A wafer basket handle

Abstract

This utility model belongs to the field of semiconductor manufacturing technology and discloses a wafer basket handle, including a top plate; two handles, which are arranged opposite each other and connected to the top center of the top plate; four stepped grooves, with every two stepped grooves symmetrically arranged at the bottom of the handle; and four cushioning pads, each cushioning pad being embedded in the corresponding stepped groove. This utility model, by providing a mounting groove at the top center of the top plate, allows the two handles to rotate within the mounting groove via cotter pins. The two corners of the handle's grip end are press-fitted with urethane rubber cushioning pads with a Shore A hardness, which can replace the hard contact between the handle and the top plate, thereby reducing impact force, high-frequency vibration, and the generation of fine particles.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing technology, specifically a wafer basket handle. Background Technology

[0002] In the production process of silicon wafers, monocrystalline silicon rods are cut into thin silicon wafers, which are then processed to form the wafers we commonly see. Because silicon wafers require multiple processing steps during production, they need to be transported over short distances. Therefore, basket structures are used. The basket includes a support frame and a handle. The support frame has slots inside to hold the silicon wafers in place. Workers use the handle to transport the support frame and silicon wafers over short distances.

[0003] The existing wafer basket handles have a hard contact with the top plate of the basket and no fixed structure. The handles are subject to uncontrollable rotation due to transportation bumps and machine vibrations during use, which causes the top plate to generate microparticles that contaminate the packaging and testing environment. To address this, we have proposed a wafer basket handle. Utility Model Content

[0004] To address the problems mentioned in the background section, this invention provides a wafer basket handle, which solves the problem that existing wafer basket handles are prone to collisions with the top plate, leading to microparticle contamination of the packaging and testing environment.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a wafer basket handle, including a top plate; and

[0006] The top plate has two handles, which are arranged opposite each other and connected by a connecting mechanism.

[0007] The handle has four stepped grooves, with two stepped grooves symmetrically arranged at the bottom of the handle.

[0008] The buffer pads are provided in four parts, each of which is embedded in the corresponding step groove.

[0009] Preferably, the top center of the top plate is provided with a mounting groove that mates with the handle, and the mounting groove extends through the center of the top plate from left to right.

[0010] Preferably, the stepped groove is located on the lower surface of the handle's grip end, the buffer pad is interference-fitted into the interior of the stepped groove, and the lower surface of the buffer pad contacts the inner bottom wall of the mounting groove.

[0011] Preferably, the inner side of the handle is provided with a biomimetic groove that mates with the palm, and the hand-held end of the handle is inclined.

[0012] Preferably, the inner wall of the mounting groove is provided with four first insertion holes in the middle, and the four first insertion holes are symmetrical to each other.

[0013] Preferably, each of the two handles has a second socket at the center of one end that is close to the other, which is the same as the first socket.

[0014] Preferably, the connecting mechanism includes four cotter pins, each of which is inserted into the first and second sockets on the same side.

[0015] Preferably, the front ends of the two handles and the sides close to each other are provided with grooves, and the top center of the grooves is provided with arc-shaped grooves.

[0016] Preferably, the front end of the handle is provided with a torsion spring, which is sleeved on the middle of the cotter pin.

[0017] Preferably, one end of the torsion spring is fixedly connected to the arc-shaped groove, and the other end of the torsion spring is fixedly connected to the inner bottom wall of the mounting groove.

[0018] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0019] In summary, compared with the prior art, this utility model provides an installation groove at the top center of the top plate, with two handles rotating within the groove via cotter pins. Both corners of the handle's gripping end are fitted with urethane cushioning pads of Shore A hardness, which replace the hard contact between the handle and the top plate, thereby reducing impact force, high-frequency vibration, and the generation of fine particles. Simultaneously, a torsion spring is installed on the cotter pin, with its two ends fixed to the arc-shaped groove and the installation groove respectively, ensuring the handle is fixed without external force and preventing vibration. This eliminates the possibility of the wafer basket colliding with the top plate during transport or machine vibration, thus preventing the generation of fine particles. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0021] Figure 2 This is a top view of the structure of this utility model;

[0022] Figure 3 This is a schematic diagram of the right-side structure of this utility model;

[0023] Figure 4 This is a schematic diagram of the exploded structure of this utility model;

[0024] Figure 5 This is an exploded view of the handle and fixing mechanism of this utility model.

[0025] In the diagram: 1. Top plate; 2. Mounting slot; 3. Handle; 4. Groove; 5. Cotter pin; 6. Torsion spring; 7. Buffer pad; 8. First insertion hole; 9. Second insertion hole; 10. Step groove; 11. Bionic groove. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0027] like Figures 1 to 5 As shown, this utility model provides a wafer basket handle, including a top plate 1; and two handles 3, which are arranged opposite each other and connected to the top center of the top plate 1; four stepped grooves 10, which are symmetrically arranged at the bottom of each two handles 3; and four buffer pads 7, each of which is embedded in the corresponding stepped groove 10; wherein the addition of a Shore 30A hardness urethane buffer pad can replace the hard contact between the handle 3 and the top plate 1, thereby reducing impact force, high-frequency vibration and the generation of fine particles;

[0028] During assembly, first press the buffer pad 7 into the stepped groove 10 at the bottom of the handle 3, then place the torsion spring 6 between the mounting groove 2 and the first insertion hole 8 and the second insertion hole 9 on the front end of the handle 3, and press in the cotter pin 5 to complete the assembly. When in use, assemble the top plate 1 and other parts of the wafer basket together. When in use, simply lift the two handles 3 by hand to transport them. When putting them down, simply release your hands, and the handles 3 will automatically lie flat in the mounting groove 2 under the action of the torsion spring 6.

[0029] Furthermore, the top center of the top plate 1 is provided with a mounting groove 2 that matches the handle 3, and the mounting groove 2 extends through the center of the top plate 1 from left to right; wherein the depth of the mounting groove 2 is not less than the height of the handle 3, so that the handle 3 can be placed flat in the mounting groove 2 without being exposed, which facilitates the storage of the handle 3.

[0030] Furthermore, the stepped groove 10 is provided on the lower surface of the handle 3's hand-held end, and the buffer pad 7 is interference-fitted into the interior of the stepped groove 10. The lower surface of the buffer pad 7 contacts the inner bottom wall of the mounting groove 2. The stepped groove 10 is located at the two corners of the handle 3's hand-held end, which can maximize the support for the handle 3, so that the handle 3 can be placed stably in the mounting groove 2. At the same time, the buffer pad 7 is interference-fitted into the stepped groove 10 to prevent the buffer pad 7 from falling off.

[0031] Furthermore, the inner side of the handle 3 is provided with a bionic groove 11 that mates with the palm, and the hand-held end of the handle 3 is set at an angle; wherein the bionic groove 11 can fit the fingers, and together with the angled hand-held end, the basket can be smoothly transported.

[0032] Furthermore, the inner wall of the mounting groove 2 is provided with four first insertion holes 8, which are symmetrical to each other; the symmetrical first insertion holes 8 enable the reliable connection between the handle 3 and the top plate 1.

[0033] Furthermore, each of the two handles 3 has a second socket 9 at the middle of its close-to-each end, which is the same as the first socket 8; the symmetrical second socket 9 and the first socket 8 are connected by a mechanism that ensures the reliability of the connection between the handle 3 and the top plate 1.

[0034] Furthermore, the connecting mechanism includes four cotter pins 5, each of which is inserted into the first insertion hole 8 and the second insertion hole 9 on the same side; wherein the cotter pins 5 enable the handle 3 to connect with the top plate 1, and enable the handle 3 to rotate relative to the top plate 1 through the cotter pins 5.

[0035] Furthermore, the front ends of the two handles 3 and the sides close to each other are provided with grooves 4, and the top center of the grooves 4 is provided with arc-shaped grooves; the arc-shaped grooves can support the torsion springs 6.

[0036] Furthermore, a torsion spring 6 is provided at the front end of the handle 3, and the torsion spring 6 is sleeved on the middle of the cotter pin 5.

[0037] Furthermore, one end of the torsion spring 6 is fixedly connected to the arc-shaped groove, and the other end of the torsion spring 6 is fixedly connected to the inner bottom wall of the mounting groove 2; wherein, in the absence of external force, the torsion spring 6 can fix the handle 3 and prevent vibration, thereby preventing the wafer basket from colliding with the top plate 1 due to transportation bumps or machine vibration during use, resulting in the generation of fine particles.

[0038] In summary, compared with the prior art, this utility model provides an installation groove 2 at the top center of the top plate 1. The two handles 3 rotate within the installation groove 2 via cotter pins 5. Both corners of the handle 3 are press-fitted with urethane cushioning pads 7 with a Shore A hardness of 30A, which can replace the hard contact between the handle 3 and the top plate 1, thereby reducing impact force, high-frequency vibration, and the generation of fine particles. At the same time, a torsion spring 6 is provided on the cotter pin 5. The two ends of the torsion spring 6 are fixed in the arc-shaped groove and the installation groove 2 respectively, so that the handle 3 is fixed without external force and prevents vibration, thus preventing the collision between the handle 3 and the top plate 1 caused by the wafer basket during transportation bumps or machine vibration during use, which would generate fine particles.

[0039] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0040] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A wafer basket handle, characterized by, Including the top plate (1); and Handle (3), two handles (3) are provided, the two handles (3) are arranged opposite to each other and are provided at the top center of the top plate (1) through a connecting mechanism; Step groove (10), four step grooves (10) are provided, and every two step grooves (10) are symmetrically arranged at the bottom of the handle (3); The buffer pads (7) are provided in four parts, and each buffer pad (7) is embedded in the corresponding step groove (10).

2. The wafer cluster handle of claim 1, wherein: The top of the top plate (1) is provided with a mounting groove (2) that cooperates with the handle (3) at the middle of the top. The mounting groove (2) extends through the middle of the top plate (1) from left to right.

3. The wafer basket handle of claim 2, wherein: The stepped groove (10) is located on the lower surface of the handle (3) hand-held end, and the buffer pad (7) is interference-fitted into the interior of the stepped groove (10). The lower surface of the buffer pad (7) is in contact with the inner bottom wall of the mounting groove (2).

4. The wafer basket handle of claim 2, wherein: The handle (3) has a biomimetic groove (11) on its inner side that fits the palm, and the hand-held end of the handle (3) is set at an angle.

5. The wafer basket handle of claim 1, wherein: The inner wall of the mounting groove (2) is provided with four first insertion holes (8), which are symmetrical to each other.

6. The wafer basket handle of claim 5, wherein: The two handles (3) are provided with a second socket (9) at the middle of their respective ends that are close to each other. This second socket is the same as the first socket (8).

7. The wafer basket handle of claim 1, wherein: The connecting mechanism includes four cotter pins (5), each of which is inserted into the first socket (8) and the second socket (9) on the same side.

8. The wafer basket handle of claim 1, wherein: The front ends of the two handles (3) and the sides close to each other are provided with grooves (4), and the top center of the grooves (4) is provided with arc-shaped grooves.

9. The wafer basket handle of claim 1, wherein: The handle (3) has a torsion spring (6) at its front end, and the torsion spring (6) is sleeved on the middle part of the cotter pin (5).

10. The wafer basket handle of claim 9, wherein: One end of the torsion spring (6) is fixedly connected to the arc-shaped groove, and the other end of the torsion spring (6) is fixedly connected to the inner bottom wall of the mounting groove (2).

Images