A magnetron sputtering coating equipment

Abstract

This application relates to the field of sputtering coating and provides a magnetron sputtering coating apparatus, including a cavity, a cage, and a drive assembly. A splined magnetofluid and a first bearing are located at the top of the cavity, with the splined magnetofluid and the first bearing mounted coaxially. A second bearing is located at the bottom of the cavity. The cage has a first fixed shaft and a second fixed shaft at its axial ends, respectively. The first fixed shaft has a splined hole in the middle, and the splined shaft of the splined magnetofluid is adapted to be coaxially inserted into the splined hole. The outer journal of the first fixed shaft is rotatably supported by the inner ring of the first bearing, and the second fixed shaft is rotatably supported by the second bearing. This application mounts the drive assembly above the cavity, completely changing the traditional bottom-driven design that requires complex disassembly from below the cavity. This facilitates the maintenance and replacement of the drive assembly and the splined magnetofluid, improving maintenance efficiency. Furthermore, the drive assembly drives the first bearing and the cage from the top, optimizing the power transmission path and enabling stable operation under lower loads with lower energy consumption.

Description

Technical Field

[0001] This utility model relates to the field of magnetron sputtering coating, and further to a magnetron sputtering coating device. Background Technology

[0002] In existing magnetron sputtering coating equipment, the drive assembly is located below the cage. When the drive assembly starts and rotates the cage, the space below is extremely confined, making it difficult for operators to observe and monitor the area. Any inspection, maintenance, or disassembly of the components below typically requires climbing into that narrow space, which not only greatly inconveniences maintenance work but also increases the difficulty and risk of operation. Even more problematic is that in such cases, the entire cage usually needs to be disassembled before further maintenance can be carried out, undoubtedly reducing the equipment's maintenance efficiency. Furthermore, since the cage's load is mainly concentrated at the bottom, driving the cage from below requires more force, which to some extent increases the energy consumption and the burden on the drive system during equipment operation, thus affecting the overall performance and operational economy of the equipment. Utility Model Content

[0003] To address the aforementioned technical problems, the purpose of this utility model is to provide a magnetron sputtering coating device that installs the drive assembly above the cavity, completely changing the traditional bottom drive method which requires complex disassembly from below the cavity. This facilitates the maintenance and replacement of the drive assembly and spline magnetofluid, improving maintenance efficiency. Furthermore, the drive assembly drives the first bearing and cage to rotate from the top, optimizing the power transmission path and enabling stable operation under lower loads with lower energy consumption.

[0004] To achieve the above objectives, this utility model provides a magnetron sputtering coating device, including a cavity, a cage, and a drive assembly. The top of the cavity is provided with a spline magnetofluid and a first bearing, the spline magnetofluid and the first bearing are coaxially mounted, and the bottom of the cavity is provided with a second bearing.

[0005] The cage is provided with a first fixed shaft and a second fixed shaft at its two axial ends respectively. The first fixed shaft is provided with a spline hole in the middle. The spline shaft of the spline magnetofluid is adapted to be coaxially inserted into the spline hole. The outer journal of the first fixed shaft is rotatably supported by the inner ring of the first bearing for transmission and engagement. The second fixed shaft is rotatably supported by the second bearing.

[0006] The drive assembly is disposed above the cavity and drives the spline shaft connected to the spline magnetofluid to rotate, thereby driving the first fixed shaft and the cage to rotate synchronously through the spline shaft.

[0007] In some embodiments, the top of the cavity is provided with a spindle cover, the spindle cover is provided with an axially through first channel, the spline magnetic fluid is detachably installed in the first channel, and the spline shaft of the spline magnetic fluid is adapted to pass through the first channel and engage with the spline hole of the first fixed shaft.

[0008] In some embodiments, the spline magnetorheological fluid is adapted to be disposed in the first channel and fixedly connected to the spindle cover by a detachable locking member;

[0009] The drive assembly includes a drive component, a timing belt, and a timing pulley. The timing pulley is fixed to the top of the spline shaft of the spline magnetic fluid, and the drive component drives the timing pulley through the timing belt.

[0010] In some embodiments, the top of the cavity is further provided with an upper obstruction plate, which is fixed below the spindle cover and has a second channel. The second channel has an installation groove, and the first bearing is disposed in the installation groove. The spindle cover is fixedly disposed above the second channel. The bottom of the spindle cover is provided with an annular pressing block, which abuts against the top end face of the outer ring of the first bearing to achieve axial positioning of the outer ring of the first bearing.

[0011] In some embodiments, the spline shaft of the splined magnetic fluid is provided with a third channel extending through it, the third channel connecting to the interior of the cavity, and a film thickness gauge crystal oscillator system is provided in the third channel for real-time monitoring of film thickness.

[0012] In some embodiments, a crystal-controlled slip ring is provided above the spline shaft of the splined magnetofluid. The crystal-controlled slip ring is adapted to be electrically connected to the crystal oscillator system of the film thickness gauge. The outer ring of the crystal-controlled slip ring is fixedly connected to the synchronous pulley of the drive assembly and rotates synchronously with it. The inner ring of the crystal-controlled slip ring is fixedly connected to the spindle cover and remains stationary with it.

[0013] In some embodiments, the outer side of the crystal-controlled slip ring is further provided with a fixed seat and a pair of fixed rods, and the pair of fixed rods are fixedly connected to the fixed seat and the synchronous pulley along the cavity axis;

[0014] The top of the crystal-controlled slip ring is also provided with a fixing plate and a fixing post. The fixing plate is fixedly connected to the inner ring of the crystal-controlled slip ring, and the fixing post is fixedly connected to the fixing plate and the main shaft cover of the cavity along the axial direction of the cavity.

[0015] In some embodiments, a crystal sensing bracket and a photoelectric sensor are also included. The crystal sensing bracket is fixed to the top of the synchronous pulley, and the photoelectric sensor is fixed to the spindle cover by a fixing block and corresponds to the crystal sensing bracket.

[0016] In some embodiments, the bottom of the cavity is provided with a lower obstruction plate, and the lower obstruction plate is provided with a second bearing, the inner ring of the second bearing being connected to the second fixed shaft.

[0017] In some embodiments, the first bearing is a cylindrical roller bearing and the second bearing is a crossed roller bearing.

[0018] Compared with the prior art, the magnetron sputtering coating equipment provided by this utility model has at least one of the following beneficial effects:

[0019] 1. By mounting the drive assembly above the cavity, the traditional bottom drive requires complex disassembly from below the cavity, which is a major obstacle. This makes it easier to maintain and replace the drive assembly and spline magnetofluid, improving maintenance efficiency. Moreover, the drive assembly drives the first bearing and cage to rotate from the top, optimizing the power transmission path and enabling stable operation at lower loads with lower energy consumption.

[0020] 2. The spline magnetofluid can be detachably installed in the first channel, making operation extremely simple, fast, and safe, minimizing equipment downtime, significantly reducing maintenance costs and risks, and providing convenience during equipment maintenance and repair.

[0021] 3. An annular pressing block is set at the bottom of the spindle cover and is made to abut tightly against the top end face of the first bearing outer ring, thereby achieving axial positioning of the first bearing outer ring. This not only ensures accurate positioning of the bearing outer ring during installation, but also effectively prevents axial movement of the bearing outer ring due to vibration and rotation during equipment operation.

[0022] 4. The spline shaft is suitable for installing a film thickness gauge crystal oscillator system, which facilitates real-time film thickness detection. It cleverly utilizes the internal space of the spline shaft, solving the problem that traditional equipment cannot install a film thickness gauge crystal oscillator system inside the cavity due to limited bottom space, and achieves a high degree of functional integration and optimized layout.

[0023] 5. The outer ring of the crystal control slip ring is firmly connected to the synchronous pulley of the drive assembly and rotates synchronously with the rotation of the synchronous pulley. The inner ring of the crystal control slip ring is fixedly connected to the main shaft cover and remains stationary with the main shaft cover. This allows the crystal control slip ring to establish a stable electrical connection between the rotating drive assembly and the stationary main shaft cover, ensuring that the signal of the film thickness gauge crystal oscillator system can be accurately transmitted to the control center. Attached Figure Description

[0024] The preferred embodiments will be described below in a clear and easy-to-understand manner, in conjunction with the accompanying drawings, to further explain the above-mentioned characteristics, technical features, advantages and implementation methods of this utility model.

[0025] Figure 1 This is an overall diagram of the magnetron sputtering coating equipment;

[0026] Figure 2 This is an overall cross-sectional view of the magnetron sputtering coating equipment;

[0027] Figure 3 It is a cross-sectional view of the top of the cavity;

[0028] Figure 4 It is a cross-sectional view of the bottom of the cavity;

[0029] Figure 5 It is a cross-sectional view of a splined magnetohydrodynamic fluid;

[0030] Figure 6 This is a diagram of the top structure of the cavity.

[0031] Explanation of icon numbers:

[0032] Cavity 1, main shaft cover 11, first channel 111, annular pressing block 112, crystal induction bracket 113, photoelectric sensor 114, spline magnetofluid 12, spline shaft 121, third channel 122, film thickness gauge crystal oscillator system 123, crystal-controlled slip ring 124, fixed seat 125, fixed rod 126, fixed plate 127, fixed column 128, first bearing 13, second bearing 14, upper obstruction plate 15, second channel 151, lower obstruction plate 16.

[0033] Cage frame 2, first fixed shaft 21, spline hole 211, second fixed shaft 22,

[0034] Drive assembly 3, drive component 31, timing belt 32, timing pulley 33. Detailed Implementation

[0035] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the specific implementation methods of this utility model will be described below with reference to the accompanying drawings. Obviously, the drawings described below are merely some embodiments of this utility model. For those skilled in the art, other drawings and other implementation methods can be obtained based on these drawings without any creative effort.

[0036] To keep the drawings concise, each figure only schematically shows the parts relevant to the utility model, and these do not represent the actual structure of the product. Furthermore, for ease of understanding, in some figures, only one of the components with the same structure or function is schematically depicted, or only one is labeled. In this document, "one" not only means "only one," but can also mean "more than one."

[0037] It should also be further understood that the term “and / or” as used in this application specification and the appended claims means any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0038] In this document, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0039] Furthermore, in the description of this application, the terms "first," "second," etc., are used only for distinguishing descriptions and should not be construed as indicating or implying relative importance. It should be noted that the above embodiments can be freely combined as needed. The above are merely preferred embodiments of this utility model. It should be pointed out that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.

[0040] refer to Figures 1 to 4 This utility model provides a magnetron sputtering coating device, including a cavity 1, a cage 2, and a drive assembly 3. The top of the cavity 1 is provided with a splined magnetofluid 12 and a first bearing 13, which are coaxially mounted. The bottom of the cavity 1 is provided with a second bearing 14. The cage 2 is provided with a first fixed shaft 21 and a second fixed shaft 22 at its two axial ends, respectively. The first fixed shaft 21 is provided with a spline hole 211 in the middle. The splined shaft 121 of the splined magnetofluid 12 is adapted to be coaxially inserted into the spline hole 211. The outer journal of the first fixed shaft 21 is rotatably supported by the inner ring of the first bearing 13 for transmission. The second fixed shaft 22 is rotatably supported by the second bearing 14. The drive assembly 3 is disposed above the cavity 1 and drives the splined shaft 121 connected to the splined magnetofluid 12 to rotate, thereby driving the first fixed shaft 21 and the cage 2 to rotate synchronously through the splined shaft 121.

[0041] In this embodiment, the drive assembly 3 is installed above the cavity 1, which completely changes the traditional bottom drive that requires complicated disassembly from below the cavity 1, making it easier to maintain and replace the drive assembly 3 and the spline magnetofluid 12, and improving maintenance efficiency; moreover, the drive assembly 3 drives the first bearing 13 and the cage 2 to rotate from the top, optimizing the power transmission path, enabling stable operation with a lower load and lower energy consumption.

[0042] Specifically, cavity 1 is the main body constituting the vacuum coating process space. A splined magnetofluid 12 and a first bearing 13 are installed at the top of cavity 1. The splined magnetofluid 12 and the first bearing 13 are coaxially mounted to ensure concentricity of power transmission. A second bearing 14 is installed at a corresponding position at the bottom of cavity 1.

[0043] The cage 2 is a rotating frame used to load the substrate to be coated. It has a first fixed shaft 21 and a second fixed shaft 22 at its axial ends. The first fixed shaft 21 is located at the top of the cage 2. The first fixed shaft 21 has a splined hole 211 at its center, the size and tooth profile of which precisely match the splined shaft 121 of the splined magnetofluid 12. This not only ensures the accuracy of power transmission but also effectively avoids axial movement and radial wobble, thereby significantly improving the uniformity and stability of the coating. A support journal is formed on the outer side of the first fixed shaft 21 for transmission engagement with the inner ring of the first bearing 13. The second fixed shaft 22 is located at the bottom of the cage 2 and is rotatably connected to the second bearing 14.

[0044] The drive assembly 3, located above the cavity 1, provides the rotational power for the cage 2. The output of the drive assembly 3 directly or indirectly drives the spline shaft 121 connected to the splined magnetofluid 12. The splined output shaft of the splined magnetofluid 12 is coaxially inserted into and tightly fitted within the splined hole 211 of the first fixed shaft 21 at the top of the cage 2, forming a core connection for torque transmission. Simultaneously, the support journal of the first fixed shaft 21 is rotatably supported in the inner ring of the first bearing 13 at the top of the cavity 1, achieving radial positioning and support. The second fixed shaft 22 of the cage 2 is rotatably supported in the second bearing 14 at the bottom of the cavity 1, primarily bearing radial loads and assisting in positioning, forming a stable two-point support structure. When the drive assembly 3 operates, it drives the splined shaft 121 of the splined magnetofluid 12 to rotate, allowing the magnetic coupling inside the splined magnetofluid 12 to transmit the rotational motion leak-free to its vacuum-side splined output shaft. The splined output shaft directly drives the first fixed shaft 21 to rotate through spline engagement, thereby causing the first fixed shaft 21 to drive the entire cage 2 to rotate synchronously around its axis.

[0045] Placing the drive assembly 3 in an atmospheric pressure environment above the cavity 1 completely changes the traditional bottom-driven system, which requires complex disassembly from below the cavity. When it is necessary to inspect or replace the drive assembly 3, the splined magnetic fluid 12, or the first bearing 13, operations can usually be performed from above the equipment. The drive assembly 3 is easier to access and observe from above, facilitating daily inspections, lubrication, and condition monitoring. Maintenance personnel can easily complete various maintenance tasks without having to delve into the bottom of the cavity 1. This not only significantly shortens maintenance time, simplifies processes, reduces downtime, and improves equipment utilization, but also effectively reduces the operational difficulty and safety risks during maintenance. Furthermore, by avoiding frequent disassembly of components inside the cavity 1, potential sources of contamination are reduced, further improving the stability of the coating quality.

[0046] Meanwhile, the drive assembly 3 drives the first bearing 13 and the cage 2 to rotate from the top. Compared with the traditional method of driving the cage 2 from below, the optimized power transmission path reduces unnecessary energy loss, resulting in significantly lower energy consumption and less effort during equipment operation. It also reduces the burden on the drive assembly 3, which not only helps improve the overall performance and extend the service life of the equipment but also enhances its operational economy, saving enterprises substantial energy and maintenance costs in the long term. Specifically, in traditional equipment, the drive assembly 3 is located below the cage 2 and needs to overcome the cage 2's own weight to drive its rotation. This results in significant energy loss during power transmission. For example, the torque output by the motor requires additional energy to overcome the gravitational torque and the resistance torque of the surrounding medium to rotate the cage 2, leading to increased motor load and energy consumption. In other words, due to the traditional bottom-drive arrangement, the motor needs to withstand a large starting and operating load. During startup, the motor needs to overcome the static inertia and gravity of the cage 2 to begin rotation. During operation, components below the cage 2 may generate additional resistance due to friction, vibration, and other factors, further increasing the motor's load and causing it to operate under high load for extended periods. This not only increases energy consumption but also shortens the motor's lifespan. This invention places the drive assembly 3 above the cavity 1, driving the spline shaft 121 connected to the splined magnetofluid 12, thereby rotating the cage 2. This makes power transmission more direct and efficient, effectively reducing the motor's load. First, during startup, because the drive assembly 3 is located above, the center of gravity of the cage 2 is relatively closer to the drive axis, reducing the adverse effects of inertial torque and gravitational torque on the motor during startup, making it easier to start and reducing starting current and energy consumption. Second, during operation, the upward drive method makes the rotation of the cage 2 more stable, reducing additional resistance caused by vibration and friction, allowing the drive assembly 31 to operate stably under lower load. Compared with traditional equipment, this invention can reduce the average load of the drive component 31, thereby significantly reducing energy consumption, extending the service life of the drive component 31, and reducing equipment maintenance costs.

[0047] Further, refer to Figure 3 and Figure 5 The top of the cavity 1 is provided with a spindle cover 11, and the spindle cover 11 is provided with an axially penetrating first channel 111. The spline magnetic fluid 12 is detachably installed in the first channel 111, and the spline shaft 121 of the spline magnetic fluid 12 is adapted to pass through the first channel 111 and mesh with the spline hole 211 of the first fixed shaft 21.

[0048] In this embodiment, the spline magnetofluid 12 is detachably installed in the first channel 111, which is extremely simple, fast and safe to operate, minimizes equipment downtime, significantly reduces maintenance costs and risks, and provides convenience in the process of equipment maintenance and repair.

[0049] Specifically, in traditional equipment, the drive assembly 3 and related transmission components are usually compactly installed in a small space. Once replacement or repair is needed, maintenance personnel often have to spend a lot of time and effort to disassemble surrounding components in order to access the fault point. This complex and cumbersome maintenance process not only increases the workload and difficulty of maintenance, but may also lead to prolonged equipment downtime, affecting production progress and enterprise efficiency.

[0050] The splined magnetic fluid 12 of this application is suitable for placement in the first channel 111 and is fixedly connected to the spindle cover 11 by a detachable locking component. When the splined magnetic fluid 12 needs to be inspected, maintained, or replaced, maintenance personnel do not need to enter the confined space inside the equipment or disassemble a large number of parts. Simply by following a pre-set procedure, the connecting component between the splined magnetic fluid 12 and the spindle cover 11 can be easily disassembled, allowing the splined magnetic fluid 12 to be removed from the first channel 111. The entire process is simple and requires no complex tools or equipment, thus shortening the preparation time before maintenance. (Reference) Figure 6 The drive assembly 3 includes a drive component 31, a timing belt 32, and a timing pulley 33. The timing pulley 33 is fixed to the top of the spline shaft 121 of the spline magnetofluid 12. The drive component 31 drives the timing pulley 33 through the timing belt 32.

[0051] More specifically, the spindle cover 11 at the top of the cavity 1 has a first channel 111. The spline magnetic fluid 12, as a pre-assembled independent sealed transmission module, has its outer housing precisely fitted within the first channel 111, ensuring that the spline shaft 121 of the spline magnetic fluid 12 maintains initial coaxiality with the spline hole 211 of the lower first fixed shaft 21. The spline magnetic fluid 12 is then securely connected to the spindle cover 11 via detachable locking components. The locking components provide axial clamping force, tightly pressing the flange end face of the spline magnetic fluid 12 against the corresponding sealing surface of the spindle cover 11, achieving radial positioning and rigid connection to prevent the spline magnetic fluid 12 from loosening or shifting during operation, ensuring transmission stability. When maintenance or replacement of the spline magnetic fluid 12 is required, simply loosen and remove these detachable locking components at the top of the cavity 1 to completely and quickly remove the entire spline magnetic fluid 12 from the first channel 111. There is no need to damage the main seal of cavity 1, enter the interior of vacuum cavity 1, or touch the cage 2 or the lower second bearing 14. This greatly simplifies the maintenance process of the most critical and vulnerable dynamic sealing component, transforming what was originally a complex and time-consuming repair task into a quick replacement. The locking components are preferably multiple high-strength bolts / screws evenly distributed circumferentially, in conjunction with a flange structure.

[0052] The synchronous pulley 33 is fixedly connected to the top of the spline shaft 121 of the splined magnetic fluid 12 module. The synchronous belt 32 connects the output shaft of the drive component 31 to the synchronous pulley 33 at the top of the spline shaft 121, realizing non-contact power transmission. When it is necessary to disassemble the splined magnetic fluid 12, only the synchronous pulley 33 needs to be removed to disconnect the connection between the drive component 31 and the spline shaft 121, without disassembling the drive component 31 itself or its support, which further reduces the disassembly steps and the required space. The drive component 31 is preferably a motor, but this application does not limit it. The top of the drive component 3 may also be provided with a motor cover to protect the drive component 3.

[0053] It is worth noting that the convenient installation method of the spline magnetofluid 12 also provides great convenience for maintenance personnel during the maintenance process. Since the spline magnetofluid 12 can be easily removed from the equipment, maintenance personnel can perform detailed inspections and maintenance operations in a spacious external environment, no longer limited by space, reducing maintenance risks caused by operational inconvenience. At the same time, the rapid disassembly and installation characteristics significantly shorten maintenance time, reduce equipment downtime, and improve equipment availability and production efficiency.

[0054] Further, refer to Figure 3 The top of the cavity 1 is also provided with an upper obstruction plate 15, which is fixed below the spindle cover 11 and has a second channel 151. The second channel 151 has an installation groove, and the first bearing 13 is set in the installation groove. The spindle cover 11 is fixedly set above the second channel 151. The bottom of the spindle cover 11 is provided with an annular pressing block 112, which abuts against the top end face of the outer ring of the first bearing 13 to achieve axial positioning of the outer ring of the first bearing 13.

[0055] In this embodiment, an annular pressing block 112 is provided at the bottom of the spindle cover 11 and is made to abut tightly against the top end face of the outer ring of the first bearing 13, thereby achieving axial positioning of the outer ring of the first bearing 13. This not only ensures accurate positioning of the bearing outer ring during installation, but also effectively prevents axial movement of the bearing outer ring due to vibration and rotation during equipment operation.

[0056] Specifically, during equipment installation, traditional bearing fixing methods may require complex adjustment and calibration steps to ensure the correct installation position and axial fixation of the bearing. This not only increases the difficulty and time cost of installation but may also lead to equipment malfunction risks due to improper installation. The annular pressing block 112 of this utility model simplifies the installation process. When installing the first bearing 13, simply place the first bearing 13 into the mounting groove of the upper end plate 15, and then abut against the top end face of the outer ring of the first bearing 13 through the annular pressing block 112 of the spindle cover 11 to achieve axial positioning of the first bearing 13. This makes the installation process more intuitive and convenient, reducing the workload and operational difficulty for installers. At the same time, during equipment maintenance and repair, if it is necessary to replace the first bearing 13, the spindle cover 11 can be quickly removed, and the first bearing 13 can be taken out for replacement without complicated disassembly steps and tools, shortening maintenance time and downtime, and improving equipment maintenance efficiency.

[0057] The tight contact between the annular pressing block 112 and the top end face of the outer ring of the first bearing 13 forms a stable mechanical connection, ensuring the stability and reliability of the first bearing 13 during long-term operation, thereby improving the overall performance and service life of the equipment. This also enhances the overall vibration resistance of the equipment. When the equipment is subjected to external vibration, the outer ring of the first bearing 13 can remain relatively stable under the constraint of the annular pressing block 112, thus ensuring the smooth rotation of the cage 2 and improving the stability and consistency of the coating quality. Furthermore, the annular pressing block 112 helps reduce the gap between the first bearing 13 and the cavity 1, improving the sealing performance of the equipment. Simultaneously, the fixed installation of the spindle cover 11 above the second channel 151 further enhances the sealing effect of the top of the cavity 1, preventing gas leakage or impurity intrusion, and ensuring a high vacuum environment and stable coating quality during the coating process.

[0058] It is worth noting that this utility model achieves axial positioning of the outer ring of the first bearing 13 by abutting the annular pressing block 112 against the top end face of the outer ring of the first bearing 13. From the perspective of structural stability, it ensures the stability of the first bearing 13 during operation and reduces the risk of equipment failure caused by displacement of the first bearing 13. From the perspective of ease of installation and maintenance, it simplifies the installation and maintenance process, reduces the difficulty of operation and downtime. From the perspective of sealing performance, it enhances the sealing effect of the cavity 1, ensuring a high vacuum environment during the coating process. From the perspective of shock resistance, it improves the equipment's resistance to external vibrations and ensures the stability of the coating quality.

[0059] Further, refer to Figure 3 and Figure 6The spline shaft 121 of the spline magnetic fluid 12 has a third channel 122 through it. The third channel 122 is connected to the inside of the cavity 1. The film thickness gauge crystal oscillator system 123 is installed in the third channel 122 for real-time monitoring of film thickness.

[0060] In this embodiment, the spline shaft 121 is suitable for installing the film thickness gauge crystal oscillator system 123, which facilitates real-time detection of film thickness. It cleverly utilizes the internal space of the spline shaft 121, solving the problem that the film thickness gauge crystal oscillator system 123 cannot be set inside the cavity 1 due to limited bottom space in traditional equipment, and realizing a high degree of functional integration and optimized layout.

[0061] Specifically, in traditional magnetron sputtering coating equipment, the limited space at the bottom of the cavity 1 makes it difficult to accommodate additional monitoring equipment, thus restricting the installation location of the film thickness gauge crystal oscillator system 123. It is usually necessary to install additional equipment outside the device or in other locations within the cavity 1. This not only increases the complexity and footprint of the equipment but may also lead to inaccurate monitoring data because the monitoring point is far from the actual coating area, making it susceptible to interference and unable to reflect changes in coating thickness in real time.

[0062] This invention cleverly utilizes the internal space of the spline shaft 121 by setting a third channel 122 inside the spline shaft 121 and installing the film thickness gauge crystal oscillator system 123 therein. This optimizes space utilization, allowing the film thickness gauge crystal oscillator system 123 to be directly placed close to the coating area without the need for additional mounting brackets and connecting lines at the bottom of the cavity 1 or other locations. This reduces manufacturing costs and ensures the real-time performance and accuracy of monitoring data. Simultaneously, it avoids the difficulty of additionally installing monitoring equipment at the bottom of the cavity 1 or in other confined spaces, simplifying the overall layout of the equipment and making its structure more compact and rational.

[0063] Furthermore, a crystal-controlled slip ring 124 is provided above the spline shaft 121 of the spline magnetic fluid 12. The crystal-controlled slip ring 124 is suitable for electrical connection with the film thickness gauge crystal oscillator system 123. The outer ring of the crystal-controlled slip ring 124 is fixedly connected to the synchronous pulley 33 of the drive assembly 3 and rotates synchronously with it. The inner ring of the crystal-controlled slip ring 124 is fixedly connected to the main shaft cover 11 and remains stationary with it.

[0064] In this embodiment, the outer ring of the crystal control slip ring 124 is firmly connected to the synchronous pulley 33 of the drive assembly 3 and rotates synchronously with the rotation of the synchronous pulley 33. The inner ring of the crystal control slip ring 124 is fixedly connected to the spindle cover 11 and remains stationary with the spindle cover 11. This allows the crystal control slip ring 124 to establish a stable electrical connection between the rotating drive assembly 3 and the stationary spindle cover 11, ensuring that the signal of the film thickness gauge crystal oscillator system 123 can be accurately transmitted to the control center.

[0065] Specifically, the outer side of the crystal-controlled slip ring 124 is also provided with a fixed seat 125 and a pair of fixed rods 126. The pair of fixed rods 126 are fixedly connected to the fixed seat 125 and the synchronous pulley 33 along the axial direction of the cavity 1. The pair of fixed rods 126 are located on both sides of the axial direction of the cavity 1, which effectively reduces the radial vibration and axial movement that the crystal-controlled slip ring 124 may generate during rotation, ensuring the stability of the outer ring of the crystal-controlled slip ring 124 when rotating at high speed, and ensuring the synchronization with the drive assembly 3, reducing the signal transmission error caused by asynchronous rotation. This not only improves the service life of the crystal-controlled slip ring 124, but also ensures the stability of signal transmission. Especially in high-precision and high-speed coating processes, it can significantly reduce signal interference and data errors caused by mechanical vibration.

[0066] The top of the crystal-controlled slip ring 124 is also provided with a fixing plate 127 and a fixing post 128. The fixing plate 127 is fixedly connected to the inner ring of the crystal-controlled slip ring 124, and the fixing post 128 is fixedly connected to the fixing plate 127 and the main shaft cover 11 of the cavity 1 along the axial direction of the cavity 1. This not only further enhances the static stability of the inner ring of the crystal-controlled slip ring 124, but also provides additional support and protection for the entire crystal-controlled slip ring 124.

[0067] It is worth noting that the film thickness gauge crystal oscillator system 123 is installed in the third channel 122 inside the splined shaft 121 for real-time monitoring of the coating thickness. The main function of the crystal control slip ring 124 is to achieve stable electrical connection and signal transmission between rotating components (such as the drive assembly 3 and the cage 2) and stationary components (such as the cavity 1 and the spindle cover 11). The implementation of this function is prior art and will not be further elaborated here. The crystal control slip ring 124 ensures that these monitoring data can be accurately transmitted from the rotating splined shaft 121 to the stationary control system and provides a stable power supply to the film thickness gauge crystal oscillator system 123. This ensures that the system will not malfunction or experience data interruption due to unstable power supply during equipment operation, thereby guaranteeing the continuity and stability of the coating process.

[0068] Furthermore, it also includes a crystal sensing bracket 113 and a photoelectric sensor 114. The crystal sensing bracket 113 is fixed to the top of the synchronous pulley 33, and the photoelectric sensor 114 is fixed to the main shaft cover 11 by a fixing block and corresponds to the crystal sensing bracket 113.

[0069] In this embodiment, the cooperation of photoelectric sensor 114 and crystal sensing bracket 113 can accurately detect the rotational position and speed of synchronous pulley 33, providing real-time rotational status information for the equipment control system. With this information, the control system can accurately adjust the rotational speed of drive component 3 to ensure that the rotational speed of cage 2 is stable and consistent with process requirements.

[0070] Specifically, the photoelectric sensor 114 is a high-precision optical sensor, securely mounted on the spindle cover 11 by a fixing block, corresponding to the crystal sensor bracket 113. The relative position between the photoelectric sensor 114 and the crystal sensor bracket 113 is precisely calibrated to ensure that the photoelectric sensor 114 can accurately detect the mark or signal on the crystal sensor bracket 113 when the synchronous pulley 33 rotates. The photoelectric sensor 114 typically consists of two parts: a transmitter and a receiver. The transmitter emits a light signal, and when the synchronous pulley 33 rotates, the mark on the crystal sensor bracket 113 periodically blocks or reflects the light signal. The receiver detects these changes and converts them into electrical signals. The connection between the crystal sensor bracket 113 and the synchronous pulley 33 uses a high-precision threaded connection and locking device to ensure that it will not loosen or shift during long-term operation.

[0071] Further, refer to Figure 4 The bottom of the cavity 1 is provided with a lower sealing plate 16, and a second bearing 14 is provided on the lower sealing plate 16. The inner ring of the second bearing 14 is connected to the second fixed shaft 22.

[0072] In this embodiment, the second bearing 14 is installed at the center of the lower plate 16. The outer ring of the second bearing 14 is tightly fitted with the lower plate 16, and the inner ring of the second bearing 14 is fitted and connected with the second fixed shaft 22 to ensure that there will be no loosening or displacement during high-speed rotation.

[0073] Specifically, the second bearing 14 provides solid support for the stable rotation of the cage 2, ensuring the reliability and stability of the equipment during long-term operation. The first bearing 13 is a cylindrical roller bearing, and the second bearing 14 is a crossed roller bearing. Of course, the first bearing 13 can also be a high-precision, high-rigidity bearing, such as an angular contact ball bearing or a tapered roller bearing, and the second bearing 14 can also be a high-precision bearing, such as a deep groove ball bearing or a self-aligning roller bearing, to accommodate possible minor alignment deviations. This application does not impose further limitations here.

[0074] It should be noted that the above embodiments can be freely combined as needed. The above are merely preferred embodiments of this utility model. It should be pointed out that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.

Claims

1. A magnetron sputter coating apparatus, characterized in that include: A cavity, the top of which is provided with a splined magnetic fluid and a first bearing, the splined magnetic fluid being coaxially mounted with the first bearing, and the bottom of which is provided with a second bearing; The cage frame has a first fixed shaft and a second fixed shaft at its two axial ends, respectively. The first fixed shaft has a spline hole in the middle. The spline shaft of the spline magnetofluid is adapted to be coaxially inserted into the spline hole. The outer journal of the first fixed shaft is rotatably supported by the inner ring of the first bearing for transmission. The second fixed shaft is rotatably supported by the second bearing. A drive assembly is disposed above the cavity and drives a spline shaft connected to the spline magnetofluid to rotate, thereby driving the first fixed shaft and the cage to rotate synchronously through the spline shaft.

2. The magnetron sputtering coating equipment according to claim 1, characterized in that, The top of the cavity is provided with a spindle cover, the spindle cover is provided with an axially penetrating first channel, the spline magnetic fluid is detachably installed in the first channel, and the spline shaft of the spline magnetic fluid is adapted to pass through the first channel and mesh with the spline hole of the first fixed shaft.

3. The magnetron sputtering coating equipment according to claim 2, characterized in that, The spline magnetofluid is adapted to be disposed in the first channel and fixedly connected to the spindle cover by a detachable locking member; The drive assembly includes a drive component, a timing belt, and a timing pulley. The timing pulley is fixed to the top of the spline shaft of the spline magnetic fluid, and the drive component drives the timing pulley through the timing belt.

4. The magnetron sputtering coating equipment according to claim 3, characterized in that, The top of the cavity is also provided with an upper obstruction plate, which is fixed below the spindle cover and has a second channel. The second channel has an installation groove, and the first bearing is set in the installation groove. The spindle cover is fixedly set above the second channel. The bottom of the spindle cover is provided with an annular pressing block, which abuts against the top end face of the outer ring of the first bearing to achieve axial positioning of the outer ring of the first bearing.

5. A magnetron sputtering coating apparatus according to any one of claims 1-4, characterized in that, The splined magnetic fluid has a third channel extending through its spline shaft. The third channel connects to the interior of the cavity and contains a film thickness gauge crystal oscillator system for real-time monitoring of the film thickness.

6. The magnetron sputtering coating equipment according to claim 5, characterized in that, A crystal-controlled slip ring is also provided above the spline shaft of the spline magnetic fluid. The crystal-controlled slip ring is suitable for electrical connection with the crystal oscillator system of the film thickness gauge. The outer ring of the crystal-controlled slip ring is fixedly connected to the synchronous pulley of the drive assembly and rotates synchronously with it. The inner ring of the crystal-controlled slip ring is fixedly connected to the spindle cover and remains stationary with it.

7. The magnetron sputtering coating equipment according to claim 6, characterized in that, The outer side of the crystal-controlled slip ring is also provided with a fixed seat and a pair of fixed rods, and the pair of fixed rods are fixedly connected to the fixed seat and the synchronous pulley along the axial direction of the cavity. The top of the crystal-controlled slip ring is also provided with a fixing plate and a fixing post. The fixing plate is fixedly connected to the inner ring of the crystal-controlled slip ring, and the fixing post is fixedly connected to the fixing plate and the main shaft cover of the cavity along the axial direction of the cavity.

8. The magnetron sputtering coating equipment according to claim 3, characterized in that, It also includes a crystal sensing bracket and a photoelectric sensor. The crystal sensing bracket is fixed to the top of the synchronous pulley, and the photoelectric sensor is fixed to the main shaft cover by a fixing block and corresponds to the crystal sensing bracket.

9. The magnetron sputtering coating equipment according to claim 1, characterized in that, The bottom of the cavity is provided with a lower obstruction plate, and the lower obstruction plate is provided with a second bearing, the inner ring of the second bearing being connected to the second fixed shaft.

10. A magnetron sputtering coating apparatus according to claim 1, characterized in that, The first bearing is a cylindrical roller bearing, and the second bearing is a crossed roller bearing.

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