A quartz furnace tube surface defect detection apparatus

Abstract

This utility model discloses a surface defect detection device for quartz furnace tubes, belonging to the technical field of defect detection equipment. It includes a support frame, with a traction frame movably connected to the top surface of the support frame. Two traction frames are provided, and a fixed rod is installed between the two traction frames. A tube clamping mechanism is fixedly connected to the outer wall of the end of the traction frame. A cylinder is fixedly installed on the top surface of the traction frame, and a fixed frame is fixedly connected to one side of the outer wall of the support frame. This utility model places the quartz furnace tube on the tube clamping mechanism and uses a cylinder to drive the clamping jaws for clamping and fixing. An electric cylinder drives the two traction frames to move, thereby moving the quartz furnace tube clamped on the tube clamping mechanism within an illumination ring plate. A CCD camera takes an image of the furnace tube surface, and the illumination ring plate provides surround lighting to the quartz furnace tube surface, reducing shadows and reflections and ensuring the furnace tube surface is fully illuminated, making defects easier to detect and improving detection accuracy and precision.

Description

Technical Field

[0001] This utility model relates to the field of defect detection equipment technology, and in particular to a defect detection device for the surface of quartz furnace tubes. Background Technology

[0002] In fields such as semiconductor manufacturing and photovoltaic industry, quartz furnace tubes are widely used as key components in high-temperature heat treatment processes. The surface quality of quartz furnace tubes directly affects the performance and yield of products. Tiny surface defects, such as cracks, bubbles, scratches, and impurities, can cause furnace tube rupture under high-temperature conditions, affect internal process reactions, and lead to contamination in chip manufacturing, a decline in the quality of silicon wafer production, and huge economic losses.

[0003] However, in the existing technology, with the development of machine vision technology, most of the inspection equipment based on machine vision is used to detect defects on the surface of quartz furnace tubes. However, due to the certain curvature and optical characteristics of the surface of quartz furnace tubes, ordinary lighting and imaging methods are difficult to guarantee the clarity and uniformity of image acquisition, which makes it difficult to extract defect features and affects the detection accuracy and reliability. Utility Model Content

[0004] The purpose of this invention is to solve the problem in the existing technology that, due to the certain curvature and optical characteristics of the surface of quartz furnace tubes, ordinary lighting and imaging methods are difficult to guarantee the clarity and uniformity of image acquisition, resulting in difficulty in extracting defect features and affecting the detection accuracy and reliability. Therefore, this invention proposes a defect detection device for the surface of quartz furnace tubes.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a quartz furnace tube surface defect detection device, comprising a support frame, a traction frame movably connected to the top surface of the support frame, two traction frames being provided, a fixed rod installed between the two traction frames, a pipe clamp mechanism fixedly connected to the outer wall of the end of the traction frame, a cylinder fixedly installed on the top surface of the traction frame, a fixed frame fixedly connected to one side of the outer wall of the support frame, an illumination ring plate fixedly connected to the top of the fixed frame, a CCD camera fixedly connected to the middle outer wall of the fixed frame, supplementary lights installed on both sides of the CCD camera, the support frame including a fixed box, an electric cylinder fixedly installed on the inner wall of the fixed box, and one of the traction frames being drively connected to one end of the telescopic rod of the electric cylinder.

[0006] Preferably, the pipe clamping mechanism includes a first connecting rod, a second connecting rod, grippers, and a transmission box. There are two grippers, which are fixedly connected to one end of the first connecting rod and one end of the second connecting rod, respectively. One end of the extension rod of the cylinder is fixedly connected to the outer wall of the first connecting rod.

[0007] Preferably, the other ends of both connecting rod one and connecting rod two are fixedly connected with toothed plates, and the two toothed plates are symmetrically arranged inside connecting rod one.

[0008] Preferably, the toothed plates are movably connected to the inner wall of the transmission box, and the inner wall of the transmission box is rotatably connected to a gear, with the two toothed plates meshing with the two sides of the gear.

[0009] Preferably, the bottom surface of the fixed box is fixedly connected to a base frame.

[0010] Preferably, one end of the telescopic rod of the electric cylinder is fixedly connected to a traction rod, and the top end of the traction rod is fixedly connected to the bottom surface of the traction frame.

[0011] Preferably, a guide groove is provided through the top surface of the fixed box, and the traction rod is movably connected to the inner wall of the guide groove.

[0012] Compared with the prior art, the advantages and positive effects of this utility model are as follows:

[0013] 1. In this utility model, the quartz furnace tube is placed on the tube clamping mechanism and clamped and fixed by the cylinder-driven gripper. The electric cylinder drives two traction frames to move, thereby moving the quartz furnace tube clamped on the tube clamping mechanism within the illumination ring plate. The CCD camera takes pictures of the surface of the furnace tube, and the illumination ring plate provides surround lighting to the surface of the quartz furnace tube, reducing shadows and reflections and fully illuminating the surface of the furnace tube, making defects easier to detect and improving detection accuracy and precision.

[0014] 2. In this utility model, the setting of the traction rod facilitates the electric cylinder to pull and control the traction frame, and the setting of the fixed rod facilitates the user to adjust the distance between the two traction frames, thereby adapting to the testing of quartz furnace tubes of different lengths. Attached Figure Description

[0015] Figure 1 This utility model provides a three-dimensional structural schematic diagram of a quartz furnace tube surface defect detection device;

[0016] Figure 2 This utility model provides a side view structural diagram of a quartz furnace tube surface defect detection device;

[0017] Figure 3 This utility model provides a schematic diagram of the internal structure of the fixing box for a quartz furnace tube surface defect detection device;

[0018] Figure 4 This invention provides a schematic diagram of the internal structure of the transmission box of a quartz furnace tube surface defect detection device.

[0019] Legend: 1. Support frame; 11. Fixing box; 12. Base frame; 13. Guide groove; 14. Electric cylinder; 15. Traction rod; 2. Traction frame; 21. Fixing rod; 3. Fixing frame; 31. Illumination ring plate; 32. CCD camera; 33. Fill light; 4. Pipe clamp mechanism; 41. Link 1; 42. Link 2; 43. Gripper; 44. Transmission box; 45. Gear; 46. Gear plate; 5. Cylinder. Detailed Implementation

[0020] To better understand the above-mentioned objectives, features, and advantages of this utility model, the present utility model will be further described below with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0021] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed in the following specification.

[0022] Example 1: As Figure 1 - Figure 4 As shown, this utility model provides a surface defect detection device for quartz furnace tubes, including a support frame 1. A traction frame 2 is movably connected to the top surface of the support frame 1. Two traction frames 2 are provided, and a fixing rod 21 is installed between the two traction frames 2. A pipe clamping mechanism 4 is fixedly connected to the outer wall of the end of the traction frame 2. A cylinder 5 is fixedly installed on the top surface of the traction frame 2. A fixing frame 3 is fixedly connected to one side of the outer wall of the support frame 1. An illumination ring plate 31 is fixedly connected to the top of the fixing frame 3, and a CCD camera 3 is fixedly connected to the middle outer wall of the fixing frame 3. 2. Both sides of the CCD camera 32 are equipped with supplementary lights 33. The support frame 1 includes a fixed box 11. An electric cylinder 14 is fixedly installed on the inner wall of the fixed box 11. One of the traction frames 2 is connected to one end of the telescopic rod of the electric cylinder 14. A base frame 12 is fixedly connected to the bottom surface of the fixed box 11. A traction rod 15 is fixedly connected to one end of the telescopic rod of the electric cylinder 14. The top end of the traction rod 15 is fixedly connected to the bottom surface of the traction frame 2. A guide groove 13 is opened through the top surface of the fixed box 11. The traction rod 15 is movably connected to the inner wall of the guide groove 13.

[0023] The specific settings and functions of this embodiment are described in detail below. The quartz furnace tube is placed on the tube clamping mechanism 4 and clamped and fixed by the cylinder 5 driving the gripper 43. The electric cylinder 14 drives the two traction frames 2 to move, thereby moving the quartz furnace tube clamped on the tube clamping mechanism 4 within the illumination ring plate 31. The CCD camera 32 takes pictures of the surface of the furnace tube. The illumination ring plate 31 provides surround lighting to the surface of the quartz furnace tube, reducing shadows and reflections and fully illuminating the surface of the furnace tube, making defects easier to find and improving detection accuracy. The traction rod 15 facilitates the electric cylinder 14 to pull and control the traction frame 2. The fixing rod 21 allows the user to adjust the distance between the two traction frames 2, thus adapting to the detection of quartz furnace tubes of different lengths.

[0024] Example 2: Figure 1 - Figure 4 As shown, the pipe clamping mechanism 4 includes a first connecting rod 41, a second connecting rod 42, a gripper 43, and a transmission box 44. There are two grippers 43, which are fixedly connected to one end of the first connecting rod 41 and the second connecting rod 42, respectively. One end of the telescopic rod of the cylinder 5 is fixedly connected to the outer wall of the first connecting rod 41. The other ends of the first connecting rod 41 and the second connecting rod 42 are both fixedly connected to toothed plates 46. The two toothed plates 46 are symmetrically arranged inside the first connecting rod 41. The toothed plates 46 are movably connected to the inner wall of the transmission box 44. The inner wall of the transmission box 44 is rotatably connected to a gear 45. The two toothed plates 46 are meshed with the two sides of the gear 45.

[0025] The overall effect of this embodiment is that, through the meshing transmission of gear 45 and toothed plate 46, when the cylinder 5 controls the movement of connecting rod 41, connecting rod 42 moves synchronously with connecting rod 41 to achieve clamping or loosening, thereby achieving the clamping of the quartz furnace tube to be tested.

[0026] The device is used as follows: During use, the user places the quartz furnace tube on the clamping mechanism 4 and uses the cylinder 5 to drive the gripper 43 for clamping and fixing. The electric cylinder 14 drives the two traction frames 2 to move, thereby moving the quartz furnace tube clamped on the clamping mechanism 4 within the illumination ring plate 31. The illumination ring plate 31 provides surround lighting to the surface of the quartz furnace tube, reducing shadows and reflections and ensuring the surface is fully illuminated, making defects easier to detect. A CCD camera 32 takes images of the furnace tube surface, and the acquired images are transmitted to the control system and host computer software. Through image processing algorithms and deep learning models, defect features in the images are extracted and analyzed to determine the presence of defects such as cracks, bubbles, and scratches, and to determine the location, size, and type of the defects.

[0027] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any other way. Any person skilled in the art may make changes or modifications to the above-disclosed technical content to create equivalent embodiments for application in other fields. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present utility model without departing from the technical solution of the present utility model shall still fall within the protection scope of the technical solution of the present utility model.

Claims

1. A quartz furnace tube surface defect detection apparatus comprising a support frame (1), characterized in that: The top surface of the support frame (1) is movably connected to a traction frame (2). There are two traction frames (2). A fixed rod (21) is installed between the two traction frames (2). A pipe clamp mechanism (4) is fixedly connected to the outer wall of the end of the traction frame (2). A cylinder (5) is fixedly installed on the top surface of the traction frame (2). A fixed frame (3) is fixedly connected to one side of the outer wall of the support frame (1). A lighting ring plate (31) is fixedly connected to the top of the fixed frame (3). A CCD camera (32) is fixedly connected to the middle outer wall of the fixed frame (3). A supplementary light (33) is installed on both sides of the CCD camera (32). The support frame (1) includes a fixed box (11). An electric cylinder (14) is fixedly installed on the inner wall of the fixed box (11). One of the traction frames (2) is connected to one end of the telescopic rod of the electric cylinder (14) via a transmission.

2. The quartz furnace tube surface defect inspection apparatus according to claim 1, characterized by: The pipe clamping mechanism (4) includes a first connecting rod (41), a second connecting rod (42), a clamp (43) and a transmission box (44). There are two clamps (43), which are fixedly connected to one end of the first connecting rod (41) and the second connecting rod (42) respectively. One end of the telescopic rod of the cylinder (5) is fixedly connected to the outer wall of the first connecting rod (41).

3. A quartz furnace tube surface defect inspection apparatus according to claim 2, characterized by: The other ends of both connecting rod 1 (41) and connecting rod 2 (42) are fixedly connected with toothed plates (46), and the two toothed plates (46) are symmetrically arranged inside connecting rod 1 (41).

4. The apparatus for detecting surface defects of a quartz furnace tube according to claim 3, characterized by: The toothed plates (46) are movably connected to the inner wall of the transmission box (44), and the inner wall of the transmission box (44) is rotatably connected to the gear (45). The two toothed plates (46) are meshed with the two sides of the gear (45).

5. The apparatus for detecting surface defects of a quartz furnace tube according to claim 1, characterized by: The bottom surface of the fixed box (11) is fixedly connected to the base frame (12).

6. The apparatus for detecting surface defects of a quartz furnace tube according to claim 1, characterized by: One end of the telescopic rod of the electric cylinder (14) is fixedly connected to a traction rod (15), and the top end of the traction rod (15) is fixedly connected to the bottom surface of the traction frame (2).

7. A quartz furnace tube surface defect inspection apparatus according to claim 6, characterized by: The top surface of the fixed box (11) is provided with a guide groove (13), and the traction rod (15) is movably connected to the inner wall of the guide groove (13).

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