A coating material evaporation device for vacuum coating

Abstract

This utility model relates to an evaporation device for coating materials used in vacuum coating, belonging to the field of coating material evaporation technology. It includes a quartz crucible, with an electric heating wire, a heat insulation plate, and a cooling component surrounding the crucible. The upper end of the crucible has an integrally formed flared opening, and both the flared opening and the inner wall of the crucible are provided with an anti-sticking layer, which is a ceramic coating. An outer barrel is bolted to the periphery of the crucible and connected to a base. A cooling component is provided around the outer barrel. A controller is fixed to the outer surface of the outer barrel via a mounting bracket. The electric heating wire is bolted to the outer surface of the crucible. This device reduces material adhesion by providing a ceramic coating anti-sticking layer on the inner wall of the quartz crucible, the inner wall of the flared opening, the outer surface of the filter plate, and the inner wall of the filter holes. The smoothness and high chemical stability of the ceramic coating reduce material adhesion. The flared opening design increases the cross-sectional area, reduces flow velocity, and decreases deposition, thereby alleviating clogging problems.

Description

Technical Field

[0001] This invention belongs to the field of coating material evaporation technology, specifically relating to a coating material evaporation device for vacuum coating. Background Technology

[0002] Evaporation of coating materials is a technique that, in a vacuum environment, heats the coating material (such as metals, metal oxides, fluorides, etc.) to its evaporation temperature, causing its atoms or molecules to detach from the material surface and enter the gas phase. These gas phase particles then deposit onto the surface of the substrate (such as optical lenses, filters, etc.) to form a thin film. The basic process involves placing the coating material into an evaporation source (such as a resistance heating source, electron beam heating source, laser heating source, etc.) and evacuating the entire system to a high vacuum (typically 10⁻⁶). -3 ~10 -5 To reduce the scattering and contamination of evaporating particles by gas molecules, the evaporation source is heated to allow the coating material to absorb energy. When the temperature rises to the material's evaporation temperature, the atoms or molecules on the material surface gain sufficient kinetic energy to overcome surface tension and cohesion and escape to form vapor. The vapor particles move in a straight line in a vacuum environment and eventually deposit on the substrate surface above or in front of the evaporation source. As the deposition process continues, a uniform thin film is gradually formed. This technology is widely used in optical coatings (such as antireflective coatings and reflective coatings), decorative coatings, and functional coatings (such as conductive films and wear-resistant films). Its core is to ensure that the composition, thickness, uniformity, and other properties of the thin film meet the design requirements by controlling parameters such as vacuum degree, heating temperature, evaporation rate, and substrate temperature.

[0003] For example, in the prior art application number CN202120543006.9, there is an evaporation source structure for a coating material. The evaporation source structure includes a quartz crucible, a heating wire, a heat insulation sheet, and a thermocouple. The heating wire is disposed around the quartz crucible and matches the outer contour shape of the quartz crucible. The heat insulation sheet surrounds the heating wire and covers the heating range of the heating wire. The thermocouple is disposed on the outside of the quartz crucible for measuring the temperature of the quartz crucible.

[0004] The existing technology has been found to have material deposition problems through actual use: the quartz crucible adopts a bottle-shaped design, which can reduce clogging, but after long-term use, the bottle mouth is prone to residual evaporation material deposits, which may lead to narrowing or even blockage of the bottle mouth, affecting the evaporation efficiency; therefore, we propose a coating material evaporation device for vacuum coating to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide an evaporation device for coating materials used in vacuum coating, which can solve the problems mentioned in the background art.

[0006] The specific technical solution adopted in this utility model is as follows:

[0007] An evaporation device for coating materials in vacuum coating includes a quartz crucible. The quartz crucible is surrounded by an electric heating wire, a heat insulation plate, and a cooling component. The upper end of the quartz crucible is integrally provided with a flared mouth, and both the flared mouth and the inner wall of the quartz crucible are provided with an anti-stick layer, which is a ceramic coating.

[0008] The present invention is further configured such that: an outer barrel is fixed to the periphery of the quartz crucible by bolts and the outer barrel is connected to the base; a cooling component is provided on the periphery of the outer barrel; and a controller is fixedly mounted on the outer surface of the outer barrel by a fixing bracket.

[0009] The present invention is further configured such that: an electric heating wire is fixed to the outer surface of the quartz crucible by bolts, and a heat insulation plate is also provided between the outer surface of the quartz crucible for heat preservation.

[0010] The present invention is further configured such that: the cooling component includes a circulating water pump fixed to the outer surface of the outer barrel and a copper pipe disposed inside the outer barrel; the copper pipe is fixed to the outer surface of the quartz crucible by means of a metal mounting bracket and is provided with coolant inside the copper pipe; the first and last ends of the copper pipe are connected to the circulating water pump for circulating the coolant.

[0011] The present invention is further configured such that: a flange is integrally provided at the upper end of the flared mouth; a filter plate is fixed on the inner wall of the flared mouth and filter holes are provided in the filter plate; and an anti-sticking layer is provided on the outer surface of the filter plate and the inner wall of the filter holes.

[0012] The present invention is further configured such that: a groove is provided on the upper surface of the filter plate and a threaded hole is provided on the inner wall of the groove for installing the filter plate.

[0013] The technical effects achieved by this utility model are as follows:

[0014] This utility model relates to a vacuum coating material evaporation device. By setting a ceramic coating anti-sticking layer on the inner wall of the quartz crucible, the inner wall of the flared mouth, the outer surface of the filter plate, and the inner wall of the filter hole, the material adhesion is reduced by utilizing its smoothness and high chemical stability. The flared mouth design increases the cross-sectional area, reduces the flow rate, and reduces deposition, thereby alleviating the clogging problem.

[0015] This utility model relates to an evaporation device for vacuum coating materials. The filter plate and filter holes divert the flow to avoid concentrated material impact on localized areas, while filtering out large particles of impurities in the material, thus improving coating accuracy. Furthermore, the filter plate is detachable through the threaded holes in the groove, and the outer barrel is fixed to the base with bolts, facilitating regular disassembly and cleaning. Attached Figure Description

[0016] Figure 1 This is an overall structural diagram of the present invention;

[0017] Figure 2 This is a schematic diagram of the connection structure between the outer barrel and the inner quartz crucible of this utility model;

[0018] Figure 3 This is a schematic diagram of the connection between the quartz crucible and the flared mouth of this utility model;

[0019] Figure 4 This is a utility model Figure 1 Enlarged schematic diagram of point a in the middle.

[0020] The attached diagram lists the components represented by each number as follows:

[0021] 1. Outer barrel; 2. Quartz crucible; 3. Heat insulation plate; 4. Cooling components; 41. Circulating water pump; 42. Copper pipe; 5. Controller; 6. Flared mouth; 7. Filter plate; 8. Filter holes; 9. Flange; 10. Groove; 11. Electric heating wire; 12. Anti-stick layer; Detailed Implementation

[0022] To make the purpose and advantages of this utility model clearer, the following detailed description is provided in conjunction with embodiments. It should be understood that the following text is merely used to describe one or more specific implementations of this utility model and does not strictly limit the scope of protection specifically claimed by this utility model.

[0023] like Figures 1 to 4 As shown, a coating material evaporation device for vacuum coating includes a quartz crucible 2, and a temperature sensor is also installed inside the quartz crucible 2; an electric heating wire 11, a heat insulation plate 3 and a cooling component 4 are arranged around the quartz crucible 2; a flared mouth 6 is integrally provided at the upper end of the quartz crucible 2, and both the flared mouth 6 and the inner wall of the quartz crucible 2 are provided with an anti-stick layer 12, which is a ceramic coating.

[0024] It should be noted that the anti-stick layer 12 is a ceramic coating, whose core characteristics are high surface smoothness and excellent chemical stability: ceramic materials themselves have extremely low surface energy, making it difficult for gaseous coating materials (such as metal vapor, oxide vapor, etc.) to adhere firmly to the coating surface during condensation during evaporation, thereby reducing the deposition residue of materials on the inner wall of quartz crucible 2, the inner wall of bell mouth 6, the outer surface of filter plate 7, and the inner wall of filter holes 8; at the same time, the ceramic coating has strong high temperature resistance and can adapt to the high temperature environment (usually hundreds to thousands of degrees Celsius) when quartz crucible 2 is heated without decomposition, deformation, or performance degradation, and can maintain the anti-stick effect for a long time; in addition, ceramic materials have high chemical inertness and do not react chemically with most coating materials (such as metals, compounds, etc.), avoiding the formation of sticky substances due to material reactions that aggravate deposition, further ensuring the durability of the anti-stick effect, fundamentally reducing the probability of material deposition in key parts (especially bottle mouth, filter holes, and other easily clogged areas), and alleviating the clogging problem after long-term use;

[0025] The thickness of the anti-stick layer 12 (ceramic coating) needs to be designed comprehensively based on the application scenario and performance requirements, and is usually in the range of 50μm-500μm. If the thickness is too thin (e.g., less than 50μm), defects such as pinholes and local exposure may occur due to insufficient coating uniformity, causing the coating material to directly contact the substrate of the quartz crucible 2, the flared mouth 6, or the filter plate 7, resulting in loss of anti-stick effect and easy corrosion and wear at high temperatures, shortening the service life. If the thickness is too thick (e.g., more than 500μm), cracking and peeling may occur during repeated heating-cooling cycles due to the difference in thermal expansion coefficients between the ceramic coating and the substrate (quartz, metal, etc.), which will affect the protective performance. At the same time, an excessively thick coating may reduce the inner diameter of the flared mouth 6 or the pore size of the filter hole 8, indirectly increasing the risk of clogging. In practical applications, a thickness of 100μm-300μm is often chosen, which can ensure the integrity of the coating and the anti-stick effect, adapt to the thermal cycling conditions of the equipment, and take into account durability and structural compatibility.

[0026] refer to Figure 1 The outer barrel 1 is fixed to the periphery of the quartz crucible 2 by bolts and the outer barrel 1 is connected to the base. The outer barrel 1 is provided with a cooling component 4. The outer surface of the outer barrel 1 is fixed with a controller 5 by a fixing bracket.

[0027] refer to Figure 2 The outer surface of the quartz crucible 2 is fixed with an electric heating wire 11 by bolts, and the outer surface of the quartz crucible 2 is also provided with a heat insulation plate 3 for heat preservation.

[0028] It should be noted that the heating temperature of the equipment needs to be determined according to the characteristics of the coating material (such as melting point and evaporation temperature), and is usually in the range of several hundred to several thousand degrees Celsius: for low melting point materials (such as aluminum, zinc and other metals), the heating temperature is generally controlled at 800-1500℃ to allow them to evaporate fully; for high melting point materials (such as refractory metals or oxide ceramic materials such as tungsten, molybdenum and other refractory metals), the heating temperature needs to be increased to 1800-3000℃ or even higher to meet the evaporation requirements; the temperature sensor in the quartz crucible 2 monitors the temperature in real time and feeds it back to the controller 5. The controller 5 stabilizes the temperature in the optimal evaporation temperature range of the material by adjusting the power of the electric heating wire 11, which can not only ensure the efficient evaporation of the material, but also avoid damage to the performance of the quartz crucible 2 and the anti-stick layer 12 (ceramic coating) due to excessive temperature, and at the same time reduce the impurities generated by the decomposition of the material due to overheating, and improve the purity of the gaseous material in conjunction with the filter holes 8 of the filter plate 7;

[0029] refer to Figure 2 The cooling component 4 includes a circulating water pump 41 fixed to the outer surface of the outer barrel 1 and a copper pipe 42 disposed inside the outer barrel 1. The copper pipe 42 is fixed to the outer surface of the quartz crucible 2 by means of a metal mounting bracket and is filled with coolant. The first and last ends of the copper pipe 42 are connected to the circulating water pump 41 for circulating the coolant.

[0030] refer to Figure 1 and Figure 3 A flange 9 is integrally provided at the upper end of the bell mouth 6. A filter plate 7 is fixed to the inner wall of the bell mouth 6, and filter holes 8 are provided inside the filter plate 7. An anti-sticking layer 12 is provided on the outer surface of the filter plate 7 and the inner wall of the filter holes 8. The pore diameter of the filter holes 8 needs to be designed in combination with the filter plate size, gaseous material flow rate and anti-clogging requirements, and is usually in the range of 1mm-10mm.

[0031] refer to Figure 4 The filter plate 7 has a groove 10 on its upper surface and a threaded hole on the inner wall of the groove 10 for easy installation of the filter plate 7.

[0032] The working principle of this utility model is as follows: When the vacuum coating material evaporation equipment is working, the controller 5 activates the electric heating wire 11 to heat the quartz crucible 2, causing the internal coating material to evaporate. The temperature sensor inside the quartz crucible 2 monitors the temperature in real time and feeds it back to the controller 5 to adjust the power of the electric heating wire 11 to achieve precise temperature control. The heat insulation plate 3 reduces heat diffusion and improves heating efficiency. The outer barrel 1 fixes the internal structure and forms protection. The circulating water pump 41 pushes the coolant to circulate in the copper pipe 42 surrounding the quartz crucible 2, absorbing excess heat and preventing high-temperature damage to the outer barrel 1 and surrounding components. The cooling component 4 and the heat insulation plate 3 work together to form a thermal balance. The gaseous material is guided to the filter plate 7 through the flared mouth 6 at the top of the quartz crucible 2. The filter holes 8 of the filter plate 7 intercept impurities that have not been completely evaporated. The pure gaseous material is discharged through the filter holes 8 and deposited on the surface of the substrate to be coated after being connected to the main cavity of the vacuum coating equipment via the flange 9.

[0033] The above description is merely a preferred embodiment of this utility model. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of this utility model, and these improvements and modifications should also be considered within the scope of protection of this utility model. Structures, devices, and operating methods not specifically described or explained in this utility model, unless otherwise specified or limited, shall be implemented using conventional methods in the art.

Claims

1. A film deposition material evaporation apparatus for vacuum film deposition, comprising a quartz crucible (2), the periphery of the quartz crucible (2) being provided with an electric heating wire (11), a heat insulation plate (3) and a cooling member (4), characterized in that: The upper end of the quartz crucible (2) is integrally provided with a flared mouth (6), and both the flared mouth (6) and the inner wall of the quartz crucible (2) are provided with an anti-stick layer (12), which is a ceramic coating.

2. The evaporation equipment for vacuum coating materials according to claim 1, characterized in that: The outer barrel (1) of the quartz crucible (2) is fixed to the periphery by bolts and the outer barrel (1) is connected to the base. The outer barrel (1) is provided with a cooling component (4) and the outer surface of the outer barrel (1) is fixed with a controller (5) by a fixing bracket.

3. The evaporation equipment for vacuum coating materials according to claim 1, characterized in that: The outer surface of the quartz crucible (2) is fixed with an electric heating wire (11) by bolts, and the outer surface of the quartz crucible (2) is also provided with a heat insulation plate (3) for heat preservation.

4. The evaporation equipment for vacuum coating materials according to claim 1, characterized in that: The cooling component (4) includes a circulating water pump (41) fixed to the outer surface of the outer barrel (1) and a copper pipe (42) installed inside the outer barrel (1). The copper pipe (42) is fixed to the outer surface of the quartz crucible (2) by a metal mounting bracket and is filled with coolant. The first and last ends of the copper pipe (42) are connected to the circulating water pump (41) for circulating coolant.

5. The evaporation equipment for vacuum coating materials according to claim 1, characterized in that: The upper end of the flared mouth (6) is integrally provided with a flange (9), the inner wall of the flared mouth (6) is fixed with a filter plate (7) and the filter plate (7) is provided with filter holes (8), and the outer surface of the filter plate (7) and the inner wall of the filter holes (8) are provided with an anti-sticking layer (12).

6. An evaporation apparatus for coating materials in vacuum coating according to claim 1 or 5, characterized in that: The filter plate (7) has a groove (10) on its upper surface and a threaded hole on the inner wall of the groove (10) for installing the filter plate (7).

Images