groove 11 and the positioning support 2, so as to support and guide the positioning support 2 to move inside the movable groove 11.
[0028] The elastic element 4 is arranged opposite to the positioning support 2 in the movable groove 11, and the end of the elastic element 4 away from the positioning support 2 abuts against the inner wall of the movable groove 11 away from the positioning support 2. The top of the fixed support 1 is provided with a working recess 12, one side of the working recess 12 is connected to the groove opening of the movable groove 11, and the positioning support 2 is provided with a clamping block 21 corresponding to the working recess 12. The clamping block 21 is driven by the elastic potential energy of the elastic element 4 to abut against the side wall of the working recess 12.
[0029] During the operation of the single wafer inspection fixture, the elastic potential energy of the elastic element 4 can be overcome, causing the positioning support 2 to compress the elastic element 4 along the axial direction of the guide rod 3 within the movable groove 11. This maintains a clamping gap between the clamping block 21 and the working recess 12, allowing the single wafer 5 to be placed within this gap. When the pressure on the elastic element 4 is released, the positioning support 2 rebounds along the axial direction of the guide rod 3 within the movable groove 11, and the single wafer 5 is clamped and fixed by the clamping block 21 and the working recess 12. This prevents displacement or deviation during the measurement and inspection of the single wafer 5, ensuring a stable inspection position for the single wafer 5 and improving its inspection accuracy.
[0030] It should be noted that the clamping block 21 and the working recess 12 clamp the side of a portion of the single wafer 5, thereby exposing most of the other structures of the single wafer 5, so as to facilitate the inspection of its morphology, such as chipping, cracks, burrs and stress defects.
[0031] In one possible implementation, a telescopic rod 6 is provided on one side of the fixed support 1. One end of the telescopic rod 6 is inserted into the movable groove 11 and then threadedly fixed to the positioning support 2. The other end of the telescopic rod 6 has an operating nut 61 on the outside of the fixed support 1. Thus, by pushing the operating nut 61, the positioning support 2 is driven to compress the elastic element 4 along the axial direction of the guide rod 3 in the movable groove 11, so that a clamping gap is maintained between the clamping block 21 and the working recess 12, so as to prevent the single wafer 5 from being clamped.
[0032] Preferably, one side of the fixed support 1 is provided with a positioning through hole 13 that communicates with the movable groove 11, and the telescopic rod 6 is matched in the positioning through hole 13, thereby preventing the radial displacement of the telescopic rod 6.
[0033] The positioning support 2 is positioned at a predetermined distance from the side of the telescopic rod 6 and the inner wall of the movable groove 11 away from the positioning support 2, so as to provide a predetermined stroke for the positioning support 2 to move along the axial direction of the guide rod 3 in the movable groove 11, and also to facilitate the compression and release of the elastic element 4.
[0034] Preferably, the positioning support 2 has a positioning blind hole 22 on the side opposite to the telescopic rod 6, and part of the elastic element 4 is connected in the positioning blind hole 22 to fix the elastic element 4 so as to provide stable elastic buffer.
[0035] Optionally, the positioning blind hole 22 is filled with a fixing adhesive layer, and the elastic element 4 includes a metal spring.
[0036] In one example, the clamping block 21 is integrally connected to the side of the positioning support 2 facing the working recess 12, and the top of the clamping block 21 and the top of the positioning support 2 are located on the same plane to ensure that the top structure of the inspection fixture is flat and to avoid interference structures that would affect the morphology inspection of the single wafer 5 after clamping it.
[0037] To further ensure the morphology inspection effect of a single wafer 5, the clamping block 21 is located on the same plane as the top of the fixed support 1 on the working recess 12. That is, the top of the inspection fixture can be regarded as a plane, thereby highlighting the single wafer 5.
[0038] Furthermore, the clamping block 21 and the working recess 12 are parallel to each other on their facing sides, thereby ensuring stable clamping action and avoiding uneven force on a single wafer 5.
[0039] Preferably, the end of the clamping block 21 and the side wall of the working recess 12 are provided with an elastic buffer coating to absorb excess stress during clamping and further reduce the risk of wafer side breakage.
[0040] In one example, a guide hole 14 communicating with the movable groove 11 is provided on one side of the fixed support 1, and the guide rod 3 is fixed in the guide hole 14, thereby enhancing the positioning stability of the guide rod 3.
[0041] Preferably, the guide rod 3, the elastic element 4, and the telescopic tie rod 6 are parallel to each other, thereby ensuring that the positioning support 2 moves smoothly and stably along the axial direction of the guide rod 3 within the movable groove 11.
[0042] The present application has been described in detail above. Specific examples have been used to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only for the purpose of helping to understand the core ideas of the present application. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the ideas of the present application. Therefore, the content of this specification should not be construed as a limitation of the present application.
Claims
1. A single-wafer inspection fixture, used to measure and inspect the morphology quality of a single wafer, characterized in that: The device includes a fixed support, a positioning support, a guide rod, and an elastic element. The fixed support has a movable groove, and the positioning support is connected within the movable groove. The guide rod is connected to the fixed support and passes through both the movable groove and the positioning support, supporting and guiding the positioning support's movement within the movable groove. The elastic element is arranged opposite to the positioning support within the movable groove, with one end of the elastic element away from the positioning support abutting against the inner wall of the movable groove on the side away from the positioning support. The fixed support has a working recess at its top, one side of which is connected to the opening of the movable groove. The positioning support has a clamping block corresponding to the working recess, which is driven by the elastic potential energy of the elastic element to abut against the side wall of the working recess.
2. The single-wafer inspection fixture as described in claim 1, characterized in that, The clamping block is integrally connected to the side of the positioning support facing the working recess, and the top of the clamping block and the top of the positioning support are located on the same plane.
3. The single-wafer inspection fixture as described in claim 1, characterized in that, The clamping block is located on the same plane as the top of the fixed support on the working recess.
4. The single-wafer inspection fixture as described in claim 1, characterized in that, A telescopic rod is provided on one side of the fixed support. One end of the telescopic rod is inserted into the movable groove and then threadedly fixed to the positioning support. The other end of the telescopic rod has an operating nut on the outside of the fixed support.
5. The single-wafer inspection fixture as described in claim 4, characterized in that, The side of the positioning support away from the telescopic rod maintains a preset distance from the inner wall of the movable groove on the side away from the positioning support.
6. The single-wafer inspection fixture as described in claim 4, characterized in that, The fixed support has a positioning through hole on one side that connects to the movable groove, and the telescopic rod is matched in the positioning through hole.
7. The single-wafer inspection fixture as described in claim 4, characterized in that, The positioning support has a positioning blind hole on the side opposite to the telescopic rod, and part of the elastic element is connected in the positioning blind hole.
8. The single-wafer inspection fixture as described in claim 1, characterized in that, Both the end of the clamping block and the side wall of the working recess are provided with an elastic buffer coating.
9. The single-wafer inspection fixture as described in claim 1, characterized in that, The fixed support has a guide hole on one side that connects to the movable groove, and the guide rod is fixed in the guide hole.
10. The single-wafer inspection fixture as described in claim 4, characterized in that, The guide rod, the elastic element, and the telescopic rod are parallel to each other.