Sample support structure and scanning probe microscope based on Hellbeck array

Abstract

This application relates to the field of scanning probe microscopy, and discloses a sample support structure based on a Hellbeck array, comprising: a base, at least partially composed of a structure providing magnetic field confinement; and a sample holder, at least partially composed of a Hellbeck array. The sample holder and base are arranged in a first configuration, generating an attractive force between them. The magnetic field confinement structure restricts the spatial divergence of magnetic field lines, concentrating them at the interface region between the sample holder and the base, transforming them into a strong attractive force between them, thus achieving reliable fixation. Furthermore, the magnetically weakened side of the Hellbeck array shields the sample placement area, and combined with the concentrated confinement of magnetic field lines at the interface region, effectively suppresses magnetic field leakage into the sample area. This improves fixation efficiency, reduces magnetic field penetration interference with the sample and measurement, and enhances measurement accuracy. This application also discloses a scanning probe microscope.

Description

Technical Field

[0001] This application relates to the field of scanning probe microscopy technology, and for example to a sample support structure based on a Helbeck array and a scanning probe microscope. Background Technology

[0002] Currently, scanning probe microscopy, as a key instrument for nanoscale characterization, is highly susceptible to the impact of external vibrations and sample displacement on its imaging accuracy. In existing technologies, samples are typically fixed to a stage using mechanical clamps or adhesives. However, in special detection environments such as high-frequency scanning or vacuum atmospheres, mechanical clamps are prone to sample micro-slippage due to thermal expansion or stress relaxation, while adhesives may contaminate the sample or interfere with surface property measurements. Especially in scenarios requiring multiple sample changes, traditional fixation methods suffer from cumbersome operation and poor positioning repeatability, severely limiting detection efficiency and data reliability.

[0003] To improve sample fixation efficiency, related technologies have introduced magnetic adsorption structures, embedding permanent magnets in the sample holder and utilizing the ferromagnetic material of the base for rapid positioning. For example, an array of neodymium iron boron magnets is arranged at the bottom of the sample holder, simplifying the clamping process through magnetic attraction; alternatively, an electromagnetic coil is placed in the base, which attracts the magnetic sample holder for instantaneous fixation when energized.

[0004] In the process of implementing the embodiments of this disclosure, at least the following problems were found in the related art:

[0005] Using relevant technologies, if the magnet strength is weak, there is a risk of positioning drift due to insufficient adsorption force. Increasing the magnet strength to ensure fixation reliability, however, intensifies the magnetic field strength in the sample area. Especially when measuring sensitive samples such as magnetic nanomaterials and superconducting thin films, the divergent magnetic field generated by the magnet may penetrate into the sample area, introducing significant background noise or even artifacts, leading to distortion of morphology or electrical signals and resulting in inaccurate measurement results.

[0006] The information disclosed in the background section is only intended to enhance the understanding of the background of this utility model, and therefore may contain information that does not constitute prior art known to those skilled in the art. Utility Model Content

[0007] To provide a basic understanding of some aspects of the disclosed embodiments, a brief summary is given below. This summary is not intended as a general commentary, nor is it intended to identify key / important components or describe the scope of protection of these embodiments, but rather as a prelude to the detailed description that follows.

[0008] This disclosure provides a sample support structure and scanning probe microscope based on a Hellbeck array to improve sample fixation efficiency, reduce magnetic field penetration into the sample area, and improve the accuracy of measurement results.

[0009] In some embodiments, the sample support structure based on the Hellbeck array includes: a base, at least partially composed of a structure that can provide magnetic field confinement; and a sample holder, at least partially composed of the Hellbeck array; wherein the sample holder and the base are arranged in a first manner, and when the sample holder and the base are arranged in the first manner, a mutual attractive force is generated between the sample holder and the base.

[0010] Optionally, the magnetic field strength of the sample holder in the sample placement area is less than or equal to a first threshold; wherein, the first threshold is the magnetic field strength that allows the sample to maintain its intrinsic magnetism on the side surface.

[0011] Optionally, the attractive force between the sample holder and the base is greater than or equal to a second threshold, so that the relative position of the sample holder and the base is fixed.

[0012] Optionally, the first method includes: the side of the sample holder with stronger magnetism facing the side of the base with magnetism.

[0013] Optionally, the first method also includes: the side of the sample holder with stronger magnetism is directly connected to the base; or, the side of the sample holder with stronger magnetism is connected to the base via an adapter.

[0014] Optionally, the sample placement area is located on the side of the sample holder where the magnetism is weaker.

[0015] Optionally, a positioning structure is provided on the sample holder to position the sample and the sample holder, and / or the base and the sample holder.

[0016] Optionally, the Hellbeck array includes: multiple magnet segments arranged sequentially adjacent to each other along a preset path; wherein the magnetization direction of the multiple magnet segments rotates continuously along the preset path to generate a strong magnetic field on a first side of the Hellbeck array and a weaker magnetic field on a second side opposite to the first side.

[0017] Optionally, the preset path includes a circular path and / or a straight path.

[0018] In some embodiments, the scanning probe microscope includes the sample support structure based on the Halebec array described above.

[0019] The sample support structure and scanning probe microscope based on the Hellbeck array provided in this disclosure can achieve the following technical effects:

[0020] Because the sample holder employs a Helbeck array structure, it creates a spatially asymmetric magnetic field distribution through continuous rotation of the magnetization direction of the magnet segments, forming a magnetically enhanced side and a magnetically weakened side. When the magnetically enhanced side faces the magnetic field constraint structure of the base and is set in the first configuration, the magnetic field constraint structure restricts the spatial divergence of magnetic field lines, concentrating them at the interface between the sample holder and the base, significantly increasing the interface magnetic flux density. Based on the magnetic stress effect, the increase in magnetic flux density directly translates into a strong mutual attraction between the sample holder and the base, achieving reliable fixation. Simultaneously, the magnetically weakened side of the Helbeck array actively shields the sample placement area, and combined with the concentrated constraint of magnetic field lines at the interface, effectively suppresses magnetic field leakage into the sample placement area. This improves fixation efficiency while reducing magnetic field penetration interference with the sample and measurement, thus enhancing measurement accuracy.

[0021] The above general description and the description below are exemplary and illustrative only and are not intended to limit this application. Attached Figure Description

[0022] One or more embodiments are illustrated by way of example with reference to the accompanying drawings. These illustrations and drawings do not constitute a limitation on the embodiments. Elements having the same reference numerals in the drawings are shown as similar elements. The drawings are not to be scaled. And wherein:

[0023] Figure 1 This is a schematic diagram of a sample support structure based on a Hellbeck array provided in an embodiment of this disclosure;

[0024] Figure 2 This is a side view of a sample holder structure composed of a linear Hellbeck array provided in an embodiment of this disclosure;

[0025] Figure 3 This is a top view of a sample holder structure composed of a ring-shaped Hellbeck array provided in an embodiment of this disclosure;

[0026] Figure 4 This is a schematic diagram of a scanning probe microscope employing a sample carrier structure based on a Hellbeck array, provided in an embodiment of this disclosure.

[0027] Figure label:

[0028] 10: Sample; 20: Base; 30: Sample holder; 40: Magnet section; 50: Magnetization direction; 60: Magnetic field lines; 70: Light source; 80: Detector; 90: Probe. Detailed Implementation

[0029] To provide a more detailed understanding of the features and technical content of the embodiments of this disclosure, the implementation of the embodiments of this disclosure will be described in detail below with reference to the accompanying drawings. The accompanying drawings are for illustrative purposes only and are not intended to limit the embodiments of this disclosure. In the following technical description, for ease of explanation, several details are used to provide a full understanding of the disclosed embodiments. However, one or more embodiments may still be implemented without these details. In other cases, well-known structures and devices may be simplified in their depiction to simplify the drawings.

[0030] The terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this disclosure are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate for the embodiments of this disclosure described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion.

[0031] In this disclosure, the terms "upper," "lower," "inner," "middle," "outer," "front," and "rear," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for better description of the embodiments of this disclosure and their implementations, and are not intended to limit the indicated devices, elements, or components to having a specific orientation, or to require them to be constructed and operated in a specific orientation. Furthermore, some of the aforementioned terms may be used to indicate other meanings besides orientation or positional relationship; for example, the term "upper" may in some cases indicate a dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in the embodiments of this disclosure according to the specific circumstances.

[0032] Furthermore, the terms "set up," "connect," and "fix" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this disclosure according to the specific circumstances.

[0033] Unless otherwise stated, the term "multiple" means two or more.

[0034] In this embodiment of the disclosure, the character " / " indicates that the objects before and after it are in an "or" relationship. For example, A / B means: A or B.

[0035] The term "and / or" describes an association between objects, indicating that three relationships can exist. For example, A and / or B means: A or B, or A and B.

[0036] It should be noted that, unless otherwise specified, the embodiments and features described in the present disclosure can be combined with each other.

[0037] Combination Figure 1-3 As shown, this disclosure provides a sample 10 support structure based on a Hellbeck array, including a base 20 and a sample holder 30. The base 20 is at least partially composed of a structure that can provide magnetic field confinement. The sample holder 30 is at least partially composed of a Hellbeck array. The sample holder 30 and the base 20 are arranged in a first manner, and when the sample holder 30 and the base 20 are arranged in the first manner, a mutual attractive force is generated between them.

[0038] In this embodiment, the structure providing magnetic field confinement includes ferromagnetic materials and / or coils and / or electromagnets. When using coils and / or electromagnets, the attraction force between the sample holder 30 and the base 20 can be adjusted by regulating the current. Furthermore, a shielding structure, such as a nanocrystalline soft magnetic alloy layer and / or a permalloy shield, can be provided on the side of the sample holder 30 where the sample 10 is placed, to reduce the impact of potential magnetic leakage from the coils and / or electromagnets on the sample.

[0039] The sample 10 support structure based on a Hellbeck array provided in this embodiment utilizes a Hellbeck array structure for the sample holder 30. This structure creates a spatially asymmetric magnetic field distribution through the continuous rotation of the magnetization direction 50 of the magnet segment 40, forming a magnetically enhanced side and a magnetically weakened side. When the magnetically enhanced side faces the magnetic field constraint structure of the base 20 and is configured in the first manner, the magnetic field constraint structure restricts the spatial divergence of the magnetic field lines 60, concentrating them at the interface between the sample holder 30 and the base 20, significantly increasing the interface magnetic flux density. Based on the magnetic stress effect, the increased magnetic flux density directly translates into a strong mutual attraction between the sample holder 30 and the base 20, achieving reliable fixation. Simultaneously, the magnetically weakened side of the Hellbeck array actively shields the sample placement area, and combined with the concentrated constraint of the magnetic field lines 60 at the interface, effectively suppresses magnetic field leakage into the sample placement area. This improves fixation efficiency, reduces magnetic field penetration interference with the sample 10 and measurements, and enhances measurement accuracy.

[0040] Optionally, the magnetic field strength of the sample holder 30 in the sample placement area is less than or equal to a first threshold; wherein, the first threshold is the magnetic field strength that allows the sample 10 to maintain its intrinsic magnetism on the side surface.

[0041] In this way, by limiting the magnetic field strength of the sample holder 30 in the sample placement area to a first threshold, and utilizing the active shielding effect of the magnetic weakening side of the Helbeck array and the synergistic effect of the magnetic field constraint structure of the base 20, a high-density concentrated constraint of magnetic field lines is formed in the interface region between the sample holder 30 and the base 20. At the same time, the magnetic field strength in the sample placement area is attenuated to below the intrinsic magnetic maintenance threshold. While ensuring the inherent magnetic properties of the sample 10, the lateral penetration of the magnetic field into the sample placement area is effectively suppressed, avoiding interference from external strong magnetic fields on the intrinsic properties of the sample 10 surface, such as magnetic domain structure or superconducting properties. This eliminates measurement signal distortion caused by magnetic field noise and significantly improves the accuracy of morphology and electrical signal measurement in scenarios such as magnetic material characterization and superconducting thin film detection using atomic force microscopy.

[0042] Optionally, the attractive force between the sample holder 30 and the base 20 is greater than or equal to a second threshold, so that the relative positions of the sample holder 30 and the base 20 are fixed.

[0043] Thus, when the attractive force reaches or exceeds the second threshold, the strong magnetic adsorption force generated by the synergistic effect of the Helbeck array and the magnetic field confinement structure of the base 20 can firmly fix the sample holder 30 and the base 20, maintaining a relatively stable positional relationship between them. By setting the attractive force between the sample holder 30 and the base 20 to be greater than or equal to the second threshold, it can be ensured that a sufficiently strong mutual attractive force is formed between the sample holder 30 and the base 20, thereby effectively overcoming the influence of factors such as high-frequency scanning, thermal expansion, stress relaxation, or external vibration on the relative position of the sample holder 30 and the base 20, and avoiding micro-slippage or positioning drift of the sample holder 30 relative to the base 20. This significantly improves the fixation reliability of the sample support structure, provides stable sample support for scanning probe microscopy during nanoscale measurements, effectively reduces measurement signal distortion or background noise caused by sample displacement, and thus improves the accuracy and reliability of the measurement results.

[0044] Optionally, a positioning structure is provided on the sample holder 30 to position the sample 10 and the sample holder 30, and / or the base 20 and the sample holder 30.

[0045] In this way, the positioning structure forms a clear positioning reference through physical contact or cooperation, avoiding the offset of sample 10 on sample holder 30 and the positional deviation of sample holder 30 during installation. By setting the positioning structure on sample holder 30, precise positioning between sample 10 and sample holder 30 can be achieved with the help of mechanical limiting features (such as positioning pins, slots, bosses, etc.), while ensuring the relative positional accuracy of sample holder 30 and base 20. When the positioning structure positions sample 10 and sample holder 30, it can ensure the consistency of sample 10's placement position on sample holder 30, eliminating measurement errors caused by sample placement deviations. When positioning base 20 and sample holder 30, it can ensure that the relative position of sample holder 30 and base 20 remains unchanged each time sample holder 30 is installed. Combined with the strong attractive force generated by the Helbeck array and the magnetic field constraint structure of base 20, repeatable and precise docking of sample holder 30 and base 20 can be achieved. This effectively improves the positioning repeatability of the sample support structure, avoids micro-displacement of sample 10 caused by installation errors, provides a stable measurement benchmark for scanning probe microscope, and can significantly improve detection efficiency, ensure the reliability and consistency of measurement data, especially in scenarios where sample 10 is replaced multiple times. At the same time, it reduces changes in magnetic field leakage caused by position deviation and further optimizes the interference suppression effect of magnetic field on sample 10.

[0046] Optionally, the first method includes: the side of the sample holder 30 with stronger magnetism facing the side of the base 20 with magnetism.

[0047] In this embodiment of the disclosure, when the base 20 has multiple magnetic sides, the sample holder 30 with the stronger magnetic side faces any of the magnetic sides of the base 20, which can be either the weakest magnetic side or the strongest magnetic side.

[0048] In this way, when the stronger magnetic side of the sample holder 30 faces the magnetic side of the base 20, the high-density magnetic field lines 60 on the magnetically enhanced side of the Helbeck array are precisely guided to the magnetic region of the base 20. This allows the magnetic field lines 60 to penetrate the interface perpendicularly with minimal magnetic resistance, significantly increasing the magnetic flux density at the interface and generating a strong adsorption force based on the magnetic stress effect. At the same time, the magnetic field lines 60 are strictly constrained in the axial space, preventing circumferential diffusion. Combined with the active shielding effect of the Helbeck array on the sample 10 region, the magnetic field in the sample placement area can be attenuated to the microtesla level, ensuring reliable fixation while eliminating magnetic field interference to the sensitive sample 10.

[0049] Optionally, the first method further includes: the projection of the side of the sample holder 30 with stronger magnetism onto the base 20 is the part with the strongest magnetism on the side of the base 20 with magnetism.

[0050] In this embodiment of the present disclosure, the average magnetic flux density of the projected area of ​​the magnetically enhanced side of the sample holder 30 on the surface of the base 20 is greater than the average magnetic flux density of the non-projected area.

[0051] In this embodiment of the disclosure, when the magnetic distribution on the magnetic side of the base 20 is uneven, such as the magnetic properties being weak at both ends and strong in the middle, or the magnetic properties being strong at one end and weak at the other end, the side of the sample holder 30 with stronger magnetic properties is aligned with the part with the strongest magnetic properties on the magnetic side of the base 20, such as the middle region, right region, or left region of the magnetic side of the base 20.

[0052] In this way, when the projection of the stronger magnetic side of the sample holder 30 onto the base 20 precisely covers the area of ​​strongest magnetism in the base 20, the magnetic field lines 60 are forced to converge along the path with the highest magnetic permeability in the base 20, minimizing magnetic resistance and generating a super-strong adsorption force based on the magnetic stress effect. At the same time, the high magnetic permeability region of the base 20 completely suppresses the edge diffusion of the magnetic field lines 60, creating a uniform micro-Tesla-level weak magnetic field environment in the sample 10 region. This provides near-zero magnetic interference measurement conditions for the scanning probe microscope while ensuring the reliability of the fixation.

[0053] Optionally, the first method also includes: the side of the sample holder 30 with stronger magnetism is directly connected to the base 20.

[0054] In this embodiment of the disclosure, the direct connection between the side of the sample holder 30 with the base 20 and the magnetic side means that the side of the sample holder 30 with the magnetic side is at least partially in direct contact with the base 20.

[0055] In this way, when the stronger magnetic side of the sample holder 30 is directly connected to the base 20, the magnetic reluctance loss in the intermediate air gap is eliminated, achieving zero-loss penetration of the magnetic field lines 60. The interface magnetic flux density is increased to above the material saturation limit by a preset ratio, generating a super-strong adsorption force based on the magnetic stress effect. Furthermore, the leakage path of the magnetic field lines 60 is completely sealed through physical contact, causing the magnetic field strength in region 10 of the sample to attenuate. Direct mechanical coupling further suppresses micro-displacement caused by thermal expansion and vibration, ensuring the trajectory accuracy of nanoscale scanning in atomic force microscopy, and creating a near-zero magnetic interference and zero drift measurement environment while improving fixation reliability.

[0056] Optionally, the first method also includes: the side of the sample holder 30 with stronger magnetism is connected to the base 20 via an adapter.

[0057] In this embodiment of the present disclosure, the connection between the side of the sample holder 30 with the base 20 via an adapter means that the side of the sample holder 30 with the stronger magnetism is in at least partially in indirect contact with the base 20 via the adapter.

[0058] In this embodiment, the adapter can adopt a three-layer composite structure. The upper layer can be a magnetically conductive pure iron substrate, which is in direct contact with the magnetically enhanced side of the sample holder 30. The middle layer is a low-expansion coefficient alloy, which is bonded to the upper layer by vacuum brazing. The lower layer can be a soft magnetic permalloy thin plate, which is attached to the magnetic area of ​​the base 20. When the temperature changes, the middle layer can suppress overall thermal deformation, and the upper and lower layers form a continuous low magnetic resistance path, so that the magnetic field lines 60 are conducted to the base 20 with high efficiency. Ceramic positioning pins can be set at the four corners of the adapter, which are interference-fitted with the positioning holes of the sample holder 30 and the base 20 to ensure that the assembly coaxiality is less than a set threshold, so as to achieve automatic thermal drift compensation while ensuring strong adsorption force. In other embodiments, the adapter can also be composed of a ball joint mechanism and a magnetically conductive component. The ball joint base is fixed to the magnetic area of ​​the base 20 by bolts, and its ball socket is embedded with a nanocrystalline soft magnetic alloy coating. The ball joint connecting rod is made of magnetically conductive stainless steel. One end forms a rotating pair with the ball socket, and the other end can be inserted into the dovetail groove on the magnetically enhanced side of the sample holder 30 through a tapered magnetically conductive interface. Magnetic field lines 60 converge through the tapered interface and are conducted axially along the ball joint connecting rod to the ball socket coating, and finally guided into the base 20. The ball joint locking screw is made of non-magnetic titanium alloy, and after tightening, it fixes the spatial orientation of the sample holder 30.

[0059] In this way, when the sample holder 30 with stronger magnetism is connected to the base 20 via the adapter, the adapter can create a low magnetic resistance magnetic channel. The magnetic field lines 60 are directionally conducted to the base 20 through the adapter, maintaining the interface magnetic flux density at a level higher than the set ratio of the direct connection scheme, ensuring reliable adsorption force. At the same time, the adapter allows the sample holder 30 and the base 20 to be non-conformally installed, solving assembly conflicts in space-constrained scenarios. Its thermal expansion coefficient matching design automatically compensates for temperature drift deformation, providing an elastic fixation solution against thermal drift for scanning probe microscopes with special configurations.

[0060] Optionally, the sample placement area is located on the side of the sample holder 30 where the magnetism is weaker.

[0061] Thus, because the Helbeck array forms a spatially asymmetric magnetic field distribution through the continuous rotation of the magnetization direction 50 of the magnet segment 40, its weaker magnetic side inherently possesses the characteristic of actively shielding the magnetic field. When the sample placement area is set on this side, the magnetic field gradient characteristics of the array are directly utilized, placing the sample 10 region in a physical position where the magnetic field strength is significantly attenuated. Combined with the magnetic field confinement structure, the magnetic field lines 60 are concentrated and confined to the interface region between the sample holder 30 and the base 20 (i.e., the stronger magnetic side), further suppressing the leakage of the magnetic field to the sample placement area. Under this dual effect, the actual exposed magnetic field strength of the sample 10 region is significantly reduced, thereby effectively reducing the interference of magnetic field penetration on the sensitive sample 10, avoiding background noise or signal distortion caused by the magnetic field during the measurement process, and improving the measurement accuracy of the scanning probe microscope.

[0062] Optionally, the sample placement area is located at the weakest part of the sample holder 30 on the side with weaker magnetism.

[0063] In this embodiment of the disclosure, the average magnetic flux density of the sample placement area 10 is less than the average magnetic flux density of the non-sample placement area on the magnetically weakened side of the sample holder 30. Alternatively, the spatial deviation between the geometric center of the sample placement area 10 and the point of minimum magnetic flux density on the magnetically weakened side of the sample holder 30 does not exceed a set distance.

[0064] In this embodiment of the present disclosure, when the magnetic distribution on the side of the sample holder 30 with weaker magnetism is uneven, such as strong magnetism at both ends and weak magnetism in the middle, or strong magnetism at one end and weak magnetism at the other end, the sample placement area is set in the weakest part of the side of the sample holder 30 with weaker magnetism, such as the middle area, right area, or left area of ​​the side of the base 20 with magnetism.

[0065] In this way, because the Hellbeck array forms a spatially asymmetric magnetic field distribution through the continuous rotation of the magnetization direction 50 of the magnet segment 40, the weaker side of the array already has magnetic field attenuation characteristics, and the weakest part is further located at the minimum point of the magnetic field strength on that side. When the sample placement area is precisely set at this position, the magnetic field gradient minimum characteristic of the array is directly utilized, so that the sample 10 region is in the physical position of the lowest magnetic field strength. Combined with the magnetic field constraint structure, the magnetic field lines 60 are concentrated and constrained in the interface region between the sample holder 30 and the base 20, forming a triple shielding mechanism of array weak side attenuation, gradient minimum positioning, and interface magnetic field line 60 constraint. This suppresses the actual exposed magnetic field strength of the sample 10 region to below the microtesla level, avoids magnetic field penetration interference to the sensitive sample 10, and reduces the risk of background noise and signal distortion during the measurement process.

[0066] Optionally, the Hellbeck array includes multiple magnet segments 40. The multiple magnet segments 40 are arranged adjacent to each other along a preset path; wherein the magnetization direction 50 of the multiple magnet segments 40 rotates continuously along the preset path to generate a strong magnetic field on a first side of the Hellbeck array and a weaker magnetic field on a second side opposite to the first side.

[0067] In this embodiment of the disclosure, the magnetization direction 50 of an adjacent magnet segment 40 is rotated by a predetermined angle relative to the previous magnet segment 40. The predetermined angle includes 45 degrees, 90 degrees, or other predetermined degrees. Continuous rotation refers to the magnetization direction 50 rotating 360 degrees within a complete spatial cycle.

[0068] In this embodiment of the disclosure, the plurality of magnet segments 40 includes at least three, four, or eight magnet segments 40 with different magnetization directions 50.

[0069] In this embodiment of the disclosure, the plurality of magnet segments 40 are all independent permanent magnets, and the independent permanent magnets have a generally rectangular cross-section.

[0070] In this way, because multiple magnet segments 40 are arranged adjacently along a preset path and their magnetization direction 50 rotates continuously along the preset path, a phase-matched magnetic field superposition is formed on the first side of the Hellbeck array through the magnetic field vector synthesis of adjacent magnet segments 40, thereby generating a high-intensity magnetic field. On the second side opposite to the first side, the magnetic field vectors of adjacent magnet segments 40 cancel each other out, forming an actively shielded weak magnetic field region. This asymmetric magnetic field distribution, on the one hand, allows the high magnetic flux density on the first side to work synergistically with the magnetic field constraint structure of the base 20, transforming the concentrated constraint of the magnetic field lines 60 in the interface region into a strong adsorption force, thus achieving reliable fixation of the sample holder 30. On the other hand, it combines the weak magnetic field characteristics of the second side with the spatial isolation design of the sample placement area, suppressing the magnetic field strength in the sample 10 region to the microtesla level, completely eliminating the interference of the magnetic field on the sensitive sample 10, thereby improving the measurement accuracy of the scanning probe microscope while ensuring the reliability of fixation.

[0071] Optionally, the preset path includes a circular path and / or a straight path.

[0072] Thus, since the preset path includes a circular path and / or a straight path, the closed magnetic circuit design of the circular path can minimize edge magnetic flux leakage at the endpoints of the magnet segment 40, ensuring that the magnetic field vectors on the magnetic enhancement side are uniformly superimposed in the circumferential direction, maximizing the interface magnetic flux density. The straight path, on the other hand, maintains the axial magnetic field gradient through continuous rotation of the magnetization direction 50, adapting to narrow spatial layouts. Both paths achieve the core characteristics of the Hellbeck array: generating a high-intensity magnetic field on one side through the in-phase superposition of magnetic field vectors from adjacent magnet segments 40, while simultaneously forming an active shielding region with phase cancellation on the other side. This allows the sample 10 support structure to utilize the zero-leakage magnetic characteristic of the circular path to improve fixation reliability, while the straight path adapts to the spatial constraints of specially configured equipment, ultimately ensuring the concentrated constraint of the magnetic field lines 60 in the interface region and the magnetic field suppression effect in the sample 10 region, meeting the precise measurement needs of diverse scanning probe microscopes.

[0073] In the embodiments disclosed herein, such as Figure 4 As shown, a scanning probe microscope is also disclosed, comprising: a light source 70, a detector 80, a probe 90, and the aforementioned sample support structure based on a Hellbeck array. The probe 90 is used for sample detection, and the detection light emitted by the light source 70 is reflected by the probe 90 and then reaches the detector 80.

[0074] The foregoing description and accompanying drawings fully illustrate embodiments of the present disclosure to enable those skilled in the art to practice them. Other embodiments may include structural and other changes. The embodiments represent only possible variations. Individual components and functions are optional unless explicitly required, and the order of operation may vary. Parts and features of some embodiments may be included or substituted for parts and features of other embodiments. Embodiments of the present disclosure are not limited to the structures described above and shown in the accompanying drawings, and various modifications and changes may be made without departing from its scope. The scope of the present disclosure is limited only by the appended claims.

Claims

1. A sample carrying structure based on a Halbach array, characterized in that include: The base is at least partially composed of a structure that can provide magnetic field confinement; The sample holder is at least partially composed of a Hellbeck array; The sample holder and the base are arranged in a first manner, and when the sample holder and the base are arranged in the first manner, a mutual attractive force will be generated between the sample holder and the base.

2. The structure according to claim 1, characterized in that, The magnetic field strength of the sample holder in the sample placement area is less than or equal to the first threshold. The first threshold is the magnetic field strength that allows the sample's side surface to retain its intrinsic magnetism.

3. The structure according to claim 1, characterized in that, The attractive force between the sample holder and the base is greater than or equal to a second threshold, so that the relative position of the sample holder and the base is fixed.

4. The structure of claim 1, wherein The first approach includes: The sample holder should have the stronger magnetic side facing the magnetic side of the base.

5. The structure of claim 1, wherein The first approach also includes: The side of the sample holder with stronger magnetism is directly connected to the base; or, The sample holder with stronger magnetism is connected to the base via an adapter.

6. The structure according to claim 1, characterized in that, The sample placement area is located on the side of the sample holder where the magnetism is weaker.

7. The structure according to claim 1, characterized in that, The sample holder is provided with a positioning structure to position the sample and the sample holder, and / or the base and the sample holder.

8. The structure of any one of claims 1 to 7, wherein, The Heilbeck array includes: Multiple magnet segments are arranged adjacent to each other along a preset path; In this process, the magnetization direction of multiple magnet segments rotates continuously along a preset path to generate a strong magnetic field on the first side of the Hellbeck array and a weaker magnetic field on the second side opposite to the first side.

9. The structure according to claim 8, characterized in that, The preset paths include circular paths and / or straight paths.

10. A scanning probe microscope, characterized by, Includes the sample support structure based on the Helbeck array as described in any one of claims 1 to 9.

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