Winding and unwinding device and magnetron sputtering machine

Abstract

The application provides a winding and unwinding device and a magnetron sputtering machine, the application is provided with an unwinding adjusting mechanism and a winding adjusting mechanism, the unwinding adjusting mechanism comprises an unwinding detection assembly and a first horizontal driving assembly, the unwinding detection assembly is arranged on one side of an unwinding roller and is used for detecting first position information of a base film in an unwinding process, and the first horizontal driving assembly is used for adjusting the position of the unwinding roller in the axial direction of the unwinding roller according to the first position information; the winding adjusting mechanism comprises a winding detection assembly and a second horizontal driving assembly, the winding detection assembly is arranged on one side of a winding roller and is used for detecting second position information of the base film in a winding process; and the second horizontal driving assembly is used for adjusting the position of the winding roller in the axial direction of the winding roller according to the second position information, the position adjustment of the unwinding roller and the winding roller is realized by the unwinding adjusting mechanism and the winding adjusting mechanism respectively, deviation correction can be realized in the winding process, flat winding can be realized, and off-edge winding can also be realized according to requirements.

Description

Technical Field

[0001] This application relates to the field of vacuum coating technology, and in particular to a winding and unwinding device and a magnetron sputtering machine. Background Technology

[0002] Vacuum coating technology is a very environmentally friendly film formation technique. Films formed through vacuum coating possess advantages such as high hardness, high wear resistance, good chemical stability, strong adhesion to the substrate, and a bright metallic appearance. Therefore, vacuum coating is increasingly widely used in the decorative treatment of metal substrates such as copper, aluminum, silver, gold, and stainless steel.

[0003] In vacuum coating technology, the base film provides a foundation surface for the coating material to adhere, enabling the coating to form a uniform and continuous thin film on it, ensuring the smooth progress of the coating process and the integrity of the coating. However, during the unwinding and rewinding of the base film, the base film is prone to deformation due to its inherent characteristics and excessively fast film feeding speed, which can affect normal rewinding. Utility Model Content

[0004] In view of this, the purpose of this application is to provide a winding and unwinding device that can achieve flush winding or staggered winding.

[0005] To achieve the above objectives, this application provides a winding and unwinding device, the winding and unwinding device comprising:

[0006] An unwinding mechanism includes an unwinding roller and a first rotary drive assembly, wherein the first rotary drive assembly is connected to the unwinding roller and drives the unwinding roller to rotate for unwinding.

[0007] The winding mechanism includes a winding roller and a second rotary drive assembly, the second rotary drive assembly being connected to the winding roller and driving the winding roller to rotate for winding; the axial direction of the unwinding roller is parallel to the axial direction of the winding roller;

[0008] The unwinding adjustment mechanism includes an unwinding detection component and a first horizontal drive component. The unwinding detection component is disposed on one side of the unwinding roller and is used to detect the first position information of the base film side during the unwinding process. The first horizontal drive component is connected to the unwinding roller and is used to adjust the position of the unwinding roller in the axial direction of the unwinding roller according to the first position information.

[0009] The winding adjustment mechanism includes a winding detection component and a second horizontal drive component. The winding detection component is disposed on one side of the winding roller and is used to detect a second position information of the base film side during the winding process. The second horizontal drive component is connected to the winding roller and is used to adjust the position of the winding roller axially according to the second position information.

[0010] In a preferred embodiment, the unwinding detection assembly includes an unwinding detection sensor, which includes a first limiting groove for limiting the side of the base film in the vertical direction.

[0011] And / or, the winding detection assembly includes a winding detection sensor, the winding detection sensor including a second limiting groove for limiting the base film side in the vertical direction.

[0012] In a preferred embodiment, the take-up and unwinding device further includes a support base, and the two ends of the unwinding roller are rotatably connected to the support base via an unwinding chuck. The first rotary drive assembly is connected to the unwinding chuck and drives the unwinding chuck to rotate.

[0013] Both ends of the take-up roller are rotatably connected to the support base via a take-up chuck, and the second rotary drive assembly is connected to the take-up chuck and drives the take-up chuck to rotate.

[0014] In a preferred embodiment, the support base includes a first support plate and a second support plate, the two ends of the unwinding roller are respectively connected to the first support plate and the second support plate, and the two ends of the winding roller are respectively connected to the first support plate and the second support plate.

[0015] In a preferred embodiment, the first rotary drive assembly includes a first rotary motor and a first magnetic fluid. The first rotary motor is connected to the first magnetic fluid and drives the first magnetic fluid to rotate. The shaft of the unwind chuck is connected to the shaft of the first magnetic fluid. When the first magnetic fluid rotates, it drives the unwind chuck to rotate.

[0016] The first horizontal drive assembly is connected to the shaft of the unwinding chuck. The first horizontal drive assembly drives the shaft of the unwinding chuck to move axially, thereby adjusting the position of the unwinding roller in the axial direction of the unwinding roller.

[0017] And / or, the second rotary drive assembly includes a second rotary motor and a second magnetic fluid, the second rotary motor being connected to the second magnetic fluid and driving the second magnetic fluid to rotate, the shaft of the take-up chuck being connected to the shaft of the second magnetic fluid, and the second magnetic fluid driving the take-up chuck to rotate when it rotates;

[0018] The second horizontal drive assembly is connected to the shaft of the take-up chuck, and the second horizontal drive assembly drives the shaft of the take-up chuck to move axially, so as to adjust the position of the take-up roller in the axial direction of the take-up roller.

[0019] In a preferred embodiment, the first rotary drive assembly further includes a first transmission assembly, the shaft of the unwinding chuck is connected to the shaft of the first magnetic fluid through the first transmission assembly, and the unwinding chuck is driven to rotate through the first transmission assembly when the first magnetic fluid rotates; the first horizontal drive assembly drives the first transmission assembly to move axially relative to the shaft of the first magnetic fluid in order to adjust the position of the unwinding roller in the axial direction of the unwinding roller.

[0020] And / or, the second rotary drive assembly further includes a second transmission assembly, wherein the shaft of the take-up chuck is connected to the shaft of the second magnetic fluid via the second transmission assembly, and the take-up chuck is driven to rotate via the second transmission assembly when the second magnetic fluid rotates; the second horizontal drive assembly adjusts the position of the take-up roller in the axial direction of the take-up roller by driving the second transmission assembly to move axially relative to the shaft of the second magnetic fluid.

[0021] In a preferred embodiment, the first transmission assembly includes a first driving wheel, a first driven wheel, and a first transmission member. The first driving wheel is sleeved on the shaft of the first magnetic fluid, and the first driven wheel is sleeved on the shaft of the unwinding chuck. The first driving wheel and the first driven wheel are connected through the first transmission member. When the first magnetic fluid rotates, it drives the first driving wheel to rotate. The first driving wheel drives the first driven wheel to rotate through the first transmission member. The first horizontal drive assembly can drive the shaft of the unwinding chuck to move axially relative to the first driven wheel.

[0022] And / or, the second transmission assembly includes a second driving wheel, a second driven wheel, and a second transmission member. The second driving wheel is sleeved on the shaft of the second magnetic fluid, and the second driven wheel is sleeved on the shaft of the unwinding chuck. The second driving wheel and the second driven wheel are connected through the second transmission member. When the second magnetic fluid rotates, it drives the second driving wheel to rotate. The second driving wheel drives the second driven wheel to rotate through the second transmission member. The second horizontal drive assembly can drive the shaft of the take-up chuck to move axially relative to the second driven wheel.

[0023] In a preferred embodiment, the take-up and unwinding device further includes a first slide rail and a first slide table. The end of the unwinding roller is slidably connected to the first slide rail via the first slide table. The first horizontal drive assembly is connected to the first slide table and drives the first slide table to slide on the first slide rail to adjust the position of the unwinding roller in the axial direction of the unwinding roller.

[0024] And / or, the take-up and unwinding device further includes a second slide rail and a second slide table, the end of the take-up roller is slidably connected to the second slide rail via the second slide table, and the second horizontal drive assembly is connected to the second slide table and drives the second slide table to slide on the second slide rail to adjust the position of the take-up roller in the axial direction of the take-up roller.

[0025] In a preferred embodiment, the first slide rail includes a first sub-slide rail and a second sub-slide rail, the first slide table includes a first sub-slide table and a second sub-slide table, the first sub-slide rail and the second sub-slide rail are respectively disposed on both sides of the unwinding roller, the first sub-slide table is slidably connected to the first sub-slide rail, the second sub-slide table is slidably connected to the second sub-slide rail, both ends of the unwinding roller are respectively connected to the first sub-slide table and the second sub-slide table, and the first horizontal drive assembly is connected to the first sub-slide table;

[0026] And / or, the second slide rail includes a third sub-slide rail and a fourth sub-slide rail, the second slide table includes a third sub-slide table and a fourth sub-slide table, the third sub-slide rail and the fourth sub-slide rail are respectively disposed on both sides of the take-up roller, the third sub-slide table is slidably connected to the third sub-slide rail, the fourth sub-slide table is slidably connected to the fourth sub-slide rail, both ends of the take-up roller are respectively connected to the third sub-slide table and the fourth sub-slide table, and the second horizontal drive assembly is connected to the third sub-slide table.

[0027] Based on the same inventive concept, this application also provides a magnetron sputtering machine, which includes a vacuum coating chamber and the unwinding and rewinding device described in any of the above-mentioned embodiments, wherein the unwinding roller and the rewinding roller are both disposed in the vacuum coating chamber.

[0028] As can be seen from the above description, the unwinding and take-up device provided in this application, by setting an unwinding adjustment mechanism and a take-up adjustment mechanism, includes an unwinding detection component and a first horizontal drive component. The unwinding detection component is disposed on one side of the unwinding roller and is used to detect the first position information of the base film side during the unwinding process. The first horizontal drive component is used to adjust the position of the unwinding roller axially according to the first position information. The take-up adjustment mechanism includes a take-up detection component and a second horizontal drive component. The take-up detection component is disposed on one side of the take-up roller and is used to detect the second position information of the base film side during the take-up process. The second horizontal drive component is used to adjust the position of the take-up roller axially according to the second position information. By using the unwinding adjustment mechanism and the take-up adjustment mechanism to adjust the position of the unwinding roller and the take-up roller respectively, it is possible to achieve deviation correction during the take-up process, achieve flush take-up, and also perform staggered take-up as needed. Attached Figure Description

[0029] To more clearly illustrate the technical solutions in this application or related technologies, the drawings used in the description of the embodiments or related technologies will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0030] Figure 1 This is a schematic diagram of the winding and unwinding device in one embodiment of this application;

[0031] Figure 2 for Figure 1 Enlarged structural diagram at point A;

[0032] Figure 3 for Figure 1 Enlarged structural diagram at point B;

[0033] Figure 4 This is a schematic diagram of the winding and unwinding device in one embodiment of this application;

[0034] Figure 5 for Figure 4 Enlarged schematic diagram of the structure at point C.

[0035] Figure Labels

[0036] 100. Winding device; 110. Cover plate; 200. Film roll;

[0037] 11. Unwinding roller; 12. First rotary drive assembly; 121. First rotary motor; 122. First magnetohydrodynamic fluid; 123. First transmission assembly; 124. First drive wheel; 125. First driven wheel; 126. First transmission component;

[0038] 21. Take-up roller; 22. Second rotary drive assembly; 221. Second rotary motor; 222. Second magnetohydrodynamic fluid; 223. Second transmission assembly;

[0039] 31. Unwinding detection assembly; 311. Unwinding detection sensor; 312. First limiting groove; 32. First horizontal drive assembly; 321. Servo motor; 322. Cylinder; 323. Push plate; 324. Bellows;

[0040] 41. Winding detection assembly; 411. Winding detection sensor; 412. Second limiting groove;

[0041] 5. Support base; 51. First support plate; 52. Second support plate;

[0042] 61. Unwind chuck; 62. Rewind chuck;

[0043] 71. First slide rail; 711. First sub-slide rail; 712. Second sub-slide rail; 72. First slide table; 721. First sub-slide table; 722. Second sub-slide table. Detailed Implementation

[0044] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with specific embodiments and the accompanying drawings.

[0045] It should be noted that, unless otherwise defined, the technical or scientific terms used in the embodiments of this application should have the ordinary meaning understood by one of ordinary skill in the art to which this application pertains. The terms "first," "second," and similar terms used in the embodiments of this application do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are only used to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0046] Reference Figures 1-3 As shown, one embodiment of this application discloses a winding and unwinding device 100, which includes an unwinding mechanism, a winding mechanism, an unwinding adjustment mechanism, and a winding adjustment mechanism.

[0047] The unwinding mechanism includes an unwinding roller 11 and a first rotary drive assembly 12. The first rotary drive assembly 12 is connected to the unwinding roller 11 and drives the unwinding roller 11 to rotate for unwinding.

[0048] The winding mechanism includes a winding roller 21 and a second rotary drive assembly 22. The second rotary drive assembly 22 is connected to the winding roller 21 and drives the winding roller 21 to rotate for winding. The axial direction of the unwinding roller 11 is parallel to the axial direction of the winding roller 21.

[0049] The unwinding adjustment mechanism includes an unwinding detection component 31 and a first horizontal drive component 32. The unwinding detection component 31 is disposed on one side of the unwinding roller 11 and is used to detect the first position information of the base film side during the unwinding process. The first horizontal drive component 32 is connected to the unwinding roller 11 and is used to adjust the position of the unwinding roller 11 in the axial direction according to the first position information.

[0050] The winding adjustment mechanism includes a winding detection component 41 and a second horizontal drive component. The winding detection component 41 is disposed on one side of the winding roller 21 and is used to detect the second position information of the base film side during the winding process. The second horizontal drive component is connected to the winding roller 21 and is used to adjust the position of the winding roller 21 axially according to the second position information.

[0051] The unwinding and take-up device 100 provided in this embodiment includes an unwinding adjustment mechanism and a take-up adjustment mechanism. The unwinding adjustment mechanism includes an unwinding detection component 31 and a first horizontal drive component 32. The unwinding detection component 31 is disposed on one side of the unwinding roller 11 and is used to detect the first position information of the base film during the unwinding process. The first horizontal drive component 32 is used to adjust the position of the unwinding roller 11 axially according to the first position information. The take-up adjustment mechanism includes a take-up detection component 41 and a second horizontal drive component. The take-up detection component 41 is disposed on one side of the take-up roller 21 and is used to detect the second position information of the base film during the take-up process. The second horizontal drive component is used to adjust the position of the take-up roller 21 axially according to the second position information. By using the unwinding adjustment mechanism and the take-up adjustment mechanism to adjust the position of the unwinding roller 11 and the take-up roller 21 respectively, it is possible to correct deviations during the take-up process, achieve flush take-up, and also perform staggered take-up as needed.

[0052] The film roll 200 is formed by winding the base film. The base film is supplied and stored in the form of film roll 200. The base film coming out of the unwinding roller 11 is taken into the winding roller 21 and wound on the winding roller 21 to form a film roll again.

[0053] The offset of the base film on the unwinding side can be obtained through the first position information, and the offset of the base film on the winding side can be obtained through the second position information.

[0054] To achieve flush winding, the offset of the base film on the unwinding side and the offset on the winding side must be less than a first threshold. Specifically, when the offset direction is determined to be X-direction based on the first position information and the offset is greater than or equal to the first threshold, the first horizontal drive component 32 drives the unwinding roller 11 to move in the -X direction. Similarly, when the offset direction is determined to be X-direction based on the second position information and the offset is greater than or equal to the first threshold, the second horizontal drive component drives the winding roller 21 to move in the -X direction.

[0055] To achieve staggered winding, the offset of the base film on the unwinding side and the offset on the winding side must simultaneously satisfy a second threshold and a third threshold. Specifically, the third threshold is greater than the second threshold, and the second threshold is greater than the first threshold. This staggers the sides of adjacent base film layers on the winding roller 21, achieving staggered winding.

[0056] Please continue to refer to Figure 1 As shown, in one embodiment, the unwinding detection assembly 31 includes an unwinding detection sensor 311, which includes a first limiting groove 312 for vertically positioning the side of the base film. During operation, the edge of the base film passes through the first limiting groove 312, and the unwinding detection sensor 311 detects the edge of the base film and determines the offset direction of the base film based on the position of the edge. Optionally, the unwinding detection sensor 311 can be a photoelectric sensor, a laser sensor, a capacitive sensor, or an infrared sensor, etc.

[0057] Specifically, photoelectric sensors can be either through-beam or reflective photoelectric sensors. Through-beam sensors consist of a transmitter and a receiver. When the edge of the base film blocks or alters the light propagation path, the light signal received by the receiver changes, thus detecting the shift of the base film. In reflective photoelectric sensors, the transmitter and receiver are located on the same side of the base film. The emitted light is reflected from the surface of the base film and received by the sensor. The positional shift of the base film is determined by detecting the intensity or time of the reflected light.

[0058] Among them, the capacitive sensor is based on the principle of capacitance. When the base film moves closer to or further away from the sensor, it changes the capacitance value between the sensor and the base film. The offset of the base film is determined by detecting the change in capacitance value.

[0059] Optionally, the unwinding roll 11 and the take-up roll 21 include expansion shafts to ensure stability during unwinding and take-up.

[0060] Please continue to refer to Figure 1 As shown, in one embodiment, the winding detection assembly 41 includes a winding detection sensor 411, which includes a second limiting groove 412 for vertically positioning the side of the base film. During operation, the edge of the base film passes through the second limiting groove 412, and the winding detection sensor 411 detects the edge of the base film and determines the offset direction of the base film based on the position of the edge. Optionally, the winding detection sensor 411 can be a photoelectric sensor, a laser sensor, a capacitive sensor, or an infrared sensor, etc.

[0061] Please continue to refer to Figure 1As shown, in one embodiment, the unwinding / rewinding device 100 further includes a support base 5. The two ends of the unwinding roller 11 are rotatably connected to the support base 5 via an unwinding chuck 61. A first rotary drive assembly 12 is connected to the unwinding chuck 61 and drives it to rotate. The two ends of the winding roller 21 are rotatably connected to the support base 5 via a winding chuck 62. A second rotary drive assembly 22 is connected to the winding chuck 62 and drives it to rotate. The support base 5 supports the unwinding roller 11 and the winding roller 21 to facilitate unwinding and winding. The unwinding chuck 61 enables the rotatable connection between the unwinding roller 11 and the support base 5, ensuring normal unwinding. The winding chuck 62 enables the rotatable connection between the winding roller 21 and the support base 5, ensuring normal winding.

[0062] Please continue to refer to Figure 1 As shown, in one embodiment, the support base 5 includes a first support plate 51 and a second support plate 52. The two ends of the unwinding roller 11 are connected to the first support plate 51 and the second support plate 52, respectively, and the two ends of the take-up roller 21 are connected to the first support plate 51 and the second support plate 52, respectively. Specifically, the two ends of the unwinding roller 11 are connected to the first support plate 51 and the second support plate 52 via an unwinding chuck 61, and the two ends of the take-up roller 21 are connected to the first support plate 51 and the second support plate 52 via a take-up chuck 62.

[0063] Please continue to refer to Figure 1-3 As shown, in one embodiment, the first rotary drive assembly 12 includes a first rotary motor 121 and a first magnetic fluid 122. The first rotary motor 121 is connected to the first magnetic fluid 122 and drives the first magnetic fluid 122 to rotate. The shaft M of the unwinding chuck 61 is connected to the shaft N of the first magnetic fluid 122. When the first magnetic fluid 122 rotates, it drives the unwinding chuck 61 to rotate. The first horizontal drive assembly 32 is connected to the shaft M of the unwinding chuck 61. The first horizontal drive assembly 32 drives the shaft M of the unwinding chuck 61 to move axially, so as to adjust the position of the unwinding roller 11 in the axial direction.

[0064] Optionally, the shaft N of the first magnetic fluid 122 can be connected to the shaft M of the unwinding chuck 61 via a coupling or the like. The first magnetic fluid 122 has an axial space for the shaft N to move axially, ensuring that the first horizontal drive assembly 32 can drive the shaft M and shaft N to move axially. In another embodiment, the shaft N has an axial space for the shaft M to move axially, allowing the shaft M to move relative to the shaft N axially.

[0065] Please continue to refer to Figure 1As shown, in one embodiment, the second rotary drive assembly 22 includes a second rotary motor 221 and a second magnetic fluid 222. The second rotary motor 221 is connected to the second magnetic fluid 222 and drives the second magnetic fluid 222 to rotate. The shaft of the take-up chuck 62 is connected to the shaft of the second magnetic fluid 222. When the second magnetic fluid 222 rotates, it drives the take-up chuck 62 to rotate. The second horizontal drive assembly is connected to the shaft of the take-up chuck 62. The second horizontal drive assembly drives the shaft of the take-up chuck 62 to move axially, so as to adjust the position of the take-up roller 21 in the axial direction.

[0066] The second horizontal drive assembly has the same structure and working principle as the first horizontal drive assembly 32. The connection method between the shaft of the second magnetofluid 222 and the shaft of the winding chuck 62 can be referred to the above embodiment, and will not be repeated here.

[0067] Reference Figure 4-5 As shown, in one embodiment, the first rotary drive assembly 12 further includes a first transmission assembly 123. The shaft of the unwind chuck 61 is connected to the shaft of the first magnetofluid 122 via the first transmission assembly 123. When the first magnetofluid 122 rotates, it drives the unwind chuck 61 to rotate via the first transmission assembly 123. The first horizontal drive assembly 32 drives the first transmission assembly 123 to move axially relative to the shaft of the first magnetofluid 122, thereby adjusting the position of the unwind roller 11 in the axial direction. The first transmission assembly 123 can move axially along the shaft N of the first magnetofluid 122 under the drive of the first horizontal drive assembly 32.

[0068] Reference Figure 4-5 As shown, in one embodiment, the second rotary drive assembly 22 further includes a second transmission assembly 223. The shaft of the take-up chuck 62 is connected to the shaft of the second magnetic fluid 222 via the second transmission assembly 223. When the second magnetic fluid 222 rotates, it drives the take-up chuck 62 to rotate via the second transmission assembly 223. The second horizontal drive assembly drives the second transmission assembly 223 to move axially relative to the shaft of the second magnetic fluid 222, thereby adjusting the position of the take-up roller 21 axially. The second transmission assembly 223 can move axially on the shaft of the second magnetic fluid 222 under the drive of the second horizontal drive assembly.

[0069] Reference Figure 4-5As shown, in one embodiment, the first transmission assembly 123 includes a first driving wheel 124, a first driven wheel 125, and a first transmission member 126. The first driving wheel 124 is sleeved on the shaft of the first magnetofluid 122, and the first driven wheel 125 is sleeved on the shaft of the unwinding chuck 61. The first driving wheel 124 and the first driven wheel 125 are connected by the first transmission member 126. When the first magnetofluid 122 rotates, it drives the first driving wheel 124 to rotate. The first driving wheel 124 drives the first driven wheel 125 to rotate through the first transmission member 126. The first horizontal drive assembly 32 can drive the shaft M of the unwinding chuck 61 to move axially relative to the first driven wheel 125. Optionally, the shaft M of the unwinding chuck 61 and the first driven wheel 125 are limited by a keyway to achieve synchronous rotation. Simultaneously, they can move relative to each other axially. Optionally, the first transmission member 126 can be a belt or chain, etc.

[0070] Reference Figure 4-5 As shown, in one embodiment, the second transmission assembly 223 includes a second driving wheel, a second driven wheel, and a second transmission member. The second driving wheel is sleeved on the shaft of the second magnetofluid 222, and the second driven wheel is sleeved on the shaft of the unwinding chuck 61. The second driving wheel and the second driven wheel are connected by the second transmission member. When the second magnetofluid 222 rotates, it drives the second driving wheel to rotate. The second driving wheel drives the second driven wheel to rotate through the second transmission member. The second horizontal drive assembly can drive the shaft of the take-up chuck 62 to move axially relative to the second driven wheel. Optionally, the shaft of the take-up chuck 62 and the second driven wheel are limited by a keyway to achieve synchronous rotation. Simultaneously, they can move relative to each other axially. Optionally, the second transmission member can be a belt or chain, etc.

[0071] Optionally, the second transmission component 223 has the same structure as the first transmission component 123, which will not be described in detail here.

[0072] Reference Figure 1-3 As shown, in one embodiment, the unwinding / rewinding device 100 further includes a first slide rail 71 and a first slide table 72. The end of the unwinding roller 11 is slidably connected to the first slide rail 71 via the first slide table 72. A first horizontal drive assembly 32 is connected to the first slide table 72 and drives the first slide table 72 to slide on the first slide rail 71, thereby adjusting the position of the unwinding roller 11 in the axial direction. The first slide table 72 engages with the first slide rail 71 to ensure that the adjustment direction is always along the axial direction of the unwinding roller 11.

[0073] Reference Figure 1-3As shown, in one embodiment, the take-up and unwinding device 100 further includes a second slide rail and a second slide table. The end of the take-up roller 21 is slidably connected to the second slide rail via the second slide table. A second horizontal drive assembly is connected to the second slide table and drives the second slide table to slide on the second slide rail to adjust the position of the take-up roller 21 in the axial direction. The second slide table engages with the second slide rail to ensure that the adjustment direction is always along the axial direction of the take-up roller 21.

[0074] In one embodiment, the first slide rail 71 includes a first sub-slide rail 711 and a second sub-slide rail 712, and the first slide table 72 includes a first sub-slide table 721 and a second sub-slide table 722. The first sub-slide rail 711 and the second sub-slide rail 712 are respectively disposed on both sides of the unwinding roller 11. The first sub-slide table 721 is slidably connected to the first sub-slide rail 711, and the second sub-slide table 722 is slidably connected to the second sub-slide rail 712. Both ends of the unwinding roller 11 are respectively connected to the first sub-slide table 721 and the second sub-slide table 722. The first horizontal drive assembly 32 is connected to the first sub-slide table 721, which helps to save material costs.

[0075] In one embodiment, the second slide rail includes a third sub-slide rail and a fourth sub-slide rail, and the second slide table includes a third sub-slide table and a fourth sub-slide table. The third sub-slide rail and the fourth sub-slide rail are respectively disposed on both sides of the take-up roller 21. The third sub-slide table is slidably connected to the third sub-slide rail, and the fourth sub-slide table is slidably connected to the fourth sub-slide rail. Both ends of the take-up roller 21 are respectively connected to the third sub-slide table and the fourth sub-slide table. The second horizontal drive assembly is connected to the third sub-slide table.

[0076] Optionally, the second slide rail has the same structure and working principle as the first slide rail 71, which will not be described in detail here.

[0077] In one embodiment, the first support plate 51 is connected to the first sub-slide 721 and the third sub-slide, and the second support plate 52 is connected to the second sub-slide 722 and the fourth sub-slide. Further, the unwinding detection component 31 and the winding detection component 41 are simultaneously disposed on either the first support plate 51 or the second support plate 52. In other embodiments, a set of unwinding detection components 31 and a set of winding detection components 41 may be disposed on the first support plate 51 and the second support plate 52, respectively.

[0078] Reference Figure 1-3 As shown, in one embodiment, the first horizontal drive assembly 32 includes a servo motor 321 and a lead screw. The servo motor 321 drives the lead screw to rotate, and the lead screw drives the nut to move axially. The nut is connected to the first slide 72 and drives the first slide 72 to move.

[0079] Reference Figure 4-5As shown, in one embodiment, the first horizontal drive assembly 32 includes a cylinder 322, which is connected to the first slide 72 via a push plate 323. The cylinder 322 extends and retracts to drive the push plate 323 to move, and the push plate 323 drives the first slide 72 to move. In other embodiments, the first horizontal drive assembly 32 can be an electric cylinder or the like.

[0080] In one embodiment, the winding and unwinding device 100 further includes a cover plate 110. The first rotary drive assembly 12, the second rotary drive assembly 22, the first horizontal drive assembly 32, and the second horizontal drive assembly are all connected to the cover plate 110. The cover plate 110 serves to fix the first rotary drive assembly 12, the second rotary drive assembly 22, the first horizontal drive assembly 32, and the second horizontal drive assembly to the cover plate 110, thereby ensuring the overall structural stability of the winding and unwinding device 100.

[0081] In one embodiment, the winding and unwinding device 100 further includes a bellows 324. One end of the bellows 324 is connected to the cover plate 110 by bolts, and the other end is connected to the first support plate 51 by bolts. The piston rod of the cylinder 322 is disposed inside the bellows 324 to seal the piston rod of the cylinder 322 and avoid affecting the vacuum coating.

[0082] Based on the same inventive concept, another embodiment of this application discloses a magnetron sputtering machine, which includes a vacuum coating chamber and a winding and unwinding device 100 as described in any of the above embodiments. The unwinding roller 11 and the winding roller 21 are both disposed in the vacuum coating chamber, and the winding and unwinding device 100 as described in any of the above embodiments is used to unwind and wind the film roll during vacuum coating.

[0083] The magnetron sputtering machine provided in this embodiment has a winding and unwinding device 100, which includes an unwinding adjustment mechanism and a winding adjustment mechanism. The unwinding adjustment mechanism includes an unwinding detection component 31 and a first horizontal drive component 32. The unwinding detection component 31 is disposed on one side of the unwinding roller 11 and is used to detect the first position information of the base film during the unwinding process. The first horizontal drive component 32 is used to adjust the position of the unwinding roller 11 axially according to the first position information. The winding adjustment mechanism includes a winding detection component 41 and a second horizontal drive component. The winding detection component 41 is disposed on one side of the winding roller 21 and is used to detect the second position information of the base film during the winding process. The second horizontal drive component is used to adjust the position of the winding roller 21 axially according to the second position information. By using the unwinding adjustment mechanism and the winding adjustment mechanism to adjust the position of the unwinding roller 11 and the winding roller 21 respectively, it is possible to correct deviations during the winding process, achieve flush winding, and also perform staggered winding as needed.

[0084] In one embodiment, the servo motor 321 and the lead screw are disposed inside the vacuum coating chamber, while the first rotary motor 121 and the second rotary motor 221 are disposed outside the vacuum coating chamber. This helps to reduce potential leakage points, reduce the use of openings and seals, and lower costs.

[0085] In one embodiment, the unwinding detection component 31, the winding detection component 41, the support base 5, the unwinding chuck 61, the winding chuck 62, the first slide rail 71, and the first slide table 72 are all disposed inside the vacuum coating chamber.

[0086] It should be noted that some embodiments of this application have been described above. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps described in the claims can be performed in a different order than that shown in the above embodiments and still achieve the desired result. In addition, the processes depicted in the drawings do not necessarily require the specific order or sequential order shown to achieve the desired result.

[0087] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of this application (including the claims) is limited to these examples; within the framework of this application, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of different aspects of the above embodiments of this application, which are not provided in detail for the sake of brevity.

[0088] The embodiments of this application are intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the embodiments of this application should be included within the protection scope of this application.

Claims

1. A winding and unwinding device, characterized in that, include: An unwinding mechanism includes an unwinding roller and a first rotary drive assembly, wherein the first rotary drive assembly is connected to the unwinding roller and drives the unwinding roller to rotate for unwinding. The winding mechanism includes a winding roller and a second rotary drive assembly, the second rotary drive assembly being connected to the winding roller and driving the winding roller to rotate for winding; the axial direction of the unwinding roller is parallel to the axial direction of the winding roller; The unwinding adjustment mechanism includes an unwinding detection component and a first horizontal drive component. The unwinding detection component is disposed on one side of the unwinding roller and is used to detect the first position information of the base film side during the unwinding process. The first horizontal drive assembly is connected to the unwinding roller and is used to adjust the position of the unwinding roller in the axial direction according to the first position information. The winding adjustment mechanism includes a winding detection component and a second horizontal drive component. The winding detection component is disposed on one side of the winding roller and is used to detect the second position information of the base film side during the winding process. The second horizontal drive assembly is connected to the take-up roller and is used to adjust the position of the take-up roller in the axial direction according to the second position information.

2. The winding and unwinding device according to claim 1, characterized in that, The unwinding detection assembly includes an unwinding detection sensor, which includes a first limiting groove for limiting the side of the base film in the vertical direction. And / or, the winding detection assembly includes a winding detection sensor, the winding detection sensor including a second limiting groove for limiting the base film side in the vertical direction.

3. The winding and unwinding device according to claim 1, characterized in that, The take-up and unwinding device also includes a support base. The two ends of the unwinding roller are rotatably connected to the support base via an unwinding chuck. The first rotary drive component is connected to the unwinding chuck and drives the unwinding chuck to rotate. Both ends of the take-up roller are rotatably connected to the support base via a take-up chuck, and the second rotary drive assembly is connected to the take-up chuck and drives the take-up chuck to rotate.

4. The winding and unwinding device according to claim 3, characterized in that, The support base includes a first support plate and a second support plate. The two ends of the unwinding roller are respectively connected to the first support plate and the second support plate, and the two ends of the winding roller are respectively connected to the first support plate and the second support plate.

5. The winding and unwinding device according to claim 3, characterized in that, The first rotary drive assembly includes a first rotary motor and a first magnetic fluid. The first rotary motor is connected to the first magnetic fluid and drives the first magnetic fluid to rotate. The shaft of the unwind chuck is connected to the shaft of the first magnetic fluid. When the first magnetic fluid rotates, it drives the unwind chuck to rotate. The first horizontal drive assembly is connected to the shaft of the unwinding chuck. The first horizontal drive assembly drives the shaft of the unwinding chuck to move axially, thereby adjusting the position of the unwinding roller in the axial direction of the unwinding roller. And / or, the second rotary drive assembly includes a second rotary motor and a second magnetic fluid, the second rotary motor being connected to the second magnetic fluid and driving the second magnetic fluid to rotate, the shaft of the take-up chuck being connected to the shaft of the second magnetic fluid, and the second magnetic fluid driving the take-up chuck to rotate when it rotates; The second horizontal drive assembly is connected to the shaft of the take-up chuck, and the second horizontal drive assembly drives the shaft of the take-up chuck to move axially, so as to adjust the position of the take-up roller in the axial direction of the take-up roller.

6. The winding and unwinding device according to claim 5, characterized in that, The first rotary drive assembly further includes a first transmission assembly, wherein the shaft of the unwinding chuck is connected to the shaft of the first magnetic fluid via the first transmission assembly, and the unwinding chuck is driven to rotate via the first transmission assembly when the first magnetic fluid rotates; the first horizontal drive assembly drives the first transmission assembly to move axially relative to the shaft of the first magnetic fluid in order to adjust the position of the unwinding roller in the axial direction of the unwinding roller. And / or, the second rotary drive assembly further includes a second transmission assembly, wherein the shaft of the take-up chuck is connected to the shaft of the second magnetic fluid via the second transmission assembly, and the take-up chuck is driven to rotate via the second transmission assembly when the second magnetic fluid rotates; the second horizontal drive assembly adjusts the position of the take-up roller in the axial direction of the take-up roller by driving the second transmission assembly to move axially relative to the shaft of the second magnetic fluid.

7. The winding and unwinding device according to claim 6, characterized in that, The first transmission assembly includes a first driving wheel, a first driven wheel, and a first transmission member. The first driving wheel is sleeved on the shaft of the first magnetic fluid, and the first driven wheel is sleeved on the shaft of the unwinding chuck. The first driving wheel and the first driven wheel are connected through the first transmission member. When the first magnetic fluid rotates, it drives the first driving wheel to rotate. The first driving wheel drives the first driven wheel to rotate through the first transmission member. The first horizontal drive assembly can drive the shaft of the unwinding chuck to move axially relative to the first driven wheel. And / or, the second transmission assembly includes a second driving wheel, a second driven wheel, and a second transmission member. The second driving wheel is sleeved on the shaft of the second magnetic fluid, and the second driven wheel is sleeved on the shaft of the unwinding chuck. The second driving wheel and the second driven wheel are connected through the second transmission member. When the second magnetic fluid rotates, it drives the second driving wheel to rotate. The second driving wheel drives the second driven wheel to rotate through the second transmission member. The second horizontal drive assembly can drive the shaft of the take-up chuck to move axially relative to the second driven wheel.

8. The winding and unwinding device according to claim 1, characterized in that, The unwinding and winding device further includes a first slide rail and a first slide table. The end of the unwinding roller is slidably connected to the first slide rail via the first slide table. The first horizontal drive assembly is connected to the first slide table and drives the first slide table to slide on the first slide rail, so as to adjust the position of the unwinding roller in the axial direction of the unwinding roller. And / or, the take-up and unwinding device further includes a second slide rail and a second slide table, the end of the take-up roller is slidably connected to the second slide rail via the second slide table, and the second horizontal drive assembly is connected to the second slide table and drives the second slide table to slide on the second slide rail to adjust the position of the take-up roller in the axial direction of the take-up roller.

9. The winding and unwinding device according to claim 8, characterized in that, The first slide rail includes a first sub-slide rail and a second sub-slide rail, and the first slide table includes a first sub-slide table and a second sub-slide table. The first sub-slide rail and the second sub-slide rail are respectively disposed on both sides of the unwinding roller. The first sub-slide table is slidably connected to the first sub-slide rail, and the second sub-slide table is slidably connected to the second sub-slide rail. Both ends of the unwinding roller are respectively connected to the first sub-slide table and the second sub-slide table. The first horizontal drive assembly is connected to the first sub-slide table. And / or, the second slide rail includes a third sub-slide rail and a fourth sub-slide rail, the second slide table includes a third sub-slide table and a fourth sub-slide table, the third sub-slide rail and the fourth sub-slide rail are respectively disposed on both sides of the take-up roller, the third sub-slide table is slidably connected to the third sub-slide rail, the fourth sub-slide table is slidably connected to the fourth sub-slide rail, both ends of the take-up roller are respectively connected to the third sub-slide table and the fourth sub-slide table, and the second horizontal drive assembly is connected to the third sub-slide table.

10. A magnetron sputtering machine, characterized in that, include: The vacuum coating chamber and the unwinding and winding device as described in any one of claims 1-9, wherein the unwinding roller and the winding roller are both disposed within the vacuum coating chamber.

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