Condenser

Abstract

This utility model discloses a condenser, including a hollow shell with an inlet and an outlet. Multiple condensing elements are disposed within the shell. Multiple baffles divide the interior of the shell into multiple condensation zones for housing the condensing elements. Each baffle has a vent hole, the diameter of which is smaller than the diameter of the condensing element within the zone defined by the baffle. The volume of the condensing elements in the condensation zones gradually decreases along the direction from the inlet to the center of the shell and along the direction from the outlet to the center of the shell. By rationally arranging the condensing elements of different diameters in the condenser, the void ratio between the condensing elements at the inlet and outlet is larger, facilitating gas passage, while the void ratio between the condensing elements in the center of the condenser is smaller, resulting in better condensation of the gas in the condenser.

Description

Technical Field

[0001] This utility model relates to the field of condensation equipment technology, and in particular to a condenser. Background Technology

[0002] During the operation of semiconductor wet process equipment, the chemicals generated in the equipment will produce chemical waste gas after passing through high temperature, spraying and other processes. In order to prevent the chemical waste gas from condensing in the connecting pipeline before entering the terminal treatment equipment and causing waste liquid leakage, a condenser needs to be installed at the exhaust port of the equipment to pre-condense the chemical waste gas in advance.

[0003] Existing condenser structures cannot simultaneously guarantee condensation efficiency and smooth gas flow within the condenser. Utility Model Content

[0004] To overcome the problems existing in related technologies, this utility model provides a condenser.

[0005] According to a first aspect of the present disclosure, a condenser is provided, comprising:

[0006] The shell is designed as a hollow structure, and the shell is provided with an air inlet and an air outlet;

[0007] Multiple condenser components are housed within the casing;

[0008] Multiple baffles divide the interior of the housing into multiple condensation zones for placing condensing components. Each baffle has a vent hole, the diameter of which is smaller than the diameter of the condensing component in the condensation zone divided by the baffle.

[0009] The volume of the condenser in the condensation zone gradually decreases along the direction from the air inlet to the middle position of the housing and along the direction from the air outlet to the middle position of the housing.

[0010] In some embodiments, the condenser is configured as a hollow spherical structure.

[0011] In some embodiments, the condenser is configured as a metal foam ball.

[0012] In some embodiments, the surface of the condenser is provided with a hydrophobic coating.

[0013] In some embodiments, the condenser further includes a drain device disposed at the bottom of the housing, the condensation area being in communication with the bottom of the housing, and the drain device being used to drain liquid from the housing.

[0014] In some embodiments, the condenser further includes a plurality of observation devices disposed on the housing and corresponding to the position of each condensation zone. Each observation device includes a transparent area through which the condensation zone can be observed.

[0015] In some embodiments, the condenser further includes a humidity monitoring device disposed on the housing near the air outlet.

[0016] In some embodiments, the condenser further includes a flow guide disposed at the air inlet, which is used to guide the gas entering the housing.

[0017] In some embodiments, the condenser further includes a negative pressure monitoring device disposed at the air inlet of the housing.

[0018] In some embodiments, the air inlet and air outlet are respectively provided with connectors, which are used to connect to external pipelines.

[0019] The beneficial effects of this utility model are: by reasonably setting the arrangement of condensing elements of different diameters in the condenser, the void ratio between the condensing elements at the air inlet and outlet positions is larger, which facilitates the passage of gas, while the void ratio between the condensing elements in the middle position of the condenser is smaller, which makes the condensation effect of the gas in the condenser better. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram showing the installation position of a condenser according to an exemplary embodiment.

[0022] Figure 2 This is a schematic diagram of the internal structure of a condenser according to an exemplary embodiment.

[0023] Figure 3 This is a schematic diagram of the structure of a condenser according to an exemplary embodiment.

[0024] In the diagram: 1. Machine base; 2. Condenser; 3. Terminal processing equipment; 4. External piping;

[0025] 21. Condensing component; 22. Housing; 23. Baffle; 24. Observation device; 25. Humidity monitoring device; 26. Negative pressure monitoring device; 27. Drainage device; 28. Flow guide; 29. ​​First condensing zone; 210. Second condensing zone; 211. Third condensing zone;

[0026] 221. Air inlet; 222. Air outlet. Detailed Implementation

[0027] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. In the following description, when referring to the drawings, unless otherwise indicated, the same numerals in different drawings denote the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this invention. Rather, they are merely examples of apparatuses and methods consistent with some aspects of this invention as detailed in the appended claims.

[0028] The structure of the condenser in the relevant technology cannot simultaneously guarantee condensation efficiency and smooth gas flow in the condenser.

[0029] In order to address the problems existing in the related technologies, an exemplary embodiment of this disclosure provides a condenser 2.

[0030] like Figure 1 As shown, condenser 2 is located between machine 1 and terminal processing equipment 3, and condenser 2 is connected to terminal processing equipment 3 via external pipeline 4. The gas generated by machine 1 enters terminal processing equipment 3 for treatment through external pipeline 4. During the gas flow, it passes through condenser 2, which pre-condenses the waste gas in the gas, reducing its content and preventing condensation in external pipeline 4. This avoids the accumulation of waste liquid generated by waste gas condensation in external pipeline 4, which could lead to leakage. Machine 1 can be a semiconductor wet process machine, used in wet processing stages such as wafer cleaning, etching, resist removal, and electroplating in semiconductor fabrication. During operation, machine 1 generates waste gases such as H2SO4 and H3PO4, which need to be recovered and purified. Terminal processing equipment 3 treats the waste gas generated by machine 1 to ensure that the gases and liquids emitted into the environment are non-toxic and harmless substances. Furthermore, terminal processing equipment 3 can also recover and reuse useful gases or liquids, saving material costs.

[0031] like Figure 2 As shown, the condenser 2 includes a housing 22, multiple condensing elements 21 and multiple baffles 23, with the multiple condensing elements 21 and multiple baffles 23 disposed in the housing 22.

[0032] The housing 22 is a hollow structure with an inlet 221 and an outlet 222. The gas to be condensed enters the housing 22 through the inlet 221, flows within the housing 22 to the outlet 222, and then exits the condenser 2. In one example, such as... Figure 2As shown, the housing 22 is shaped like a hollow, curved tube, for example, an L-shaped pipe. Of course, it can be understood that the overall shape of the housing 22 can be arbitrarily set according to the actual application scenario and requirements. The positions of the air inlet 221 and air outlet 222 on the housing 22 can also be arbitrarily set according to actual needs. For example... Figure 1 and Figure 2 As shown, the condenser 2 is connected to the machine base 1 through the air inlet 221 and to the external pipeline 4 through the air outlet 222, and then to the terminal processing equipment 3.

[0033] Reference Figure 2 As shown, multiple baffles 23 are disposed in the housing 22, and the multiple baffles 23 divide the interior of the housing 22 into multiple condensation areas for placing condensing components 21. Each condensation area is provided with a condensing component 21, and the size of the condensing component 21 in different condensation areas can be different.

[0034] In one example, the diameter of the condenser 21 in the condensation region gradually decreases along the direction from the air inlet 221 to the midpoint of the housing 22, and along the direction from the air outlet 222 to the midpoint of the housing 22. That is, the diameter of the condenser 21 in the condensation region near the air inlet 221 and near the air outlet 222 is larger, while the diameter of the condenser 21 in the condensation region located in the midpoint of the housing 22 (such as at the corner of an L-shape) is smaller.

[0035] The baffles 23 are plate-shaped and perpendicular to the axis of the housing 22. The edges of the baffles 23 are connected to the inner wall of the housing 22, and the connection can be either fixed or detachable. Each baffle 23 has a vent hole, the diameter of which is smaller than the diameter of the condenser 21 in the condensation area defined by the baffle 23.

[0036] The number of baffles 23 can be arbitrarily set according to requirements. Each baffle 23 has a vent hole that extends through the baffle along its thickness direction to ensure that airflow between two adjacent condensation zones separated by the baffles 23 can pass through the vent hole. The diameter of the vent hole is smaller than the diameter of the condensing element 21 in the condensation zone divided by the baffles 23, to prevent the condensing element 21 from entering from one condensation zone to another, ensuring a stable number and distribution of condensing elements 21 in each condensation zone, while allowing gas to flow smoothly between the condensation zones through the vent hole, ensuring the continuity of the condensation process.

[0037] In one example, such as Figure 2As shown, four baffles 23 are provided, dividing the internal space of the housing 22 into three condensation regions: a first condensation region 29, a second condensation region 210, and a third condensation region 211. Multiple condensing elements 21 are placed in each of the three regions. The volume of the condensing elements 21 in the first and third condensation regions 29 and 211 is larger than that in the second condensation region 210. Specifically, when the condensing element is a regular sphere, the diameter of the condensing element 21 in the first and third condensation regions 29 and 211 is larger than that in the second condensation region 210; conversely, when the condensing element is an irregular shape, the volume of the condensing element 21 in the first and third condensation regions 29 and 211 is larger than that in the second condensation region 210.

[0038] In actual use, the gas generated by the machine 1 passes sequentially through the first condensation zone 29, the second condensation zone 210, and the third condensation zone 211. When the gas passes through the first condensation zone 29, there is a large void ratio (characterizing the gap between two independent condenser elements 21) between the larger diameter condenser elements 21, which is conducive to airflow and allows the gas to enter the condenser 2 more smoothly from the inlet 221. Similarly, the gas purified by condensation can also be discharged from the condenser 2 more smoothly through the outlet 222 via the outlet 221 through the third condensation zone 211. In the second condensation zone 210, the smaller diameter condenser elements 21 have smaller gaps between adjacent condenser elements, resulting in a slower airflow velocity. This allows for better condensation of the waste gas in the second condensation zone 210, ensuring the condensation purification effect.

[0039] In some possible embodiments, to ensure condensation effect, each condensation region can be filled with condensing elements. In other possible embodiments, to simultaneously consider airflow and condensation effect, a smaller number of larger diameter condensing elements can be filled in the first condensation region 29 and the third condensation region 211 to further increase the gap between the condensing elements and improve airflow velocity. At the same time, the second condensation region 210 is filled with smaller condensing elements to improve condensation effect.

[0040] Reference Figure 3 As shown, the condenser 21 is configured as a hollow spherical structure, and the surface of the condenser 21 is also provided with a hydrophobic coating.

[0041] The hollow design of the condenser 21 significantly increases the contact area between the condenser 21 and the gas, allowing the gas to come into more complete contact with the condenser 21, improving heat exchange efficiency and enhancing the condensation effect. The spherical structure of the condenser 21 creates a relatively turbulent airflow as the gas flows through it, enhancing gas disturbance and further promoting heat transfer. In addition, the hollow spherical structure also has good flowability, without causing excessive obstruction to gas flow, ensuring smooth gas flow within the casing 22.

[0042] The hydrophobic coating on the surface of the condenser 21 effectively prevents condensate from adhering to its surface. When waste gas in the gas liquefies on the surface of the condenser 21 to form waste liquid, the hydrophobic coating causes the waste liquid to quickly slide off the surface of the condenser 21, preventing the waste liquid from accumulating and forming a liquid film on the surface of the condenser 21. The presence of a liquid film would hinder heat exchange between the gas and the condenser 21, reducing condensation efficiency. The application of the hydrophobic coating effectively solves this problem, ensuring that the condenser 21 can always conduct efficient heat exchange with the gas.

[0043] The hydrophobic material is SiO2 nanoparticles. Understandably, other types of materials can also be selected for hydrophobic materials depending on actual needs.

[0044] In one example, the condenser 21 is configured as a metal foam ball.

[0045] The metal foam spheres contain numerous pores and channels, which not only increase the contact area with the gas but also provide excellent thermal conductivity. The high thermal conductivity of the metal material itself allows heat from the gas to be quickly transferred to the metal foam spheres, ensuring effective condensation. Simultaneously, the porous structure of the metal foam spheres also acts as a filter, removing small particulate impurities and improving the purity of the condensed gas. The condenser component 21 is made of metal foam, a lightweight porous metal material with a three-dimensional network structure. Its notable characteristic is a porosity of 70%-90%. The microscopic topological features of the through-pore structure are demonstrated using a tetrahedral unit cell model, showing a positive correlation between the diameter of the rod-shaped skeleton and the pore size. In terms of heat transfer performance, using metal foam with a porosity of 90% can reduce the friction surface temperature by 16%-36% and exhibits superior temperature uniformity compared to traditional materials.

[0046] Reference Figure 2 As shown, a drain device 27 is also provided at the bottom of the shell 22 in the condenser 2. The condensation area in the condenser 2 is connected to the bottom of the shell 22. The drain device 27 is used to drain the liquid in the shell 22.

[0047] During the condensation process, the waste liquid formed after the waste gas in the gas liquefies will flow downwards due to gravity and eventually collect at the bottom of the shell 22. The drain device 27 can discharge the waste liquid in the shell 22 in a timely manner, avoiding the accumulation of waste liquid in the shell 22, which would affect the gas flow and condensation effect, as well as prevent the waste liquid from corroding the bottom of the shell 22 and shortening the service life of the condenser 2.

[0048] In one example, the drain device 27 is a drain valve, and it is located at the bottom of the housing 22 near the vent 222. The waste liquid generated by condensation in the first condensation zone 29, the second condensation zone 210, and the third condensation zone 211 will flow to the bottom of the housing 22 under the action of gravity. At this time, opening the drain device 27 will drain the waste liquid.

[0049] Reference Figure 2 As shown, an observation device 24 is also provided at the position corresponding to each condensation zone in the condenser 2. The observation device 24 is installed on the housing 22 and has a transparent area, through which the condensation zone can be observed. This allows the operator to directly observe the situation in the condensation zone, such as the status of the condensing element 21, the generation and flow of waste liquid, etc. If any abnormality is found in the condensing element 21, such as blockage or damage, or if the waste liquid flow is not smooth, the operator can take appropriate measures in a timely manner to prevent the condenser 2 from malfunctioning and ensure its normal operation.

[0050] In one example, the observation device 24 is a quick-release flange, such as Figure 2 As shown, three observation devices 24 are provided, with their positions corresponding to the first condensation zone 29, the second condensation zone 210, and the third condensation zone 211, respectively, to observe the working condition of each condensation zone. If an abnormal working condition of the condenser 2 is detected through the observation devices 24, since the observation devices 24 are quick-release flanges, the abnormality of the condenser 2 can be dealt with promptly by removing the observation devices 24. For example, the number of condensing components 21 can be increased or decreased based on the observed condensation effect.

[0051] Reference Figure 2 As shown, the condenser 2 is also equipped with a humidity monitoring device 25 and a negative pressure monitoring device 26. The humidity monitoring device 25 is located on the housing 22 near the air outlet 222, and the negative pressure monitoring device 26 is located on the housing 22 near the air inlet 221.

[0052] During the operation of condenser 2, it is necessary to ensure both the condensation effect and the ability of the gas generated by machine 1 to flow into condenser 2 from machine 1 only, without backflow.

[0053] Humidity is an important indicator for measuring the condensation effect of a gas. By monitoring the humidity of the gas, it can be determined whether the condenser 2 is operating as expected. In one example, the humidity monitoring device 25 includes a humidity sensor and a display instrument. The humidity sensor can detect the humidity of the gas in real time and transmit the detected signal to the display instrument, which then displays the humidity value intuitively for easy viewing by the operator. If the detected gas humidity is high, it indicates that the condensation effect is poor, and the number of condensing elements 21 needs to be increased in time to improve the condensation effect. In this example, the threshold for gas humidity is set to 35%. When the gas humidity is close to the threshold, the internal condition of the condenser 2 needs to be observed through the observation device 24 to further determine whether the number of condensing elements 21 needs to be increased; when the gas humidity exceeds the threshold, the number of condensing elements 21 needs to be increased immediately to improve the condensation effect and prevent excessive exhaust gas from flowing out.

[0054] The negative pressure monitoring device 26 is used to detect the negative pressure between the machine 1 and the condenser 2, ensuring that gas can flow from the machine 1 to the condenser 2 without backflow. If backflow occurs, exhaust gas will enter the machine 1, affecting its normal production. When the negative pressure monitoring device 26 detects that the pressure on the machine 1 side is lower than the pressure in the condenser 2, pressurization measures need to be taken immediately to prevent backflow of exhaust gas.

[0055] Reference Figure 2 As shown, a guide member 28 is provided at the air inlet of the housing 22 in the condenser 2. The guide member 28 is used to guide the gas entering the housing 22.

[0056] By setting the flow guide 28, the gas can be kept evenly distributed when entering the condenser 2, preventing the gas from concentrating in a part of the condenser 2, which would cause some condensing elements 21 to not be in contact with the gas or not be in sufficient contact with the gas, thus affecting the condensation effect.

[0057] In one example, the air guide 28 includes three air guide plates evenly distributed in a direction perpendicular to the axial direction of the housing 22. The three air guide plates are disposed inside the housing 22 near the air inlet 221, and the extension direction of the three air guide plates is parallel to the axial direction of the housing 22.

[0058] In an exemplary embodiment, the air inlet 221 and the air outlet 222 are respectively provided with connectors (not shown in the figure), and the condenser 2 is connected to the external pipeline 4 through the connectors. The structure and size of the connectors need to match the external pipeline 4.

[0059] In one example, the connector uses a connecting flange and includes a sealing gasket to ensure a tight seal at the connection point. A through-hole is provided in the center of the sealing gasket to ensure smooth gas flow.

[0060] In summary, by placing the condenser 2 provided in this disclosure between the machine 1 and the terminal processing equipment 3, the exhaust gas in the exhaust gas discharged from the machine 1 can be condensed in advance, avoiding the exhaust gas from condensing into waste liquid in the external pipeline 4, which would lead to leakage.

[0061] The condenser 2 has multiple condensing elements 21 and multiple baffles 23 within its housing 22. The baffles 23 divide the internal space of the housing 22 into multiple condensation zones. The multiple condensing elements 21 are distributed in different condensation zones, and the volume of the condensing elements 21 near the gas inlet 221 and the gas outlet 222 is larger than that of the condensing elements 21 located in the middle part of the housing 22. Because the condensing elements 21 near the gas inlet 221 and the gas outlet 222 have a larger volume and a larger void ratio, the gas generated by the machine 1 can more easily enter or exit the condenser 2. Simultaneously, because the condensing elements 21 located in the middle part of the housing 22 have a smaller volume and a smaller void ratio, the gas generated by the machine 1 can be better condensed in the middle position of the condenser 2.

[0062] Other embodiments of the present invention will readily occur to those skilled in the art upon consideration of the specification and practice of the invention disclosed herein. This application is intended to cover any variations, uses, or adaptations of the present invention that follow the general principles of the present invention and include common knowledge or customary techniques in the art not disclosed herein. The specification and examples are to be considered illustrative only, and the true scope and spirit of the present invention are indicated by the following claims.

[0063] It should be understood that this invention is not limited to the precise structure described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of this invention is limited only by the appended claims.

Claims

1. A condenser, characterized in that, include: The housing is configured as a hollow structure, and the housing is provided with an air inlet and an air outlet; Multiple condenser elements are disposed within the housing; Multiple baffles divide the interior of the housing into multiple condensation zones for placing condensing components. Each baffle has a vent hole, the diameter of which is smaller than the diameter of the condensing component in the condensation zone divided by the baffle. The volume of the condenser in the condensation region gradually decreases along the direction from the air inlet to the middle position of the housing and along the direction from the air outlet to the middle position of the housing.

2. The condenser according to claim 1, characterized in that, The condenser is configured as a hollow spherical structure.

3. The condenser according to claim 1, characterized in that, The condenser is configured as a metal foam ball.

4. The condenser according to claim 1, characterized in that, The surface of the condenser is provided with a hydrophobic coating.

5. The condenser according to any one of claims 1-4, characterized in that, The condenser also includes a draining device, which is located at the bottom of the housing. The condensation area is connected to the bottom of the housing, and the draining device is used to drain the liquid in the housing.

6. The condenser according to any one of claims 1-4, characterized in that, The condenser also includes multiple observation devices, which are disposed on the housing and corresponding to the position of each condensation area. Each observation device includes a transparent area through which the condensation area can be observed.

7. The condenser according to any one of claims 1-4, characterized in that, The condenser also includes a humidity monitoring device, which is located on the housing near the air outlet.

8. The condenser according to any one of claims 1-4, characterized in that, The condenser also includes a flow guide, which is disposed at the air inlet and is used to guide the gas entering the housing.

9. The condenser according to any one of claims 1-4, characterized in that, The condenser also includes a negative pressure monitoring device, which is located at the air inlet of the housing.

10. The condenser according to any one of claims 1-4, characterized in that, The air inlet and the air outlet are each provided with a connector, which is used to connect to an external pipeline.

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