A correction module integrating vision and a high dynamic response actuator

By integrating a vision inspection and positioning module with a high dynamic response actuator into a correction module, the problem of high complexity in multi-axis collaborative control in existing technologies is solved, achieving high-precision and high-speed chip positioning in semiconductor sorting and testing, avoiding physical damage, and improving production efficiency.

CN224460524UActive Publication Date: 2026-07-03ZHEJIANG QINGXIN TECH CO LTD
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Utility models(China)
Current Assignee / Owner
ZHEJIANG QINGXIN TECH CO LTD
Filing Date
2025-05-07
Publication Date
2026-07-03

AI Technical Summary

Technical Problem

Existing vision-based non-contact correction technology in semiconductor sorting and testing suffers from high complexity in multi-axis collaborative control, making it difficult to balance speed and accuracy, resulting in low equipment production efficiency.

Method used

The correction module, which integrates vision and high dynamic response actuators, includes a vision detection and positioning module, an electric displacement stage and a voice coil motor. It can directly correct the deviation through a single recognition, achieving high-precision non-contact correction in the Y-axis and ΞΈ-axis directions, combined with PID control algorithm and torque control function.

Benefits of technology

It achieves high-precision and high-speed chip positioning, avoids physical damage, improves production efficiency, reduces operation steps, and is suitable for the precise positioning of ultra-thin chips.

✦ Generated by Eureka AI based on patent content.

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Abstract

This utility model provides a correction module integrating vision and a high dynamic response actuator, belonging to the field of semiconductor packaging technology. It includes, from top to bottom, a vision inspection and positioning module comprising a motor mounting base, a module angle adjustment base, a module fixed mounting base, a voice coil motor, a motor connecting block, a kit mounting base, a miniature linear guide rail, a positioning kit, a corner coaxial light source, a light source mounting base, an adjustment block mounting base, a light source height adjustment block, a vision inspection camera, a camera mounting base, an angle adjustment limit block one, and an angle adjustment limit block two. The voice coil motor is fixed to the top surface of the motor mounting base, and its shaft end is connected to the motor connecting block. The motor connecting block is fixedly connected to the kit mounting base, and the positioning kit is installed at the front end of the kit mounting base. This utility model has a simple structure, is easy to assemble and disassemble, has low processing cost, low system complexity, decoupled control, simple and efficient operation, and good overall performance.
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