A spray plate cleaning device

Abstract

This utility model relates to the field of semiconductor processing technology and provides a spray plate cleaning device, including a housing. The housing includes a cleaning chamber and a flow path chamber. The cleaning chamber is provided with a base, a flow distribution component, and a fixing component. The flow path chamber is provided with a cleaning liquid tank. The base is provided with a spray plate placement slot. The fixing component is used to fix the spray plate to the spray plate placement slot. The flow distribution component is located in the inner cavity of the base and below the spray plate. The flow distribution component is provided with multiple through holes. The bottom of the inner cavity of the base is provided with a liquid inlet. The cleaning liquid tank is connected to the liquid inlet through a liquid inlet pipe. The liquid inlet pipe is provided with a pressurizing component. The cleaning liquid tank is provided with a return port. The cleaning liquid flows out of the base from the liquid inlet and flows back to the cleaning liquid tank through the return port along the return pipe for recycling.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor processing technology, and in particular relates to a spray plate cleaning device. Background Technology

[0002] Currently, the main fabrication processes for modern very large-scale integrated circuits include thin film preparation (CVD, PVD), diffusion doping, ion implantation, high-temperature processes (oxidation, annealing), photolithography, and etching. Among these, etching is a crucial step in wafer fabrication, primarily involving the selective removal of unwanted materials from the silicon wafer surface using chemical or physical methods. Dry etching utilizes the ionization of reactive gases in a high-frequency electric field to form plasma, enabling precise etching under the influence of this plasma. The spray disk is one of the most critical core components of a dry etching machine.

[0003] The spray plate is a disc-shaped material with a certain thickness and a uniformly distributed number of micropores. It is used to disperse plasma gas, thereby ensuring that the plasma bombards the wafer surface evenly. With the increasingly refined layout design of very large-scale integrated circuits, current wafer fabrication processes have generally entered the nanometer era, thus placing extremely high demands on the cleanliness of the entire process. Since the spray plate and the wafer are in direct contact within the dry etching machine cavity, the spray plate also needs to have a high degree of cleanliness to avoid contamination of the wafer during dry etching. The cleanliness of the spray plate is mainly reflected in the absence of a large number of particles, metals, and organic matter on its surface and within its micropores. Traditional cleaning methods typically involve immersing the spray plate in a tank filled with cleaning solution using a basket or similar support fixture. The liquid molecules undergo random Brownian motion, reacting with contaminants through physical or chemical means to remove them. However, in this method, the cleaning solution remains stationary, and it is particularly difficult for the liquid to freely diffuse into the high aspect ratio micropores, requiring a long immersion time and resulting in unsatisfactory cleaning effects.

[0004] To solve the above-mentioned technical problems, this utility model designs a spray plate cleaning device. Utility Model Content

[0005] This utility model provides a spray plate cleaning device, which aims to solve the problems of low cleaning efficiency and unsatisfactory cleaning effect of spray plate cleaning.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a spray plate cleaning device, comprising a housing, the housing including a cleaning chamber and a flow path chamber, the cleaning chamber being provided with a base, a diversion component, and a fixing component, the flow path chamber being provided with a cleaning liquid tank, the base being provided with a spray plate placement slot, the fixing component being used to fix the spray plate in the spray plate placement slot, the diversion component being located in the inner cavity of the base and below the spray plate, the diversion component being provided with multiple through holes, the bottom of the inner cavity of the base being provided with a liquid inlet, the cleaning liquid tank being connected to the liquid inlet through a liquid inlet pipe, the liquid inlet pipe being provided with a pressurizing component, the cleaning liquid tank being provided with a return port, the cleaning liquid flowing out of the base from the liquid inlet, flowing back to the cleaning liquid tank along the return pipe through the return port for recycling.

[0007] Based on the above technical solution, the bottom of the base is provided with a liquid outlet, which is connected to an external waste liquid pipe through a liquid outlet pipe for discharging waste cleaning liquid.

[0008] Furthermore, the inlet is provided with a first valve, the outlet is provided with a second valve, and the return pipe and the inlet pipe are provided with a third valve.

[0009] Based on the above technical solution, the base cavity is provided with a mounting groove in the circumference. The diversion component includes an annular body and a first diversion plate and a second diversion plate arranged vertically. The annular body is embedded in the mounting groove. The through holes on the first diversion plate and the second diversion plate are staggered. A liquid storage cavity is provided between the second diversion plate and the bottom wall of the base cavity. There is a gap between the first diversion plate and the second diversion plate.

[0010] Furthermore, the fixing component includes a fixing part, a rotating part, and a pin. The fixing part is fixedly connected to the top of the base, and the rotating part is rotatably connected to the fixing part. One end of the rotating part near the center of the base has a through hole along the axial direction of the spray plate. The pin passes through the through hole and can move in the direction of approaching or moving away from the spray plate. One end of the pin abuts against the spray plate.

[0011] Preferably, the spray tray placement groove includes a first placement groove and a second placement groove, the diameter of the first placement groove is larger than the diameter of the second placement groove, and the second placement groove is disposed on the bottom wall of the first placement groove.

[0012] Furthermore, the spray tray cleaning equipment also includes an annular seal. The bottom walls of the first and second placement slots are provided with seal receiving slots. The annular seal is located in the seal receiving slot. When the spray tray is placed in the first or second placement slot, the annular seal is in contact with the bottom wall of the spray tray.

[0013] Based on the above technical solution, the cleaning chamber is provided with a liquid inlet, which is connected to the cleaning liquid tank through a liquid inlet channel.

[0014] Furthermore, the spray plate cleaning equipment also includes a base cover, which is placed on the base and a sealing element is provided between the base cover and the base. The base cover is connected to the liquid filling port so that the cleaning liquid accumulated in the base flows back to the cleaning liquid tank.

[0015] Compared with related technologies, the beneficial effects of this utility model are as follows:

[0016] This invention places the spray plate in a spray plate placement slot and secures it with a fixing component. Cleaning fluid flows from the cleaning fluid tank through the inlet pipe. Under the pressure of the pressurizing component, the cleaning fluid enters through the inlet, and the liquid level slowly rises into the base, then slowly rises to the distribution component. After flowing through multiple through holes in the distribution component, it rises to the height of the spray plate. By controlling the operation of the pressurizing component, the cleaning fluid level rises and falls multiple times, flowing multiple times through the surface of the spray plate and into multiple micropores, thus performing multiple cleaning operations on the spray plate. The distribution component design allows the cleaning fluid level to rise more slowly and evenly, resulting in a more thorough cleaning of the spray plate. The pressurized cleaning fluid not only cleans the surface of the spray plate but also thoroughly cleans the deep micropores of the spray plate, improving the cleaning effect. Compared to static cleaning fluid, dynamic and pressurized cleaning fluid has a greater cleaning force, improving cleaning efficiency and quality. After cleaning the micropores of the spray plate, the cleaning fluid falls back to the diversion component, flows back to the bottom wall of the base cavity through the through hole of the diversion component, flows out of the base through the inlet, and flows back to the cleaning fluid tank through the return pipe, thus circulating for reuse. This significantly reduces energy consumption, is energy-saving and environmentally friendly, and the recycling of cleaning fluid reduces the need for manual intervention, thereby improving cleaning efficiency to a certain extent. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of this utility model. For those skilled in the art, other embodiments can be derived from the provided drawings without creative effort.

[0018] Figure 1 This is a structural schematic diagram of a spray tray cleaning device provided by this utility model;

[0019] Figure 2 This utility model provides Figure 1 A schematic diagram of the cross-sectional structure along the AA direction shown in the figure;

[0020] Figure 3This utility model provides Figure 2 An enlarged structural diagram of part A shown in the figure;

[0021] Figure 4 This is a schematic diagram of another spray plate cleaning device provided by this utility model;

[0022] Figure 5 This utility model provides Figure 4 A schematic diagram of the cross-sectional structure along the BB direction shown in the figure;

[0023] Figure 6 This is an exploded structural diagram of the spray plate, diversion component and base provided by this utility model;

[0024] Figure 7 This is a schematic diagram of the structure of the spray plate cleaning device with a base cover provided by this utility model.

[0025] In the diagram: 1. Base; 11. Spray plate placement slot; 111. First placement slot; 112. Second placement slot; 12. Liquid inlet; 121. Liquid inlet pipe; 122. Pressurizing component; 13. Liquid outlet; 131. Liquid outlet pipe; 14. Mounting slot; 2. Cleaning fluid tank; 21. Liquid return port; 211. Liquid return pipe; 3. Diverting assembly; 31. Through hole; 32. Annular body; 33. First diverting plate; 34. Second diverting plate; 35. Liquid storage chamber; 36. Gap; 4. Fixing assembly; 41. Fixing part; 42. Rotating part; 43. Pin; 5. Annular seal; 51. Seal receiving slot; 6. Housing; 61. Cleaning chamber; 611. Liquid inlet; 612. Liquid inlet channel; 62. Flow path chamber; 7. Base cover; 8. Spray plate. Detailed Implementation

[0026] The present invention will be further described below with reference to the accompanying drawings and examples:

[0027] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0028] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0029] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0030] Combination Figure 1-3 As shown in the figure, this embodiment of the present disclosure provides a spray plate cleaning device, including a housing 6. The housing includes a cleaning chamber 61 and a flow path chamber 62. The cleaning chamber 61 is provided with a base 1, a diversion component 3 and a fixing component 4. The flow path chamber 62 is provided with a cleaning liquid tank 2. The base 1 is provided with a spray plate 8 placement groove 11. The fixing component 4 is used to fix the spray plate 8 to the spray plate 8 placement groove 11. The diversion component 3 is located in the inner cavity of the base 1 and below the spray plate 8. The diversion component 3 is provided with multiple through holes 31. The bottom of the inner cavity of the base 1 is provided with a liquid inlet 12. The cleaning liquid tank 2 is connected to the liquid inlet 12 through a liquid inlet pipe 121. The liquid inlet pipe 121 is provided with a pressurizing component 122. The cleaning liquid tank 2 is provided with a return port 21. The cleaning liquid flows out of the base 1 from the liquid inlet 12 and flows back to the cleaning liquid tank 2 through the return port 21 along the return pipe 211 for recycling.

[0031] The spray plate cleaning equipment provided in this embodiment involves placing the spray plate 8 in the spray plate placement groove 11 and fixing it with the fixing component 4. Cleaning fluid flows from the cleaning fluid tank 2 through the inlet pipe 121. Under the pressure of the pressurizing component, the cleaning fluid enters through the inlet, and the liquid level slowly rises to the base, then slowly rises to the diversion component. After flowing through multiple through holes in the diversion component, it rises to the height of the spray plate. By controlling the operation of the pressurizing component, the cleaning fluid level rises and falls multiple times, flowing multiple times through the surface of the spray plate and into multiple micropores, thus performing multiple cleaning operations on the spray plate. The diversion component design allows the cleaning fluid level to rise more slowly and evenly, resulting in more thorough cleaning of the spray plate. The pressurized cleaning fluid not only cleans the surface of the spray plate 8, but also thoroughly cleans the deep micropores of the spray plate 8, improving the cleaning effect. Compared with static cleaning fluid, dynamic and pressurized cleaning fluid has a greater cleaning force, improving cleaning efficiency and quality. After cleaning the micropores of the spray plate 8, the cleaning fluid falls back to the diversion component 3, flows back to the bottom wall of the inner cavity of the base 1 through the through hole 31 of the diversion component 3, flows out of the base 1 through the inlet 12, and flows back to the cleaning fluid tank 2 through the return pipe 211 and the return port 21, thus circulating for reuse. This significantly reduces energy consumption, is energy-saving and environmentally friendly, and the recycling of cleaning fluid can reduce the need for manual intervention, thereby improving cleaning efficiency to a certain extent.

[0032] Based on the above technical solutions, such as Figure 4 and Figure 5 As shown, the bottom of the base 1 is provided with a liquid outlet 13, which is connected to an external waste liquid pipe through a liquid outlet pipe 131 for discharging waste cleaning liquid.

[0033] After the cleaning fluid has finished cleaning, it flows through the through hole 31 of the diversion component 3 to the bottom of the base 1, opens the outlet 13, and allows the cleaning fluid to flow out of the base 1 from the outlet 13. After flowing through the outlet pipe 131, it flows out of the spray plate cleaning equipment and is discharged through the external waste liquid pipe, thus completing the entire cleaning process.

[0034] Furthermore, the inlet 12 is equipped with a first valve, the outlet 13 is equipped with a second valve, and a third valve is provided at the junction of the return pipe 211 and the inlet pipe 121. Specifically, the third valve is a two-position three-way valve.

[0035] During the cleaning process, the first and second valves are initially closed, while the third valve is initially connected to the inlet 12 and the inlet pipe 121. First, the first valve is opened, and the cleaning fluid, under pressure, flows through the inlet pipe 121 and into the base 1 via the inlet 12. It then flows to the diversion assembly 3, passing through multiple through-holes 31, causing the cleaning fluid level to rise to the spray plate 8. Under the pressure of the pressurizing component, the cleaning fluid flows multiple times over the surface of the spray plate 8 and into multiple micropores, cleaning the spray plate 8. After the micro-holes of the cleaning spray plate 8 are cleaned, the liquid falls back to the diversion component 3 and flows back to the bottom wall of the inner cavity of the base 1 through the through hole 31 of the diversion component 3. The third valve is adjusted to the state where the liquid inlet 12 is connected to the return pipe 211. The liquid flows out of the base 1 from the liquid inlet 12 and flows back to the cleaning liquid tank 2 through the return pipe 211 and the return pipe 21. The cycle is repeated until the cleaning is completed. The first valve is closed and the second valve is opened. The cleaning liquid flows out of the base 1 from the liquid outlet 13, flows through the liquid outlet pipe 131 and then flows out of the spray plate cleaning equipment. The waste cleaning liquid is discharged through the external waste liquid pipe.

[0036] Based on the above technical solutions, such as Figure 3 As shown, the base 1 has a mounting groove 14 circumferentially arranged in the inner cavity. The diversion assembly 3 includes an annular body 32 and a first diversion plate 33 and a second diversion plate 34 arranged vertically. The annular body 32 is embedded in the mounting groove 14. The through holes 31 on the first diversion plate 33 and the second diversion plate 34 are staggered. A liquid storage chamber 35 is provided between the second diversion plate 34 and the bottom wall of the inner cavity of the base 1. There is a gap 36 between the first diversion plate 33 and the second diversion plate 34.

[0037] Specifically, by setting up a first diversion plate 33 and a second diversion plate 34, with the through holes 31 staggered, the cleaning fluid is deflected and diffused when flowing through the two layers of through holes 31, resulting in a slower and more uniform rise in the cleaning fluid level. This ensures a more even and thorough cleaning of the spray plate. Furthermore, the arrangement of the first diversion plate 33 and the second diversion plate 34 effectively filters impurities in the cleaning fluid, preventing them from entering the spray plate 8 and affecting the cleaning effect and cleanliness of the spray plate 8. It can be understood that the number of layers of the first diversion plate 33 and the second diversion plate 34, the diameter of the through holes 31, and the spacing and stagger angle between adjacent diversion plates can all be adjusted according to actual needs such as the pressure and flow rate of the cleaning fluid and the model of the spray plate 8.

[0038] Preferably, a liquid storage chamber 35 is provided between the second diverter plate 34 and the bottom wall of the inner cavity of the base 1, and a gap 36 exists between the first diverter plate 33 and the second diverter plate 34. A second gap 36 exists between the first diverter plate 33 and the spray plate 8. In this way, the arrangement of the liquid storage chamber 35, the gap 36, and the second gap 36 provides multiple buffer spaces as the cleaning fluid flows from the inlet 12 through the diverter assembly 3, preventing excessive accumulation of cleaning fluid during flow from affecting the flow of the cleaning fluid through the first diverter plate 33 and the second diverter plate 34.

[0039] Furthermore, such as Figure 6 As shown, the fixing component 4 includes a fixing part 41, a rotating part 42, and a pin 43. The fixing part 41 is fixedly connected to the top of the base 1, and the rotating part 42 is rotatably connected to the fixing part 41. One end of the rotating part 42 near the center of the base 1 has a through hole along the axial direction of the spray plate 8. The pin 43 passes through the through hole and can move in the direction of approaching or moving away from the spray plate 8. One end of the pin 43 abuts against the spray plate 8.

[0040] Specifically, the fixing part 41 can be a fixing block or a fixing rod. Taking the fixing block as an example, the fixing block is fixed to the top of the base 1. The rotating part 42 can be a rotating rod. One end of the rotating rod is rotatably connected to the fixing block, and the other end is provided with a pin 43. The pin 43 can fix the spray plate 8, and during the cleaning process, it can prevent the spray plate 8 from shifting and keep the spray plate 8 stable.

[0041] Optionally, there are multiple fixing components 4, which are evenly distributed circumferentially around the spray plate 8 on the top of the base 1. The arrangement of multiple fixing components 4 allows for a more uniform force to be applied when fixing the spray plate 8, resulting in uniform force on the spray plate 8. This also ensures more stable fixation of the spray plate 8 during the process of the cleaning fluid spraying and cleaning it.

[0042] Preferably, such as Figure 3 and Figure 6As shown, the spray tray placement groove 11 includes a first placement groove 111 and a second placement groove 112. The diameter of the first placement groove 111 is larger than the diameter of the second placement groove 112, and the second placement groove 112 is disposed on the bottom wall of the first placement groove 111.

[0043] The arrangement of the first placement groove 111 and the second placement groove 112 can accommodate spray trays 8 of two different diameters, thereby improving the versatility of the cleaning equipment. The diameter of the first placement groove 111 is larger than that of the second placement groove 112, and the second placement groove 112 is located on the bottom wall of the first placement groove 111. This reduces the space occupied by the first placement groove 111 and the second placement groove 112, thereby reducing the volume of the spray tray cleaning equipment, reducing manufacturing costs to a certain extent, and improving equipment flexibility.

[0044] Furthermore, such as Figure 3 As shown, the spray tray cleaning equipment also includes an annular seal 5. The bottom walls of the first placement groove 111 and the second placement groove 112 are provided with a seal receiving groove 51. The annular seal 5 is located in the seal receiving groove 51. When the spray tray 8 is placed in the first placement groove 111 or the second placement groove 112, the annular seal 5 is in contact with the bottom wall of the spray tray 8.

[0045] The annular seal 5 serves two purposes: firstly, it seals the spray disc 8 against the first placement groove 111 or the second placement groove 112, preventing cleaning fluid from overflowing through the gap between the spray disc 8 and the first placement groove 111 or the second placement groove 112; secondly, it acts as an elastic buffer when the fixing assembly 4 secures the spray disc 8, preventing excessive deformation of the spray disc 8 relative to the base 1 due to over-tightening and thus avoiding damage to the spray disc 8. Specifically, the annular seal 5 has a T-shaped or similar cross-section, which increases the contact area between the top wall of the annular seal 5 and the bottom wall of the spray disc 8, improving sealing and safety.

[0046] Optionally, a first return channel is provided between the bottom wall of the first placement tank 111 and the second gap 36, and a second return channel is provided between the bottom wall of the second placement tank 112 and the second gap 36. During the cleaning process, some cleaning liquid will overflow from the upper surface of the spray plate 8 into the first placement tank 111 and the second placement tank 112. The first return channel and the second return channel can guide the overflowed cleaning liquid back to the diversion component 3, and then flow back to the liquid storage chamber 35 of the base 1 through the diversion component 3, so as to avoid the accumulation of cleaning liquid in the first placement tank 111 and the second placement tank 112.

[0047] Based on the above technical solutions, such as Figure 2 , Figure 4 and Figure 5As shown, the cleaning chamber 61 is provided with a liquid inlet 611, which is connected to the cleaning liquid tank 2 through a liquid inlet channel 612.

[0048] When the remaining cleaning fluid in the cleaning fluid tank 2 is too low, the cleaning fluid can be replenished directly from the filling port 611 in the cleaning chamber 61 without opening the cleaning fluid tank 2, making the replenishment of cleaning fluid more convenient and improving efficiency.

[0049] A partition plate is provided between the cleaning chamber 61 and the flow path chamber 62. The partition plate is provided with a drain port. The drain port is connected to the outlet pipe 131 through a drain pipe to discharge excess cleaning liquid in the cleaning chamber 61.

[0050] During the cleaning process, some cleaning fluid may overflow from the micropores of the spray plate 8 into the base 1, that is, into the cavity of the cleaning chamber 61. By setting a drain port on the partition plate, the cleaning fluid overflowing into the cleaning chamber can be discharged into the drain pipe, and then discharged to the outside through the outlet pipe 131.

[0051] Furthermore, such as Figure 7 As shown, the spray plate cleaning equipment also includes a base cover 7, which is placed on the base 1. A sealing element is provided between the base cover 7 and the base 1. The base cover 7 is connected to the liquid inlet 611 so that the cleaning liquid accumulated in the base 1 flows back to the cleaning liquid tank 2.

[0052] Specifically, a pipe is provided between the base cover 7 and the liquid filling port 611. When the cleaning liquid continues to rise after flowing through the spray plate 8, the cleaning liquid gradually fills the interior of the base 1. The accumulated excess cleaning liquid can flow through the pipe to the liquid filling port 611 and flow back to the cleaning liquid tank 2 through the liquid filling port 611, so as to realize the recycling of the cleaning liquid.

[0053] Specifically, the end of the base cover 7 that contacts the base 1 is a stepped structure. The end of the base 1 is provided with a stepped part, and the end of the base cover 7 is provided with a stepped mating part. Relative to the center of the base 1, the stepped part can be a stepped structure with the inside higher than the outside, or a stepped structure with the inside lower than the outside.

[0054] Based on the above technical solution, the cleaning chamber 61 is provided with an observation window on the side and a ventilation opening on the top.

[0055] The ventilation opening is connected to the outside via a ventilation duct, which contains a fan to discharge the cleaning fluid that evaporates from the cleaning chamber 61. The cleaning chamber 61 has observation windows on all four sides, and these windows can be opened. The observation windows allow staff to monitor the cleaning process and promptly identify and address any emergencies.

[0056] When cleaning the spray plate, the first and second valves are initially closed, and the third valve is initially connected to the inlet 12 and the inlet pipe 121. The cleaning process is as follows:

[0057] When the first valve is opened, the cleaning fluid flows through the inlet pipe 121 and enters the base 1 through the inlet port 12 under the action of the pressurizing component 122. The cleaning fluid level rises to the diversion component 3. After passing through multiple through holes 31 of the diversion component 3, the liquid level rises to the surface of the spray plate 8 and into multiple micropores. The pressurizing component 122 controls the rise and fall of the cleaning fluid level to clean the spray plate 8 multiple times.

[0058] After the cleaning fluid cleans the spray plate 8 and its micropores, it falls back to the diversion component 3. It flows back to the bottom wall of the inner cavity of the base 1 through the through hole 31 of the diversion component 3. The third valve is adjusted to the state where the inlet 12 is connected to the return pipe 211. The cleaning fluid flows out of the base 1 from the inlet 12 and flows back to the cleaning fluid tank 2 through the return pipe 211 and the return port 21 for recycling.

[0059] After cleaning, close the first valve and open the second valve. The cleaning fluid flows out of the base 1 from the outlet 13, flows through the outlet pipe 131 and then flows out of the spray plate cleaning equipment. The waste cleaning fluid is discharged through the external waste pipe.

[0060] The cleaning fluid reaches the spray plate after passing through the diversion component, which makes the rise of the cleaning fluid level more slow and uniform, resulting in a more thorough cleaning of the spray plate. The pressurized cleaning fluid not only cleans the surface of the spray plate 8, but also cleans the deep micropores of the spray plate 8, improving the cleaning effect. Moreover, compared with static cleaning fluid, dynamic and pressurized cleaning fluid has a greater cleaning force, which can improve cleaning efficiency and quality. After cleaning the micropores of the spray plate 8, the cleaning fluid falls back to the diversion component 3, flows back to the bottom wall of the inner cavity of the base 1 through the through hole 31 of the diversion component 3, flows out of the base 1 through the inlet 12, and flows back to the cleaning fluid tank 2 through the return pipe 211 and the return port 21, thus circulating for reuse. This significantly reduces energy consumption, is energy-saving and environmentally friendly, and the recycling of cleaning fluid can reduce the need for manual intervention and improve cleaning efficiency to a certain extent.

[0061] The present invention has been described above by way of example, but the present invention is not limited to the specific embodiments described above. Any modifications or variations made based on the present invention shall fall within the scope of protection claimed by the present invention.

Claims

1. A spray pan cleaning apparatus, characterized by, The device includes a housing, which comprises a cleaning chamber and a flow path chamber. The cleaning chamber contains a base, a flow divider assembly, and a fixing assembly. The flow path chamber contains a cleaning fluid tank. The base has a spray plate placement slot. The fixing assembly is used to fix the spray plate to the spray plate placement slot. The flow divider assembly is located within the base cavity and below the spray plate, and has multiple through holes. The bottom of the base cavity has a liquid inlet. The cleaning fluid tank is connected to the liquid inlet via an inlet pipe, which has a pressurizing component. The cleaning fluid tank has a return port. The cleaning fluid flows out of the base through the inlet and returns to the cleaning fluid tank via the return pipe and return port for recycling.

2. The spray pan cleaning apparatus of claim 1, wherein, The base has a liquid outlet at the bottom, which is connected to an external waste liquid pipe through a liquid outlet pipe for discharging waste cleaning liquid.

3. The spray pan cleaning apparatus of claim 2, wherein, The inlet is equipped with a first valve, the outlet is equipped with a second valve, and the return pipe and the inlet pipe are equipped with a third valve.

4. The spray pan cleaning apparatus of claim 1, wherein, The base cavity is provided with a mounting groove in the circumference. The diversion assembly includes an annular body and a first diversion plate and a second diversion plate arranged vertically. The annular body is embedded in the mounting groove. The through holes on the first diversion plate and the second diversion plate are arranged alternately. A liquid storage cavity is provided between the second diversion plate and the bottom wall of the base cavity. There is a gap between the first diversion plate and the second diversion plate.

5. The spray pan cleaning apparatus of claim 1, wherein, The fixing component includes a fixing part, a rotating part, and a pin. The fixing part is fixedly connected to the top of the base, and the rotating part is rotatably connected to the fixing part. One end of the rotating part near the center of the base has a through hole along the axial direction of the spray plate. The pin passes through the through hole and can move in the direction of approaching or moving away from the spray plate. One end of the pin abuts against the spray plate.

6. The spray pan cleaning apparatus of claim 1, wherein, The spray tray placement groove includes a first placement groove and a second placement groove. The diameter of the first placement groove is larger than the diameter of the second placement groove, and the second placement groove is located on the bottom wall of the first placement groove.

7. The spray pan cleaning apparatus of claim 6, wherein, It also includes an annular seal. The bottom walls of the first and second placement grooves are provided with seal receiving grooves. The annular seal is located in the seal receiving groove. When the spray plate is placed in the first or second placement groove, the annular seal is in contact with the bottom wall of the spray plate.

8. The spray pan cleaning apparatus of claim 7, wherein, The cleaning chamber is equipped with a liquid inlet, which is connected to the cleaning liquid tank through a liquid inlet channel.

9. The spray pan washing apparatus according to any one of claims 1 to 7, characterized in that, It also includes a base cover, which is placed on the base and a sealing element is provided between the base cover and the base. The base cover is connected to the liquid filling port so that the cleaning liquid accumulated in the base can flow back to the cleaning liquid tank.

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