A cavity high vacuum maintaining device

Abstract

This utility model discloses a cavity high vacuum maintaining device, belonging to the technical field of helium leak detection testing equipment. It includes an outer frame, a sealing plate, a first cylinder, a sealing assembly, a connecting frame, and a sealed cavity. The outer frame is located at one end of the connecting frame, and the sealing plate is slidably connected to the outer frame. A sealing assembly is installed on the sealing plate. The first cylinder is installed on the outer wall of the outer frame, with its bottom extending through the upper end of the connecting frame and connecting to the upper part of the sealing plate. The sealed cavity is installed within the connecting frame. This invention solves the problem in existing technologies where the single-layer seal leads to a decrease in vacuum level, interference with helium signals, and affects detection accuracy and reliability. It significantly improves the vacuum cavity's ability to maintain a high vacuum level, providing a performance foundation for high-precision detection technologies such as helium detection that are extremely sensitive to vacuum environments.

Description

Technical Field

[0001] This utility model relates to the technical field of helium leak detection and testing equipment, specifically to a cavity high vacuum maintenance device. Background Technology

[0002] In precision manufacturing fields with high airtightness requirements, such as automotive, aerospace, and semiconductor industries, helium mass spectrometry leak detection technology is the gold standard for detecting minute leaks. The principle involves placing the component under test (such as a valve or container) in a sealed cavity and evacuating it to a high vacuum, then filling it with helium gas. If a leak is present, the escaping helium molecules will be detected by a highly sensitive helium mass spectrometer, allowing for a quantification of the leak rate.

[0003] However, maintaining a high vacuum within the cavity is an absolute prerequisite for ensuring accuracy. Traditional vacuum cavities typically rely on a single-layer sealing ring (such as an O-ring). When pursuing the ultimate precision of detecting extremely small leaks, the limitations of a single-layer seal become apparent. The strong negative pressure generated by the high vacuum inside the cavity causes extremely small amounts of ambient air to slowly seep into the cavity through the sealing ring at the gap between the cover and the main body. This reduces the vacuum level, interferes with the helium signal, and affects the accuracy and reliability of the detection.

[0004] Therefore, how to provide a cavity high vacuum maintaining device that solves the defects of the existing single-layer sealing ring structure is a technical problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0005] Therefore, this utility model provides a cavity high vacuum maintaining device to solve the problem in the prior art that the vacuum level is reduced due to the limitations of single-layer sealing, which interferes with the helium signal and affects the detection accuracy and reliability.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] This utility model discloses a cavity high vacuum maintaining device, comprising:

[0008] A connecting frame has an outer frame at one end, and a sealing plate is slidably connected to the outer frame. A sealing assembly is installed on the sealing plate.

[0009] The first cylinder is installed on the outer wall of the outer frame, and the bottom of the first cylinder extends out of the upper end of the connecting bracket and is connected to the upper part of the sealing plate;

[0010] A sealed cavity is installed in the connecting frame.

[0011] In one possible implementation, the sealing plate includes:

[0012] The sealing plate body has two collar-type annular grooves on its horizontal surface and several connection holes on its top surface.

[0013] An air extraction hole is formed on the sealing plate body, the air extraction hole is located between the two annular grooves, and an air extraction connector is inserted into the air extraction hole;

[0014] The slide rails are arranged in pairs and installed at both ends of the sealing plate body in the horizontal direction;

[0015] Several sliders are installed on the side wall of the sealing plate body.

[0016] In one possible implementation, the sealing assembly includes:

[0017] A first sealing ring is installed in the outer annular groove, and a second sealing ring is installed in the other annular groove, with the second sealing ring disposed inside the first sealing ring;

[0018] A slit portion is provided between the first sealing ring and the second sealing ring, and the air extraction hole is provided at the slit portion.

[0019] In one possible implementation, the outer frame includes:

[0020] The outer frame body has two support parts installed at both ends. Each support part has a symmetrically formed sliding groove on its outer wall, and several limiting components are installed on the outer wall of each support part.

[0021] A through groove is formed at the top of the outer frame body;

[0022] Several through holes are formed on the top of the outer frame body;

[0023] The slider is slidably connected in the groove.

[0024] In one possible implementation, the limiting component includes:

[0025] The second cylinder has an extension plate mounted on its outer wall, and the extension plate is mounted on the support portion.

[0026] A transmission rod is connected to the output end of the cylinder, and a floating slider is installed at one end of the transmission rod. The floating slider is slidably connected in the slide rail.

[0027] In one possible implementation, the cross-section of the annular groove is a semi-circular structure adapted to the shape of the sealing ring.

[0028] In one possible implementation, the first cylinder includes:

[0029] The first cylinder block is mounted at one end on the top of the outer frame;

[0030] One end of the cylinder rod is connected to the first cylinder body, and the other end of the cylinder rod passes through the through groove and is connected to the sealing plate body.

[0031] This utility model has the following advantages:

[0032] This invention, through its design of double sealing rings and an intermediate buffer chamber with active dynamic evacuation, fundamentally solves the limitations of single-layer seals, which lead to reduced vacuum, interference with helium signals, and compromised detection accuracy and reliability. Simultaneously, precise guiding positioning and clamping gating mechanisms provide reliable and repeatable execution guarantees for this sealing solution. This systematic solution not only significantly improves the vacuum chamber's ability to maintain a high vacuum level but also provides a performance foundation for high-precision detection technologies such as helium detection, which are extremely sensitive to vacuum environments. Attached Figure Description

[0033] To more clearly illustrate the embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings in the following description are merely exemplary, and those skilled in the art can derive other embodiments based on the provided drawings without creative effort.

[0034] The structures, proportions, sizes, etc. illustrated in this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed herein, and are not intended to limit the implementation conditions of this utility model. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size, without affecting the effects and objectives that this utility model can produce, should still fall within the scope of the technical content disclosed in this utility model.

[0035] Figure 1 A perspective view of the cavity high vacuum maintaining device provided by this utility model;

[0036] Figure 2 A perspective view of the slit portion provided for this utility model;

[0037] Figure 3 A front view of the sealing plate provided by this utility model;

[0038] Figure 4 A perspective view of the outer frame provided for this utility model;

[0039] Figure 5 A perspective view of the limiting component provided by this utility model;

[0040] Figure 6 A perspective view of the first cylinder provided for this utility model;

[0041] In the figure: 1 Outer frame; 11 Outer frame body; 12 Slide groove; 13 Limiting component; 131 Second cylinder; 132 Extension plate; 133 Floating slider; 14 Through groove; 15 Through hole; 16 Support part; 2 Sealing plate; 21 Sealing plate body; 22 Slide rail; 23 Air extraction hole; 24 Slider; 25 Ring groove; 26 Air extraction connector; 27 Connecting hole; 3 First cylinder; 31 First cylinder body; 32 Cylinder rod; 4 Sealing component; 41 First sealing ring; 42 Slit part; 43 Second sealing ring; 5 Connecting frame; 6 Sealing cavity. Detailed Implementation

[0042] The following specific embodiments illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0043] Please refer to Figures 1-5 The present invention discloses a cavity high vacuum maintaining device, such as... Figure 1 It includes an outer frame 1, a sealing plate 2, a first cylinder 3, a sealing assembly 4, a connecting frame 5, and a sealing cavity 6. The outer frame 1 is provided at one end of the connecting frame 5. The sealing plate 2 is slidably connected to the outer frame 1. The sealing assembly 4 is installed on the sealing plate 2. The first cylinder 3 is installed on the outer wall of the outer frame 1. The bottom of the first cylinder 3 extends out of the upper end of the connecting frame 5 and is connected to the upper part of the sealing plate 2. The sealing cavity 6 is installed in the connecting frame 5.

[0044] In use, the outer frame 1 is placed close to the sealing cavity 6, ensuring that the second sealing ring 43 is pressed against the side wall of the opening of the sealing cavity 6. First, the first cylinder 3 drives the sealing plate 2 to the designated position. Then, the limiting component 13 drives the floating slider 133 through the second cylinder 131 to press the sealing plate 2 tightly and close the cavity. During this process, the slider 24 slides along the slide groove 12 of the outer frame body 11 to provide the main direction. The floating slider 133, installed on the second cylinder 131, slides along the slide rail 22 of the sealing plate 2, pressing the sealing plate 2 tightly through its floating characteristics. The limiting component 13 ensures that the sealing plate is accurately positioned. After closing, the first sealing ring 41 and the second sealing ring 43 in the annular groove 25 form a double physical sealing barrier. Finally, the space between the two sealing rings is continuously evacuated by the evacuation connector 26 connected to the slit 42, and any trace amount of gas that may have penetrated through the first sealing ring 41 is removed in real time, so that the isolation area is kept in a near-vacuum state. This ensures that the amount of gas entering the main cavity through the second sealing ring 43 is close to zero, effectively maintaining the high vacuum environment of the cavity to meet the helium detection accuracy requirements.

[0045] In a specific embodiment, such as Figure 2 The sealing plate 12 includes a sealing plate body 21, slide rails 22, air extraction holes 23, sliders 24, annular grooves 25, air extraction connectors 26, and connecting holes 27. The sealing plate body 21 has two interlocking annular grooves 25 on its horizontal surface and several connecting holes 27 on its top surface. The air extraction hole 23 is located on the sealing plate body 21 between the two annular grooves 25, and an air extraction connector 26 is inserted into the air extraction hole 23. The slide rails 22 are arranged in pairs and installed at both ends of the sealing plate body 21 in the horizontal direction. Several sliders 24 are installed on the side walls of the sealing plate body 21. The connecting holes 27 on the top of the sealing plate body 21 are used to fix the pneumatic rod of the first cylinder 3, directly receiving the cylinder's driving force to achieve lifting and lowering. The two annular grooves 25 machined on the horizontal surface are used to precisely embed the first sealing ring 41 and the second sealing ring 43, forming a double-seal physical barrier. The slide rails 22 arranged in pairs on both sides cooperate with the floating sliders 133 of the limiting assembly 13 to ensure that the door moves without jamming. The sliders 24 installed at the four corners, together with the sliding grooves 12 of the outer frame body 11, form a main directional system, which bears the weight of the door and constrains the vertical trajectory, and together realizes the precise opening and closing positioning of the sealing plate, providing a basic guarantee for high vacuum sealing.

[0046] In a specific embodiment, such as Figure 3 The sealing assembly 4 includes a first sealing ring 41, a slit portion 42, and a second sealing ring 43. The first sealing ring 41 is installed in the outer annular groove 25, and the second sealing ring 43 is installed in the other annular groove 25. The second sealing ring 43 is located inside the first sealing ring 41. The slit portion 42 is located between the first sealing ring 41 and the second sealing ring 43, and the evacuation port 23 is located at the slit portion 42. The first sealing ring 41 and the second sealing ring 43 form a double physical sealing barrier, and the slit portion 42 between them forms a closed isolation cavity. The evacuation port 23 penetrates the surface of the slit portion, and the evacuation connector 26 is tightly installed in it and connected to an external vacuum pump. By removing the trace amount of gas that penetrates the first sealing ring 41, the slit portion 42 is kept in a near-vacuum state, completely blocking the path of gas to continue penetrating the second sealing ring 43. The vacuum isolation, in conjunction with the double sealing rings, achieves the absolute maintenance of a high vacuum in the cavity.

[0047] In a specific embodiment, such as Figure 4The outer frame 1 includes an outer frame body 11, a sliding groove 12, a limiting component 13, a through groove 14, a through hole 15, and a support part 16. Two support parts 16 are installed at both ends of the outer frame body 11. A sliding groove 12 is symmetrically formed on the outer wall of each support part 16. Several limiting components 13 are installed on the outer wall of each support part 16. The through groove 14 is formed at the top of the outer frame body 11, and several through holes 15 are formed at the top of the outer frame body 11. A slider 24 is slidably connected in the sliding groove 12. The outer frame body 11 forms the fixed skeleton of the cavity, and the support parts 16 on both sides provide structural reinforcement and functional integration surfaces. The sliding grooves 12 symmetrically formed on the outer wall of each support part precisely cooperate with the slider 24 of the sealing plate 2 to form a vertical guide main track, bearing the weight of the door and constraining its movement trajectory. The limiting components 13 installed on the side walls of the support parts dynamically engage with the sliding rail 22 of the sealing plate, and the floating slider 133 presses the sealing ring tightly, achieving precise positioning and clamping of the door. The top through slot 14 provides a lifting channel for the pneumatic rod of the first cylinder 3, ensuring the linear transmission of driving force; while the through hole 15 is used to connect vacuum lines or sensors to assist in vacuuming the cavity and monitoring its status.

[0048] In a specific embodiment, such as Figure 5 The limiting component 13 includes a second cylinder 131, an extension plate 132, a floating slider 133, and a transmission rod 134. The extension plate 132 is installed on the outer wall of the second cylinder 131 and is mounted on the support part 16. The transmission rod 134 is connected to the output end of the cylinder 131, and the floating slider 133 is installed at one end of the transmission rod 134. The floating slider 133 is slidably connected in the slide rail 22. The second cylinder 131 pushes the floating slider 133 through telescopic movement. The extension plate 132 rigidly fixes the limiting component 13 to the outer frame support part 16, establishing a stable reference. The floating slider 133 is installed at the end of the cylinder rod and dynamically engages with the sealing plate slide rail 22, which not only achieves precise positioning and guidance for the lifting and lowering of the door, but also, when the second cylinder 131 pushes, the floating slider 133 presses tightly against the sealing plate 2, eliminating the compression gap of the sealing ring, significantly enhancing the tightness of the double sealing ring, and directly ensuring the high vacuum sealing performance of the cavity.

[0049] In a specific embodiment, such as Figure 3 The annular groove 25 has a semi-circular cross-section that matches the shape of the sealing ring. The annular groove 125 has a circular arc profile that precisely matches the semi-circular sealing ring. Through precise groove depth and curvature design, the first sealing ring 21 and the second sealing ring 23 are embedded and generate uniform radial compression. This forms a pre-pressure seal when static and can dynamically fill micro-gaps when the cavity is closed. At the same time, it constrains the displacement of the sealing ring to avoid high pressure differential extrusion failure, directly ensuring the zero-leakage performance of the double barrier.

[0050] In a specific embodiment, such as Figure 6The first cylinder 3 includes a first cylinder body 31 and a cylinder rod 32. One end of the first cylinder body 31 is mounted on the top of the outer frame, and one end of the cylinder rod 32 is drivenly connected to the first cylinder body 31. The other end of the cylinder rod 32 passes through the through groove 14 and is drivenly connected to the sealing plate body 21. The air extraction connector 23 is tightly disposed in the air extraction hole 26, forming a key communication interface between the vacuum pump and the isolation cavity between the double sealing rings. It removes the trace amount of gas that has seeped through the first sealing ring 41 in real time, keeping the isolation cavity in a near-vacuum state, completely preventing the possibility of gas continuing to penetrate the second sealing ring 43, thereby achieving the effect of almost zero air seepage into the cavity.

[0051] Although the present invention has been described in detail above with general descriptions and specific embodiments, some modifications or improvements can be made to it, which will be obvious to those skilled in the art. Therefore, all such modifications or improvements made without departing from the spirit of the present invention fall within the scope of protection claimed by the present invention.

Claims

1. A cavity high vacuum maintenance device, characterized by, include: A connecting frame (5) is provided with an outer frame (1) at one end, and a sealing plate (2) is slidably connected in the outer frame (1), and a sealing component (4) is installed on the sealing plate (2); The first cylinder (3) is installed on the outer wall of the outer frame (1). The bottom of the first cylinder (3) extends through the upper end of the connecting bracket (5) and is connected to the upper part of the sealing plate (2). A sealed cavity (6) is installed in the connecting frame (5).

2. The chamber high vacuum maintenance device according to claim 1, wherein The sealing plate (2) includes: The sealing plate body (21) has two ring grooves (25) on its horizontal surface and several connecting holes (27) on its top surface; An air extraction hole (23) is provided on the sealing plate body (21). The air extraction hole (23) is located between the two annular grooves (25). An air extraction connector (26) is inserted into the air extraction hole (23). Slide rails (22) are arranged in pairs and installed at both ends of the sealing plate body (21) in the horizontal direction; Several sliders (24) are installed on the side wall of the sealing plate body (21).

3. The chamber high vacuum maintenance device of claim 2, wherein, The sealing assembly (4) includes: A first sealing ring (41) is installed in the outer annular groove (25), and a second sealing ring (43) is installed in the other annular groove (25). The second sealing ring (43) is disposed inside the first sealing ring (41). A slit (42) is provided between the first sealing ring (41) and the second sealing ring (43), and the air extraction hole (23) is provided at the slit (42).

4. The cavity high vacuum maintaining device as described in claim 2, characterized in that, The outer frame (1) includes: The outer frame body (11) has two support parts (16) installed at both ends. Each support part (16) has a symmetrical groove (12) on its outer wall and a number of limiting components (13) installed on its outer wall. A through groove (14) is formed on the top of the outer frame body (11); Several through holes (15) are provided on the top of the outer frame body (11); The slider (24) is slidably connected in the groove (12).

5. The chamber high vacuum maintenance device of claim 4, wherein, The limiting component (13) includes: The second cylinder (131) has an extension plate (132) installed on its outer wall, and the extension plate (132) is installed on the support (16); A transmission rod (134) is connected to the output end of the cylinder (131). A floating slider (133) is installed at one end of the transmission rod (134), and the floating slider (133) is slidably connected in the slide rail (22).

6. The chamber high vacuum maintenance device of claim 2, wherein, The cross-section of the annular groove (25) is a semi-circular structure adapted to the shape of the sealing ring.

7. The chamber high vacuum maintenance device of claim 4, wherein, The first cylinder (3) includes: The first cylinder block (31) is mounted at one end on the top of the outer frame; The cylinder rod (32) is connected to the first cylinder body (31) at one end and to the sealing plate body (21) at the other end through the through groove (14).

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