Flower basket lifting device and silicon wafer cleaning equipment

Abstract

This utility model discloses a flower basket lifting device and a silicon wafer cleaning equipment. The flower basket lifting device includes a first X-axis displacement mechanism, at least one first Z-axis displacement mechanism, and a support base. The support base is used to support the flower basket. In a spatial rectangular coordinate system with X, Y, and Z axes as coordinate axes, the flower basket includes at least two receiving spaces for accommodating silicon wafers arranged side by side along the X-axis direction. The first Z-axis displacement mechanism is connected to the support base and is used to drive the support base displacement mechanism to move along the Z-axis direction. The first X-axis displacement mechanism is connected to the first Z-axis displacement mechanism and is used to drive the first Z-axis displacement mechanism to move along the X-axis direction. The flower basket lifting device of this utility model can be adapted to various specifications of flower baskets, expanding the applicability of the flower basket lifting device, increasing the loading capacity of the flower basket, and improving the efficiency of the flower basket lifting device.

Description

Technical Field

[0001] This utility model belongs to the field of silicon wafer cleaning technology, specifically relating to a basket lifting device and silicon wafer cleaning equipment. Background Technology

[0002] In existing silicon wafer cleaning machines, the wafer basket is mostly placed on a basket lifting device, which controls the basket's raising and lowering, allowing the basket to receive silicon wafers transported by a conveyor belt. Since a conventional wafer basket has only one holding space, which can hold several wafers stacked together, its loading capacity is limited and its loading efficiency is low. To increase the wafer loading capacity of the basket, it could be made to have multiple holding spaces, but conventional basket lifting devices cannot accommodate wafer baskets with multiple holding spaces.

[0003] The information disclosed in this background section is intended only to enhance the understanding of the overall background of this utility model and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Utility Model Content

[0004] The purpose of this utility model is to provide a flower basket lifting device and a silicon wafer cleaning equipment, which can be adapted to lifting various flower baskets of different specifications, thus expanding the applicability of the lifting equipment.

[0005] To achieve the above objectives, a specific embodiment of the present invention provides the following technical solution: a basket lifting device, applied to a silicon wafer cleaning equipment, the basket lifting device comprising a first X-axis displacement mechanism, at least one first Z-axis displacement mechanism, and a support base;

[0006] The support base is used to support the flower basket. In a spatial rectangular coordinate system with X, Y, and Z axes as coordinate axes, the flower basket includes at least two receiving spaces arranged side by side along the X-axis for receiving silicon wafers.

[0007] The first Z-axis displacement mechanism is connected to the bearing seat, and the first Z-axis displacement mechanism is used to drive the bearing seat displacement mechanism to move along the Z-axis direction;

[0008] The first X-axis displacement mechanism is connected to the first Z-axis displacement mechanism. The first X-axis displacement mechanism is used to drive the first Z-axis displacement mechanism to move along the X-axis direction so that different receiving spaces are aligned with the silicon wafer. The X-axis direction has an angle with the silicon wafer transport direction.

[0009] In one or more embodiments of the present invention, the flower basket lifting device further includes a protective component, the protective component including a protective drive unit and an elastic element, the protective drive unit being mounted on a support base, the elastic element being connected to the protective drive unit, the protective drive unit being used to drive the elastic element to make linear movement in a horizontal sliding motion, so that the elastic element abuts against the silicon wafer inside the flower basket or moves the elastic element away from the flower basket.

[0010] In one or more embodiments of this utility model, the direction of movement of the elastic element is the Y-axis direction.

[0011] In one or more embodiments of this utility model, the support seat is provided with a clearance opening for the movement of the elastic member.

[0012] In one or more embodiments of the present invention, the first X-axis displacement mechanism includes a first X-axis fixed base and at least one first X-axis drive unit. The first X-axis drive unit is mounted on the first X-axis fixed base, and the output end of the first X-axis drive unit is connected to the first Z-axis displacement mechanism.

[0013] In one or more embodiments of this utility model, the first X-axis drive unit and the first Z-axis displacement mechanism are disposed on opposite sides of the first X-axis fixed base.

[0014] In one or more embodiments of the present invention, the first Z-axis displacement mechanism includes a first Z-axis fixed base and a first Z-axis drive unit. The first Z-axis drive unit is mounted on the first Z-axis fixed base, the output end of the first Z-axis drive unit is connected to the bearing base, and the first Z-axis fixed base is connected to the first X-axis displacement mechanism.

[0015] A specific embodiment of this utility model also provides a silicon wafer cleaning device, including:

[0016] Such as the flower basket lifting device mentioned above;

[0017] The wafer insertion device includes a first conveying mechanism for transporting silicon wafers into a basket on a basket lifting device;

[0018] A cleaning device, comprising several cleaning tanks arranged in parallel, is used to clean silicon wafers in a basket;

[0019] The cleaning conveyor line, located downstream of the wafer insertion device and upstream of the cleaning device, along the transport direction of the basket, is used to transport the basket containing the silicon wafers to the cleaning device.

[0020] The flower basket conveyor line is located upstream of the insert device and downstream of the cleaning device, along the transportation direction of the flower baskets, and is used to transport empty flower baskets.

[0021] A robotic arm device is located above the starting end of the flower basket lifting device, the cleaning conveyor line, and the transfer conveyor line. It is used to transfer flower baskets from the flower basket lifting device to the cleaning conveyor line and to transfer flower baskets from the flower basket conveyor line to the flower basket lifting device.

[0022] In one or more embodiments of this utility model, the insert device further includes:

[0023] A workbench is provided with a feeding trough. The first conveying mechanism is installed on the workbench. The feeding trough is located at the starting end of the first conveying mechanism and is used to hold water.

[0024] The wafer loading mechanism is mounted on the worktable, and part of it is located in the loading trough. The loading mechanism is used to drive the wafer tray loaded with multiple silicon wafers to move along the Z-axis direction.

[0025] The slitting mechanism includes a plurality of sprayers disposed in a loading trough, the sprayers being used to spray liquid onto the silicon wafers on the wafer holder, so as to separate the topmost silicon wafer on the wafer holder from the other silicon wafers.

[0026] The wafer conveying mechanism includes a suction cup and a wafer conveying assembly. The end of the wafer conveying assembly is close to the starting end of the first conveying mechanism. The suction cup is used to pick up the topmost silicon wafer on the wafer holder and make the topmost silicon wafer on the wafer holder abut against the wafer conveying assembly. The wafer conveying assembly is used to transport the silicon wafer picked up by the suction cup to the first conveying mechanism.

[0027] In one or more embodiments of the present invention, the wafer conveying assembly includes a suction seat and a conveyor belt structure mounted on the suction seat, and a suction cup is mounted below the suction seat. The suction cup is used to pick up the silicon wafer so that the silicon wafer abuts against the conveyor belt structure.

[0028] In one or more embodiments of the present invention, the loading mechanism includes a loading drive unit and a loading base, the loading base being used to support the film holder, and the loading drive unit being used to drive the loading base to move along the Z-axis direction.

[0029] In one or more embodiments of the present invention, the robotic arm device includes a second X-axis displacement mechanism, at least one second Z-axis displacement mechanism, and a first gripper mechanism mounted on the second Z-axis displacement mechanism. The second Z-axis displacement mechanism is slidably mounted on the second X-axis displacement mechanism. The second X-axis displacement mechanism is used to drive the second Z-axis displacement mechanism to move along the X-axis direction. The second Z-axis displacement mechanism is used to drive the first gripper mechanism to move along the X-axis direction, so that the first gripper mechanism moves closer to or further away from the flower basket on the flower basket lifting device. The first gripper mechanism is used to grip the flower basket on the flower basket lifting device.

[0030] In one or more embodiments of this utility model, the insert device includes a plurality of first conveying mechanisms arranged in parallel, the cleaning conveyor line includes a first cleaning conveyor line and a second cleaning conveyor line, the first cleaning conveyor line and the second cleaning conveyor line are respectively disposed on opposite sides of the plurality of first conveying mechanisms, the robotic arm device includes a third X-axis displacement mechanism, a third Z-axis displacement mechanism slidably mounted on the third X-axis displacement mechanism, and a second gripper mechanism mounted on the third Z-axis displacement mechanism, the third X-axis displacement mechanism is used to drive the third Z-axis displacement mechanism to move along the X-axis direction, the third Z-axis displacement mechanism is used to drive the second gripper mechanism to move along the X-axis direction between the first cleaning conveyor line and the second cleaning conveyor line, so that the second gripper mechanism approaches or moves away from the flower basket on the second cleaning conveyor line, the second gripper mechanism is used to grip the flower basket on the second cleaning conveyor line.

[0031] In one or more embodiments of the present invention, the cleaning conveyor line includes a cleaning frame, a cleaning conveyor belt mounted on the cleaning frame, and a first flipping mechanism. The first flipping mechanism is located at the starting end of the cleaning conveyor belt and is used to flip the flower basket from a vertical state to a horizontal state.

[0032] In one or more embodiments of the present invention, the flower basket conveyor line includes a flower basket frame, a flower basket conveyor belt mounted on the flower basket frame, and a second flipping mechanism. The second flipping mechanism is located at the end of the flower basket conveyor belt and is used to flip the flower basket from a horizontal state to a vertical state.

[0033] Compared with the prior art, the flower basket lifting device of this utility model drives the flower basket to move horizontally along the X-axis direction through the first X-axis displacement mechanism, so that different accommodating spaces are aligned with the silicon wafers transported by the first conveying mechanism. This allows the flower basket lifting device to be adapted to various specifications of flower baskets, thus expanding its applicability. When the flower basket has multiple accommodating spaces, it can also increase the loading capacity of the flower basket and improve the efficiency of the flower basket lifting device. Attached Figure Description

[0034] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0035] Figure 1 This is a three-dimensional schematic diagram of the vertical flower basket in this utility model;

[0036] Figure 2 This is a three-dimensional schematic diagram of the horizontal flower basket in this utility model;

[0037] Figure 3 This is a partial perspective view of a silicon wafer cleaning device according to one embodiment of the present invention;

[0038] Figure 4 This is a partial perspective view of a silicon wafer cleaning device in one embodiment of the present invention;

[0039] Figure 5 This is a schematic diagram of the upper plate mechanism and the plate holder in one embodiment of the present invention;

[0040] Figure 6 This is a schematic diagram of the wafer conveying mechanism and the silicon wafer in one embodiment of the present invention;

[0041] Figure 7 This is a perspective view of the flower basket lifting device in one embodiment of the present invention;

[0042] Figure 8 This is a perspective view of the flower basket lifting device in one embodiment of the present invention;

[0043] Figure 9 This is a partial perspective view of the robotic arm device in one embodiment of the present invention;

[0044] Figure 10 This is a partial perspective view of the robotic arm device in one embodiment of the present invention.

[0045] Explanation of key figure labels:

[0046] 1. Flower basket lifting device; 11. First X-axis displacement mechanism; 111. First X-axis fixed seat; 112. First X-axis drive unit; 12. First Z-axis displacement mechanism; 121. First Z-axis fixed seat; 122. First Z-axis drive unit; 13. Bearing seat; 131. Clearance opening; 14. Protective component; 141. Protective drive unit; 142. Elastic element; 143. Protective frame; 2. Frame; 3. Insertion device; 31. Worktable; 311. Feeding trough; 32. First conveying mechanism; 33. Loading mechanism; 331. Loading base; 33 2. Wafer loading drive unit; 34. Wafer suction and conveying mechanism; 341. Suction seat; 342. Conveyor belt structure; 4. First cleaning conveyor line; 5. Second cleaning conveyor line; 6. Basket conveyor line; 7. Robotic arm device; 71. Second X-axis displacement mechanism; 72. Second Z-axis displacement mechanism; 73. First gripper mechanism; 74. Third X-axis displacement mechanism; 75. Third Z-axis displacement mechanism; 76. Second gripper mechanism; 8. Basket; 81. Support plate; 82. Rod-shaped support; 83. Accommodation space; 821. Reception slot; 9. Wafer holder; 91. Silicon wafer. Detailed Implementation

[0047] To enable those skilled in the art to better understand the technical solutions of this utility model, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0048] As described in the background section, during the production of monocrystalline silicon wafers, some impurities or dust may remain on the surface of the wafers, requiring cleaning before subsequent processing or other steps. To achieve automated production, multiple silicon wafers are stacked in a wafer tray.

[0049] like Figure 1 and Figure 2 As shown, the flower basket 8 includes two opposing support plates 81 and a plurality of spaced-apart rod-shaped support members 82 connected between the two support plates 81. The plurality of support members and the two support plates 81 cooperate to form at least one receiving space 83 for receiving silicon wafers 91. In this embodiment, the flower basket 8 has two receiving spaces 83. The rod-shaped support members 82 are provided with a plurality of receiving slots 821 spaced apart along their axial direction. The receiving slots 821 of the same height on the plurality of rod-shaped support members 82 form a group of receiving slots 821. Multiple groups of receiving slots 821 are formed spaced apart along the height direction on the plurality of rod-shaped support members 82. Each group of receiving slots 821 corresponds to receiving the edge portion of a silicon wafer 91. That is, when a silicon wafer 91 enters the receiving space, the edge portion of the silicon wafer 91 will be inserted into a group of receiving slots 821. The receiving slots 821 not only provide support for the silicon wafers 91, but also allow the plurality of silicon wafers 91 contained in the flower basket 8 to be distributed sequentially at intervals, which is convenient for later picking and cleaning. In addition, it is preferable that only one silicon wafer 91 is inserted into each receiving slot 821. Figure 1 The flower basket 8 shown is in a vertical position, as... Figure 2 The flower basket 8 shown is in a horizontal position.

[0050] like Figure 3 and Figure 4 As shown, the silicon wafer cleaning equipment in one embodiment of this utility model includes a frame 2, a basket lifting device 1, a wafer insertion device 3, a cleaning device (not shown in the figure), a cleaning conveyor line, a basket conveyor line 6, and a robotic arm device 7.

[0051] Understandably, the basket conveyor 6 transports empty baskets 8 to its end. The robotic arm 7 picks up the basket 8 at the end of the basket conveyor 6 and transfers it to the basket 8 on the basket lifting device 1. The wafer insertion device 3 transports silicon wafers 91 into the basket 8. The robotic arm 7 then transfers the basket 8 containing the silicon wafers 91 to the cleaning conveyor line. The cleaning conveyor line transports the basket 8 and the silicon wafers 91 within it to the cleaning device, where the cleaning device completes the cleaning of the silicon wafers 91. Both the basket lifting device 1 and the robotic arm 7 can be mounted on the frame 2. The wafer insertion device 3, the cleaning device, the cleaning conveyor line, and the basket conveyor 6 can be connected to the frame 2, or not.

[0052] To facilitate the introduction of the silicon wafer cleaning equipment of this utility model, a spatial rectangular coordinate system with the X, Y, and Z axes as coordinate axes is established. Figure 3 and Figure 4 (The coordinate system shown).

[0053] Specifically, the cleaning device includes several parallel cleaning tanks for cleaning the silicon wafers 91 in the basket 8. The basket conveyor line 6, along the transport direction of the basket 8, is located upstream of the insertion device 3 and downstream of the cleaning device, for transporting empty baskets 8. The cleaning conveyor line, along the transport direction of the basket 8, is located downstream of the insertion device 3 and upstream of the cleaning device, for transporting the basket 8 containing the silicon wafers 91 to the cleaning device.

[0054] Furthermore, the cleaning conveyor line includes a cleaning frame, a cleaning conveyor belt mounted on the cleaning frame, and a first flipping mechanism. The first flipping mechanism is located at the starting end of the cleaning conveyor belt and is used to flip the flower basket 8 from a vertical position to a horizontal position. The first flipping mechanism can be a common flipping mechanism on the market, as long as it can flip the flower basket 8 from a vertical position to a horizontal position.

[0055] The flower basket conveyor line 6 includes a flower basket frame 8, a flower basket 8 conveyor belt mounted on the flower basket frame 8, and a second flipping mechanism. The second flipping mechanism is located at the end of the flower basket 8 conveyor belt and is used to flip the flower basket 8 from a horizontal position to a vertical position. The second flipping mechanism can be a common flipping mechanism on the market, as long as it can flip the flower basket 8 from a horizontal position to a vertical position.

[0056] like Figures 3 to 6As shown, the wafer insertion device 3 includes a worktable 31, a first conveying mechanism 32, a wafer loading mechanism 33, a wafer splitting mechanism, and a wafer suction and conveying mechanism 34. The worktable 31 is provided with a loading trough 311. The first conveying mechanism 32 is installed on the worktable 31 and is used to transport silicon wafers 91 to the basket 8 on the basket lifting device 1. The loading trough 311 is located at the starting end of the first conveying mechanism 32 and is used to hold water. The wafer loading mechanism 33 is installed on the worktable 31 and is partially located within the loading trough 311. The loading mechanism is used to drive the wafers loaded with multiple silicon wafers 91. The tray 9 moves along the Z-axis; the wafer separation mechanism includes several sprayers disposed in the loading trough 311, which spray liquid onto the silicon wafers 91 on the tray 9 to separate the top silicon wafer 91 on the tray 9 from the other silicon wafers 91; the wafer suction and conveying mechanism 34 includes a suction cup and a wafer suction and conveying assembly, the end of which is adjacent to the starting end of the first conveying mechanism 32. The suction cup is used to pick up the top silicon wafer 91 on the tray 9 and make the top silicon wafer 91 on the tray 9 abut against the wafer suction and conveying assembly. The wafer suction and conveying assembly is used to transport the silicon wafer 91 picked up by the suction cup to the first conveying mechanism 32.

[0057] It is understandable that the water contained in the loading tank 311 can protect the silicon wafer 91 and facilitate the wafer separation process of the silicon wafer 91 in the wafer holder 9. Water has the advantages of low cost and easy access. In other embodiments, the loading tank 311 can also contain other liquids, as long as the liquid will not affect the silicon wafer 91. The liquid sprayed by the sprayer is water or other liquids that will not affect the silicon wafer 91; preferably, the liquid sprayed by the sprayer is water. The suction cup can be connected to a negative pressure source through a pipe, thereby providing suction force.

[0058] The first conveying mechanism 32 can be a commercially available conveyor belt mechanism or other conveying mechanism, as long as it can transport the silicon wafer 91 into the basket 8 on the basket lifting device 1. In this embodiment, the first conveying mechanism 32 is a commercially available conveyor belt structure 342, and the end of the first conveying mechanism 32 is located close to the basket lifting device 1. In this embodiment, the transport direction of the silicon wafer 91 on the first conveying mechanism 32 is the Y-axis direction.

[0059] The segmentation mechanism also includes a liquid supply source, which is connected to the sprayer via a pipe, thereby supplying liquid to the sprayer. The sprayer can be any commonly available nozzle.

[0060] The wafer conveying assembly includes a suction base 341 and a conveyor belt structure 342 mounted on the suction base 341. The suction base 341 is mounted on a worktable 31, and a suction cup is mounted below the suction base 341. The suction cup is used to pick up the silicon wafer 91 so that the silicon wafer 91 abuts against the conveyor belt structure 342. The bottom of the conveyor belt structure 342 abuts against the silicon wafer 91 picked up by the suction cup. The rotation of the conveyor belt structure 342 drives the silicon wafer 91 picked up by the suction cup to move towards the first conveying mechanism 32 until the silicon wafer 91 is transferred to the first conveying mechanism 32. The conveyor belt structure 342 may include a motor fixedly mounted on the suction base 341, a rotating wheel rotatably mounted on the suction base 341, and a conveyor belt wound around the rotating wheel. The motor is connected to the rotating wheel and can drive the rotating wheel to rotate, thereby driving the conveyor belt to move.

[0061] The wafer loading mechanism 33 includes a wafer loading drive unit 332 and a wafer loading base 331. The wafer loading base 331 supports the wafer tray 9, and the wafer loading drive unit 332 drives the wafer loading base 331 to move along the Z-axis. The wafer loading drive unit 332 is mounted on the worktable 31. The wafer loading mechanism 33 aims to bring the uppermost silicon wafer 91 of the wafer tray 9 as close as possible to the wafer suction and delivery assembly. Under the impact of the liquid sprayed from the liquid sprayer, the uppermost silicon wafer 91 of the wafer tray 9 separates from other silicon wafers 91 and moves closer to the suction cup. Under the suction force of the suction cup, the uppermost silicon wafer 91 of the wafer tray 9 is attracted by the suction cup. After the uppermost silicon wafer 91 of the wafer tray 9 is attracted by the suction cup, the wafer loading drive unit 332 drives the wafer loading base 331 to move along the Z-axis (i.e., upward movement) and move it closer to the wafer suction and delivery assembly, thus facilitating the attraction of the next silicon wafer 91 by the wafer suction and delivery assembly. Here, the Z-axis direction can be considered as the up-down direction.

[0062] like Figure 3 and Figure 4 As shown, in this embodiment, the wafer insertion device 3 includes two parallel worktables 31. Each worktable 31 is equipped with two sets of first conveying mechanisms 32, wafer loading mechanisms 33, wafer splitting mechanisms, and wafer suction and conveying mechanisms 34. This arrangement can improve the cleaning efficiency of the silicon wafer cleaning equipment. The cleaning conveying line includes a first cleaning conveying line 4 and a second cleaning conveying line 5. The first cleaning conveying line 4 and the second cleaning conveying line 5 are respectively located on opposite sides of the plurality of first conveying mechanisms 32.

[0063] In other embodiments, the wafer insertion device 3 can also be the existing structure of the wafer insertion device 3, as long as it can slice the silicon wafer 91 on the wafer holder 9 and transport it to the basket 8 on the basket lifting device 1.

[0064] like Figure 7 and Figure 8As shown, the flower basket lifting device 1 in this embodiment includes a first X-axis displacement mechanism 11, two first Z-axis displacement mechanisms 12, and two support seats 13. The support seats 13 are used to support the flower basket 8. Each first Z-axis displacement mechanism 12 is connected to one support seat 13, and the first Z-axis displacement mechanism 12 is used to drive the support seat 13 to move along the Z-axis direction. The first X-axis displacement mechanism 11 is connected to the two first Z-axis displacement mechanisms 12, and the first X-axis displacement mechanism 11 is used to drive the first Z-axis displacement mechanism 12 to move along the X-axis direction so that the different accommodating spaces 83 are aligned with the silicon wafer 91, and there is an angle between the X-axis direction and the transport direction of the silicon wafer 91. The two accommodating spaces 83 in the flower basket 8 placed on the support seat 13 are arranged side by side along the X-axis direction.

[0065] It is understood that the transport direction of silicon wafer 91 mentioned above is the same as the transport direction of silicon wafer 91 on the first conveying mechanism 32. In this embodiment, the transport direction of silicon wafer 91 on the first conveying mechanism 32 is the Y-axis direction, the angle between the Y-axis direction and the X-axis direction is 90°, and the plane containing the Y-axis direction and the X-axis direction is a horizontal plane. The first X-axis displacement mechanism 11 is used to drive the first Z-axis displacement mechanism 12 to move along the X-axis direction so that different receiving spaces 83 are aligned with silicon wafer 91. That is, the first X-axis displacement mechanism 11 drives the first Z-axis displacement mechanism 12 to move along the X-axis direction so that the different receiving spaces 83 of the basket 8 in the carrier 13 on the first Z-axis displacement mechanism 12 are aligned with the silicon wafer 91 transported on the first conveying mechanism 32, thereby inserting the silicon wafer 91 into the different receiving spaces 83 of the basket 8. In other embodiments, the angle between the X-axis direction and the transport direction of silicon wafer 91 can be other angles.

[0066] Specifically, the first X-axis displacement mechanism 11 includes a first X-axis fixed base 111 and two first X-axis drive units 112. The first X-axis drive units 112 are mounted on the first X-axis fixed base 111, and the output end of the first X-axis drive units 112 is connected to the first Z-axis displacement mechanism 12. The first X-axis fixed base 111 is mounted on the frame 2.

[0067] In this embodiment, the first X-axis drive unit 112 is a cylinder, with its cylinder body fixedly mounted on the first X-axis mounting base 111, and its piston rod connected to the first Z-axis displacement mechanism 12. In other embodiments, the first X-axis drive unit 112 can also be a common drive unit such as an electric lead screw structure or an electric cylinder structure, along with corresponding connecting parts.

[0068] Preferably, the first X-axis drive unit 112 and the first Z-axis displacement mechanism 12 are located on opposite sides of the first X-axis fixed base 111. This arrangement can save space and avoid collisions between the first X-axis drive unit 112 and the first Z-axis displacement mechanism 12 during movement.

[0069] Specifically, the first Z-axis displacement mechanism 12 includes a first Z-axis fixed base 121 and a first Z-axis drive unit 122. The first Z-axis drive unit 122 is mounted on the first Z-axis fixed base 121, and the output end of the first Z-axis drive unit 122 is connected to the bearing base 13. The first Z-axis fixed base 121 is connected to the first X-axis drive unit 112.

[0070] In this embodiment, the first Z-axis drive unit 122 is an electric lead screw structure. The main body of the electric lead screw structure is fixedly mounted on the first Z-axis mounting base 121, and the movable end of the electric lead screw structure is connected to the bearing base 13. In other embodiments, the first Z-axis drive unit 122 can also be a common drive unit such as a cylinder structure or an electric cylinder structure, along with corresponding connecting parts.

[0071] like Figure 7 and Figure 8 As shown, the flower basket lifting device 1 also includes a protection component 14, which includes a protection drive unit 141 and an elastic element 142. The protection drive unit 141 is mounted on the support base 13, and the elastic element 142 is connected to the protection drive unit 141. The protection drive unit 141 is used to drive the elastic element 142 to make linear movement in a horizontal sliding motion, so that the elastic element 142 abuts against the silicon wafer 91 in the flower basket 8 or moves the elastic element 142 away from the flower basket 8.

[0072] In this embodiment, the protective drive unit 141 can drive the elastic member 142 to be partially located inside the basket 8 and abut against the silicon wafers 91 inside the basket 8. Along the transport direction of the silicon wafers 91, the silicon wafers 91 transported by the first conveying mechanism 32 preferentially contact the elastic member 142. The elasticity of the elastic member 142 acts as a buffer, preventing the silicon wafers 91 from colliding with the rod-shaped support member 82 and causing edge damage to the silicon wafers 91. In this embodiment, the elastic member 142 can be partially located in one receiving space 83 of the basket 8 and partially located in another receiving space 83 of the basket 8. When the basket 8 is full of silicon wafers 91, the protective drive unit 141 can drive the elastic member 142 out of the basket 8, thereby facilitating the robotic arm device 7 to pick up and transfer the basket 8. Preferably, the direction of movement of the elastic member 142 is the Y-axis direction.

[0073] Furthermore, the protection component 14 also includes a protection frame 143, the protection drive unit 141 is connected to the protection frame 143, and the elastic element 142 is installed on the protection frame 143, with the protection frame 143 serving to support the elastic element 142.

[0074] In this embodiment, the protection drive unit 141 is a cylinder, with its cylinder body fixedly mounted on the first Z-axis mounting base 121, and its piston rod connected to the protection frame 143. In other embodiments, the protection drive unit 141 can also be a common drive unit such as an electric lead screw structure or an electric cylinder structure, along with corresponding connecting parts.

[0075] Furthermore, the support 13 is provided with a clearance opening 131 for the elastic member 142 to move. The protection drive unit 141 is located on the side of the support 13 away from the first conveying mechanism 32, which saves space occupied by the protection component 14.

[0076] The robotic arm device 7 is located above the starting end of the flower basket lifting device 1, the cleaning conveyor line, and the transfer conveyor line. It is used to transfer the flower basket 8 on the flower basket lifting device 1 to the cleaning conveyor line, and to transfer the flower basket 8 on the flower basket conveyor line 6 to the flower basket lifting device 1.

[0077] Specifically, such as Figure 9 As shown, the robotic arm device 7 includes a second X-axis displacement mechanism 71, two second Z-axis displacement mechanisms 72, and a first gripper mechanism 73 mounted on the second Z-axis displacement mechanism 72. The second Z-axis displacement mechanism 72 is slidably mounted on the second X-axis displacement mechanism 71. The second X-axis displacement mechanism 71 is used to drive the second Z-axis displacement mechanism 72 to move along the X-axis direction. The second Z-axis displacement mechanism 72 is used to drive the first gripper mechanism 73 to move along the X-axis direction, so that the first gripper mechanism 73 moves closer to or further away from the flower basket 8 on the flower basket lifting device 1. The first gripper mechanism 73 is used to grip the flower basket 8 on the flower basket lifting device 1.

[0078] In this embodiment, a second Z-axis displacement mechanism 72 and its first gripper mechanism 73 are used to transfer the flower basket 8 on the flower basket lifting device 1 to the cleaning conveyor line, and another second Z-axis displacement mechanism 72 and its first gripper mechanism 73 are used to transfer the flower basket 8 on the flower basket conveyor line 6 to the flower basket lifting device 1, thereby improving the overall working efficiency of the equipment. The first gripper mechanism 73 can be a commercially available electric gripper, pneumatic gripper, or other similar clamping mechanism.

[0079] It is understandable that the specific structure of the second X-axis displacement mechanism 71 can refer to the first X-axis displacement mechanism 11, and the specific structure of the second Z-axis displacement mechanism 72 can refer to the first Z-axis displacement mechanism 12; or, the second X-axis displacement mechanism 71 can be a common linear motion displacement mechanism on the market, as long as it can drive the second Z-axis displacement mechanism 72 to move along the X-axis direction; the second Z-axis displacement mechanism 72 can be a common linear motion displacement mechanism on the market, as long as it can drive the first gripper mechanism 73 to move along the Z-axis direction.

[0080] Since the workbench 31 is equipped with multiple first conveying mechanisms 32 and corresponding basket lifting devices 1, the cleaning conveyor line includes a first cleaning conveyor line 4 and a second cleaning conveyor line 5, which are respectively located on opposite sides of the multiple first conveying mechanisms 32. This arrangement can prevent the two second Z-axis displacement mechanisms 72 from interfering with each other during operation, thereby improving the working efficiency of the robotic arm device 7.

[0081] Furthermore, since there are many cleaning tanks in the cleaning device, and generally only one cleaning conveyor line is used for transportation, in this embodiment, the first cleaning conveyor line 4 can directly transport the flower basket 8 to the cleaning device, while the second cleaning conveyor line 5 only transports the flower basket 8 along the Y-axis or other directions to a location away from the second X-axis displacement mechanism 71, and does not directly transport the flower basket 8 to the cleaning device.

[0082] Therefore, as Figure 10 As shown, the robotic arm device 7 includes a third X-axis displacement mechanism 74, a third Z-axis displacement mechanism 75 slidably mounted on the third X-axis displacement mechanism 74, and a second gripper mechanism 76 mounted on the third Z-axis displacement mechanism 75. The third X-axis displacement mechanism 74 is used to drive the third Z-axis displacement mechanism 75 to move along the X-axis direction. The third Z-axis displacement mechanism 75 is used to drive the second gripper mechanism 76 to move along the X-axis direction between the first cleaning conveyor line 4 and the second cleaning conveyor line 5, so that the second gripper mechanism 76 approaches or moves away from the flower basket 8 on the second cleaning conveyor line 5. The second gripper mechanism 76 is used to grip the flower basket 8 on the second cleaning conveyor line 5. The flower basket 8 gripped by the second gripper mechanism 76 is a horizontal flower basket 8.

[0083] Understandably, the third X-axis displacement mechanism 74, the third Z-axis displacement mechanism 75, and the second gripper mechanism 76 are used to transfer the flower basket 8 on the second cleaning conveyor line 5 to the first cleaning conveyor line 4, so that the flower basket 8 can be transported to the cleaning device.

[0084] Specifically, the structure of the third X-axis displacement mechanism 74 can refer to that of the second X-axis displacement mechanism 71, the structure of the third Z-axis displacement mechanism 75 can refer to that of the second Z-axis displacement mechanism 72, and the structure of the second gripper mechanism 76 can refer to that of the first gripper mechanism 73; or, the third X-axis displacement mechanism 74 can be a common linear motion displacement mechanism on the market, as long as it can drive the third Z-axis displacement mechanism 75 to move along the X-axis direction; the second Z-axis displacement mechanism 72 can be a common linear motion displacement mechanism on the market, as long as it can drive the second gripper mechanism 76 to move along the Z-axis direction; the second gripper mechanism 76 can be a common electric gripper or pneumatic gripper or other similar clamping mechanism on the market, as long as it can clamp the flower basket 8.

[0085] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0086] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A flower basket lifting device applied to a silicon wafer cleaning apparatus, characterized in that, The flower basket lifting device includes a first X-axis displacement mechanism, at least one first Z-axis displacement mechanism, and a support base; The support base is used to support the flower basket. In a spatial rectangular coordinate system with X, Y, and Z axes as coordinate axes, the flower basket includes at least two receiving spaces arranged side by side along the X-axis for receiving silicon wafers. The first Z-axis displacement mechanism is connected to the bearing seat, and the first Z-axis displacement mechanism is used to drive the bearing seat displacement mechanism to move along the Z-axis direction; The first X-axis displacement mechanism is connected to the first Z-axis displacement mechanism. The first X-axis displacement mechanism is used to drive the first Z-axis displacement mechanism to move along the X-axis direction so that the corresponding accommodating space is aligned with the silicon wafer to be inserted.

2. The flower basket lifting device according to claim 1, characterized in that, The flower basket lifting device also includes a protective component, which includes a protective drive unit and an elastic element. The protective drive unit is mounted on a support base, and the elastic element is connected to the protective drive unit. The protective drive unit is used to drive the elastic element to make linear movement in a horizontal sliding motion, so that the elastic element abuts against the silicon wafer inside the flower basket or moves the elastic element away from the flower basket.

3. The flower basket lifting device according to claim 2, characterized in that, The elastic element moves in the Y-axis direction.

4. The flower basket lifting device according to claim 2, characterized in that, The support base is provided with a clearance opening for the movement of the elastic element.

5. The flower basket lifting device according to claim 1, characterized in that, The first X-axis displacement mechanism includes a first X-axis fixed base and at least one first X-axis drive unit. The first X-axis drive unit is mounted on the first X-axis fixed base, and the output end of the first X-axis drive unit is connected to the first Z-axis displacement mechanism.

6. The flower basket lifting device according to claim 5, characterized in that, The first X-axis drive unit and the first Z-axis displacement mechanism are located on opposite sides of the first X-axis fixed base.

7. The flower basket lifting device according to claim 1, characterized in that, The first Z-axis displacement mechanism includes a first Z-axis fixed base and a first Z-axis drive unit. The first Z-axis drive unit is mounted on the first Z-axis fixed base, and the output end of the first Z-axis drive unit is connected to the bearing base. The first Z-axis fixed base is connected to the first X-axis displacement mechanism.

8. A silicon wafer cleaning apparatus, characterized by comprising: include: The flower basket lifting device as described in any one of claims 1 to 7; The wafer insertion device includes a first conveying mechanism for transporting silicon wafers into a basket on a basket lifting device; A cleaning device, comprising several cleaning tanks arranged in parallel, is used to clean silicon wafers in a basket; The cleaning conveyor line, located downstream of the wafer insertion device and upstream of the cleaning device, along the transport direction of the basket, is used to transport the basket containing the silicon wafers to the cleaning device. The flower basket conveyor line is located upstream of the insert device and downstream of the cleaning device, along the transportation direction of the flower baskets, and is used to transport empty flower baskets. A robotic arm device is located above the starting end of the flower basket lifting device, the cleaning conveyor line, and the transfer conveyor line. It is used to transfer flower baskets from the flower basket lifting device to the cleaning conveyor line and to transfer flower baskets from the flower basket conveyor line to the flower basket lifting device.

9. The apparatus of claim 8 wherein, The insert device further includes: A workbench is provided with a feeding trough. The first conveying mechanism is installed on the workbench. The feeding trough is located at the starting end of the first conveying mechanism and is used to hold water. The wafer loading mechanism is mounted on the worktable, and part of it is located in the loading trough. The loading mechanism is used to drive the wafer tray loaded with multiple silicon wafers to move along the Z-axis direction. The slitting mechanism includes a plurality of sprayers disposed in a loading trough, the sprayers being used to spray liquid onto the silicon wafers on the wafer holder, so as to separate the topmost silicon wafer on the wafer holder from the other silicon wafers. The wafer conveying mechanism includes a suction cup and a wafer conveying assembly. The end of the wafer conveying assembly is close to the starting end of the first conveying mechanism. The suction cup is used to pick up the topmost silicon wafer on the wafer holder and make the topmost silicon wafer on the wafer holder abut against the wafer conveying assembly. The wafer conveying assembly is used to transport the silicon wafer picked up by the suction cup to the first conveying mechanism.

10. The apparatus for cleaning a silicon wafer as set forth in claim 9, wherein The wafer conveying assembly includes a suction seat and a conveyor belt structure mounted on the suction seat. The suction cup is mounted below the suction seat and is used to pick up the silicon wafer so that the silicon wafer comes into contact with the conveyor belt structure.

11. The apparatus for cleaning a silicon wafer as set forth in claim 9, wherein The loading mechanism includes a loading drive unit and a loading base. The loading base is used to support the film holder, and the loading drive unit is used to drive the loading base to move along the Z-axis.

12. The silicon wafer cleaning apparatus of claim 8, wherein The robotic arm device includes a second X-axis displacement mechanism, at least one second Z-axis displacement mechanism, and a first gripper mechanism mounted on the second Z-axis displacement mechanism. The second Z-axis displacement mechanism is slidably mounted on the second X-axis displacement mechanism. The second X-axis displacement mechanism is used to drive the second Z-axis displacement mechanism to move along the X-axis direction. The second Z-axis displacement mechanism is used to drive the first gripper mechanism to move along the X-axis direction, so that the first gripper mechanism moves closer to or further away from the flower basket on the flower basket lifting device. The first gripper mechanism is used to grip the flower basket on the flower basket lifting device.

13. The silicon wafer cleaning apparatus of claim 8, wherein, The insert device includes multiple first conveying mechanisms arranged in parallel. The cleaning conveyor line includes a first cleaning conveyor line and a second cleaning conveyor line, which are respectively located on opposite sides of the multiple first conveying mechanisms. The robotic arm device includes a third X-axis displacement mechanism, a third Z-axis displacement mechanism slidably mounted on the third X-axis displacement mechanism, and a second gripper mechanism mounted on the third Z-axis displacement mechanism. The third X-axis displacement mechanism is used to drive the third Z-axis displacement mechanism to move along the X-axis direction. The third Z-axis displacement mechanism is used to drive the second gripper mechanism to move along the X-axis direction between the first cleaning conveyor line and the second cleaning conveyor line, so that the second gripper mechanism moves closer to or further away from the flower basket on the second cleaning conveyor line. The second gripper mechanism is used to grip the flower basket on the second cleaning conveyor line.

14. The silicon wafer cleaning apparatus of claim 8, wherein The cleaning conveyor line includes a cleaning frame, a cleaning conveyor belt installed on the cleaning frame, and a first flipping mechanism. The first flipping mechanism is located at the starting end of the cleaning conveyor belt and is used to flip the flower basket from a vertical state to a horizontal state.

15. The silicon wafer cleaning equipment according to claim 8, characterized in that, The flower basket conveyor line includes a flower basket frame, a flower basket conveyor belt installed on the flower basket frame, and a second flipping mechanism. The second flipping mechanism is located at the end of the flower basket conveyor belt and is used to flip the flower basket from a horizontal state to a vertical state.

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