External guide tube for single crystal furnace

Abstract

This utility model relates to the field of single crystal furnace technology, and in particular to an external guide tube for a single crystal furnace, comprising: a lower cylinder and an upper cylinder detachably connected by a connecting assembly. In this utility model, the upper cylinder and the lower cylinder adopt a detachable structural design. If partial damage occurs, individual disassembly and repair or replacement can be performed, avoiding the scrapping of the entire external guide tube, significantly improving maintainability and reducing operating costs.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnace technology, and in particular to an external guide tube for a single crystal furnace. Background Technology

[0002] A single crystal furnace is a high-end device that melts materials such as polycrystalline silicon in an inert gas environment (such as nitrogen or argon) using a graphite heater and grows dislocation-free single crystals using the Czochralski method.

[0003] As one of the core structural components of the single crystal furnace thermal field system, the outer guide tube is a cylindrical body with openings at the top and bottom. It is installed above the molten silicon surface and located between the heater and the furnace wall (that is, surrounding the inner guide tube, crucible, and crystal). The single crystal silicon rod passes through its openings during growth. The outer guide tube indirectly participates in optimizing the temperature gradient and controlling the thermal field stability of crystal growth by regulating the argon gas flow field and thermal radiation distribution.

[0004] In existing technologies, the outer guide tube generally adopts an integral structure. In practical applications, because the bottom area of ​​the tube is continuously exposed to a high-temperature silicon vapor environment of 1600℃±50℃, it is more prone to aging and deterioration (such as cracking, deformation, coating peeling, thinning, etc.) than other areas. The surface carbon deposits and geometric deformations caused by aging can interfere with the monitoring accuracy of the in-furnace vision system on the silicon melt level and crystal growth interface, thus affecting the crystal growth quality. To solve the above technical problems, the entire outer guide tube must be replaced, which leads to the waste of the non-aging and deteriorated parts of the outer guide tube and high operating costs. Utility Model Content

[0005] The purpose of this invention is to provide an external guide tube for a single crystal furnace to solve the problems mentioned in the background art.

[0006] The technical solution adopted in this utility model is:

[0007] The external flow guide tube for a single crystal furnace includes:

[0008] The lower cylinder and the upper cylinder are detachably connected, and both the upper cylinder and the lower cylinder are hollow and open at both ends;

[0009] The lower cylinder is detachably connected to the upper cylinder via a connecting assembly;

[0010] The connection component includes:

[0011] A first connecting ring is disposed on the lower cylinder, and its upper end face is lower than the upper end face of the lower cylinder.

[0012] A second connecting ring is disposed on the upper cylinder body, opposite to the first connecting ring, and the lower end face of the second connecting ring is higher than the lower end face of the upper cylinder body;

[0013] A positioning ring is disposed between the upper cylinder and the lower cylinder, and can fit into the first connecting ring, the second connecting ring, the lower cylinder, and the upper cylinder.

[0014] A fixing ring is disposed at the junction of the upper cylinder and the lower cylinder. One end of the fixing ring can be fitted with the end face of the first connecting ring, and the other end can be fitted with the end face of the second connecting ring. The fixing ring can be fixedly connected to the positioning ring.

[0015] Optionally, the lower cylinder includes a straight section and a conical section integrally formed with the straight section;

[0016] The end face of the straight section corresponds to the lower end face of the upper cylinder, and the inner diameter of the straight section is equal to the inner diameter of the lower end face of the upper cylinder.

[0017] The first connecting ring is connected to the straight section.

[0018] Optionally, the positioning ring includes:

[0019] The inner ring portion has its two end faces respectively abutting against the end faces of the first connecting ring and the second connecting ring;

[0020] The outer ring is integrally formed on the outside of the inner ring, and its two end faces are respectively attached to the end face of the straight cylinder section and the lower end face of the upper cylinder.

[0021] The two end faces of the inner ring portion protrude beyond the two end faces of the outer ring portion.

[0022] Optionally, a sealing ring is provided on both ends of the outer ring portion.

[0023] Optionally, the sealing ring is made of graphite paper.

[0024] Optionally, the fixing ring is composed of multiple arcs joined together.

[0025] Optionally, a connecting lug is provided on the outer side of the upper end of the upper cylinder. The connecting lug is coaxial with the upper cylinder, and multiple mounting holes are provided through the connecting lug.

[0026] Optionally, the surfaces of the lower cylinder, upper cylinder, connecting lug, and connecting assembly are deposited with a high-purity silicon carbide coating with a thickness of 4μm to 100μm.

[0027] Optionally, the lower cylinder, upper cylinder, connecting lug, and connecting assembly are all made of carbon-carbon composite material.

[0028] Optionally, the carbon-carbon composite material has a density greater than or equal to 1.3 g / cm³ and a flexural strength greater than or equal to 80 MPa.

[0029] Compared with the prior art, the beneficial effects of this utility model are:

[0030] In this invention, the upper and lower cylinders are designed to be detachable. If a part is damaged, it can be disassembled and repaired or replaced separately, avoiding the scrapping of the entire outer guide tube, significantly improving maintainability and reducing operating costs. Attached Figure Description

[0031] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0032] Figure 1 This is a schematic diagram of the overall structure of this application;

[0033] Figure 2 for Figure 1 A schematic diagram of the cross-sectional structure;

[0034] Figure 3 This is a schematic diagram of the lower cylinder structure in this application;

[0035] Figure 4 This is a schematic diagram of the positioning ring in this application;

[0036] Figure 5 This is a schematic diagram of the structure of the fixing ring in this application;

[0037] Figure 6 This is a schematic diagram of the upper cylinder structure in this application.

[0038] Figure label:

[0039] 1. Lower cylinder; 11. Straight cylinder section; 12. Conical section;

[0040] 2. Upper cylinder; 21. Connecting lug;

[0041] 3. Connecting components; 31. First connecting ring; 32. Second connecting ring;

[0042] 33. Locating ring; 331. First threaded hole; 332. Inner ring portion; 333. Outer ring portion;

[0043] 34. Retaining ring; 341. Second threaded hole; 342. First arc body; 343. Second arc body. Detailed Implementation

[0044] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of this invention. Therefore, the drawings and description are considered exemplary in nature and not restrictive.

[0045] In this invention, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0046] Given the current situation, replacing the entire outer guide tube would lead to the waste of the non-aging and deteriorated parts of the outer guide tube, as well as high operating costs.

[0047] like Figures 1-6 As shown, this utility model embodiment provides an external guide tube for a single crystal furnace, including: a lower cylinder 1 and an upper cylinder 2 detachably disposed on the lower cylinder 1.

[0048] The lower cylinder 1 is located above the molten silicon surface and is hollow with openings at both ends. The upper cylinder 2 is a hollow cylindrical structure with openings at both ends.

[0049] Specifically, the lower cylinder 1 includes a straight cylinder section 11 and a conical section 12 integrally formed with the straight cylinder section 11.

[0050] The end face of the straight section 11 corresponds to the lower end face of the upper cylinder 2, and the inner diameter of the straight section 11 is equal to the inner diameter of the lower end face of the upper cylinder 2, thereby ensuring the smoothness and sealing of the connection between the straight section 11 and the upper cylinder 2.

[0051] The lower cylinder 1 and the upper cylinder 2 are detachably connected via a connecting assembly 3. Specifically, as shown... Figure 2 As shown, the connecting component 3 includes several parts such as a first connecting ring 31, a second connecting ring 32, a positioning ring 33, and a fixing ring 34.

[0052] The first connecting ring 31 is disposed on the inner wall of the straight section 11, and its end face is lower than the end face of the straight section 11. That is to say, the upper end face of the first connecting ring 31 and the upper end face of the straight section 11 form a first step. The contact area is increased by the first step, which improves the connection stability and increases the resistance of the gas leakage path, thereby further improving the sealing performance of the connection.

[0053] The second connecting ring 32 is disposed on the inner wall of one end of the upper cylinder 2 adjacent to the straight section 11, corresponding to the first connecting ring 31. The end face of the second connecting ring 32 is higher than the end face of the upper cylinder 2, that is, the lower end face of the second connecting ring 32 and the lower end face of the upper cylinder 2 form a second step. Similarly, by increasing the contact area through the second step, the connection stability is improved, while the resistance of the gas leakage path is increased, thus improving the sealing performance of the connection.

[0054] The positioning ring 33 is set between the upper cylinder 2 and the lower cylinder 1, and has multiple first threaded holes 331. The positioning ring 33 makes the upper cylinder 2 and the lower cylinder 1 on the same horizontal plane so as to facilitate the accurate installation of the lower cylinder 1 later.

[0055] Furthermore, such as Figure 2 or Figure 4 As shown, the positioning ring 33 includes several parts such as an inner ring 332 and an outer ring 333.

[0056] The inner ring portion 332 has two end faces that are respectively fitted to the end faces of the first connecting ring 31 and the second connecting ring 32. The outer ring portion 333 is integrally formed on the outside of the inner ring portion 332, and its two end faces are respectively fitted to the end face of the straight cylinder section 11 and the lower end face of the upper cylinder 2. The two end faces of the inner ring portion 332 protrude from the two end faces of the outer ring portion 333.

[0057] Furthermore, to further improve the sealing performance at the connection, in this embodiment, a sealing ring (not shown in the figure) is provided on both ends of the outer ring portion 333 (that is, the surfaces of the outer ring portion 333 that are in contact with the end face of the straight cylinder section 11 and the lower end face of the upper cylinder 2).

[0058] Preferably, the sealing ring is made of flexible graphite paper as the substrate and is formed by cutting, winding and molding.

[0059] like Figure 1 or Figure 2 As shown, the fixing ring 34 is located at the junction of the upper cylinder 2 and the lower cylinder 1, inside both cylinders. One end of the fixing ring 34 is in contact with one end face of the first connecting ring 31, and the other end is in contact with one end face of the second connecting ring 32. By using the fixing ring 34, the first connecting ring 31, and the second connecting ring 32, the contact area is increased, improving connection stability and further increasing the resistance to gas leakage paths, thus significantly improving the sealing performance of the connection.

[0060] The fixing ring 34 has multiple second threaded holes 341, which correspond to the first threaded holes 331. The bolt passes through the second threaded holes 341 and the first threaded holes 331 in sequence, thereby realizing the fixed connection between the fixing ring 34 and the positioning ring 33.

[0061] Furthermore, to facilitate the disassembly and installation of the retaining ring 34, in this embodiment, as... Figure 5 As shown, the fixing ring 34 is composed of multiple arcs.

[0062] Preferably, the fixing ring 34 in this embodiment is mainly composed of a first arc body 342 and a second arc body 343.

[0063] When installing the lower cylinder 1, firstly, one end face of the inner ring 332 of the positioning ring 33 is attached to the end face of the second connecting ring 32, and one end face of the outer ring 333 is attached to the lower end face of the upper cylinder 2. Then, one end face of the first connecting ring 31 is attached to the other end face of the inner ring 332, and the end face of the straight cylinder section 11 is attached to the other end face of the outer ring 333. Subsequently, both ends of the fixing ring 34 are attached to the end faces of the first connecting ring 31 and the second connecting ring 32, respectively. Finally, bolts are used to fix the fixing ring 34 and the positioning ring 33, thereby completing the installation of the lower cylinder 1.

[0064] When it is necessary to disassemble the lower cylinder 1 for later maintenance or replacement, rotate the bolts to separate the fixing ring 34 from the positioning ring 33, thereby realizing the disassembly of the lower cylinder 1.

[0065] Furthermore, to facilitate the installation of the upper cylinder 2, in this embodiment, as... Figure 1 or Figure 2 As shown, an annular connecting lug 21 is fixedly installed on the outer side of the upper end of the upper cylinder 2, and the connecting lug 21 is coaxial with the upper cylinder 2. Multiple mounting holes (not shown in the figure) are drilled through the connecting lug 21, and these mounting holes are evenly distributed on the circumference centered on the center of the upper cylinder 2. The connecting parts of the outer guide tube connecting mechanism pass through these mounting holes, thereby realizing the installation of the upper cylinder 2.

[0066] Furthermore, in this embodiment, the lower cylinder 1, the upper cylinder 2, the connecting lug 21, and the connecting assembly 3 are all made of carbon-carbon composite material. The carbon-carbon composite material has a density greater than or equal to 1.3 g / cm³ and a flexural strength greater than or equal to 80 MPa.

[0067] Furthermore, to improve the oxidation resistance of the surfaces of the lower cylinder 1, upper cylinder 2, connecting lug 21, and connecting assembly 3, reduce oxidation loss, and extend service life, an anti-oxidation coating is deposited on the surfaces of the lower cylinder 1, upper cylinder 2, connecting lug 21, and connecting assembly 3 in this embodiment. Specifically, the anti-oxidation coating is a high-purity silicon carbide coating with a thickness of 4 μm to 100 μm.

[0068] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. An external guide tube for a single crystal furnace, characterized in that, include: The lower cylinder and the upper cylinder are detachably connected, and both the upper cylinder and the lower cylinder are hollow and open at both ends; The lower cylinder is detachably connected to the upper cylinder via a connecting assembly; the connecting assembly includes: a first connecting ring disposed on the lower cylinder, the upper end face of which is lower than the upper end face of the lower cylinder. A second connecting ring is disposed on the upper cylinder body, opposite to the first connecting ring, with the lower end face of the second connecting ring higher than the lower end face of the upper cylinder body; a positioning ring is disposed between the upper cylinder body and the lower cylinder body, and can fit against the first connecting ring, the second connecting ring, the lower cylinder body, and the upper cylinder body; a fixing ring is disposed at the junction of the upper cylinder body and the lower cylinder body, with one end fitting against the end face of the first connecting ring and the other end fitting against the end face of the second connecting ring, and the fixing ring can be fixedly connected to the positioning ring.

2. The external guide tube for a single crystal furnace according to claim 1, characterized in that, The lower cylinder includes a straight section and a conical section integrally formed with the straight section; the end face of the straight section corresponds to the lower end face of the upper cylinder, and the inner diameter of the straight section is equal to the inner diameter of the lower end face of the upper cylinder; the first connecting ring is connected to the straight section.

3. The external guide tube for a single crystal furnace according to claim 2, characterized in that, The positioning ring includes: an inner ring portion, the two end faces of which are respectively fitted to the end faces of the first connecting ring and the second connecting ring; and an outer ring portion, integrally formed on the outside of the inner ring portion, the two end faces of which are respectively fitted to the end face of the straight cylinder section and the lower end face of the upper cylinder; wherein, the two end faces of the inner ring portion protrude beyond the two end faces of the outer ring portion.

4. The external guide tube for a single crystal furnace according to claim 3, characterized in that, A sealing ring is provided on both ends of the outer ring portion.

5. The external guide tube for a single crystal furnace according to claim 4, characterized in that, The sealing ring is made of graphite paper.

6. The external guide tube for a single crystal furnace according to claim 1, characterized in that, The fixing ring is composed of multiple arcs joined together.

7. The external guide tube for a single crystal furnace according to claim 1, characterized in that, A connecting lug is provided on the outer side of the upper end of the upper cylinder. The connecting lug is coaxial with the upper cylinder and has multiple mounting holes through it.

8. The external guide tube for a single crystal furnace according to claim 7, characterized in that, The surfaces of the lower cylinder, upper cylinder, connecting lug, and connecting assembly are coated with a high-purity silicon carbide coating with a thickness of 4μm to 100μm.

9. The external guide tube for a single crystal furnace according to claim 7, characterized in that, The lower cylinder, upper cylinder, connecting lug, and connecting assembly are all made of carbon-carbon composite material.

10. The external guide tube for a single crystal furnace according to claim 9, characterized in that, The carbon-carbon composite material has a density greater than or equal to 1.3 g / cm³ and a flexural strength greater than or equal to 80 MPa.

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