Simple barrel coating process equipment

Abstract

The utility model relates to the field of process equipment, concretely relates to a simple barrel -shaped coating process equipment, especially suitable for the part with mounting hole in back, this coating process equipment, including for placing in magnetron sputtering equipment barrel, the sidewall of barrel is equipped with a plurality of lightening holes, and is provided with a plurality of assembly components, and the part to be coated is nested on the assembly components and fixed. The coating process equipment solves the problems of heavy weight of process equipment, slow assembly efficiency, inconsistent coating quality and the like in the magnetron sputtering coating process.

Description

Technical Field

[0001] This utility model relates to the field of process equipment, specifically to a simple barrel-shaped coating process equipment, which is particularly suitable for parts with mounting holes on the back. Background Technology

[0002] Magnetron sputtering, as an important physical vapor deposition process, holds a significant position in the field of thin film preparation. It was widely used in the 1950s and early 1960s. However, magnetron sputtering is often limited by process equipment and other factors, especially in large-scale production, where it is often difficult to obtain uniform, high-quality thin films. Therefore, researchers began to explore new sputtering technologies. From the 1970s to the 1990s, magnetron sputtering technology underwent further development and optimization, with researchers continuously improving magnetron sputtering equipment to enhance sputtering efficiency and thin film quality.

[0003] Among them, the process equipment used in magnetron sputtering equipment plays a crucial role, providing necessary support for the sputtering process and improving production efficiency and coating quality. However, in product (part) production, the process equipment has the following disadvantages during use: (1) the process equipment is heavy; (2) the product assembly efficiency on the process equipment is slow; and (3) the coating quality of the products is inconsistent. Therefore, it is necessary to improve the process equipment to meet the increasingly diverse needs.

[0004] In view of the above, this utility model is hereby proposed. Utility Model Content

[0005] The purpose of this invention is to overcome the shortcomings of the prior art and provide a simple barrel-shaped coating process equipment. This coating process equipment solves the problems of heavy equipment weight, slow assembly efficiency, and inconsistent coating quality in the magnetron sputtering coating process.

[0006] The objective of this utility model is achieved through the following technical solution:

[0007] This utility model provides a simple barrel-shaped coating process equipment, including a barrel for placement in a magnetron sputtering device, a plurality of weight reduction holes on the side wall of the barrel, and a plurality of assembly components, on which the parts to be coated are nested and fixed.

[0008] Furthermore, the cylinder is cylindrical.

[0009] Furthermore, n rows of assembly components are uniformly arranged on the side wall of the cylinder along its axial direction, and m assembly components are uniformly arranged along its circumference.

[0010] Where n≥2, m≥2.

[0011] Furthermore, the assembly includes a through groove opened on the cylinder, the bottom end of the through groove is provided with a mounting plate connected to the cylinder, and the mounting plate is located inside the cylinder. The mounting plate is equipped with a connector for nesting the parts to be coated.

[0012] Furthermore, the through slot has a rectangular structure.

[0013] Furthermore, the connecting element is a bolt.

[0014] Furthermore, the cylinder is made of 304 stainless steel.

[0015] Furthermore, the wall thickness of the cylinder is 1±0.2mm.

[0016] Compared with the prior art, the technical solution provided by this utility model has the following beneficial effects:

[0017] This invention proposes a simplified barrel-shaped coating process equipment. By opening multiple weight-reducing holes on the side wall of the barrel, the weight of the equipment is reduced, making it easier to handle. Simultaneously, by setting multiple assembly components on the side wall of the barrel, the parts to be coated are easily fixed and assembled, and multiple parts can be assembled, improving the assembly efficiency and coating efficiency during the coating process. Furthermore, the cylindrical structure of the barrel allows parts to be evenly fixed on the assembly components of the process equipment, ensuring a consistent distance between the magnetron sputtering target and the parts, thereby guaranteeing a consistent film thickness after coating and improving coating quality. Attached Figure Description

[0018] The accompanying drawings are incorporated in and form part of this specification, and together with the description, serve to explain the principles of this invention.

[0019] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the structure of the simplified barrel-shaped coating process equipment of this utility model;

[0021] Figure 2 This is an enlarged structural schematic diagram of the assembly component of this utility model;

[0022] Figure 3 This is a schematic diagram of the coating process equipment and the parts to be coated in this embodiment.

[0023] Wherein: 1 is the cylinder; 11 is the weight reduction hole; 12 is the assembly component; 121 is the through groove; 122 is the mounting plate; 123 is the connector. Detailed Implementation

[0024] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numerals in different drawings denote the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this invention. Rather, they are merely examples of apparatuses consistent with some aspects of this invention as detailed in the appended claims.

[0025] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments.

[0026] See Figure 1 and Figure 2 This utility model provides a simple barrel-shaped coating process equipment, including a barrel 1 for placement in a magnetron sputtering device. The side wall of the barrel 1 is provided with a plurality of weight reduction holes 11 and a plurality of assembly components 12, on which the parts to be coated are nested.

[0027] In this embodiment, the cylinder 1 is cylindrical, and the size of the cylinder 1 is not limited in this embodiment.

[0028] Furthermore, two rows of assembly components 12 are evenly arranged on the side wall of the cylinder 1 along its axial direction, and 12 assembly components 12 are evenly arranged along its circumference.

[0029] like Figure 2 and Figure 3 As shown, each of the assembly components 12 includes a through groove 121 opened on the cylinder 1. The bottom end of the through groove 121 is provided with a mounting plate 122 connected to the cylinder 1, and the mounting plate 122 is located inside the cylinder 1. A connector 123 for nesting the parts to be coated is mounted on the mounting plate 122.

[0030] It should be noted that the structure and size of the through groove 121 and the mounting plate 122 are not limited and are designed according to the actual working conditions. The function of the through groove 121 is to facilitate the installation of the parts to be coated.

[0031] Specifically, the connector 123 is a bolt. The size of the bolt is not limited in this embodiment and can be set according to the size of the mounting hole on the back of the part to be coated.

[0032] In this embodiment, the cylinder 1 is made of 304 stainless steel with a wall thickness of 1mm.

[0033] The usage process of this utility model is as follows:

[0034] like Figure 3 As shown, the mounting holes on the back of the parts to be coated are nested in the bolts for fixation. After all the parts to be coated are assembled, the process equipment is placed in the magnetron sputtering instrument, the distance between the target head and the process equipment is adjusted, and then the process equipment is rotated to coat multiple parts to be coated at the same time. This process equipment improves the coating efficiency.

[0035] When the structure of the part to be coated is compatible with the structure of the cylinder 1, multiple bolts can be selected for joint fixing. The subsequent operation process is the same as described above, and will not be repeated here.

[0036] Therefore, the applicability of this utility model is relatively wide, and there are no major restrictions on the structure of the coated parts, as long as there are assembly holes on the back and the parts can be placed inside the cylinder 1.

[0037] The above description is merely a specific embodiment of this utility model, enabling those skilled in the art to understand or implement it. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this utility model.

[0038] It should be understood that this utility model is not limited to the content already described above, and various modifications and changes can be made without departing from its scope. The scope of this utility model is limited only by the appended claims.

Claims

1. A simple barrel-shaped coating process equipment, characterized in that, It includes a cylinder (1) for placement in a magnetron sputtering device, the side wall of the cylinder (1) having multiple weight-reducing holes (11) and multiple assembly components (12) for which the part to be coated is nested on the assembly components (12) and fixed.

2. The simplified barrel-shaped coating process equipment according to claim 1, characterized in that, The cylinder (1) is cylindrical.

3. The simplified barrel-shaped coating process equipment according to claim 1, characterized in that, On the side wall of the cylinder (1), n ​​rows of assembly components (12) are uniformly arranged along its axial direction, and m assembly components (12) are uniformly arranged along its circumference. Where n≥2, m≥2.

4. The simplified barrel-shaped coating process equipment according to claim 1 or 3, characterized in that, The assembly assembly (12) includes a through groove (121) opened on the cylinder (1), the bottom end of the through groove (121) is provided with an mounting plate (122) connected to the cylinder (1), and the mounting plate (122) is located inside the cylinder (1), and the mounting plate (122) is equipped with a connector (123) for nesting the parts to be coated.

5. The simplified barrel-shaped coating process equipment according to claim 4, characterized in that, The connector (123) is a bolt.

6. The simplified barrel-shaped coating process equipment according to claim 1, characterized in that, The cylinder (1) is made of 304 stainless steel.

7. The simplified barrel-shaped coating process equipment according to claim 1, characterized in that, The wall thickness of the cylinder (1) is 1±0.2mm.

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