A high-cleanliness cleanroom for chip packaging

Abstract

This utility model relates to the field of workshop purification technology, specifically to a high-cleanliness cleanroom for chip packaging. It includes a connecting plate installed inside the workshop wall, with a ventilation duct fixedly connected to one side of the connecting plate. A ventilation opening is provided inside the connecting plate, and the interior of the ventilation duct is connected to the ventilation opening. A ventilation fan, a first filter plate, and a second filter plate are installed inside one end of the ventilation duct. Along the airflow direction from the ventilation opening to the ventilation fan, the second filter plate, the first filter plate, and the ventilation fan are arranged sequentially. This utility model utilizes a flow-guiding component, including multiple baffles, where one end of each baffle contacts the side of the second filter plate away from the first filter plate. This effectively buffers, decelerates, and guides the high-speed, dust-laden airflow entering the ventilation duct. Simultaneously, a cleaning component, including a scraper structure slidably mounted on the top of the baffles, enables the cleaning of deposits on the surfaces of the multiple baffles.

Description

Technical Field

[0001] This utility model relates to the field of workshop purification technology, and in particular to a high-cleanliness purification workshop for chip packaging. Background Technology

[0002] In chip packaging technology, cleanliness control is one of the key links to ensure product quality and yield. During chip packaging, contaminants such as dust, particles, and chemical gases are generated. If they cannot be discharged and controlled outside the clean area in a timely manner, they will not only affect the packaging effect, but may also cause problems such as chip surface contamination and poor wire bonding. Therefore, in chip packaging cleanrooms, the exhaust system not only undertakes the task of efficiently discharging contaminated gases, but also needs to be combined with a high-efficiency filtration structure to ensure that the discharged gases do not cause secondary pollution and to ensure that the clean environment inside is stable and undisturbed.

[0003] In existing technologies, such as the "Ultra-High Cleanliness Cleanroom for Chip Packaging" with announcement number CN222634710U, the system includes workshop walls, ventilation ducts, ventilation fans, filters, and mounting components. The ventilation ducts are horizontally arranged and penetrate the workshop walls. The ventilation fans and filters are installed inside the ventilation ducts. The filters include a mounting frame. Although this technology, through the design of U-shaped clamps and limiting plates, allows for rapid installation and removal of the filters, greatly reducing the time required to replace the filter screen and improving production efficiency, it shares the following problems with traditional methods: First, the airflow in the ventilation ducts directly contacts the filter components, easily causing high-speed dust-laden airflow to directly impact the filter plates, leading to filter material blockage, reduced lifespan, and consequently, a decrease in exhaust efficiency over time. Second, the filter area lacks a structure design that facilitates maintenance and cleaning. After long-term operation, the impurities accumulated inside the ventilation ducts are difficult to clean, leading to difficulties in equipment maintenance and a high risk of cross-contamination. Utility Model Content

[0004] In view of this, the purpose of this utility model is to propose a high-cleanliness purification workshop for chip packaging, so as to solve the problems of short service life and easy accumulation of impurities in existing workshop filtration systems due to the lack of flow guiding and buffering structures and cleaning functions.

[0005] Based on the above objectives, this utility model provides a high-cleanliness cleanroom for chip packaging, including a connecting plate installed inside the workshop wall. A ventilation duct is fixedly connected to one side of the connecting plate, and a ventilation opening is provided inside the connecting plate. The interior of the ventilation duct is connected to the ventilation opening. A ventilation fan, a first filter plate, and a second filter plate are installed inside one end of the ventilation duct. The second filter plate, the first filter plate, and the ventilation fan are arranged sequentially along the airflow direction from the ventilation opening to the ventilation fan. A flow guiding component is provided inside the ventilation duct for buffering and stratifying the gas flow in front of the filter plate. The flow guiding component includes multiple baffles fixedly connected inside the ventilation duct. One side of the multiple baffles is in contact with the side of the second filter plate away from the first filter plate. A cleaning component is provided inside the ventilation duct for cleaning the multiple baffles.

[0006] Preferably, the vent is internally fixedly connected with multiple baffles, the top of one side of each baffle is in contact with the bottom of one end of each baffle, and the baffle is inclined at the end in contact with the baffle.

[0007] Preferably, a plurality of interceptor plates are fixedly connected to the top of the baffle plate, and the interior of the plurality of interceptor plates is provided with a plurality of second leakage holes for airflow diversion.

[0008] Preferably, the ventilation duct is internally fixedly connected with multiple U-shaped plates, the number of multiple baffles is equal to the number of multiple U-shaped plates, and the positions of the multiple U-shaped plates correspond to the positions of the multiple baffles.

[0009] Preferably, the bottom of the plurality of U-shaped plates is higher than the top of the plurality of corresponding baffles, and a baffle is fixedly connected to the top of the U-shaped plates. The height of the top of the baffle is higher than the height of the top of the interception plate, and the width of the baffle is equal to the width of the second filter plate and the first filter plate.

[0010] Preferably, the cleaning component includes scrapers slidably connected to the tops of multiple baffles, the bottom of the scrapers having an inclined angle, the bottoms of the multiple scrapers respectively contacting the tops of the multiple baffles, and the bottoms of the scrapers having multiple adapter grooves, the positions of the multiple adapter grooves corresponding to the positions of the interception plates.

[0011] Preferably, a pull rod is fixedly connected to one side of each of the plurality of scrapers, and the end of the pull rod away from the scraper passes through the interior of the U-shaped plate and the side wall of the ventilation duct and is fixedly connected to a pull plate.

[0012] Preferably, the top of the baffle plate has a plurality of first leakage holes, which are distributed vertically in both directions. A collection box is slidably connected to the bottom of the ventilation duct, and the position of the top opening of the collection box corresponds to the position of the baffle plate and the U-shaped plate.

[0013] Preferably, a plurality of fixed cylinders are fixedly connected to one side of the scraper. A connecting rod is slidably engaged inside the bottom of the fixed cylinder. A spring is fixedly connected inside the fixed cylinder. The bottom of the spring is fixedly connected to the top of the connecting rod. U-shaped rods are fixedly connected to both sides of the bottom end of the connecting rod. A ball is rotatably engaged at the end of the two U-shaped rods away from the connecting rod. The diameter of the ball is smaller than the diameter of the first leakage hole. When the bottom of the ball contacts the top of the baffle plate, the spring is in a compressed state. The distance between the edges of the two U-shaped rods is greater than the diameter of the first leakage hole. The positions of the plurality of balls correspond to the lateral positions of the plurality of first leakage holes.

[0014] Preferably, the collection box is fixedly connected to a first handle on one side of the ventilation duct sidewall, and the first filter plate and the second filter plate are respectively fixedly connected to a second handle on one side of the ventilation duct sidewall.

[0015] The beneficial effects of this utility model are:

[0016] 1. The flow guiding components, including multiple baffles, are designed so that one end of each baffle contacts the side of the second filter plate away from the first filter plate. This effectively buffers, slows down, and guides the high-speed dust-laden airflow entering the ventilation duct. Specifically, when the high-speed airflow passes through the multiple inclined baffles, it is divided into multiple secondary airflow channels, thereby reducing the local airflow velocity and minimizing eddy formation. At the same time, larger particles such as dust settle more easily on the surface of the baffles due to the reduced velocity, thus achieving preliminary physical separation before entering the filter. This significantly reduces the load on the first and second filter plates, effectively extending their service life and improving the overall filtration efficiency. In addition, the top of the baffles is equipped with an interceptor plate and a second perforation, which further physically blocks and disperses the deposited particles, optimizes the internal airflow organization of the ventilation path, prevents dust from concentrating and impacting the filter plates, and ensures the long-term stable operation of the system.

[0017] 2. The cleaning components, including a scraper structure that slides on top of the baffle plate, can clean deposits on the surfaces of multiple baffle plates. The scraper has an inclined angle and an adapter groove at its lower end, which fits tightly with the baffle plate and interceptor plate. During the sliding process of the scraper, it can effectively scrape off dust, particles and other impurities accumulated on the baffle plate and interceptor plate and guide them into the baffle plate with multiple first leakage holes. They fall into the collection box below through the leakage holes for unified collection and treatment. This cleaning structure not only achieves the convenience of cleaning without disassembly, but also ensures that impurities inside the multiple first leakage holes are pushed out during the movement of the ball through the matching spring, connecting rod and ball structure, thereby avoiding the problem of impurities clogging the leakage holes, and improving the cleanliness, reliability and continuity of workshop operation. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only for this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the overall three-dimensional structure of the present invention;

[0020] Figure 2 This is a three-dimensional structural diagram of the ventilation duct of this utility model;

[0021] Figure 3 This utility model Figure 2 Side view sectional structural schematic diagram;

[0022] Figure 4 This is a schematic diagram of the internal structure of the ventilation duct of this utility model;

[0023] Figure 5 This is a schematic diagram showing the connection between the baffle plate and the second filter plate of this utility model;

[0024] Figure 6 This is an enlarged structural diagram of the baffle plate and U-shaped plate of this utility model;

[0025] Figure 7 This is a side view sectional diagram of the fixed cylinder structure of this utility model.

[0026] The diagram is marked as follows:

[0027] 1. Workshop wall; 2. Ventilation duct; 3. Connecting plate; 4. Ventilation opening; 5. Partition; 6. Ventilation fan; 7. First filter plate; 8. Second filter plate; 9. Baffle plate; 10. Interceptor plate; 11. First leakage hole; 12. U-shaped plate; 13. Baffle; 14. Scraper; 15. Pull rod; 16. Fixing cylinder; 17. Spring; 18. Connecting rod; 19. U-shaped rod; 20. Ball bearing; 21. Collection box; 22. Pull plate; 23. First handle; 24. Second handle; 25. Second leakage hole; 26. Adaptor groove. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments.

[0029] It should be noted that, unless otherwise defined, the technical or scientific terms used in this utility model should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains. The terms "first," "second," and similar terms used in this utility model do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0030] Such as this utility model Figures 1 to 7 The diagram shows a high-cleanliness cleanroom for chip packaging, including a connecting plate 3 installed inside the workshop wall 1. A ventilation duct 2 is fixedly connected to one side of the connecting plate 3. A ventilation opening 4 is opened inside the connecting plate 3. The interior of the ventilation duct 2 is connected to the ventilation opening 4. A ventilation fan 6, a first filter plate 7, and a second filter plate 8 are installed inside one end of the ventilation duct 2. The second filter plate 8, the first filter plate 7, and the ventilation fan 6 are arranged sequentially along the airflow direction from the ventilation opening 4 to the ventilation fan 6. A flow guiding component is provided inside the ventilation duct 2 for buffering and stratifying the gas in front of the filter plate. The flow guiding component includes multiple baffles 9 fixedly connected inside the ventilation duct 2. One side of the multiple baffles 9 is in contact with the side of the second filter plate 8 away from the first filter plate 7. A cleaning component is provided inside the ventilation duct 2 for cleaning the multiple baffles 9.

[0031] The flow guiding components, including multiple baffles 9, are designed so that one end of each baffle is in contact with the side of the second filter plate 8 away from the first filter plate 7, which can effectively buffer, decelerate and guide the high-speed dust-laden airflow entering the ventilation duct 2.

[0032] like Figures 1 to 4 As shown, multiple baffles 5 are fixedly connected inside the vent 4. The top of one side of each baffle 5 is in contact with the bottom of one end of each baffle 9. The baffle 9 is inclined at the end that is in contact with the baffle 5.

[0033] With the partition 5 in place, during ventilation, the ventilation fan 6 draws air from inside the workshop through the ventilation duct 2, creating a directional airflow along the direction from the ventilation opening 4, the baffle plate 9, the second filter plate 8, the first filter plate 7 to the ventilation fan 6. The gas passes through the partition 5 and enters the top of the corresponding baffle plate 9 from different air openings, thus achieving the effect of stratifying the airflow. At the same time, when the high-speed airflow passes through multiple inclined baffle plates 9, it will be divided into multiple secondary airflow channels, thereby reducing the local airflow velocity and reducing the formation of eddies. Meanwhile, larger particles such as dust are more likely to settle on the surface of the baffle plate 9 due to the reduced velocity, thus achieving preliminary physical separation before entering the filter, significantly reducing the load on the first and second filter plates 8, effectively extending their service life and improving the overall filtration efficiency.

[0034] like Figures 4 to 6 As shown, multiple interceptor plates 10 are fixedly connected to the top of the baffle plate 9, and multiple second leakage holes 25 for airflow diversion are opened inside the multiple interceptor plates 10 respectively.

[0035] With the interceptor plate 10 set, the top of the baffle plate 9 is provided with the interceptor plate 10 and the second leakage hole 25. When the airflow passes through the top of the baffle plate 9, the interceptor plate 10 forms a physical blockage to the deposited particles, and the second leakage hole 25 allows the airflow to be diverted and dispersed, optimizing the internal airflow organization of the ventilation path, thereby preventing dust from concentrating and impacting the filter plate, thus extending the service life of the filter plate and ensuring the long-term stable operation of the system.

[0036] like Figures 4 to 6 As shown, multiple U-shaped plates 12 are fixedly connected inside the ventilation duct 2. The number of multiple baffles 9 is equal to the number of multiple U-shaped plates 12, and the positions of the multiple U-shaped plates 12 correspond to the positions of the multiple baffles 9. The bottom of the multiple U-shaped plates 12 is higher than the top of the multiple corresponding baffles 9. A baffle 13 is fixedly connected to the top of the U-shaped plates 12. The height of the top of the baffle 13 is higher than the height of the top of the interceptor plate 10. The width of the baffle 9 is equal to the width of the second filter plate 8 and the first filter plate 7.

[0037] By setting the U-shaped plate 12, baffle 13, and the height of the bottom of the U-shaped plate 12, it is convenient for impurities to fall from the bottom of the U-shaped plate 12 when they are scraped off. At the same time, the U-shaped plate 12 also ensures that the gas can flow inside the baffle plate 9. When the gas enters the baffle plate 9, it is blocked by the U-shaped plate 12 and baffle 13 to ensure that the gas can be completely filtered by the filter plate, thereby ensuring the filtration efficiency.

[0038] like Figures 1 to 7 As shown, the cleaning assembly includes scrapers 14 that are slidably connected to the top of multiple baffles 9. The bottom of the scrapers 14 is provided with an inclined angle. The bottom of the multiple scrapers 14 is in contact with the top of the multiple baffles 9. The bottom of the scrapers 14 is provided with multiple adapter grooves 26. The positions of the multiple adapter grooves 26 are respectively corresponding to the positions of the interceptor plates 10. A pull rod 15 is fixedly connected to one side of each of the multiple scrapers 14. The end of the pull rod 15 away from the scraper 14 passes through the interior of the U-shaped plate 12 and the side wall of the ventilation duct 2 and is fixedly connected to a pull plate 22. The top of the baffles 9 is provided with multiple first leakage holes 11. The multiple first leakage holes 11 are distributed vertically. A collection box 21 is slidably connected to the interior of the bottom of the ventilation duct 2. The position of the top opening of the collection box 21 is corresponding to the positions of the baffles 9 and the U-shaped plate 12.

[0039] The cleaning components, including a scraper 14 slidably mounted on top of the baffle 9, enable the cleaning of deposits on the surfaces of multiple baffles 9. The scraper 14 has an inclined angle and an adapter groove 26 at its lower end, allowing it to fit tightly against the baffles 9 and the interceptor plate 10. During the sliding process of the scraper 14, dust, particles, and other impurities accumulated on the top of the baffles 9 and the surface of the interceptor plate 10 are effectively scraped off and guided to the baffles 9 with multiple first drain holes 11. These impurities fall through the gap between the first drain holes 11 and the bottom of the U-shaped plate 12 into the collection box 21 below, completing unified collection and processing. The cleaning structure not only achieves the convenience of cleaning without disassembly, but also improves the cleanliness, reliability and continuity of workshop operation. During cleaning, when the top of the baffle plate 9 accumulates impurities after long-term use, pulling the pull plate 22 causes the pull rod 15 to move with the scraper 14. At this time, the bottom of the scraper 14 will scrape off the impurities on the top of the baffle plate 9, thereby avoiding the problem of impurities accumulating on the top of the baffle plate 9. At the same time, the scraped impurities will fall from the inside of the first drain hole 11 and the bottom of the U-shaped plate 12 into the inside of the collection box 21 for collection, which facilitates subsequent processing.

[0040] like Figures 4 to 7As shown, a plurality of fixed cylinders 16 are fixedly connected to one side of the scraper 14. A connecting rod 18 is slidably engaged inside the bottom of the fixed cylinder 16. A spring 17 is fixedly connected inside the fixed cylinder 16. The bottom of the spring 17 is fixedly connected to the top of the connecting rod 18. U-shaped rods 19 are fixedly connected to both sides of the bottom end of the connecting rod 18. A ball 20 is rotatably engaged at the end of the two U-shaped rods 19 away from the connecting rod 18. The diameter of the ball 20 is smaller than the diameter of the first leakage hole 11. When the bottom of the ball 20 contacts the top of the baffle plate 9, the spring 17 is in a compressed state. The distance between the edges of the two U-shaped rods 19 is greater than the diameter of the first leakage hole 11. The positions of the plurality of balls 20 correspond to the lateral positions of the plurality of first leakage holes 11.

[0041] The structure consisting of a fixed cylinder 16, a spring 17, a connecting rod 18, and a ball bearing 20 ensures that the ball bearing 20 pushes out impurities inside the multiple first drain holes 11 during its movement, thus preventing impurities from clogging the drain holes. When the scraper 14 moves with the fixed cylinder 16, the bottom of the ball bearing 20 will roll on top of the baffle plate 9. When the bottom of the ball bearing 20 contacts the top of the first drain hole 11, the spring 17 automatically rebounds, causing a portion of the bottom of the ball bearing 20 to get stuck inside the first drain hole 11, thereby causing the ball bearing 20 to push out the impurities accumulated inside the first drain hole 11, thus preventing impurities from clogging the inside of the first drain hole 11. At the same time, the U-shaped rod 19 prevents the ball bearing 20 from being completely stuck inside the first drain hole 11 and unable to move. The spring 17 ensures that the ball bearing 20 can move freely up and down during its movement, thus facilitating the cleaning of the inside of the multiple first drain holes 11.

[0042] like Figure 1 , Figure 2 and Figure 5 As shown, the collection box 21 is fixedly connected to one side of the ventilation duct 2 with a first handle 23, and the first filter plate 7 and the second filter plate 8 are fixedly connected to one side of the ventilation duct 2 with a second handle 24 respectively.

[0043] With the first handle 23 and the second handle 24, the first handle 23 allows staff to easily slide the collection box 21 out of the ventilation duct 2 for cleaning. The second handle 24 facilitates the replacement of the filter plates after long-term use. The two filter plates ensure that the gas undergoes two fine filtrations before being discharged, effectively blocking pollutants such as dust and chemical particles, and ensuring that the discharged gas meets the environmental protection requirements of the cleanroom. Therefore, even if a small amount of dust is carried up by the airflow during the cleaning process, it will be blocked by the second filter plate 8 and the first filter plate 7 and will not directly escape into the workshop.

[0044] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of the present invention (including the claims) is limited to these examples; within the framework of the present invention, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of the different aspects of the present invention as described above, which are not provided in the details for the sake of brevity.

[0045] This utility model is intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A high-cleanliness cleanroom for chip packaging, comprising a connecting plate (3) installed inside the workshop wall (1), characterized in that, A ventilation duct (2) is fixedly connected to one side of the connecting plate (3). A ventilation opening (4) is provided inside the connecting plate (3). The interior of the ventilation duct (2) is connected to the ventilation opening (4). A ventilation fan (6), a first filter plate (7), and a second filter plate (8) are installed inside one end of the ventilation duct (2). The second filter plate (8), the first filter plate (7), and the ventilation fan (6) are arranged in sequence along the airflow direction from the ventilation opening (4) to the ventilation fan (6). A flow guiding component for buffering and stratifying the gas in front of the filter plate is provided inside the ventilation duct (2). The flow guiding component includes multiple baffles (9) fixedly connected inside the ventilation duct (2). One side of the multiple baffles (9) is in contact with the side of the second filter plate (8) away from the first filter plate (7). The ventilation duct (2) is equipped with a cleaning component for cleaning multiple baffles (9).

2. The high-cleanliness cleanroom for chip packaging according to claim 1, characterized in that, The vent (4) is fixedly connected to a plurality of partitions (5). The top of one side of each of the partitions (5) is in contact with the bottom of one end of a plurality of baffles (9). The baffles (9) are inclined at the end in contact with the partitions (5).

3. The high-cleanliness cleanroom for chip packaging according to claim 1, characterized in that, The top of the baffle plate (9) is fixedly connected to a plurality of interceptor plates (10), and the interior of the plurality of interceptor plates (10) is provided with a plurality of second leak holes (25) for airflow diversion.

4. The high-cleanliness cleanroom for chip packaging according to claim 3, characterized in that, The ventilation duct (2) is internally fixedly connected with multiple U-shaped plates (12), the number of multiple baffles (9) is equal to the number of multiple U-shaped plates (12), and the positions of the multiple U-shaped plates (12) correspond to the positions of the multiple baffles (9).

5. The high-cleanliness cleanroom for chip packaging according to claim 4, characterized in that, The bottom of each of the U-shaped plates (12) is higher than the top of the corresponding baffles (9). A baffle (13) is fixedly connected to the top of the U-shaped plate (12). The height of the top of the baffle (13) is higher than the height of the top of the interceptor plate (10). The width of the baffle (9) is equal to the width of the second filter plate (8) and the first filter plate (7).

6. The high-cleanliness cleanroom for chip packaging according to claim 5, characterized in that, The cleaning assembly includes scrapers (14) that are slidably connected to the top of multiple baffles (9). The bottom of the scrapers (14) is provided with an inclined angle. The bottom of the multiple scrapers (14) is in contact with the top of the multiple baffles (9). The bottom of the scrapers (14) is provided with multiple adapter grooves (26). The positions of the multiple adapter grooves (26) are respectively corresponding to the positions of the interceptor plates (10).

7. The high-cleanliness cleanroom for chip packaging according to claim 6, characterized in that, A pull rod (15) is fixedly connected to one side of each of the multiple scrapers (14). The end of the pull rod (15) away from the scraper (14) passes through the interior of the U-shaped plate (12) and the side wall of the ventilation duct (2) and is fixedly connected to a pull plate (22).

8. The high-cleanliness cleanroom for chip packaging according to claim 6, characterized in that, The top of the baffle plate (9) is provided with a plurality of first leakage holes (11), which are arranged in a vertical and horizontal manner. The bottom of the ventilation duct (2) is slidably connected to a collection box (21), and the position of the top opening of the collection box (21) corresponds to the position of the baffle plate (9) and the U-shaped plate (12).

9. A high-cleanliness cleanroom for chip packaging according to claim 8, characterized in that, A plurality of fixed cylinders (16) are fixedly connected to one side of the scraper (14). A connecting rod (18) is slidably engaged inside the bottom of the fixed cylinder (16). A spring (17) is fixedly connected inside the fixed cylinder (16). The bottom of the spring (17) is fixedly connected to the top of the connecting rod (18). U-shaped rods (19) are fixedly connected to both sides of the bottom end of the connecting rod (18). A ball (20) is rotatably engaged at the end of the two U-shaped rods (19) away from the connecting rod (18). The diameter of the ball (20) is smaller than the diameter of the first leak hole (11). When the bottom of the ball (20) contacts the top of the baffle plate (9), the spring (17) is in a compressed state. The distance between the edges of the two U-shaped rods (19) is greater than the diameter of the first leak hole (11). The positions of the plurality of balls (20) correspond to the lateral positions of the plurality of first leak holes (11).

10. A high-cleanliness cleanroom for chip packaging according to claim 8, characterized in that, The collection box (21) is fixedly connected to one side of the ventilation duct (2) with a first handle (23), and the first filter plate (7) and the second filter plate (8) are fixedly connected to one side of the ventilation duct (2) with a second handle (24).

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